CN205146495U - Valve and use its semiconductor tectorial membrane spraying system for gas -liquid twin -fluid atomization - Google Patents
Valve and use its semiconductor tectorial membrane spraying system for gas -liquid twin -fluid atomization Download PDFInfo
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- CN205146495U CN205146495U CN201520813568.5U CN201520813568U CN205146495U CN 205146495 U CN205146495 U CN 205146495U CN 201520813568 U CN201520813568 U CN 201520813568U CN 205146495 U CN205146495 U CN 205146495U
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- valve
- gas
- spool
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- twin
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Abstract
The utility model discloses a be applied to gas -liquid twin -fluid atomization's valve, the inlet is installed to the upper end of valve body, and the inside of valve body sets up stock solution chamber, inlet and stock solution chamber intercommunication, stock solution chamber lower extreme sets up the connecting pipe, and the connecting pipe left end has the driving gas entry, has the case in the connecting pipe, the lower extreme of case and the intercommunication that admits air, and case cavity, there is the opening at case top center, and the driving gas sprays out from central opening part, and the case has the case cover at the stock solution intracavity, and gapped between case and the case cover, the size in clearance is adjusted through the spiral trim head that is connected with the connecting pipe, and the cooperation between case cover and the case has realized unsteady cooperation. The utility model also discloses a semiconductor tectorial membrane paint finishing that uses this valve of being applied to gas -liquid twin -fluid atomization.
Description
Technical field
The utility model belongs to spraying equipment technical field, particularly relates to a kind of valve being applied to gas-liquid twin.
Background technology
The valve design of common gas-liquid twin, mixing chamber and mixed gas-liquid two fluid with air inlet, inlet, gas and liquid spray from aperture, form mist.This kind of design can be more efficient by the atomization of liquid, but to the less demanding occasion of atomizing particle, such as agricultural spray, sprinkling irrigation, the occasions such as the spraying of industrial paints.In the application of semiconductor product surface coating, owing to requiring height, usually in several application scenario to up to a hundred microns, such spraying equipment just can not meet its fine manipulation to spraying granule, the requirement of the uniformity.And in the technique of semiconductor overlay film spraying, what use often is that pneumatic micro-spraying and ultrasonic micro-spray are coated with technique, such explained hereafter needs to use the carrying out that the region of micro-spray head to spraying is scanned one by one to cover, ensure its high request to precision, but the mode production efficiency of lining by line scan is low, device structure is complicated, transfer member and moving component many.In the technique of these sprayings, with the PVA company of the U.S. for representative, they uses pneumatic pin type atomization valve, liquid is atomized at spout, the width of processing work can be 12mm to the maximum, be done the motion of x-y by servo motor driven valve, scanning line by line on the workpiece needing spraying, completed the most afterwards and spray all standing of a larger area workpiece, spraying cost is high.
The atomization valve used in daily industry, usually large discharge is applied to, in large-scale spraying, in the design of valve, structure is simple, usually be made up of 4 to 5 parts, spray not meticulous, tiny flow quantity can not control, spraying particle is out thicker, can not be used in the overlay film spraying of semiconductor.
Summary of the invention
The purpose of this utility model is to provide a kind of valve being applied to gas-liquid twin, be intended to solve structure on existing atomization valve design simple, spray not meticulous, tiny flow quantity can not control, spraying particle is out thicker, can not be used for the problem of the overlay film spraying of semiconductor.
The utility model realizes like this, be applied to a valve for gas-liquid twin, comprise: fine setting section header, tube connector, air inlet, valve body, spool, valve core housing, dispersing tablet, filtration washer, dispersion pipe, fog outlet, brace, liquid storage cylinder, end cap;
The inside of described valve body is provided with liquid storage cylinder, and the lower end of valve body is provided with tube connector, and the lower end of tube connector is provided with fine setting section header, and the left end of tube connector is provided with air inlet, and the inside of tube connector is provided with spool; The lower end of spool is connected with air inlet, and the valve core housing upper end on spool is connected with dispersion pipe with dispersing tablet by spring, and dispersing tablet top is provided with filtering baffle, and dispersion pipe is arranged on liquid storage cylinder inside; The top of valve body is provided with the adjustable end cap of thickness, and the passage side that dispersion pipe and valve body are formed is provided with fog outlet, and fog outlet is arranged on valve body right-hand member, and fog outlet is provided with brace.
Further, described valve body side is provided with inlet, and described inlet is connected with liquid storage cylinder.
Further, described spool and valve core housing match, and the gap of spool and valve core housing is adjustable.
Further, described spool is connected with air inlet.
Further, the top of described dispersion pipe is provided with adjustable end cap, and the distance of atomization mouth and dispersing tablet can regulate.
Further, described valve core housing is connected by spring with dispersing tablet, and valve core housing floats and is fitted in bottom liquid storage cylinder or on spool.
Further, the gas of described spool realizes two-fluid mixed at high speed at valve port and spool and valve core housing.
Further, described dispersing tablet, dispersion pipe, filters physical dispersion and atomization that catch realizes gas liquid mixture.
Another object of the utility model is that providing a kind of uses the above-mentioned atomizing generator being applied to the semiconductor overlay film paint finishing of gas-liquid twin valve.
The advantage that the utility model has and good effect are: this valve being applied to gas-liquid twin is applicable to the spraying of tiny flow quantity, the liquid particles size of ejection can regulate, the mixed proportion of two fluids of ejection can regulate, the backflow recycling of bulky grain liquid, the floating fit of valve, ensures the stability controlled.
Accompanying drawing explanation
Fig. 1 is the structural representation being applied to the valve of gas-liquid twin that the utility model embodiment provides;
In figure: 1, finely tune section header; 2, tube connector; 3, air inlet; 4, valve body; 5, inlet; 6, dispersion pipe; 7, end cap; 8, fog outlet; 9, brace; 10, washer is filtered; 11, dispersing tablet; 12, liquid storage cylinder; 13, valve core housing; 14, spool.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with embodiment, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
Below in conjunction with accompanying drawing 1 and specific embodiment, application principle of the present utility model is further described.Be applied to a valve for gas-liquid twin as shown in Figure 1, comprise: fine setting section header 1, tube connector 2, air inlet 3, valve body 4, inlet 5, spool 14, valve core housing 13, dispersing tablet 11, filtration washer 10, dispersion pipe 6, fog outlet 8, brace 9, liquid storage cylinder 12, end cap 7;
The inside of described valve body 4 is provided with liquid storage cylinder 12, and the lower end of valve body 4 is provided with tube connector 2, and the lower end of tube connector 2 is provided with fine setting section header 1, and the left end of tube connector 2 is provided with air inlet 3, and the inside of tube connector 2 is provided with spool 14; The lower end of spool 14 is connected with air inlet 3, and valve core housing 13 upper end on spool 14 is connected with dispersion pipe with dispersing tablet 11 by spring, and dispersing tablet 11 top is provided with filtering baffle 10, and it is inner that dispersion pipe 6 is arranged on liquid storage cylinder 12; Dispersion pipe 6 is also filter simultaneously, and the top of valve body 4 is provided with the adjustable end cap of thickness 7, and the passage side that dispersion pipe 6 and valve body 4 are formed is provided with fog outlet 8, and fog outlet 8 is arranged on valve body 4 right-hand member, and fog outlet 8 is provided with brace 9.
Described valve body 4 side is provided with inlet 5, and described inlet is connected with liquid storage cylinder.
Described spool 14 and valve core housing 13 match, and the gap of spool and valve core housing is adjustable.
Described spool 14 is connected with air inlet.
The top of described dispersion pipe 6 is provided with adjustable end cap 7, and the distance of atomization mouth 8 and dispersing tablet 11 can regulate.
Described valve core housing 13 is connected by spring with dispersing tablet 11, and valve core housing 13 floats and is fitted in bottom liquid storage cylinder 12 or on spool 14.
The utility model also provides a kind of semiconductor overlay film paint finishing being applied to gas-liquid twin valve.
The valve installation being applied to gas-liquid twin is being gone out on mist unit, can be stable required atomizing particle is provided.It is inner that liquid enters into liquid storage cylinder 12 by inlet 5, gas is entered by air inlet 3, the flowing of gas forms negative pressure and drives the liquid in reservoir to be thus lifted to gas outlet and the gas and vapor permeation of spool via the gap between spool and valve core housing, the amount of flow of liquid adjusts its space of flowing by fine setting section header and controls the amount of flowing, at the head position of spool, the two mixing, now the flow velocity of gas is accelerated suddenly, liquid is torn and becomes fragment, secondary impact through dispersing tablet forms micron-sized particle, the droplet particles meeting dimensional requirement rises and enters fog output tube under the effect of dispersion pipe in turbulent gases.Reservoir is got back in the polymerization that then declines of the liquid of large-size.Venturi principle is utilized gas and liquid to be blended in the mixing of spool exit, mixture impacts dispersing tablet with velocity of sound and reaches aerosol dispersion, behind range of atomization, droplet filters through dispersion pipe, filtration washer 10, enter outlet conduit by atomization turbulent flow mouth again, the liquid be filtered turns back to the atomization participating in next round in liquid storage cylinder 12.Can reach atomization speed 0 ~ 2ml/min adjustable, the particle 0 ~ 20um of atomization is adjustable.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (8)
1. one kind is applied to the valve of gas-liquid twin, it is characterized in that, this valve being applied to gas-liquid twin comprises: fine setting section header, tube connector, air inlet, valve body, spool, valve core housing, dispersing tablet, filtering baffle, dispersion pipe, fog outlet, brace, liquid storage cylinder, end cap;
The inside of described valve body is provided with liquid storage cylinder, and the lower end of valve body is provided with tube connector, and the lower end of tube connector is provided with fine setting section header, and the left end of tube connector is provided with air inlet, and the inside of tube connector is provided with spool; The lower end of spool is connected with air inlet, and the valve core housing upper end on spool is connected with dispersion pipe with dispersing tablet by spring, and dispersing tablet top is provided with filtering baffle, and dispersion pipe is arranged on liquid storage cylinder inside; The top of valve body is provided with the adjustable end cap of thickness, and the passage side that dispersion pipe and valve body are formed is provided with fog outlet, and fog outlet is arranged on valve body right-hand member, and fog outlet is provided with brace.
2. be applied to the valve of gas-liquid twin as claimed in claim 1, it is characterized in that, described valve body side is provided with inlet, and described inlet is connected with liquid storage cylinder.
3. be applied to the valve of gas-liquid twin as claimed in claim 1, it is characterized in that, described spool and valve core housing match, and the gap of spool and valve core housing is adjustable.
4. be applied to the valve of gas-liquid twin as claimed in claim 1, it is characterized in that, described spool is connected with air inlet.
5. be applied to the valve of gas-liquid twin as claimed in claim 1, it is characterized in that, the top of described dispersion pipe is provided with adjustable end cap, and the distance of atomization mouth and dispersing tablet is adjustable.
6. be applied to the valve of gas-liquid twin as claimed in claim 1, it is characterized in that, described valve core housing is connected by spring with dispersing tablet, and valve core housing floats and is fitted in bottom liquid storage cylinder or on spool.
7. be applied to the valve of gas-liquid twin as claimed in claim 1, it is characterized in that, the gas of described spool realizes two-fluid mixed at high speed at valve port and spool and valve core housing.
8. one kind uses the semiconductor overlay film paint finishing of the valve being applied to gas-liquid twin described in claim 1-4 any one.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520813568.5U CN205146495U (en) | 2015-10-21 | 2015-10-21 | Valve and use its semiconductor tectorial membrane spraying system for gas -liquid twin -fluid atomization |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520813568.5U CN205146495U (en) | 2015-10-21 | 2015-10-21 | Valve and use its semiconductor tectorial membrane spraying system for gas -liquid twin -fluid atomization |
Publications (1)
Publication Number | Publication Date |
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CN205146495U true CN205146495U (en) | 2016-04-13 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201520813568.5U Withdrawn - After Issue CN205146495U (en) | 2015-10-21 | 2015-10-21 | Valve and use its semiconductor tectorial membrane spraying system for gas -liquid twin -fluid atomization |
Country Status (1)
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CN (1) | CN205146495U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105195353A (en) * | 2015-10-21 | 2015-12-30 | 苏州纽圣特电子有限公司 | Valve applied to gas-liquid two-fluid atomization |
-
2015
- 2015-10-21 CN CN201520813568.5U patent/CN205146495U/en not_active Withdrawn - After Issue
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105195353A (en) * | 2015-10-21 | 2015-12-30 | 苏州纽圣特电子有限公司 | Valve applied to gas-liquid two-fluid atomization |
CN105195353B (en) * | 2015-10-21 | 2018-01-19 | 苏州工业园区新仙特微电子有限公司 | A kind of valve applied to gas-liquid twin |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20160413 Effective date of abandoning: 20180119 |