CN205235922U - Negative pressure stirring formula reation kettle - Google Patents
Negative pressure stirring formula reation kettle Download PDFInfo
- Publication number
- CN205235922U CN205235922U CN201521099364.6U CN201521099364U CN205235922U CN 205235922 U CN205235922 U CN 205235922U CN 201521099364 U CN201521099364 U CN 201521099364U CN 205235922 U CN205235922 U CN 205235922U
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- CN
- China
- Prior art keywords
- low head
- negative pressure
- pressure stirring
- reation kettle
- stirring
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Abstract
The utility model relates to a negative pressure stirring formula reation kettle, constitute whole reation kettle structure, characterized by including barrel and upper and lower head: the upper cover is equipped with the vacuum pump interface, the low head is equipped with the air injection mouth, low head longitudinal section shape is the ellipse, low head top interval rigid coupling has the curved baffle, constitute the air flow guide district between the angle wall that curved baffle and barrel and low head formed. Beneficial effect: compared with the prior art, the utility model discloses negative pressure stirring formula reation kettle does not have a stirring rake stirring in that reation kettle is inside, adopts the mode of inside evacuation to form the negative pressure, makes the stirring of inside burble by oneself to at the jet -propelled curved baffle of lateral wall of bottom installation, the polish is when adjusting pH value, through the broken formation that has encircled retention layer on lateral wall and the angle wall of fast -speed air current, and the production of prevention gel phenomenon.
Description
Technical field
The utility model belongs to reactor, relates in particular to a kind of for the preparation of chemically mechanical polishing (CMP)The negative pressure stirring-type reactor of alkalescence polishing liquid.
Background technology
Along with the development of microelectric technique, integrated level is more and more higher, and CMP process is prepared at integrated circuitMore and more important in process, it is particularly important that the quality of polishing fluid and cleanliness factor show. At present, preparation is usedReactor in CMP alkalescence polishing liquid generally all adopts churned mechanically reactor. Reactor by kettle,The compositions such as kettle cover, chuck, agitator, transmission device, gland seal device, supporting. Paddle is in reactionIn still, by the drive of external motor, reactant liquor is stirred. Although reactant liquor can fully be stirred,Easily polishing fluid is polluted, especially the pollution of machine oil; The low head of market sale reactor withBi You dead angle, angle between kettle easily produces polishing fluid and is detained on angle wall and sidewall in whipping processLayer, affects quality and the cleanliness factor of polishing fluid. In the time producing alkalescence polishing liquid, reactant liquor is turned by acidityWhile becoming alkalescence, need mutation process, to prevent at the rapid gel in pH=6-8 hazardous area. If border is stagnantStay the pH value of layer to change slowly, now polishing fluid very easily produces gel, causes polishing fluid percent defective literHeight, even all lost efficacy. For the preparation of the negative pressure stirring-type reaction of chemically mechanical polishing alkalescence polishing liquidStill belongs to non-standard equipment, urgently need in the preparation of polishing fluid, control the reactor of retention layer.
Utility model content
The utility model is in order to overcome deficiency of the prior art, and a kind of negative pressure stirring-type reaction is providedStill, is applicable to prepare the negative pressure stirring of chemically mechanical polishing (CMP) alkalescence polishing liquid, prevents preparationAppearance gel in process and effectively removal retention layer.
The utility model for achieving the above object, is achieved through the following technical solutions, and a kind of negative pressure stirsFormula reactor, comprises that cylindrical shell and upper and lower end socket form W-response still structure, is characterized in that: described inUpper cover is provided with vavuum pump interface, and described low head is provided with jet-impingement mouth, and described low head longitudinally cutsFace shape ovalize, interval, described low head top is connected with curved baffle, described curved baffle withBetween the angle wall that cylindrical shell and low head form, form air-flow boot section.
Described vavuum pump interface is placed in upper cover central authorities.
Described jet-impingement mouth is placed in low head central authorities.
Described curved baffle longitudinal cross-section shape ovalize and with low head form fit, curved baffleOval major axis and the oval major axis of minor axis < low head and minor axis.
The major axis of described curved baffle and minor axis dimension are less than the oval-shaped major axis of low head and minor axis chiVery little is 20mm.
Beneficial effect: compared with prior art, the utility model negative pressure stirring-type reactor, at reactorInside does not have paddle to stir, and adopts the inner mode vacuumizing to form negative pressure, and inside is produced voluntarilyVortex stirring, and a curved baffle that sidewall is jet is installed in bottom, polishing fluid is regulating pH valueTime, by the broken formation that has encircled retention layer on sidewall and angle wall of air-flow at a high speed, and stop gelatin phenomenonProduce.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
In figure: 1, cylindrical shell, 2,3, upper and lower end socket, 4, vavuum pump interface, 5, jet-impingement mouth, 6,Curved baffle, 7, Jiao Bi, 8, air-flow boot section.
Detailed description of the invention
Below in conjunction with preferred embodiment, the detailed description of the invention that provides according to the utility model is described in detail asUnder: embodiment
Refer to accompanying drawing, the present embodiment provides a kind of negative pressure stirring-type reactor, comprise cylindrical shell 1 and upper,Low head 2,3 forms W-response still structure, and described upper cover is provided with vavuum pump interface 4, described trueEmpty pump interface is placed in upper cover central authorities. Described low head is provided with jet-impingement mouth 5, described jet-impingementMouth is placed in low head central authorities. Described low head longitudinal cross-section shape ovalize, described low head topInterval is connected with curved baffle 6, between the angle wall 7 that described curved baffle and cylindrical shell and low head formForm air-flow boot section 8, curved baffle longitudinal cross-section shape ovalize and with low head form fit.On the circle that on curved baffle, radius is 300, evenly get 3 points, with these 3 upright projections on bottom surfaceBe connected and fixed with buttress shaft shape glass. the oval major axis of described curved baffle and minor axis < low head ellipseShape major axis and minor axis. The major axis of described curved baffle and minor axis dimension are less than the oval-shaped major axis of low headWith minor axis dimension be 20mm. To ensure to form air-flow boot section, guiding air-flow passes through.
Refer to Fig. 1, the vavuum pump interface of negative pressure stirring-type reactor connects external vacuum pump, to reactorInside is evacuated to negative pressure, polishing fluid is produced and stir eddy current, forms negative pressure and stirs. StirringIn journey, for fear of producing polishing fluid retention layer at angle wall and sidewall, especially become by acidity in pH valueTo alkaline transition stage, be difficult to pH value mutation and produce gel. When air-flow is entered by jet-impingement mouthTime, due to the guiding function of curved baffle, the retention layer that makes angle wall and sidewall surfaces impacted andDestroyed. In whole whipping process, there is no the introducing of external contamination, and retention layer can not form, DuAbsolutely gelatin phenomenon, ensured quality and the cleanliness factor of polishing fluid.
The present embodiment, adopts the bottom surface diameter of standard elliptical head and the bottom surface diameter of side cylindrical tubeUnanimously, be 1200mm, it is highly 300mm. The bottom surface diameter of curved baffle is 1180mm, highlyFor 290mm. The aperture of jet-impingement mouth is 30mm.
Above-mentioned detailed description of this kind of negative pressure stirring-type reactor being carried out with reference to embodiment is explanationProperty instead of determinate, can list several embodiment according to institute's limited range, therefore notDepart from variation and amendment under the utility model general plotting, should belong to protection domain of the present utility model itIn.
Claims (5)
1. a negative pressure stirring-type reactor, comprises that cylindrical shell and upper and lower end socket form W-response still knotStructure, is characterized in that: described upper cover is provided with vavuum pump interface, and described low head is provided with jet-impingement mouth,Described low head longitudinal cross-section shape ovalize, interval, described low head top is connected with curved surface gearPlate, forms air-flow boot section between the angle wall that described curved baffle and cylindrical shell and low head form.
2. negative pressure stirring-type reactor according to claim 1, is characterized in that: described vacuumPump interface is placed in upper cover central authorities.
3. negative pressure stirring-type reactor according to claim 1, is characterized in that: described air-flowJet is placed in low head central authorities.
4. negative pressure stirring-type reactor according to claim 1, is characterized in that: described curved surfaceBaffle plate longitudinal cross-section shape ovalize and with low head form fit, the oval major axis of curved baffleWith the oval major axis of minor axis < low head and minor axis.
5. according to the negative pressure stirring-type reactor described in claim 1 or 4, it is characterized in that: described inThe major axis of curved baffle and minor axis dimension are less than the oval-shaped major axis of low head and minor axis dimension is 20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521099364.6U CN205235922U (en) | 2015-12-23 | 2015-12-23 | Negative pressure stirring formula reation kettle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521099364.6U CN205235922U (en) | 2015-12-23 | 2015-12-23 | Negative pressure stirring formula reation kettle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205235922U true CN205235922U (en) | 2016-05-18 |
Family
ID=55935003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521099364.6U Expired - Fee Related CN205235922U (en) | 2015-12-23 | 2015-12-23 | Negative pressure stirring formula reation kettle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205235922U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106381494A (en) * | 2016-10-13 | 2017-02-08 | 王薇 | Polishing solution for replacing copper pickling process to teat copper and copper alloy surface |
| CN107837765A (en) * | 2017-12-11 | 2018-03-27 | 江苏嘉宇特种装备股份有限公司 | A kind of vacuum reaction kettle |
-
2015
- 2015-12-23 CN CN201521099364.6U patent/CN205235922U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106381494A (en) * | 2016-10-13 | 2017-02-08 | 王薇 | Polishing solution for replacing copper pickling process to teat copper and copper alloy surface |
| CN107837765A (en) * | 2017-12-11 | 2018-03-27 | 江苏嘉宇特种装备股份有限公司 | A kind of vacuum reaction kettle |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160518 Termination date: 20181223 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |