CN205231090U - Cooling room of solar cell antireflection coating graphite boat for deposit - Google Patents
Cooling room of solar cell antireflection coating graphite boat for deposit Download PDFInfo
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- CN205231090U CN205231090U CN201521106800.8U CN201521106800U CN205231090U CN 205231090 U CN205231090 U CN 205231090U CN 201521106800 U CN201521106800 U CN 201521106800U CN 205231090 U CN205231090 U CN 205231090U
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- graphite boat
- cooling
- room
- cooling room
- thermantidote
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a cooling room of solar cell antireflection coating graphite boat for deposit belongs to solar cell production facility technical field. The utility model discloses a cooling room of solar cell antireflection coating graphite boat for deposit personally experiences sth. Part of the body and sets up in the internal cooling platform in cooling room including cooling off room the cooling platform on be equipped with the air exit, this air exit links to each other with cooling blower in the cooling platform, and treats that the refrigerated graphite boat is located the cooling platform directly over the both sides wall of the cooling room body be equipped with a set of first thermantidote, the air exit of two first thermantidotes faces toward air exhaust in the both sides of graphite boat. Through using the utility model discloses a cooling room can effectively cool off the graphite boat is whole, can only cool off the graphite boat part in having overcome prior art, cools off slower not enoughly, has improved cooling speed greatly.
Description
Technical field
The utility model belongs to manufacture of solar cells equipment technical field, more particularly, relates to a kind of cooling room of solar battery antireflective film deposition graphite boat.
Background technology
Along with the worsening shortages of the non-renewable energy resources such as oil, natural gas, the exploitation of the regenerative resources such as solar energy, wind energy, tidal energy, utilization more and more receive the concern of domestic and international researcher.Wherein, solar energy power generating with its without exhausted dangerous, pollution-free, not by resource distribution region restriction, can generate electricity nearby in electricity consumption place, energy quality is high, user is acceptant emotion, obtain the advantages such as the time of energy cost short and electric power system reliable operation has won good market prospects, China's solar-energy photo-voltaic cell production also enters the epoch of high speed development.
Usually need to use graphite boat to carry out silicon nitride anti-reflection film deposition processes to the solar cell surface after the PROCESS FOR TREATMENT such as making herbs into wool and diffusion in photovoltaic cell silicon wafer production process, thus reduce the reflection of light, increase the absorption of cell against light.After antireflective coating has deposited, the temperature of graphite boat is too high, is about 400 DEG C, needs to be cooled to 35-50 DEG C, normally carries car by graphite boat and graphite boat is pushed into graphite boat cooling room, cooled by cooling blower in prior art.But owing to usually only arranging a large cooling blower in prior art immediately below graphite boat, cause cooling air wind-force relatively little, in cooling room, cooling air circulation is not smooth, the local of graphite boat can only be cooled, cooling is then difficult to difficult cooling positions such as the both sides of graphite boat, thus causes the refrigerating work procedure time longer, do not reach the effect of cooling graphite boat fast, have a strong impact on PECVD production capacity, and employee needs to stand higher temperature for a long time in operation.
As, Chinese Patent Application No.: 201320196077.1, the applying date: on 04 17th, 2013, invention and created name was: a kind of graphite boat cooling device, the graphite boat cooling device in this application case comprises framework and is arranged on the firm banking of base of frame corner; Be provided with graphite boat cooling bench in described framework, described cooling table top is provided with air outlet, and described air outlet is connected with axial flow blower, and described axial flow blower is connected with time-delay relay.This application case, by installing the cooling time that time-delay relay can control graphite boat to a certain extent in graphite boat cooling device, reduces the wastage, and improves the service efficiency of equipment.But namely the air outlet in this application case can only blow cooling to the bottom of graphite boat, air circulation is not smooth, thus causes cooling time longer.
Utility model content
1. the utility model technical problem that will solve
It is improper owing to designing that the purpose of this utility model is to overcome existing graphite boat cooling device, cooling air wind-force is less, circulate not smooth, the local of graphite boat can only be cooled, thus cause the refrigerating work procedure time longer, have a strong impact on the deficiency of PECVD production capacity, provide a kind of cooling room of solar battery antireflective film deposition graphite boat.By using graphite boat of the present utility model to cool room, the cooling effect of graphite boat can be significantly improved, cooling time is shortened greatly, improve the generation of PECVD.
2. technical scheme
For achieving the above object, the technical scheme that the utility model provides is:
The cooling room of a kind of solar battery antireflective film deposition graphite boat of the present utility model, comprise cooling room, room body and be arranged at the chill station in cooling room, room body, described chill station is provided with exhaust outlet, this exhaust outlet is connected with the cooling blower in chill station, and graphite boat to be cooled is positioned at directly over chill station, be provided with one group of first thermantidote in the two side of described room, cooling room body, the exhaust outlet of two the first thermantidotes carries out air draft facing to the both sides of described graphite boat.
Further, the air draft direction of the first described thermantidote and the angle of graphite boat sidewall are 30-60 °.
Further, the air draft direction of the first described thermantidote and the angle of graphite boat sidewall are 45 °.
Further, exhaust duct is provided with at the crown center of described room, cooling room body.
Further, the exhaust outlet in described chill station has two, is symmetricly set in the both sides, middle part of chill station respectively, and said exhaust mouth is positioned at the inner side of two boat pin of graphite boat.
Further, be provided with one group of second thermantidote in the both sides of described chill station, the second thermantidote is positioned at the outside of two exhaust outlets, and immediately below two the boat pin being positioned at graphite boat.
3. beneficial effect
The technical scheme adopting the utility model to provide, compared with prior art, has following beneficial effect:
(1) the cooling room of a kind of solar battery antireflective film deposition graphite boat of the present utility model, chill station is provided with immediately below graphite boat, chill station is provided with exhaust outlet, this exhaust outlet is connected with the cooling blower in chill station, can carry out air draft cooling by arranging of this chill station to the bottom of graphite boat.One group of first thermantidote is provided with in the two side of cooling room, room body in the utility model, the exhaust outlet of two the first thermantidotes carries out air draft facing to the both sides of described graphite boat, thus effective cooling can be carried out to the both sides of graphite boat, overcome in prior art and can only carry out Local cooling to the bottom of graphite boat, cool slower deficiency, substantially increase the cooldown rate to graphite boat, reduce cooling time, be conducive to the raising of production capacity to a certain extent.
(2) the cooling room of a kind of solar battery antireflective film deposition graphite boat of the present utility model, the air draft direction of the first thermantidote and the angle of graphite boat sidewall are 30-60 °, by being optimized design to the air draft direction of the first thermantidote, further increase the cooling effect to graphite boat sidewall, and be conducive to the discharge cooling rear hot blast.
(3) the cooling room of a kind of solar battery antireflective film deposition graphite boat of the present utility model, one group of second thermantidote is provided with in the both sides of chill station, second thermantidote is positioned at the outside of two exhaust outlets, and immediately below two the boat pin being positioned at graphite boat, by coordinating of two exhaust outlets in chill station and the second thermantidote, can avoid bottom graphite boat, there is cooling dead angle, two of graphite boat in prior art boat pin especially can be avoided cannot to obtain the problem of better cooling.
(4) the cooling room of a kind of solar battery antireflective film deposition graphite boat of the present utility model, reasonable in design, principle is simple, is convenient to promote the use of.
Accompanying drawing explanation
Fig. 1 is the structural representation in the cooling room of a kind of solar battery antireflective film deposition graphite boat of the present utility model.
Label declaration in schematic diagram:
1, room, room body is cooled; 2, the first thermantidote; 3, graphite boat; 4, the second thermantidote; 5, exhaust outlet; 6, chill station; 7, exhaust duct.
Embodiment
For understanding content of the present utility model further, now in conjunction with the accompanying drawings and embodiments the utility model is described in detail.
Embodiment 1
As shown in Figure 1, the cooling room of a kind of solar battery antireflective film deposition graphite boat of the present embodiment, the chill station 6 comprising cooling room, room body 1 and be arranged in cooling room, room body 1, chill station 6 is provided with exhaust outlet 5, this exhaust outlet 5 is connected with the cooling blower in chill station 6, and graphite boat 3 to be cooled is placed in directly over chill station 6 by graphite boat go-cart.Exhaust outlet 5 in the present embodiment in chill station 6 has two, be symmetricly set in the both sides, middle part of chill station 6 respectively, and said exhaust mouth 5 is positioned at the inner side of two boat pin of graphite boat 3, thus air draft cooling can be carried out to the bottom of graphite boat 3, aborning, in chill station 6, the number of exhaust outlet 5 also can be determined according to actual needs.One group of first thermantidote 2 is arranged with in the two side of cooling room, room body 1 in the present embodiment, the exhaust outlet of two the first thermantidotes 2 carries out air draft facing to the both sides of graphite boat 3, and the angle of the air draft direction of the first thermantidote 2 and graphite boat 3 sidewall can be set to 30-60 ° according to actual needs, in the present embodiment, the air draft direction of the first thermantidote 2 and the angle of graphite boat 3 sidewall are 45 °, by the setting of one group of first thermantidote 2, and design is optimized to its air draft direction, thus effective cooling can be carried out to the both sides of graphite boat 3, overcome in prior art and can only carry out Local cooling to the bottom of graphite boat 3, cool slower deficiency, substantially increase the cooldown rate to graphite boat 3, shorten cooling time, be conducive to the raising of production capacity to a certain extent.One group of second thermantidote 4 is also provided with in the both sides of chill station 6, second thermantidote 4 is positioned at the outside of two exhaust outlets 5, and immediately below two the boat pin being positioned at graphite boat 3, effective cooling can be carried out to the boat pin of graphite boat 3 by arranging of the second thermantidote 4, by cooperatively interacting of two exhaust outlets 5 immediately below one group of second thermantidote 4 and graphite boat 3 and one group of first thermantidote 2, can avoid there is cooling dead angle, ensure that whole graphite boat 3 can obtain effective cooling, further increase cooldown rate.Exhaust duct 7 is provided with at the crown center of room, above-mentioned cooling room body 1, the hot-air produced after cooling graphite boat 3 in room, cooling room body 1 can be made to discharge cooling room, room body 1 by arranging of exhaust duct 7, be convenient to the circulation of air-flow, thus contribute to cooling graphite boat 3.
Schematically above be described the utility model and execution mode thereof, this description does not have restricted, and also just one of the execution mode of the present utility model shown in accompanying drawing, actual structure is not limited thereto.So, if those of ordinary skill in the art enlightens by it, when not departing from the utility model and creating aim, design the frame mode similar to this technical scheme and embodiment without creationary, protection range of the present utility model all should be belonged to.
Claims (6)
1. the cooling room of a solar battery antireflective film deposition graphite boat, the chill station (6) comprising cooling room, room body (1) and be arranged in cooling room, room body (1), described chill station (6) is provided with exhaust outlet (5), this exhaust outlet (5) is connected with the cooling blower in chill station (6), and graphite boat to be cooled (3) is positioned at directly over chill station (6), it is characterized in that: be arranged with one group of first thermantidote (2) in the two side in described room, cooling room body (1), the exhaust outlet of two the first thermantidotes (2) carries out air draft facing to the both sides of described graphite boat (3).
2. the cooling room of a kind of solar battery antireflective film deposition graphite boat according to claim 1, is characterized in that: the air draft direction of described the first thermantidote (2) and the angle of graphite boat (3) sidewall are 30-60 °.
3. the cooling room of a kind of solar battery antireflective film deposition graphite boat according to claim 2, is characterized in that: the air draft direction of described the first thermantidote (2) and the angle of graphite boat (3) sidewall are 45 °.
4. the cooling room of a kind of solar battery antireflective film deposition graphite boat according to any one of claim 1-3, is characterized in that: be provided with exhaust duct (7) at the crown center in described room, cooling room body (1).
5. the cooling room of a kind of solar battery antireflective film deposition graphite boat according to any one of claim 1-3, it is characterized in that: the exhaust outlet (5) in described chill station (6) has two, be symmetricly set in the both sides, middle part of chill station (6) respectively, and said exhaust mouth (5) is positioned at the inner side of two boat pin of graphite boat (3).
6. the cooling room of a kind of solar battery antireflective film deposition graphite boat according to claim 5, it is characterized in that: be provided with one group of second thermantidote (4) in the both sides of described chill station (6), second thermantidote (4) is positioned at the outside of two exhaust outlets (5), and immediately below two the boat pin being positioned at graphite boat (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521106800.8U CN205231090U (en) | 2015-12-25 | 2015-12-25 | Cooling room of solar cell antireflection coating graphite boat for deposit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521106800.8U CN205231090U (en) | 2015-12-25 | 2015-12-25 | Cooling room of solar cell antireflection coating graphite boat for deposit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205231090U true CN205231090U (en) | 2016-05-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521106800.8U Expired - Fee Related CN205231090U (en) | 2015-12-25 | 2015-12-25 | Cooling room of solar cell antireflection coating graphite boat for deposit |
Country Status (1)
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| CN (1) | CN205231090U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109811330A (en) * | 2019-03-18 | 2019-05-28 | 通威太阳能（成都）有限公司 | A kind of graphite boat air cooling system based on tubular type PECVD |
-
2015
- 2015-12-25 CN CN201521106800.8U patent/CN205231090U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109811330A (en) * | 2019-03-18 | 2019-05-28 | 通威太阳能（成都）有限公司 | A kind of graphite boat air cooling system based on tubular type PECVD |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 243000, Anhui, Ma'anshan Ma'anshan industrial transfer Demonstration Industry Park, Taicang Road, No. 1033 Patentee after: ANHUI YINXIN NEW ENERGY TECHNOLOGY CO., LTD. Address before: 243000, Anhui, Ma'anshan Ma'anshan industrial transfer Demonstration Industry Park, Taicang Road, No. 1033 Patentee before: ANHUI YINYANG PHOTOVOLTAIC TECHNOLOGY CO., LTD. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160511 Termination date: 20181225 |
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| CF01 | Termination of patent right due to non-payment of annual fee |