CN205461732U - Laser instrument waste gas recovery device - Google Patents
Laser instrument waste gas recovery device Download PDFInfo
- Publication number
- CN205461732U CN205461732U CN201521135431.5U CN201521135431U CN205461732U CN 205461732 U CN205461732 U CN 205461732U CN 201521135431 U CN201521135431 U CN 201521135431U CN 205461732 U CN205461732 U CN 205461732U
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- China
- Prior art keywords
- laser instrument
- waste gas
- gas
- surge tank
- pressure
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Abstract
The utility model discloses a laser instrument waste gas recovery device, including a plurality of gaseous storage jars that set up side by side, wherein, gaseous storage jar links to each other with the buffer tank that is used for receiving laser instrument waste gas through gas pipeline, the last buffer tank department of being close to of gas pipeline is connected with the vacuum pump, the last gaseous storage jar department of being close to of gas pipeline is connected with the compressor, be provided with a pressure transmitter on the gaseous storage jar, be provided with the 2nd pressure transmitter on the buffer tank, the input of a pressure transmitter, the 2nd pressure transmitter and PLC controller links to each other, the output of PLC controller and vacuum pump and compressor link to each other. The utility model discloses a set up buffer tank and vacuum pump, utilize pressure comparator control charged pressure to can retrieve and purification treatment the three kinds of noble gas of krypton, xenon, neon that produce in chip, the display manufacturing, and simple structure, easy to carry out.
Description
Technical field
This utility model relates to a kind of waste gas recovering device, particularly relates to a kind of laser instrument waste gas recovering device.
Background technology
Krypton, xenon, neon these three rare gas aerial content pettiness, three kinds of gases form altogether less than air
In 0.1002%, it is various that some unique properties having due to rare gas make krypton, xenon, neon be widely used in
In industrial use.Krypton, xenon, neon are few due to aerial content, extract difficulty, only large-scale,
Could extract on Extra large air separation plant.Xenon yield the most in the world only has more than 900 ten thousand liters, Krypton 82,000,000
Liter, neon 375,000,000 liters.These yield are by 4 international large scale industry gas companies: method liquid air, the general Lay of the U.S.
Ke Si, Germany's woods moral and company of Ukraine are controlled.
Krypton, xenon, three kinds of rare gas of neon, as microelectronics industry and the strategic material of space item, at home
Market growth demand is fast continuous, and as non-renewable resources, the industrialization of " recycling cycling and reutilization " has become inevitable.
At present, the domestic report that there is no " recycling cycling and reutilization " and example.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of laser instrument waste gas recovering device, it is possible to chip,
In display manufacturing, the krypton of generation, xenon, three kinds of rare gas of neon carry out reclaiming and purification process, simple in construction, easily
In enforcement.
This utility model employed technical scheme comprise that a kind of laser instrument waste gas recovery of offer for solving above-mentioned technical problem
Device, including multiple gas storage tanks being arranged side by side, wherein, described gas storage tanks passes through gas pipeline and use
Being connected in the surge tank receiving laser instrument waste gas, described gas pipeline connects at surge tank vacuum pump, institute
State to connect at gas storage tanks on gas pipeline and have compressor, described gas storage tanks is provided with the first pressure
Transmitter, described surge tank is provided with the second pressure transmitter, and described first pressure transmitter, the second pressure become
Sending device to be connected with the input of PLC, the outfan of described PLC is connected with vacuum pump and compressor.
Above-mentioned laser instrument waste gas recovering device, wherein, described gas storage tanks and surge tank are rustless steel steel cylinder,
The vacuum of described gas storage tanks and surge tank is less than 10pa.
This utility model contrast prior art has following beneficial effect: the laser instrument waste gas that this utility model provides returns
Receiving apparatus, by arranging surge tank and vacuum pump, utilizes pressure comparator to control the blowing pressure such that it is able to core
In sheet, display manufacturing, the krypton of generation, xenon, three kinds of rare gas of neon carry out reclaiming and purification process, and structure letter
Single, it is easy to implement.
Accompanying drawing explanation
Fig. 1 is this utility model laser instrument waste gas recovering device structural representation；
Fig. 2 is this utility model laser instrument waste gas recovery schematic flow sheet.
In figure:
1 PLC 2 gas storage tanks 3 surge tank
4 vacuum pump 5 compressors
Detailed description of the invention
The utility model will be further described with embodiment below in conjunction with the accompanying drawings.
Fig. 1 is this utility model laser instrument waste gas recovering device structural representation.
Referring to Fig. 1, the laser instrument waste gas recovering device that this utility model provides, including multiple gases being arranged side by side
Storage tank 2, wherein, described gas storage tanks 2 is by gas pipeline and the surge tank 3 for receiving laser instrument waste gas
Being connected, described gas pipeline connects at surge tank 3 vacuum pump 4, and described gas pipeline is deposited near gas
Connect at storage tank 2 and have compressor 5, described gas storage tanks 2 is provided with the first pressure transmitter, described surge tank
The second pressure transmitter, described first pressure transmitter, the second pressure transmitter and PLC 1 it is provided with on 3
Input be connected, the outfan of described PLC 1 is connected with vacuum pump 4 and compressor 5.
The laser instrument waste gas recovering device that this utility model provides, wherein, described gas storage tanks 2 and surge tank 3
For rustless steel steel cylinder, the vacuum of described gas storage tanks 2 and surge tank 3 is less than 10pa.
The laser instrument waste gas recovering device that this utility model provides, referring to Fig. 2, PTI is pressure inverting display,
S is regulation valve, and PS is pressure-regulating valve.Concrete technology and the process of control are as follows:
1), when using, start vacuum pump 4 and compressor 5 carries out application of vacuum to retracting device, in removing device
Harmful component such as air, vacuum is ＜ 10pa.
2) utilize the pressure reduction of laser instrument and retracting device, with the flow of 500L/h～800L/h, waste gas is stored in
In surge tank 3.
3) after surge tank 3 and laser instrument pressure reach balance, start compressor 5, the residual air in laser instrument is sent into
Surge tank 3, in laser instrument, vacuum reaches clean vacuum, less than 5 × 10-3pa。
4) start vacuum pump 4, waste gas pressurization in surge tank 3 is stored in gas storage tanks 2.
5) when storage pressure inside the tank requires less than suction pressure of compressor, compressor 5 is started, by remaining in surge tank 3
Gas is extracted out as compressor air suction source, continues waste gas pressurization storage.
6), in basin during vacuum ＜ 10pa, vacuum pump 4, compressor 5 are stopped transport.
7) opening the valve pressure release between basin and compressor outlet filling tube, compressor outlet fills overpressure and is down to
During 0.1Mpa, in laser instrument, waste gas recovery storage work completes.
8) device is closed stand-by.
During laser instrument gas sampling, also waste gas can be purified process, concrete purge process is as follows:
1) removing major part HCL by the method for alkali cleaning, then washing makes it is neutrality；
2) Xe is sloughed by the method for rectification；
3) H of wherein trace is removed by pressure swing absorption process20、O2、H2Deng impurity, be purified to 5N5 with
The neon of upper purity, analyzes each impurity content of reclaimed neon, when its reach air separation unit for producing
During the neon contamination levels of laser gas mixture, it is qualified neon raw material.
Although this utility model discloses as above with preferred embodiment, so it is not limited to this utility model, appoints
What those skilled in the art, without departing from spirit and scope of the present utility model, when making a little amendment and complete
Kind, protection domain the most of the present utility model is when with being as the criterion that claims are defined.
Claims (2)
1. a laser instrument waste gas recovering device, including multiple gas storage tanks (2) being arranged side by side, its feature
Being, described gas storage tanks (2) is by gas pipeline and surge tank (3) phase for receiving laser instrument waste gas
Even, described gas pipeline connects near surge tank (3) place and has vacuum pump (4), close gas on described gas pipeline
Body storage tank (2) place connects has compressor (5), described gas storage tanks to be provided with the first pressure inverting on (2)
Device, described surge tank (3) is provided with the second pressure transmitter, and described first pressure transmitter, the second pressure become
Device is sent to be connected with the input of PLC (1), the outfan of described PLC (1) and vacuum pump (4)
And compressor (5) is connected.
2. laser instrument waste gas recovering device as claimed in claim 1, it is characterised in that described gas storage tanks
And surge tank (3) is rustless steel steel cylinder, described gas storage tanks (2) and the vacuum of surge tank (3) (2)
Less than 10pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521135431.5U CN205461732U (en) | 2015-12-31 | 2015-12-31 | Laser instrument waste gas recovery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521135431.5U CN205461732U (en) | 2015-12-31 | 2015-12-31 | Laser instrument waste gas recovery device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205461732U true CN205461732U (en) | 2016-08-17 |
Family
ID=56663003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521135431.5U Active CN205461732U (en) | 2015-12-31 | 2015-12-31 | Laser instrument waste gas recovery device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205461732U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105477993A (en) * | 2015-12-31 | 2016-04-13 | 上海和立工业气体有限公司 | Laser waste gas recovering device and control method thereof |
| CN106178925A (en) * | 2016-08-26 | 2016-12-07 | 安徽中科艾克西玛光电科技有限公司 | A kind of small dry waste gas containing fluoride filter |
-
2015
- 2015-12-31 CN CN201521135431.5U patent/CN205461732U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105477993A (en) * | 2015-12-31 | 2016-04-13 | 上海和立工业气体有限公司 | Laser waste gas recovering device and control method thereof |
| CN105477993B (en) * | 2015-12-31 | 2017-12-22 | 上海和立工业气体有限公司 | Laser waste gas recovering device and its control method |
| CN106178925A (en) * | 2016-08-26 | 2016-12-07 | 安徽中科艾克西玛光电科技有限公司 | A kind of small dry waste gas containing fluoride filter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201508 Shanghai City, Jinshan District Shanyang Zhen Shan Lei Road No. 188 building 6 Patentee after: Erect gas (Shanghai) Co., Ltd. Address before: 201508 Shanghai City, Jinshan District Shanyang Zhen Shan Lei Road No. 188 building 6 Patentee before: SHANGHAI HELI INDUSTRIAL GAS CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |