CN205246712U - Full -automatic probe station image positioner - Google Patents
Full -automatic probe station image positioner Download PDFInfo
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- CN205246712U CN205246712U CN201520901119.6U CN201520901119U CN205246712U CN 205246712 U CN205246712 U CN 205246712U CN 201520901119 U CN201520901119 U CN 201520901119U CN 205246712 U CN205246712 U CN 205246712U
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- camera module
- probe station
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- station image
- automatic probe
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Abstract
The utility model relates to a full -automatic probe station image positioner can independently accomplish the accurate counterpoint of pad and probe in order to solve the probe station, improves the automatic level of probe station, reduction intensity of labour, including the base, lie in the XY platform on the base, be equipped with slide holder and second camera module support on the characterized by XY platform, be equipped with second camera module on the second camera module support and be furnished with the demarcation piece of cylinder, the base top is equipped with accuse needle card, and the top of slide holder sets up first camera module relatively. Fast to the needle, the precision is high, and compact structure is applicable to extensive pipelining.
Description
Technical field
The utility model relates to integrated circuit testing equipment technology, especially a kind of full-automatic probe station image positioning device for wafer sort.
Background technology
Wafer sort is one important procedure that integrated circuit is manufactured, and test accurately can be rejected defective products in time, reduces the waste of packaging and testing cost, improves product rate of good. Probe station is wafer sort main flow equipment, after being connected, can automatically complete the electric performance test to integrated circuit with test machine. The major function of probe station is to realize the accurate contraposition of wafer pad and probe card needle point, and this process is called pin process. In prior art, probe station pin mode mostly is manually pin, operative employee, by microscope, utilizes action bars hand-driven moving to move slide holder, and naked eyes judge the order of accuarcy to pin. Artificial vision checks pin effect, and efficiency is low and precision is not high, has reduced the automaticity of probe station simultaneously, can not meet the demand of wafer sort in enormous quantities. If patent publication No. is CNCN103760391A built-in multiprobe module, comprise base, electric test printed circuit board (PCB) and welding position are set on base; Probe is movably arranged on base, and can arrange the position on base according to the structural adjustment probe of tested device, this probe station with built-in multiprobe module, built-in multiprobe module is arranged on the chuck top for placing tested device, according to tested device testing requirement, adjust built-in multiprobe module, form dissimilar probe card. The manual probe station of a kind of semiconductor die testing that and for example patent publication No. designs for CN104698230A, comprise probe station base, wafer-supporting platform, wafer-supporting platform seat, immediate addressing mechanism, retaining mechanism and micro-adjusting mechanism, retaining mechanism is made up of vacuum cup, micro-adjusting mechanism is made up of connecting rod, fine setting guide plate, trimming handle, oscillating bearing, self-aligning bearing, when the table top of vacuum cup and probe station base is vacuum locking state, the locking that is fixed of immediate addressing mechanism; Trimming handle bottom is connected with oscillating bearing, trimming handle middle part connects connecting rod one end by self-aligning bearing, the connecting rod other end is connected with wafer-supporting platform seat, stir trimming handle, self-aligning bearing can do 360 ° of swings in horizontal plane, and drivening rod does the movement of any direction in horizontal plane, realize the fine setting of wafer-supporting platform seat.
Summary of the invention
The purpose of this utility model is the accurate contraposition that can independently complete pad and probe in order to solve probe station, to improve the automatization level of probe station, alleviate the problem of labor intensity of operating staff simultaneously, provide a kind of rational in infrastructure, fast full-automatic probe station framing system accurately of capture.
Above-mentioned technical problem of the present utility model is mainly solved by following technical proposals: a kind of full-automatic probe station image positioning device, comprise pedestal, be positioned at the XY platform on pedestal, it is characterized in that XY platform is provided with slide holder and second camera module carrier, the calibrating block that second camera module carrier is provided with second camera module and is furnished with cylinder, pedestal top is provided with control pin card, and the top of slide holder arranges first camera module relatively. The technical program, by the image of first camera module and second camera module shooting, collecting target, is compared the image obtaining and sample image, determines the position of pad and needle point; Move to drive second camera module and slide holder to move along x-y direction by controlling XY platform, control calibrating block simultaneously and demarcating position and freely motion between position, to complete the demarcation between collection and the camera of image.
As preferably, described first camera module comprises the first high power camera lens and the first low power lens. The first high power camera lens and the first low power lens need to switch according to operation, and wherein, the first low power lens visual field is large but resolution ratio is low, for fast searching pad; The first high power camera lens visual field is little but resolution ratio is high, for accurately determining pad locations.
As preferably, described second camera module comprises the second high power camera lens and the second low power lens. The second high power camera lens and the second low power lens switch according to the needs of captured object resolution height, and the second low power lens visual field is large but resolution ratio is low, for fast searching control pin card needle point; The second high power camera lens visual field is little but resolution ratio is high, for accurately determining control pin card tip position.
As preferably, described calibrating block comprises transparent glass, and tracking cross is carved with at transparent glass center. Calibrating block is mainly used in the relative position of first camera module and second camera module and demarcates.
As preferably, described calibrating block is connected with cylinder piston rod. Timing signal, power set drive calibrating block to move to second camera module high power camera lens top and demarcate position, and first camera module high power camera lens and second camera module high power camera lens obtain respectively the image of tracking cross, and the two position relationship is determined.
As preferably, described slide holder is provided with vacuum cup. Wafer is fixed on slide holder top by vacuum suction mode.
As preferably, first camera module is fixed on pedestal by first camera module carrier, and first camera module is positioned at the top of slide holder.
Effective effect of the present utility model is: fast to needle speed, precision is high, and success rate is high; Camera calibration principle is simple and easy to realize, and required installing space is little, probe station compact conformation; Automaticity is high, meets the requirement of wafer large scale test, is applicable to large-scale pipeline and produces; Calibrating block is simple in structure, and cost is low, easy to operate.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the present utility model.
Fig. 2 is the structural representation of looking up of first camera module of the present utility model.
Fig. 3 is the structural representation of second camera module of the present utility model.
Fig. 4 is a kind of calibrating block top view of the present utility model.
In figure: 1. pedestal, 2.XY platform, 3. second camera module carrier, 4. second camera module, 41. second high power camera lenses, 42. second low power lens, 5. calibrating block, 51. support bars, 52. transparent glass, 53. tracking crosses, 6. control pin card, 7. slide holder, 8. wafer, 9. first camera module, 91. first high power camera lenses, 92. first low power lens, 10. first camera module carrier.
Detailed description of the invention
Below by embodiment, and by reference to the accompanying drawings, the technical solution of the utility model is described in further detail.
Referring to Fig. 1, a kind of full-automatic probe station framing system of the present embodiment, comprises pedestal 1, is positioned at the XY platform 2 on pedestal 1, probe card 6 and first camera module carrier 10 are all fixed on the support of pedestal 1, and wherein probe card 6 is positioned at the top of whole probe station. Slide holder 7 and second camera module carrier 3 are all fixed on XY platform 2, and wafer 8 is fixed on slide holder 7 by vacuum suction mode.
First camera module 9 is fixed on first camera module carrier 10, and its height is on wafer 8 positions; Second camera module 4 and calibrating block 5 are all fixed on second camera module carrier 3. Slide holder 7 and second camera module carrier 3 drive by XY platform 2 rectilinear motion of realizing x-y direction.
First camera module 9 is all connected with computer by cable with second camera module 4, and to computer transmitting image, computer is compared the image obtaining and sample image, determines the position of pad and needle point.
First camera module 9 comprises the first high power camera lens 91 and the first low power lens 92, and as shown in Figure 3, the camera lens of two kinds of multiplying powers can switch according to the height of captured object resolution in operation process.
Second camera module 4 comprises the second high power camera lens 41 and the second low power lens 42 equally, and as shown in Figure 2, the camera lens of two kinds of multiplying powers can switch according to the needs of captured object resolution in operation process.
Calibrating block 5 is provided with support bar 51, and transparent glass 52 is positioned at support bar 51 width to middle part, and tracking cross 53 is carved with in the center of transparent glass 52, and the width of tracking cross 53 equals 0.2mm. Whole calibrating block 5 is fixed on second camera module carrier 3 by independent rack, demarcates for first camera module 9 and the relative position of second camera module 4. Calibrating block 5 is connected with cylinder piston rod, timing signal, cylinder stretches out and drives calibrating block 5 to move to high power camera lens 41 tops of second camera module 4, first camera module 9 high power camera lenses 91 and second camera module 4 high power camera lenses 41 will obtain respectively the image of tracking cross 53, to determine the position relationship of the two. After demarcation completes, cylinders retract drives calibrating block 5 to leave high power camera lens 41 tops of second camera module 4, is positioned at free position.
When work, be transferred to computer by first camera module 9 and second camera module 4 pictures taken, computer after receiving image is compared the image obtaining and sample image, determines the accurate location relation of pad and needle point. On the other hand, drive second camera module 4 and slide holder 7 to move along x-y direction by controlling 2 motions of XY platform, and control cylinder drive calibrating block 5 demarcating position and freely motion between position simultaneously, to complete the demarcation between collection and the camera of image.
Above-described embodiment is to explanation of the present utility model, is not to restriction of the present utility model, any structure after simple transformation of the present utility model is all belonged to protection domain of the present utility model.
Claims (7)
1. a full-automatic probe station image positioning device, comprise computer, pedestal (1), be positioned at the XY platform (2) on pedestal, it is characterized in that XY platform is provided with slide holder (7) and second camera module carrier (3), second camera module carrier is provided with second camera module (4) and is furnished with the calibrating block (5) of cylinder, pedestal top is provided with control pin card (6), and the top of slide holder arranges first camera module (9) relatively.
2. full-automatic probe station image positioning device according to claim 1, is characterized in that described first camera module (9) comprises the first high power camera lens (91) and the first low power lens (92).
3. full-automatic probe station image positioning device according to claim 1, is characterized in that described second camera module (4) comprises the second high power camera lens (41) and the second low power lens (42).
4. according to the full-automatic probe station image positioning device described in claim 1 or 2 or 3, it is characterized in that described calibrating block (5) comprises transparent glass (52), tracking cross (53) is carved with at transparent glass center.
5. full-automatic probe station image positioning device according to claim 4, is characterized in that described calibrating block (5) is connected with cylinder piston rod.
6. according to the full-automatic probe station image positioning device described in claim 1 or 2 or 3, it is characterized in that described slide holder (7) is provided with vacuum cup.
7. according to the full-automatic probe station image positioning device described in claim 1 or 2 or 3, it is characterized in that being fixed on pedestal (1) in described first camera module (9) by first camera module carrier (10) upper, first camera module is positioned at the top of slide holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520901119.6U CN205246712U (en) | 2015-11-12 | 2015-11-12 | Full -automatic probe station image positioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520901119.6U CN205246712U (en) | 2015-11-12 | 2015-11-12 | Full -automatic probe station image positioner |
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| Publication Number | Publication Date |
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| CN205246712U true CN205246712U (en) | 2016-05-18 |
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| CN201520901119.6U Active CN205246712U (en) | 2015-11-12 | 2015-11-12 | Full -automatic probe station image positioner |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107271886A (en) * | 2017-07-12 | 2017-10-20 | 深圳市迈创力科技有限公司 | A kind of rapid-aligning method of flying probe tester |
| TWI731169B (en) * | 2017-09-27 | 2021-06-21 | 創新服務股份有限公司 | Precision assembly mechanism |
| CN114878877A (en) * | 2022-06-02 | 2022-08-09 | 中国农业大学 | Probe card and wafer testing method |
-
2015
- 2015-11-12 CN CN201520901119.6U patent/CN205246712U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107271886A (en) * | 2017-07-12 | 2017-10-20 | 深圳市迈创力科技有限公司 | A kind of rapid-aligning method of flying probe tester |
| CN107271886B (en) * | 2017-07-12 | 2019-12-27 | 深圳市迈创力科技有限公司 | Rapid alignment method of flying probe testing machine |
| TWI731169B (en) * | 2017-09-27 | 2021-06-21 | 創新服務股份有限公司 | Precision assembly mechanism |
| CN114878877A (en) * | 2022-06-02 | 2022-08-09 | 中国农业大学 | Probe card and wafer testing method |
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