CN205175585U - A flexible electron skin for measuring contact force - Google Patents
A flexible electron skin for measuring contact force Download PDFInfo
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- CN205175585U CN205175585U CN201520966018.7U CN201520966018U CN205175585U CN 205175585 U CN205175585 U CN 205175585U CN 201520966018 U CN201520966018 U CN 201520966018U CN 205175585 U CN205175585 U CN 205175585U
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- contact
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- electronic skin
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- measuring
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Abstract
The utility model discloses a flexible electron skin for measuring contact force, this flexibility electron skin includes electrode layer, middle sensing layer and bottom electrode layer, wherein, going up the electrode layer and going up electrode and a plurality of contact including the flexibility, each contact sets up the upper surface of electrode in the flexibility, middle sensing layer includes metal film, porous PDMS membrane, set up at the epimembranal a plurality of pressure sensing units of PDMS metal film under and, porous PDMS membrane and pressure sensing unit set up go up between metal film and the lower metal film, the upper surface on bottom electrode layer is provided with flexible bottom electrode. The utility model discloses can flexible electron skin not only has high pliability and elasticity, but also has the contact force measurement function than high sensitivity.
Description
Technical field
The utility model relates to field of biosensors, particularly relates to a kind of flexible electronic skin for measuring contact.
Background technology
The sensor-based system of a kind of integrated flexible extensible that electronic skin is apish skin and designs, the information such as contact and temperature is passed to brain by skin, and ambient signal is converted into electric signal transmission to treating apparatus by electronic skin.Electronic skin has huge application demand in fields such as robot, artificial limb manufacture, wearable medical real-time watch devices.At present, what electronic skin was mainly studied has two aspect sensings, and one is tactile pressure sensing, is temperature sensing on the other hand.In tactile pressure sensing, mainly monitor the shape of operand, size, hardness and with the physical propertys such as the contact of operand.But current electronic skin research & design faces many challenges, such as, existing electronic skin can not take into account the difficult problems such as high soft elasticity and contact measurement function, simultaneously complex manufacturing technology, is difficult to form ripe application.Therefore, be necessary to provide a kind of structure simple and the flexible electronic skin of contact can be measured.
Utility model content
Fundamental purpose of the present utility model is to provide a kind of flexible electronic skin for measuring contact, is intended to solve the problem that existing electronic skin can not take into account high soft elasticity and contact measurement function.
For achieving the above object, the utility model provides a kind of flexible electronic skin for measuring contact, comprise upper electrode layer, middle detector layer and lower electrode layer, wherein, described upper electrode layer comprises flexible top electrode and multiple contact, each contact is arranged on the upper surface of described flexible top electrode, described middle detector layer comprises metal film, porous PDMS film, be arranged on the multiple pressure sensitive unit on PDMS film and lower metal film, described porous PDMS film and pressure sensitive unit are arranged between described upper metal film and lower metal film, the upper surface of described lower electrode layer is provided with flexible bottom electrode.
Preferably, described pressure sensitive unit is made up of metallized pressure drag disk, the body surface pressure that the contact for sensing each correspondence is collected.
Preferably, each pressure sensitive unit is separated to reduce the crosstalk between each pressure sensitive unit by described porous PDMS film.
Preferably, described upper electrode layer, all connected by flexible resilient wire between middle detector layer and lower electrode layer.
Preferably, described flexible resilient wire adopts nano silver wire AgNWs material to be made.
Preferably, described flexible top electrode and flexible bottom electrode all adopt nano silver wire AgNWs material to be made.
Preferably, described upper electrode layer and lower electrode layer all adopt PDMS material to make, and thickness is 0.25mm.
Preferably, described contact is arranged on the upper electrode layer that contacts with body surface, and wherein, the setting position of described contact is with the setting position one_to_one corresponding of described pressure sensitive unit and mutually mate.
Preferably, described contact adopts PDMS material to be made into hemisphere jut shape, for collecting the pressure of contact body surface and being delivered to corresponding pressure sensitive unit.
Preferably, described upper metal film and lower metal film all adopt metal A u material to be made by electron beam evaporation plating and magnetron sputtering, and thickness is 30nm to 50nm.
Compared to prior art, the composite conducting material that flexible electronic skin for measuring contact described in the utility model utilizes nano material nano silver wire and PDMS to be formed is as flexible wire and electrode, and the piezoresistive principles based on compliant conductive rubber achieves the flexible electronic skin with contact measurement function.Base material PDMS due to electronic skin has high soft elasticity, adopts the structure of how empty PDMS simultaneously, makes electronic skin not only have high-flexibility and elasticity, but also has the contact measurement function of higher sensitivity.
Accompanying drawing explanation
Fig. 1 is that the utility model is for measuring the structural blast figure of the flexible electronic skin preferred embodiment of contact;
Fig. 2 is that the utility model is for measuring the structural section figure of the flexible electronic skin preferred embodiment of contact;
Fig. 3 be the utility model for measure contact flexible electronic skin in the principle of work schematic diagram of sensing unit.
The realization of the utility model object, functional characteristics and advantage will in conjunction with the embodiments, are described further with reference to accompanying drawing.
Embodiment
For further setting forth the utility model for the technological means reaching above-mentioned purpose and take and effect, below in conjunction with accompanying drawing and preferred embodiment, embodiment of the present utility model, structure, feature and effect thereof are described in detail.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
As shown in Figure 1, Fig. 1 is that the utility model is for measuring the structural blast figure of the flexible electronic skin preferred embodiment of contact.In the present embodiment, the described flexible electronic skin for measuring contact comprises upper electrode layer 1, middle detector layer 2 and lower electrode layer 3 from outside to inside successively.Described upper electrode layer 1, middle detector layer 2 and lower electrode layer 3 all adopt one to form as substrate fabrication based on macromolecular material dimethyl silicone polymer (PDMS).PDMS is a kind of the macromolecule organic silicon compound, has nontoxic, hydrophobicity and water proofing property, inert substance, non-flammable, transparent and characteristics such as structure high resiliency.Described upper electrode layer 1, middle detector layer 2 and lower electrode layer 3 all connect and compose the entirety of electronic skin by flexible resilient wire 4 (schematic construction of a flexible resilient wire 4 as local is only shown in Fig. 1).Described flexible resilient wire 4 adopts a kind of material based on nano silver wire (AgNWs) to be made.In the present embodiment, the size of described electronic skin can be designed to arbitrary size size according to the actual requirements, such as, be preferably 60mm × 50mm × 1mm.
Shown in figure 2, Fig. 2 is that the utility model is for measuring the structural section figure of the flexible electronic skin preferred embodiment of contact.In the present embodiment, described upper electrode layer 1 comprises flexible top electrode 11 and multiple contact 12, and each contact 12 is arranged on the upper surface of described flexible top electrode 11.Described middle detector layer 2 comprises metal film 20, porous PDMS film 21, is arranged on multiple pressure sensitive units 22 on PDMS film 21 and lower metal film 23.Described porous PDMS film 21 and pressure sensitive unit 22 are arranged between metal film 20 and lower metal film 23.The upper surface of described lower electrode layer 3 is provided with flexible bottom electrode 31.
Described upper electrode layer 1 adopts PDMS material as substrate, described flexible top electrode 11 and each contact 12 are all arranged on the upper surface of described upper electrode layer 1, the thickness of described upper electrode layer 1 is preferably 0.25mm, greatly improves flexibility and the elasticity of electronic skin.Meanwhile, the ultralow thickness benefits of described upper electrode layer 1 is in the space pressure resolution improving electronic skin.Described flexible top electrode 11 adopts the nano silver wire AgNWs based on a kind of nano material to be that material is made.
Described contact 12 is distributed in electronic skin easily and the body surface of external contact, and the setting position of described contact 12 is with the setting position one_to_one corresponding of described pressure sensitive unit 22 and mutually mate.That is, a corresponding pressure sensitive unit 22 in contact 12.Described contact 12 adopts PDMS material to be made into hemisphere jut shape, to contact with the body surface of skin better.Each contact 12 is for collecting the pressure of contact body surface and being delivered to each self-corresponding pressure sensitive unit 22.The present embodiment decreases the relative sliding between flexible top electrode 11 and upper metal film 20 in the contact 12 that the outside surface of upper electrode layer 1 is arranged, and reduces the skin abrasion of surface of contact.
Described upper metal film 20 mainly adopts metal A u material to be made by electron beam evaporation plating and magnetron sputtering, thickness is preferably 30nm to 50nm, adopts nanometer grade thickness and metal A u to have good flexibility, ductility etc. and makes its flexibility that can not affect electronic skin and elasticity.Upper metal film 20 can play the effect of solid lubrication, reduces the wearing and tearing between flexible top electrode 11 and pressure sensitive unit 22 surface of contact, can reduce the contact resistance between flexible top electrode 11 and pressure sensitive unit 22 simultaneously.The two ends of pressure sensitive unit 22 cover the upper metal film 20 of 30nm, due to electronic skin stretch time, the deformation of middle detector layer 2 is all absorbed by porous PDMS film 21, be stretched with lower metal film 23 destroy so avoid metal film 20, even if when electronic skin extended state, also the integrality of metal film 20 and lower metal film 23 be can ensure, thus pliability and the elasticity of electronic skin effectively ensured.
Each pressure sensitive unit 22 is separated to reduce the crosstalk between each pressure sensitive unit 22 by described porous PDMS film 21, add pliability and the elasticity of middle detector layer 2, absorb deformation when electronic skin stretches, eliminate the deformation stretching and pressure sensitive unit 22 is produced.Make on the one hand the measurement that electronic skin can realize for contact in a stretched state equally, on the other hand, can ensure that the pressure drag disk in pressure sensitive unit 22 avoids the destruction that is stretched, thus make described flexible electronic skin have reliable body surface contact measurement function.
Each pressure sensitive unit 22 is made up of metallized pressure drag disk, the body surface pressure that the contact 12 for sensing each correspondence is collected, thus makes flexible electronic skin described in the utility model have the function measuring body surface contact.
Described lower electrode layer 3 also adopts PDMS material as substrate, and described flexible bottom electrode 31 is arranged on the upper surface of described lower electrode layer 3, and the thickness of described lower electrode layer 3 is preferably 0.25mm, greatly improves flexibility and the elasticity of electronic skin.Meanwhile, the ultralow thickness benefits of described lower electrode layer 3 is in the space pressure resolution improving electronic skin.It is that material is made that described flexible bottom electrode 31 all adopts based on nano silver wire AgNWs.
As shown in Figure 3, Fig. 3 be the utility model for measure contact flexible electronic skin in the principle of work schematic diagram of sensing unit.
Shown in composition graphs 2, described pressure sensitive unit 22 is arranged on porous PDMS film 21, this porous PDMS film 21 is a kind of pressure drag rubber, it has good mechanical property, the effect of external force not only can change the formalness of porous PDMS film 21, also make conductive filler spacing wherein change simultaneously, thus cause the resistance R of porous PDMS film 21 to convert.As shown in Figure 3, when the contact 12 of electronic skin collects pressure and will be sent to pressure sensitive unit 22, while causing the pressure drag disk deformation in pressure sensitive unit 22, have also been changed the tie point number that distance between its flexible top electrode 11 with flexible bottom electrode 31 and flexible resilient wire 4 are connected metal film 20 and lower metal film 23, thus change the physical parameters such as the resistivity of porous PDMS film 21, cause the change of the resistance value R of pressure sensitive unit 22, thus the measurement of the touch pressure that achieves a butt joint.
Flexible electronic skin for measuring contact described in the utility model is by utilizing the composite conducting material of nano material nano silver wire and PDMS formation as flexible wire and electrode, and the piezoresistive principles based on compliant conductive rubber achieves the flexible electronic skin with contact measurement function.Base material PDMS due to electronic skin has high soft elasticity, adopts the structure of how empty PDMS simultaneously, makes electronic skin not only have high-flexibility and elasticity, but also has the contact measurement function of higher sensitivity.
These are only preferred embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model instructions and accompanying drawing content to do equivalent structure or equivalent function conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (10)
1. one kind for measuring the flexible electronic skin of contact, it is characterized in that, described flexible electronic skin comprises upper electrode layer, middle detector layer and lower electrode layer, wherein, described upper electrode layer comprises flexible top electrode and multiple contact, each contact is arranged on the upper surface of described flexible top electrode, described middle detector layer comprises metal film, porous PDMS film, be arranged on the multiple pressure sensitive unit on PDMS film and lower metal film, described porous PDMS film and pressure sensitive unit are arranged between described upper metal film and lower metal film, the upper surface of described lower electrode layer is provided with flexible bottom electrode.
2. as claimed in claim 1 for measuring the flexible electronic skin of contact, it is characterized in that, described pressure sensitive unit is made up of metallized pressure drag disk, the body surface pressure that the contact for sensing each correspondence is collected.
3. as claimed in claim 2 for measuring the flexible electronic skin of contact, it is characterized in that, each pressure sensitive unit is separated to reduce the crosstalk between each pressure sensitive unit by described porous PDMS film.
4. the flexible electronic skin for measuring contact as described in any one of claims 1 to 3, is characterized in that, described upper electrode layer, is all connected by flexible resilient wire between middle detector layer and lower electrode layer.
5. as claimed in claim 4 for measuring the flexible electronic skin of contact, it is characterized in that, described flexible resilient wire adopts nano silver wire AgNWs material to be made.
6. as claimed in claim 4 for measuring the flexible electronic skin of contact, it is characterized in that, described flexible top electrode and flexible bottom electrode all adopt nano silver wire AgNWs material to be made.
7. as claimed in claim 4 for measuring the flexible electronic skin of contact, it is characterized in that, described upper electrode layer and lower electrode layer all adopt PDMS material to make, and thickness is 0.25mm.
8. as claimed in claim 1 for measuring the flexible electronic skin of contact, it is characterized in that, described contact is arranged on the upper electrode layer that contacts with body surface, and wherein, the setting position of described contact is with the setting position one_to_one corresponding of described pressure sensitive unit and mutually mate.
9. as claimed in claim 8 for measuring the flexible electronic skin of contact, it is characterized in that, described contact adopts PDMS material to be made into hemisphere jut shape, for collecting the pressure of contact body surface and being delivered to corresponding pressure sensitive unit.
10. as claimed in claim 1 for measuring the flexible electronic skin of contact, it is characterized in that, described upper metal film and lower metal film all adopt metal A u material to be made by electron beam evaporation plating and magnetron sputtering, and thickness is 30nm to 50nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520966018.7U CN205175585U (en) | 2015-11-28 | 2015-11-28 | A flexible electron skin for measuring contact force |
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| CN201520966018.7U CN205175585U (en) | 2015-11-28 | 2015-11-28 | A flexible electron skin for measuring contact force |
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| CN205175585U true CN205175585U (en) | 2016-04-20 |
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| CN201520966018.7U Expired - Fee Related CN205175585U (en) | 2015-11-28 | 2015-11-28 | A flexible electron skin for measuring contact force |
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Cited By (20)
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| CN105738012A (en) * | 2016-04-27 | 2016-07-06 | 扬州大学 | Artificial skin flexible tactile sensor measurement device |
| CN106092388A (en) * | 2016-06-21 | 2016-11-09 | 合肥联宝信息技术有限公司 | A kind of pressure sensitive material |
| CN106352927A (en) * | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| CN106370327A (en) * | 2016-10-08 | 2017-02-01 | 中国科学院深圳先进技术研究院 | Flexible pressure sensor and manufacturing method thereof |
| CN106441073A (en) * | 2016-09-05 | 2017-02-22 | 西安交通大学 | Dielectric flexible sensor for big deformation and touch pressure measurement |
| CN106419924A (en) * | 2016-11-09 | 2017-02-22 | 上海溢宇服饰有限公司 | Method for chest circumference determination based on contact pressure measurement |
| CN107478361A (en) * | 2017-08-08 | 2017-12-15 | 华东理工大学 | A kind of micro-structural voltage sensitive sensor and preparation method thereof |
| CN107582215A (en) * | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | Artificial intelligence skin and its detection method with humiture and pressure detecting function |
| CN107582216A (en) * | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detecting pressure and temperature |
| CN109078317A (en) * | 2018-09-21 | 2018-12-25 | 浙江工业大学 | A kind of unmanned judgment system of football and its implementation |
| CN109238900A (en) * | 2018-10-19 | 2019-01-18 | 四川大学 | The metallic microscopic surface abrasion detection device and measurement method that gauge head can attach |
| CN109249422A (en) * | 2017-07-14 | 2019-01-22 | 江苏申源新材料有限公司 | A kind of flexible high-strength robot skin preparation method |
| CN109855776A (en) * | 2019-01-31 | 2019-06-07 | 京东方科技集团股份有限公司 | Pressure sensor, pressure detecting system and wearable device |
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| CN110207729A (en) * | 2019-05-08 | 2019-09-06 | 武汉飞帛丝科技有限公司 | A kind of flexible electronic skin |
| CN110556472A (en) * | 2019-08-23 | 2019-12-10 | 太原理工大学 | PDMS material-based coated pressure sensor and preparation method thereof |
| CN111035400A (en) * | 2019-12-25 | 2020-04-21 | 苏州大学附属儿童医院 | Flexible sensor for detecting skin expansion tension and use method thereof |
| CN111590641A (en) * | 2020-04-30 | 2020-08-28 | 深圳市优必选科技股份有限公司 | Electronic skin and robot |
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| CN105738012B (en) * | 2016-04-27 | 2018-06-29 | 扬州大学 | A kind of artificial skin flexible touch sensation sensor measuring device |
| CN105738012A (en) * | 2016-04-27 | 2016-07-06 | 扬州大学 | Artificial skin flexible tactile sensor measurement device |
| CN106092388A (en) * | 2016-06-21 | 2016-11-09 | 合肥联宝信息技术有限公司 | A kind of pressure sensitive material |
| CN106441073A (en) * | 2016-09-05 | 2017-02-22 | 西安交通大学 | Dielectric flexible sensor for big deformation and touch pressure measurement |
| CN106352927A (en) * | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| CN106370327A (en) * | 2016-10-08 | 2017-02-01 | 中国科学院深圳先进技术研究院 | Flexible pressure sensor and manufacturing method thereof |
| CN106419924A (en) * | 2016-11-09 | 2017-02-22 | 上海溢宇服饰有限公司 | Method for chest circumference determination based on contact pressure measurement |
| CN109249422B (en) * | 2017-07-14 | 2022-03-15 | 江苏申源新材料有限公司 | Preparation method of flexible high-strength robot skin |
| CN109249422A (en) * | 2017-07-14 | 2019-01-22 | 江苏申源新材料有限公司 | A kind of flexible high-strength robot skin preparation method |
| CN107478361A (en) * | 2017-08-08 | 2017-12-15 | 华东理工大学 | A kind of micro-structural voltage sensitive sensor and preparation method thereof |
| CN107478361B (en) * | 2017-08-08 | 2019-12-24 | 华东理工大学 | Microstructured pressure-sensitive sensor and preparation method thereof |
| CN107582216A (en) * | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detecting pressure and temperature |
| CN107582215A (en) * | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | Artificial intelligence skin and its detection method with humiture and pressure detecting function |
| WO2019119661A1 (en) * | 2017-12-22 | 2019-06-27 | 深圳光启超材料技术有限公司 | Measurement film, manufacturing method of measurement film, and method for measuring strain field of plane |
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| CN109855776A (en) * | 2019-01-31 | 2019-06-07 | 京东方科技集团股份有限公司 | Pressure sensor, pressure detecting system and wearable device |
| CN109855776B (en) * | 2019-01-31 | 2021-05-18 | 京东方科技集团股份有限公司 | Pressure sensor, pressure detection system and wearable equipment |
| CN110207729A (en) * | 2019-05-08 | 2019-09-06 | 武汉飞帛丝科技有限公司 | A kind of flexible electronic skin |
| CN110556472A (en) * | 2019-08-23 | 2019-12-10 | 太原理工大学 | PDMS material-based coated pressure sensor and preparation method thereof |
| CN111855742A (en) * | 2019-12-16 | 2020-10-30 | 西安交通大学 | Electronic skin structure for detecting damage degree of explosion to human body and detection method |
| CN111855742B (en) * | 2019-12-16 | 2021-11-19 | 西安交通大学 | Electronic skin structure for detecting damage degree of explosion to human body and detection method |
| CN111035400A (en) * | 2019-12-25 | 2020-04-21 | 苏州大学附属儿童医院 | Flexible sensor for detecting skin expansion tension and use method thereof |
| CN111590641A (en) * | 2020-04-30 | 2020-08-28 | 深圳市优必选科技股份有限公司 | Electronic skin and robot |
| CN112577644A (en) * | 2020-10-29 | 2021-03-30 | 扬州大学 | Bionic skin based on liquid core bionic cells |
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