CN205146092U - Simple and convenient colloidal sol equipment - Google Patents

Simple and convenient colloidal sol equipment Download PDF

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Publication number
CN205146092U
CN205146092U CN201520916270.7U CN201520916270U CN205146092U CN 205146092 U CN205146092 U CN 205146092U CN 201520916270 U CN201520916270 U CN 201520916270U CN 205146092 U CN205146092 U CN 205146092U
Authority
CN
China
Prior art keywords
equipment
utility
model
motor
colloidal sol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520916270.7U
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Chinese (zh)
Inventor
刘运
向容
孙越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WEIFANG XINGTAIKE MICROELECTRONIC MATERIALS CO Ltd
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WEIFANG XINGTAIKE MICROELECTRONIC MATERIALS CO Ltd
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Filing date
Publication date
Application filed by WEIFANG XINGTAIKE MICROELECTRONIC MATERIALS CO Ltd filed Critical WEIFANG XINGTAIKE MICROELECTRONIC MATERIALS CO Ltd
Priority to CN201520916270.7U priority Critical patent/CN205146092U/en
Application granted granted Critical
Publication of CN205146092U publication Critical patent/CN205146092U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a simple and convenient colloidal sol equipment, including support (1), the side of support (1) is equipped with motor (2), is fixed with carousel (3) on the rotor of motor (2), and carousel (3) are gone up the symmetry and are installed a plurality of thread gluings (4), and the plastic bottle of joining in marriage after gluing is tied up in thread gluing (4). The utility model discloses solid constituent dissolved fast during the messenger glued, and the component misce bene has improved research and development efficiency, had solved above -mentioned photosensitive resist because of mixing the extravagant problem of the resource energy such as inhomogeneous research and development inefficiency that leads to and reation kettle equipment. The R&D cycle of photosensitive resist shortens, and efficiency improves, and the raw materials that significantly reduces is extravagant, improves the uniformity of mixture. This equipment has reduced the waste of equipment and raw materials simultaneously.

Description

Easy colloidal sol equipment
Technical field
The utility model relates to a kind of easy colloidal sol equipment.
Background technology
Photoresist is a kind of critical material in integrated circuit fabrication process, needs the constituent to glue in photoresist research and development and production process, as even in mixed dissolutions such as resin, crosslinking agent, solvent and additives.Because the difference of arbitrary constituent proportional quantity all can produce larger impact to the overall performance of glue, therefore usually need a large amount of photoresist sample of preparation to carry out experiment test, after the glue component proportion obtaining desired result, then carry out amplification test and produce.
Because photoresist raw material mostly are import, cost is higher, and it is high to the requirement of moisture and illumination, and for reducing the waste of raw material, photoresist sample is generally configured at gold-tinted lower seal at 20ml, 50ml, 100ml, 500ml brown bottle or vial.The production that current industry carries out photoresist is mainly undertaken by reactor, but the minimum amount of agitation due to reactor is 1000 grams, when proportional quantity is at 1 gram to 500 grams, photoresist composition fails fully effectively to mix in short-term, be unfavorable for lithography experiments, and waste equipment and other resources, reduce photoresist efficiency of research and development simultaneously, affect research and development process.
The unit of current domestic specialty research and development photoresist is little, rarely has report to have the dissolving method or equipment that are specifically designed to photoresist sample.When photoresist sample is prepared in laboratory, then the following conventional solid-liquid of main employing or liquid liquid mixing method.1. manually rock sample bottle, make raw material dissolve as far as possible and mix.This method is consuming time requires great effort again, and treating capacity is little, and efficiency is very low.2. ultrasonic pot thermostatic ultrasonic is utilized to mix.The mixing principle of ultrasonic pot mainly makes molecular solids be distributed in surrounding medium, and time ultrasonic, General Requirements glue amount is few, and adhesiveness is little.When glue amount is greater than 100 grams or the viscosity of glue is higher, ultrasonic mixing will become difficulty, and photoresist cannot fully mix.Adopt in addition during ultrasonic pot and should be noted that the water surface in ultrasonic pot should not exceed sample bottle, keep the conditions such as water temperature is constant, therefore the ultrasonic dissolution ability of ultrasonic pot is also very limited.
The method of existing photoresist sample dissolution or equipment, time and effort consuming, treating capacity are little, treatment effeciency is low, poor operability.Due to when photoresist research and development and small lot batch manufacture, the inventory of needs is little, is generally less than 500 grams.If utilize reactor to produce mixing photoresist, not only inventory does not reach the minimum combined amount of reactor, is unfavorable for Homogeneous phase mixing, and the method also wastes device resource and the energy, and slow down research and development and small lot batch manufacture speed, lowers efficiency.
Utility model content
The purpose of this utility model is a kind of easy mixed dissolution equipment of photoresist, to solve because sample dissolution mixing is uneven in photoresist R&D process, and causes the problem of the energy resource wastes such as efficiency of research and development is low, material equipment.
To achieve these goals, the utility model adopts following technical scheme.
In order to improve the efficiency of research and development of photoresist, the utility model provides simple, the easy to operate photoresist mixed dissolution equipment of a kind of structure.This utility model equipment solves because sample size is little in photoresist R&D process, can not utilize thermostatic ultrasonic pot and reactor device fabrication, and the problem such as sample mix is uneven, improves photoresist efficiency of research and development.
Easy colloidal sol equipment, comprises support, and the side of support is provided with motor, and the rotor of motor is fixed with rotating disk, rotating disk is symmetrically installed with some thread gluings, joins the plastic bottle after glue and ties up in thread gluing.
As further improvement of the utility model, described motor is provided with speed setting unit.
Thread gluing is screwed on rotating disk.
When joining glue amount and being less than or equal to 1000g, being tied up in thread gluing join the plastic bottle after glue, for ensureing that rotating disk normally rotates, need symmetrical bondage, and the plastic bottle mass difference of symmetrical bondage being not more than 100g.Experimentally progress and photoresist need incorporation time and complexity, use speed setting unit rotary speed is regulated.
The beneficial effects of the utility model are, to make in glue dissolve solid components quick, component mixes, and improves efficiency of research and development, solve above-mentioned photoresist because mixing the problem of the energy resource wastes such as the low and reactor equipment of the uneven efficiency of research and development caused.The R&D cycle of photoresist shortens, and efficiency improves, and greatly reduces wastage of material, improves uniformity of mixture.The device reduces the waste of equipment and raw material simultaneously.
Certainly, implement arbitrary product of the present utility model might not need to reach above-described all advantages simultaneously.
Accompanying drawing explanation
Fig. 1 is the utility model overall structure schematic diagram.
Wherein, 1, support; 2, motor; 3, rotating disk; 4, thread gluing.
Detailed description of the invention
Be clearly and completely described the technical solution of the utility model below in conjunction with accompanying drawing, obviously, described embodiment is the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
In description of the present utility model, it should be noted that, orientation or the position relationship of the instruction such as term " " center ", " on ", D score, "left", "right", " vertically ", " level ", " interior ", " outward " they be based on orientation shown in the drawings or position relationship; be only the utility model and simplified characterization for convenience of description; instead of instruction or imply the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second ", " the 3rd " only for describing object, and can not be interpreted as instruction or hint relative importance.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition the concrete meaning of above-mentioned term in the utility model can be understood.
As shown in Figure 1, easy colloidal sol equipment, comprises support 1, and the side of support 1 is provided with motor 2, the rotor of motor 2 is fixed with rotating disk 3, rotating disk 3 is symmetrically installed with some thread gluings 4, and join the plastic bottle after glue and tie up in thread gluing 4, motor 2 is provided with speed setting unit.
The support 1 of the present embodiment is square metal support, and motor 2 is low-power machine, and rotating disk 3 is round turntable, and thread gluing 4 is screwed on rotating disk 3.In order to make motor 2 rotating speed adjustable, motor power-supply wire connects a speed setting unit.
By reference to the accompanying drawings detailed description of the invention of the present utility model is described although above-mentioned; but the restriction not to the utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection domain of the present utility model.

Claims (3)

1. easy colloidal sol equipment, is characterized in that, comprises support (1), the side of support (1) is provided with motor (2), the rotor of motor (2) is fixed with rotating disk (3), rotating disk (3) is symmetrically installed with some thread gluings (4), join the plastic bottle after glue and tie up in thread gluing (4).
2. easy colloidal sol equipment as claimed in claim 1, is characterized in that, described motor (2) is provided with speed setting unit.
3. easy colloidal sol equipment as claimed in claim 1, is characterized in that, thread gluing (4) is screwed on rotating disk (3).
CN201520916270.7U 2015-11-17 2015-11-17 Simple and convenient colloidal sol equipment Expired - Fee Related CN205146092U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520916270.7U CN205146092U (en) 2015-11-17 2015-11-17 Simple and convenient colloidal sol equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520916270.7U CN205146092U (en) 2015-11-17 2015-11-17 Simple and convenient colloidal sol equipment

Publications (1)

Publication Number Publication Date
CN205146092U true CN205146092U (en) 2016-04-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520916270.7U Expired - Fee Related CN205146092U (en) 2015-11-17 2015-11-17 Simple and convenient colloidal sol equipment

Country Status (1)

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CN (1) CN205146092U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112305153A (en) * 2020-10-16 2021-02-02 中石化石油工程技术服务有限公司 Automatic analysis detector for bentonite content and detection method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112305153A (en) * 2020-10-16 2021-02-02 中石化石油工程技术服务有限公司 Automatic analysis detector for bentonite content and detection method thereof

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160413

Termination date: 20181117

CF01 Termination of patent right due to non-payment of annual fee