CN205254331U - CO2 laser instrument and outer light path transmission system thereof - Google Patents
CO2 laser instrument and outer light path transmission system thereof Download PDFInfo
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- CN205254331U CN205254331U CN201520846835.9U CN201520846835U CN205254331U CN 205254331 U CN205254331 U CN 205254331U CN 201520846835 U CN201520846835 U CN 201520846835U CN 205254331 U CN205254331 U CN 205254331U
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Abstract
The utility model discloses a CO2 laser instrument and outer light path transmission system thereof, outer light path transmission system includes light beam shaping device, light beam shaping device is including setting up the prism in the light path of CO2 laser emitting light, the first side of prism is perpendicular with the emergent light of CO2 laser instrument, and the CO2 laser instrument jets out, radial cross section gets into the prism for the perpendicular first side of elliptical laser beam to taking place the refraction, the second side of prism jet out after, the main cross section of prism with elliptical major axis is parallel, the apex angle of prism is less than the critical angle of the second side emergence total reflection of prism. Promptly, the facula passes through the prism for elliptical laser beam after, its major axis compressed becomes the circular shape facula, has improved the uniformity of laser beam, and when making CO2 laser instrument cut material, the effect of cutting is unanimous.
Description
Technical field
The utility model relates to field of laser processing, particularly a kind of CO2 laser instrument and outer optic path system thereof.
Background technology
Laser, due to its high brightness, high directivity, high monochromaticity and high coherence's advantage, has been widely used in sectionGrind, the importance of the national product such as national defence, industry. At industrial circle, Laser Processing, as advanced manufacturing technology, has heightEffect, high accuracy, high-quality, scope are wide, energy-conserving and environment-protective can realize that flexibility is processed and the advantage of ultra tiny processing, at automobile, electricityThe fields such as electronic circuit, electrical equipment, Aero-Space, Ferrous Metallurgy, machine-building are widely used, and in some industry (exampleAs automobile, electron trade etc.) reach higher level. To improving the quality of products, labor productivity, automation, pollution-free,More and more important effect is played in minimizing material consumption etc.
Laser cutting is more common in Laser Processing, applies also more a kind of mode. Along with laser cutting existsBeing widely used of every field, the cutting of various materials has used laser cutting mode. Along with industrial expansion, especially electricityThe miniaturization of sub-product, day by day becomes the main development direction of laser cutting for the cutting of rapidoprint. Laser cutting need reachTo high accuracy, accurately, rapidly, the processing mode of automation.
CO2 laser instrument is using CO2 as active medium, and the resonator of fast Axial-flow CO2 laser instrument is by four optical mirror slip groupsBecome: output window, completely reflecting mirror and two mirror compositions of turning back. They are separately fixed on two rigid end sheets parallel to each other.On the one hand, form refrative cavity thereby four optical mirror slips have certain angle of inclination, on the one hand, form CO2 laser instrument resonanceThe optical mirror slip in chamber cannot be adjusted to desirable parastate; On the other hand, lasing process, to the temperature of gas moleculeHighstrung. In the time that input power increases, gas temperature will raise. Gas temperature rising, flowing velocity increase etc. causeGas density is inhomogeneous, thereby affects the stability of CO2 laser instrument Output of laser. Above-mentioned two aspects all will affect CO2 laserThe circularity of the radial cross-section of device outgoing laser beam, cross section is no longer centrosymmetric circle, but oval. GenerallyIn CO2 laser instrument, the direction temperature of gas flow is lower, and spot diameter is less. And perpendicular to gas flow direction spot diameterGreatly. Generally, perpendicular to laser base direction, spot diameter is large, be oval major axis.
When laser beam vertical incidence, the absorption of material for laser light and the polarization state of laser beam are irrelevant, incline and work as laser beamWhen oblique incidence, polarization state becomes extremely important to the impact absorbing, for laser cutting, because the absorbing surface of laser has becomeThe forward position of cutting seam, so laser beam is no longer to impinge perpendicularly on absorbing surface, the now absorption efficiency of material and sharp polarisation of lightState is relevant, and therefore when adopting linearly polarized laser to add man-hour, the change of machine direction will cause that absorption efficiency changes, so line is inclined to one sideWhen the light that shakes cutting, the width of slit difference that light beam produces in different cut direction, dross degree is also different, and adopts circular polarizationWhen light cutting, cutting slit width uniformity is good, and without obvious dross phenomenon. But existing CO2 laser instrument is difficult to line is inclined to one sideThe laser beam shaking becomes circularly polarized laser beam, and when cutting, dross phenomenon is obvious.
Therefore, existing technology need to improve.
Utility model content
In view of above-mentioned the deficiencies in the prior art part, the purpose of this utility model be to provide a kind of CO2 laser instrument andOuter optic path system, can by CO2 laser emitting, radial section is that to become radial section be circular to oval laser beam reshapingLaser beam, improved the uniformity of laser beam.
In order to achieve the above object, the utility model has been taked following technical scheme:
An outer optic path system for CO2 laser instrument, comprises that the radial section for CO2 laser instrument is sent is ellipseLaser beam, be shaped to the light-beam forming unit that radial section is circular laser beam, described light-beam forming unit comprises and being arranged onPrism in the light path of CO2 laser emitting light; The first side of described prism is vertical with the emergent light of CO2 laser instrument, and CO2 swashsVertical the first side of laser beam that light device penetrates enters prism, and penetrates after refraction occurs in the second side of prism; Described ribThe main cross section of mirror is parallel with the major axis of described ellipse, and facing of total reflection occurs in the second side that the drift angle of described prism is less than prismAngle, boundary.
In the outer optic path system of described CO2 laser instrument, described prism is zinc selenide wedge.
In the outer optic path system of described CO2 laser instrument, described light-beam forming unit also comprises for changing CO2 sharpThe path of laser beam that light device penetrates, makes laser beam impinge perpendicularly on the laser mirror on the first side of described prism, instituteState in the rotating light path being arranged between described prism and CO2 laser instrument of laser mirror.
In the outer optic path system of described CO2 laser instrument, described prism is rotating, and to be arranged on laser mirror anti-Penetrate in the light path of light.
In the outer optic path system of described CO2 laser instrument, the rotating CO2 that is arranged on of described light-beam forming unit swashsOne end of light device shoot laser.
In the outer optic path system of described CO2 laser instrument, described outer optic path system also comprises quarter-waveSheet, described quarter-wave plate is arranged in the light path of emergent light of described light-beam forming unit, described quarter-wave plateThe linear polarization of the emergent light of axial plane and light-beam forming unit is 45 °.
In the outer optic path system of described CO2 laser instrument, described outer optic path system also comprises for will be visibleLight is blended into the mixed light device in laser beam, described mixed light device be arranged on light-beam forming unit and quarter-wave plate itBetween light path on.
In the outer optic path system of described CO2 laser instrument, described outer optic path system also comprises beam expanding lens, firstSpeculum, the second speculum, the 3rd speculum and focus lamp; The laser beam that CO2 laser instrument penetrates, whole in light-beam forming unitForming hot spot is after circular laser beam, and the visible ray providing with instruction light source mixes in light combination mirror, and expands by beam expanding lensShu Hou, incides in the first speculum with 45 ° of incidence angles, and the first speculum emitting laser bundle incides with 45 ° of incidence anglesIn two-mirror, the second speculum emitting laser bundle incides in the 3rd speculum with 45 ° of incidence angles, the 3rd speculum outgoingLaser beam after quarter-wave plate, line focus mirror focus on after, be irradiated on cut workpiece.
A kind of CO2 laser instrument, comprises the outer optic path system of CO2 laser instrument as above.
Compared to prior art, a kind of CO2 laser instrument that the utility model provides and outer optic path system thereof, described outsideOptic path system comprises light-beam forming unit, and described light-beam forming unit comprises the light path that is arranged on CO2 laser emitting lightOn prism; The first side of described prism is vertical with the emergent light of CO2 laser instrument, and CO2 laser instrument penetrates, radial section isOval vertical the first side of laser beam enters prism, and penetrates after refraction occurs in the second side of prism; Described prismMain cross section is parallel with the major axis of described ellipse, and the critical of total reflection occurs in the second side that the drift angle of described prism is less than prismAngle. That is, hot spot be oval laser beam by after prism, its major axis is compressed, becomes circular hot spot, has improved laser beamUniformity, while making CO2 laser instrument cutting material, the effect of cutting is consistent.
Brief description of the drawings
In the outer optic path system of the CO2 laser instrument that Fig. 1 provides for the utility model, laser beam is by the light path of prismSchematic diagram.
In the outer optic path system of the CO2 laser instrument that Fig. 2 provides for the utility model, laser beam fills by beam shapingThe light path schematic diagram of putting.
In the outer optic path system of the CO2 laser instrument that Fig. 3 provides for the utility model, before and after laser beam reshaping, major axis is longThe schematic diagram of the ratio of degree and the corresponding relation of wedge drift angle.
The top view of the outer optic path system of the CO2 laser instrument that Fig. 4 provides for the utility model.
The stereogram of the outer optic path system of the CO2 laser instrument that Fig. 5 provides for the utility model.
In the outer optic path system of the CO2 laser instrument that Fig. 6 provides for the utility model, the structure of light-beam forming unitFigure.
The light path schematic diagram of the outer optic path system of the CO2 laser instrument that Fig. 7 provides for the utility model.
The method flow diagram of the outer optic path method of the CO2 laser instrument that Fig. 8 provides for the utility model.
Detailed description of the invention
The utility model provides a kind of CO2 laser instrument and outer optic path system thereof. For making the purpose of this utility model, skillArt scheme and effect are clearer, clear and definite, referring to the accompanying drawing embodiment that develops simultaneously, the utility model are further described. ShouldWork as understanding, specific embodiment described herein is only in order to explain the utility model, and is not used in restriction the utility model.
Refer to Fig. 1 and Fig. 2, the utility model provides a kind of outer optic path system of CO2 laser instrument, comprises for inciting somebody to actionThe radial section that CO2 laser instrument 10 sends is oval laser beam, is shaped to the beam shaping that radial section is circular laser beamDevice 20, described light-beam forming unit 20 comprises the prism 210 in the light path that is arranged on CO2 laser emitting light; Described prismThe first side 211 of 210 is vertical with the emergent light of CO2 laser instrument 10, the laser beam (solid arrow in figure that CO2 laser instrument penetratesShown in) vertical the first side 211 enters prism 210, and ejaculation after refraction occurs in the second side 212 of prism 210; Described ribThe main cross section of mirror 210 is parallel with the major axis D1 of described ellipse, and the second side 212 that the drift angle a of described prism is less than prism occursThe critical angle of total reflection.
Due to the main cross section of described prism 210 and the major axis D1 of described ellipse parallel, therefore hot spot (radial section) is ovalLaser beam by after prism, the length of its major axis is compressed, the length of minor axis is constant, therefore, the hot spot of laser beam is originallyEllipse, after the shaping of prism 210, hot spot trends towards circle, has improved the uniformity of laser beam, makes the cutting of CO2 laser instrumentWhen material, the effect of cutting is consistent.
As shown in Figure 1, incident beam is perpendicular to the first side 211 incidents of prism 210, because vertical incidence the first side211, so not reflection and refraction on the first side 211, light beam continues to be transferred to the second side 212, in the second side212 places reflect, and incident angle is the drift angle a of prism, and refraction angle is b, light beam side after light beam incident direction and refractionTo between differential seat angle be that c(is not shown).
If the refractive index of prism 210 is n, the refractive index of air is, obtained by the law of refraction:
；
；
。
Because the refractive index n of general prism is greater than 1, belong to optically denser medium, and air refractionBe 1, belong to light and dredgeMedium, according to refraction of optical beam law, in the time that light beam incides optically thinner medium by optically denser medium, if incidence angle a is greater than total reflectionCritical angle f, light beam will all be reflected back toward former medium. Meet formula so can obtain critical angle f:. Therefore critical angle. Therefore, the drift angle a of prism is less than prismThe second side 212 there is the critical angle f of total reflection, guaranteed that laser beam can in prism 210, total reflection not occur, and avoids sharpLight beam loss.
In the present embodiment, described prism 210 is zinc selenide wedge, that is, described wedge adopts zinc selenide (ZnSe) as lightWedge material, the refractive index of the laser that zinc selenide penetrates CO2 laser instrument is n=2.4, so critical angle f=24.624 °. Therefore, drift angleThe prism of a between 0 ~ 24.624 °, all can be used for the outer optic path system that the utility model provides.
In Fig. 1, prism 210 right sides are the laser beam (laser beam before shaping) that CO2 laser instrument penetrates, and its wave-length coverage is9 ~ 11 μ m, the radial section of the laser beam before shaping is oval (that is, hot spot is oval), the length of this transverse isD1, the length of minor axis is D2, establishing transverse D1 is u with the ratio of minor axis D2. The second side 212 emitting laser bundles of prismWhat cross section was desirable is shaped as circle (that is, hot spot is circular), and this circular diameter is D3, that is, and and the light in transverse D1 directionAfter prism 210, its length has been compressed into D3. The first side 211 of described prism and the surface of the second side 212 are all coveredBe stamped (being coated with) high transmission rete, described high transmission rete has high permeability to laser beam, makes laser beam high efficiency transmission.
Because the first side 211 of the vertical prism 210 of laser beam enters, therefore laser beam irradiation is to shape on the second side 212The hot spot becoming is also oval, the length L=D1/cosa of its major axis. Laser beam outgoing after the refraction of the second side 212, formsHot spot, the diameter D3=L × cosb of this hot spot. Minor axis D2 and the prism of the hot spot of the laser beam penetrating due to CO2 laser instrument 10210 main cross section is vertical, thus laser beam after prism 210, the length of its hot spot minor axis is constant, only other beyond the minor axisCompressed in direction, the compresses in length of major axis obtains at most. Therefore, want the light of the second side 212 emitting laser bundles of prismSpot is circular, only need allow D3=D2, in other words, and the length of the radial section of the second side 212 emitting laser bundles of prismThe minor axis length D2 of the radial section of the laser beam that axle D3 penetrates with CO2 laser instrument 10 equates, can make the second side of prismThe radial section of 212 emitting laser bundles is circular, and D3 is exactly this diameter of a circle. Thus, we can calculate:
u=D1/D2=D1/D3=（L×cosa）/（L×cosb）=cosa/cosb；
Again because,；
Therefore,，（1）；
Therefore, as long as the drift angle a of described prism meets above-mentioned formula (1), the footpath of emitting laser bundle after prism 210Be exactly circular to cross section. Consider the refractive index of airBe 1, formula (1) can also be reduced to:。
The outer optic path system of the CO2 laser instrument that the utility model provides, in light-beam forming unit, swashs according to CO2The ratio of semi-minor axis length of laser beam spot that light device penetrates, only need arrange a drift angle a and meet the prism of formula (1), allows this prismThe first side vertical with laser beam, can be that to become cross section be circular laser to oval-shaped laser beam reshaping by cross sectionBundle, the utility model is other beam shaping systems relatively, and simple in structure, without complicated light path design, easy to adjust, cost is lowHonest and clean, applied widely.
Refer to Fig. 2, described light-beam forming unit 20 also comprises that emergent light and the CO2 for making light-beam forming unit 20 swashsThe parallel laser mirror 220 of emergent light of light device 10. Described laser mirror 220 can be arranged on prism 210 and CO2 laser instrumentBetween 10, also can be arranged in the light path of emergent light of prism 210. In the present embodiment, described laser mirror 220 is rotatableBe arranged in the light path between described prism 210 and CO2 laser instrument 10, described laser mirror 220 specifically for change CO2The path of the laser beam that laser instrument 10 penetrates, impinges perpendicularly on the first side 211 of described prism 210 laser beam. Certainly,Same rotating being arranged in the catoptrical light path of laser mirror 220 of described prism 210. , described laser mirror 220All can before perpendicular to shaping, rotate by the axle of laser beam incident direction with prism 210, namely can be around cutting perpendicular to prism masterThe axle rotation of face. Laser mirror 220 can be around the axle rotation perpendicular to prism main cross section, so can ensure to realize levelBefore the shaping of direction incident, laser beam carries out angle adjustment, makes the laser beam before shaping can be perpendicular to the first side of prism211 incide in prism 210. Combine the angle that regulates laser mirror 220 and prism 210 and horizontal direction, it is right can to realizeBefore the shaping of glancing incidence, laser beam carries out angular adjustment, and ensures that it can impinge perpendicularly on the first side of prism 210211, and ensure that the exit direction of the laser beam after shaping is also horizontal direction.
The surface of described laser mirror 220 is provided with highly reflecting films layer, in other words, and described laser mirror 220Surface is coated with the rete laser beam before shaping to high reflectance.
Make the second side 212 emitting laser bundles and the CO2 laser instrument 10 emitting laser Shu Pinghang of prism, need to meet oneFixed condition:
If CO2 laser instrument 10 emitting laser bundle and horizontal direction parallels,
From derivation before, the refraction angle of the second side 212 of prism；
Laser beam is after laser mirror 220 reflections, with the angle c=b-a of horizontal plane;
The angle of laser mirror 220 and horizontal direction，（2）；
The first side 211 of prism and the angle of horizontal direction，（3）；
Hence one can see that, selecting after the material of prism 210, and its refractive index is exactly known, prism 210 and laser reflectionThe setting of mirror 220 angles, only relevant with the drift angle a of prism. In other words, laser mirror 220 and CO2 laser instrument 10 emergent lightsAngle p the first side 211 of meeting formula (2), prism meet formula (3) with the angle q of CO2 laser instrument 10 emergent lights,Can make the direction of the laser beam that the direction of the first side 211 emitting laser bundles of prism penetrates with CO2 laser instrument 10 parallel.
Setting laser Shu Bochang is 10.6um, and laser beam is refractive index n 0=1 in air, and the material of wedge (prism 210) isZinc selenide (ZnSe), the refractive index of laser beam in wedge is n=2.4, the light beam before and after now shaping is being parallel to wedge masterThe same D1/D2 of diameter ratio D1/D3(in the direction in cross section) only there is relation with the drift angle a of wedge, its relation is as shown in Figure 3. CanSee, in the time that wedge drift angle a is 22 °, D1/D2 ratio is 2, shows that the wedge of this drift angle can be by the ratio u=2's of major axis and minor axisSpot shaping is circular light spot. Light-beam forming unit 20 maximums of the present utility model can be by major axis and minor axis more ellipse than u=4Circle spot shaping is circular.
After the input power of CO2 laser instrument 10 increases, temperature raises, in addition because CO2 laser instrument 10 adopts cooling-water machineCooling, constantly have recirculated water to carry out gas cooling, and chilling temperature can be stabilized in some values, and range of temperatureFor ± 0.2 DEG C, thus CO2 laser instrument 10 stable after, the temperature of gas almost no longer changes, only on its flow direction,There is gas flow rates, affect hot spot in the party's diameter upwards. So the major axis of hot spot is stable at CO2 laser instrument 10In output procedure, substantially remain unchanged. But for the slightly discrepant laser instrument of different brands, internal structure, its ellipse long and short shaftRatio difference, so can adopt the utility model, can, for different ratio of semi-minor axis lengths, design the wedge of different drift angles, therebyCan carry out shaping to various laser instrument.
Further, refer to Fig. 4, Fig. 5 and Fig. 6, described light-beam forming unit 20 also comprises prism angle adjusting mechanism230 and laser mirror angle adjusting mechanism 240. Described prism angle adjusting mechanism 230 is for regulating prism 210 and level sideTo angle, described laser mirror angle adjusting mechanism 240 is for regulating the angle of laser mirror 220 and horizontal direction.The rotating one end that is arranged on CO2 laser instrument 10 shoot lasers of described light-beam forming unit 20, that is, and described light-beam forming unit20 can be along the axial rotation of CO2 laser instrument 10 emitting laser bundles. Even if the hot spot of the laser beam that CO2 laser instrument 10 sends is ellipseThe main cross section of circle long axis direction and prism 210 is not parallel, only needs the described light-beam forming unit 20 of rotation, can be to CO2 laser instrumentThe transverse of the hot spot of 10 laser beams that send compresses. Thereby realize the beam shaping of elliptical laser bundle, thereby obtainCross section is circular shaping light beam.
Further, see also Fig. 7, described outer optic path system also comprises along the outgoing of light-beam forming unit 20Mixed light device 30, beam expanding lens 40, the first speculum 50, the second speculum 60, the 3rd speculum that the light path of light sets gradually70, quarter-wave plate 80 and focus lamp 90.
Described quarter-wave plate 80 is arranged in the light path of emergent light of described light-beam forming unit 20, described four/The linear polarization of the emergent light of the axial plane of one wave plate and light-beam forming unit 20 is 45 °. Like this, quarter-wave plate 80 willThe linearly polarized laser bundle of light-beam forming unit 20 outgoing is converted into circularly polarized laser bundle, does not lose laser beam energy, obtains circle partiallyThe laser that shakes is processed, and when cutting, there will not be dross phenomenon. Further, described quarter-wave plate 80 can be along laser beamAxial rotation, in the time that the axial plane of quarter-wave plate and the linear polarization of laser beam are not 45 °, can rotate four/One wave plate, makes it axial plane and linear polarization and is 45 °.
Described mixed light device 30, for visible ray is blended into laser beam, described mixed light device 30 is arranged on lightIn light path between bundle apparatus for shaping 20 and quarter-wave plate 80. Concrete, described mixed light device 30 comprises for providingThe instruction light source 310 of visible ray and light combination mirror 320.
Described the first speculum 50, the second speculum 60 and the 3rd speculum 70 are all established with the laser beam angle at 45 ° of incidentPut. The laser beam that CO2 laser instrument 10 penetrates is shaped to hot spot and is after circular laser beam, with finger in light-beam forming unit 20Show that the visible ray that light source 310 provides mixes in light combination mirror 320, and after expanding by beam expanding lens 40, incide with 45 ° of incidence anglesIn the first speculum 50, the first speculum 50 emitting laser bundles incide in the second speculum 60 with 45 ° of incidence angles equally, theTwo-mirror 60 emitting laser bundles incide in the 3rd speculum 70 with 45 ° of incidence angles equally, the 3rd speculum 70 outgoingLaser beam is after 80s through quarter-wave plate, after line focus mirror 90 focuses on, is irradiated on cut workpiece. The 3rd speculum 70The axial plane of the linear polarization of emitting laser bundle and described quarter-wave plate 80 is 45 °, to guarantee that laser beam is through four/ mono-wave plate 80 is converted into circularly polarized laser bundle. Use 3 speculums (50,60 and 70), can use fixed light on the one handRoad, as shown in Figure 5, the position of the second speculum 60 and the 3rd speculum 70 is fixed, and is so fixed light path, nowNeed product to be processed planar to carry out two dimensional motion. On the other hand, the utility model also can use flight light path,As shown in Figure 7, the second speculum 60 wherein also can be fixed on one can straight-line axle on, along beam Propagation directionRectilinear motion, and the 3rd speculum 70 also can be fixed on one can straight-line axle on, straight along the direction of beam PropagationLine motion, two kinematic axis of the second speculum 60 and the 3rd speculum 70 are orthogonal, so can form flight light path, canTo realize the two dimension processing in plane.
Concrete, CO2 laser instrument 10 emitting laser bundles, through after light-beam forming unit 20, obtain the laser after shapingBundle, the laser beam glancing incidence after shaping is in light combination mirror 320, and light combination mirror 320 is 45° angle, light combination mirror with the laser beam of incidentUpper and lower two surfaces of 320 are coated with the high transmission rete that laser beam is had to high-transmission rate, and therefore laser beam can lead to efficientlyCross, instruction light source 310 sends instruction light beam, and its wavelength is visible-range, is positioned at 400nm-700nm scope. Instruction light beamIncide light combination mirror 320 with 45° angle degree, the upper surface of light combination mirror 320 is coated with the height reflection of the high reflectance that instruction light beam is hadRete, thus indicate light beam to be reflected by the upper surface of light combination mirror 320, because light combination mirror 320 and shaping light beam and pilot lightBundle is to be all 45 °, so after light combination mirror 320, instruction light beam and shaping light beam overlap. Instruction light beam is visible ray, soCan indicate debug process, although shaping light beam is invisible, can be undertaken by the instruction light beam overlapping with itDebugging, has debugged when instruction light beam, means that the shaping light beam overlapping with it also debugged.
Shaping light beam and instruction light beam enter beam expanding lens 40, expand, and the lens surface of beam expanding lens 40 is all coated with wholeShaped light beam and instruction light beam have the high transmission rete of high-transmission rate, so that shaping light beam and instruction light beam efficiently see through.
Then shaping light beam and instruction light beam are through the first speculum 50, the second speculum 60, the 3rd reflection of 45 ° of settingsThe reflection of mirror 70, the surface of described the first speculum 50, the second speculum 60, the 3rd speculum 70 be all coated with shaping light beam andInstruction light beam has the highly reflecting films layer of high reflectance, and therefore shaping light beam and instruction light beam are all by high-efficiency reflective. Shaping light beam andInstruction light beam incides quarter-wave plate 80, and quarter-wave plate 80 is the quarter wave plate for laser beam, because before shapingLaser beam after laser beam and shaping is all linear polarization, so use quarter-wave plate 80 that linearly polarized light beam is transformed at thisFor circularly polarized laser bundle, then circularly polarized laser bundle focuses on through focus lamp 90, can process product, focus lamp 90Upper and lower surface is all coated with high transmission rete circularly polarized laser bundle to high-transmission rate, so ensure circularly polarized laser Shu GaoxiaoPassing through of rate.
Hence one can see that, and the outer optic path system that adopts the utility model to provide, can also be converted into linearly polarized laser bundleCircularly polarized laser bundle, makes adding man-hour, and in different directions, the absorptivity of material for laser light is identical, so can avoidWhen cutting, the live width of directions X and Y-direction is inconsistent, thereby ensures to obtain the consistent cutting slit width of all directions, thereby ensures chiVery little precision, in addition, also can ensure the consistent of cutting effect, and as material, neat in edge is stitched in cutting, effect is consistent, bottom drossDegree is unanimously even.
In sum, the outer optic path system that the utility model provides, has following benefit:
1, light-beam forming unit can compress the direction of the major axis of the cross section ellipse of laser beam, thereby can obtainTo circular hot spot, and ratio of semi-minor axis length still can enter by light-beam forming unit of the present utility model up to the hot spot of u=4Row shaping obtains circular hot spot;
2, light-beam forming unit only comprises 1 speculum and 1 wedge, and other light-beam forming units, simple in structure relatively,Easy to adjust, with low cost;
3, light-beam forming unit can be directly installed on laser instrument outlet, to the collimated laser beam shaping of laser instrument output,And the laser beam after guarantee shaping is also parallel, and follow-up optics is not caused to negative impact, can and mostLaser instrument, laser light path system compatibility;
4, the outer optic path system that the utility model provides can be converted into circular polarization by the laser beam of linear polarization, adoptsCircularly polarized laser Shu Jiagong, in different directions, the absorptivity of material for laser light is identical, so can avoid cutting time, X sideTo inconsistent with the live width of Y-direction, thereby ensure to obtain the consistent cutting slit width of all directions, thereby ensure dimensional accuracy. AlsoCan ensure the consistent of cutting effect, as material, neat in edge is stitched in cutting, effect is consistent, and the degree of bottom dross is unanimously even.In addition, adopt circularly polarized laser to process, can ensure the cutting effect that reaches maximum in process in each directionRate.
The outer optic path system providing based on above-described embodiment, the utility model also provide a kind of CO2 laser instrument outsideOptic path method, refers to Fig. 8, and described method adopts above-mentioned outer optic path system, comprises the steps:
It is oval laser beam that S10, CO2 laser instrument penetrate radial section;
The first side of the vertical prism of laser beam that S20, CO2 laser instrument penetrate enters prism, and in the second side of prismFace occurs to penetrate after refraction; The main cross section of described prism is parallel with the major axis of described ellipse, and the drift angle of described prism is less than prismThe second side there is the critical angle of total reflection;
The second side emitting laser bundle of S30, described prism, after quarter-wave plate, is become ellipse from linearly polarized lightCircularly polarized light or circularly polarized light.
Further, described step S30 comprises:
The second side emitting laser bundle of S310, described prism, after quarter-wave plate, detects quarter-waveWhether sheet emitting laser bundle is circularly polarized light. Concrete, in the light path of quarter-wave plate emergent light, polarizer is set, andRotatory polarization sheet, in the time of rotatory polarization sheet, the light intensity that sees through polarizer is constant, and swashing of quarter-wave plate outgoing is describedLight beam is circularly polarized light; In the time of rotatory polarization sheet, the light intensity that sees through polarizer changes, and quarter-wave plate outgoing is describedLaser beam be elliptically polarized light.
If the direction of the linear polarization of the axial plane of quarter-wave plate and shaping light beam is 45 °, shaping light beam is luckyBecome circularly polarized laser bundle, if the linear polarization of the axial plane of quarter-wave plate and shaping light beam is not equal to 45 °, go outThe light beam of penetrating is elliptically polarized light. Described polarizer (polaroid) is the organic crystal of dichroism, as iodine sulfate quinine, electricAfter stone or polyvinyl alcohol film soak in iodine solution, at high temperature stretch, dry, be then bonded between two sheet glass with regard to shapeBecome polarizer, polarizer has a specific direction, only allows parallel and vibration this direction pass through, and this direction is called shakesDirection. If the axial plane of quarter-wave plate is 45 degree with the linear polarization of shaping light beam, rotatory polarization nowSheet, can be observed the rotation along with polarizer, and the light intensity that sees through polarizer remains unchanged. If the light of quarter-wave plateAxial plane does not reach with the linear polarization of shaping light beam and is 45 °, is now elliptically polarized light, along with the rotation of polarizer,Seeing through the variation that light and shade can occur for the light intensity of polarizer, is now adjustable quarter-wave plate, until when rotatory polarization sheet, thoroughlyThe light intensity of crossing polarizer no longer changes, the axial plane that shows quarter-wave plate now with the linear polarization side of shaping light beamTo reaching 45 °, now outgoing beam is circularly polarized laser bundle.
S320, in the time that quarter-wave plate emitting laser bundle is circularly polarized light, use this laser beam to cut; Four/ mono-wave plate emitting laser bundle is the elliptical polarization light time, rotates after quarter-wave plate, returns to step S310.
Other features and the principle of the outer optic path method of described CO2 laser instrument are explained in the above-described embodiments in detailState, do not repeat them here.
The utility model also provides a kind of CO2 laser instrument, comprises that the outer optic path of CO2 laser instrument as above isSystem. Because feature and the principle of described CO2 laser instrument elaborate in the above-described embodiments, do not repeat them here.
Be understandable that, for those of ordinary skills, can be according to the technical solution of the utility model andThe design of its utility model is equal to replaces or changes, and all these changes or replace that all should to belong to the utility model appendedThe protection domain of claim.
Claims (9)
1. an outer optic path system for CO2 laser instrument, is characterized in that, comprises for CO2 laser instrument is sent radiallyCross section is oval laser beam, is shaped to the light-beam forming unit that radial section is circular laser beam, described light-beam forming unitComprise the prism in the light path that is arranged on CO2 laser emitting light; The first side of described prism and the emergent light of CO2 laser instrumentVertically, vertical the first side of laser beam that CO2 laser instrument penetrates enters prism, and penetrates after the second side of prism reflectsGo out; The main cross section of described prism is parallel with the major axis of described ellipse, and the second side that the drift angle of described prism is less than prism occursThe critical angle of total reflection.
2. the outer optic path system of CO2 laser instrument according to claim 1, is characterized in that, described prism is selenizingZinc wedge.
3. the outer optic path system of CO2 laser instrument according to claim 1, is characterized in that, described beam shaping dressPut the path that also comprises the laser beam for changing the ejaculation of CO2 laser instrument, make laser beam impinge perpendicularly on first of described prismLaser mirror on side, the rotating light path being arranged between described prism and CO2 laser instrument of described laser mirrorOn.
4. the outer optic path system of CO2 laser instrument according to claim 3, is characterized in that, described prism is rotatableBe arranged in the catoptrical light path of laser mirror.
5. the outer optic path system of CO2 laser instrument according to claim 1, is characterized in that, described beam shaping dressPut one end of the rotating CO2 of being arranged on laser emitting laser.
6. the outer optic path system of CO2 laser instrument according to claim 1, is characterized in that, described outer optic pathSystem also comprises quarter-wave plate, and described quarter-wave plate is arranged on the light path of the emergent light of described light-beam forming unitUpper, the linear polarization of the axial plane of described quarter-wave plate and the emergent light of light-beam forming unit is 45 °.
7. the outer optic path system of CO2 laser instrument according to claim 6, is characterized in that, described outer optic pathSystem also comprises the mixed light device for visible ray being blended into laser beam, and described mixed light device is arranged on beam shapingIn light path between device and quarter-wave plate.
8. the outer optic path system of CO2 laser instrument according to claim 7, is characterized in that, described outer optic pathSystem also comprises beam expanding lens, the first speculum, the second speculum, the 3rd speculum and focus lamp; The laser that CO2 laser instrument penetratesBundle is shaped to hot spot and is after circular laser beam in light-beam forming unit, and the visible ray providing with instruction light source is at light combination mirrorMiddle mixing, and after expanding by beam expanding lens, incide in the first speculum the first speculum emitting laser with 45 ° of incidence anglesBundle incides in the second speculum with 45 ° of incidence angles, and the second speculum emitting laser bundle incides the 3rd anti-with 45 ° of incidence anglesPenetrate in mirror, the 3rd speculum emitting laser bundle is after quarter-wave plate, and line focus mirror is irradiated to cut after focusing onOn workpiece.
9. a CO2 laser instrument, is characterized in that, comprises the outer light of the CO2 laser instrument as described in claim 1-8 any oneRoad transmission system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520846835.9U CN205254331U (en) | 2015-10-29 | 2015-10-29 | CO2 laser instrument and outer light path transmission system thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520846835.9U CN205254331U (en) | 2015-10-29 | 2015-10-29 | CO2 laser instrument and outer light path transmission system thereof |
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| CN205254331U true CN205254331U (en) | 2016-05-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105328330A (en) * | 2015-10-29 | 2016-02-17 | 广东正业科技股份有限公司 | CO2 laser and outer optical path transmission method and system of CO2 laser |
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2015
- 2015-10-29 CN CN201520846835.9U patent/CN205254331U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105328330A (en) * | 2015-10-29 | 2016-02-17 | 广东正业科技股份有限公司 | CO2 laser and outer optical path transmission method and system of CO2 laser |
| CN105328330B (en) * | 2015-10-29 | 2017-05-10 | 广东正业科技股份有限公司 | CO2 laser and outer optical path transmission method and system of CO2 laser |
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