CN205035458U - Stainless steel surface ion silicizing device - Google Patents
Stainless steel surface ion silicizing device Download PDFInfo
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- CN205035458U CN205035458U CN201520574188.0U CN201520574188U CN205035458U CN 205035458 U CN205035458 U CN 205035458U CN 201520574188 U CN201520574188 U CN 201520574188U CN 205035458 U CN205035458 U CN 205035458U
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Abstract
The utility model discloses a stainless steel surface ion silicizing device, including the vacuum cavity that has extraction opening and silane gas feed, be equipped with negative pole cavity and stainless steel target in the vacuum cavity, the negative pole cavity passes through insulating material to be connected with the vacuum cavity, and the stainless steel target position is equipped with the striking needle that contacts with the stainless steel target surface in negative pole cavity top and through insulating material and cathode cavity body coupling in the vacuum cavity, and the striking needle passes through the control coil and is connected with DC power supply, the internal expert of cathode cavity has a cooling water, and the internal accuse arc permanent magnet that is equipped with of cathode cavity, accuse arc permanent magnet are arranged in behind the stainless steel target and soak at the cooling water, negative pole cavity and vacuum cavity pass through the stabilising the arc power and connect. The utility model discloses equipment is easily operated, and the coproduction temperature is lower, the less advantage of energy consumption, and can change silicizing gas flow in order to control inspersed silicone content according to the operation requirement.
Description
Technical field
The utility model relates to a kind of stainless steel surface ion siliconising device, belongs to Surface Engineering field.
Background technology
Silicon adds in metal as a kind of alloy Addition ofelements, is used for improving metal parts to the anticorrosive of seawater, acids, salt and molten metal and oxidation-resistance property, and is used for improving metallic surface hardness and wear resistance.In addition, the intermetallic compound that metal and silicon generate has unique chemistry and the performance of physics aspect, such as very high fusing point, lower resistivity, and good chemical stability etc. use at high temperature oxidation stability environment, also have antioxidant property.
Fe
3si, as the one of metal silicide, has superior high-temperature oxidation resistance, and its reason is protective oxide film Si0
2generation.In steel, add element silicon to the performance improving steel when the 1970's, scholar Hochman just proposes as wt%Cr+2wt%Si>24%, effectively can improve the antioxidant property of steel.The interpolation of silicon can effectively promote to reach corrosion resistant performance by the passive film of steel Surface Creation densification.Strauss and Grabke also points out, adds silicon and be conducive to alloy at the H of 600 DEG C in Fe-20Cr-32Ni alloy
2-24%CO-2%H
2time in 0 atmosphere, make Surface Creation Cr
20
3zone of oxidation, thus reach protected effect.Maier and Norton points out, containing when adding silicon in 410 stainless steels of 12wt%Cr, effectively can improve the high temperature oxidation resistance of material at the silicon rich oxide of Surface Creation.
Solid process siliconising is the treatment process be most widely used.Powder entrapping method is method the most general in solid state diffusion, and it is also plating method with the longest history, and this method is exactly that workpiece has been imbedded for metallic cementation powder, puts bond powders (as A1
20
3) and activator mixture (powder penetrating agent) container in then encloses container heat, activator is generally halogenide, as NH
4c1, NH
4deng.Chemical vapour deposition (chemicalvapordeposition, CVD) be utilize the material of gaseous state or steam-like in gas phase or gas-solid interface, react the technology generating solid deposited thing, this method utilizes the material of gaseous state or steam-like in gas phase or gas-solid interface, react the technology generating solid deposited thing, be actually and workpiece is placed in silicon-containing gas medium heats, realize the process that Siliciumatom infiltrates workpiece surface.But utilize chemical Vapor deposition process to have it self to be difficult to the shortcoming overcome, and as temperature of reaction is too high, higher to technology and equipment condition, and sedimentation rate is too low.
Fused salt electrolysis process refers to and adopts the salt of one or several low melting points as reaction medium, utilize reactant in fused salt, have certain solubleness, by the effect of pulsed current, make for plating ion to the plated specimen surface motion with xenogenesis electric charge, and at specimen surface deposit and spread, final formation metal or intermetallic compound coating.But because the observable index of fused salt electrodepositing silicon is higher, add cannot ensure coating quality so be far from being widely used as electrolysis aluminising.Fused salt non-electrolytic sedimentation grows up on the basis of fused salt electrolysis process.It is by selecting suitable molten salt system and siliconizing treatment processes can realize the siliconising of fused salt no power.Cardinal principle is that the active silicon atom by producing in salt bath carries out.Though this method is for conventional solid method, have that technique is simple, synthesis temperature is low, soaking time is short, the powder chemical composition of synthesis is even, crystal morphology good, thing phase purity advantages of higher, but molten-salt growth method siliconising requires that temperature is at about 1050 DEG C usually, and energy consumption is too high.Also do not see the research utilizing arc discharge method in stainless steel surface siliconising at present.
Arc discharge method applies wider a kind of technology, this technology is mainly through direct short-circuit striking, high strength of electric field is formed in the moment that contact has just been separated, strong field emission and gap breakdown can be caused like this, then vacuum arc is formed, more than the ionization level high heel of common vacuum evaporation and vacuum sputtering to the ionization level of reactant gases, can be used to ionization siliconising reactant gases, obtain the silicon ion of higher concentration.
The utility model mainly utilizes arc discharge device by silane ionization in the plasma, produces the silicon ion of high density, permeates, form the heatproof anti oxidation layer of high silicon content at stainless steel surface the auxiliary lower quick of arc plasma to stainless steel surface.This apparatus structure is simple, and cost is lower, and more much lower than the siliconising temperature of solid process, CVD molten-salt growth method, oozes in Si have a good application prospect at stainless steel surface.
Utility model content
The purpose of this utility model is to overcome the deficiency that above-mentioned existing apparatus carries out stainless steel siliconising existence, and provides a kind of simple, the device that siliconising temperature is lower.This device has the advantages such as principle advanced person, structure is simple, speed of reaction is fast.
For achieving the above object, the utility model provides a kind of stainless steel surface ion siliconising device, comprises the vacuum cavity with bleeding point and silane gas import; Cathode cavity and stainless steel target is provided with in vacuum cavity, cathode cavity is connected with vacuum cavity by insulating material, stainless steel target to be positioned at above cathode cavity and to be connected with cathode cavity by insulating material, be provided with the striking pin contacted with stainless steel target surface in vacuum cavity, striking pin is connected with direct supply by control coil; Be connected with water coolant in cathode cavity, in cathode cavity, be provided with control arc permanent magnet, be immersed in water coolant after control arc permanent magnet is arranged in stainless steel target; Cathode cavity is connected by stabilising arc power supply with vacuum cavity.
Described vacuum cavity is opening door cavity.
Above-mentioned silane gas import is provided with the mass flow controller regulating silane flow rate.
Well heater is provided with in above-mentioned vacuum cavity.
Described stainless steel target diameter is 50-300mm, and thickness is 5-40mm.
The utility model is under voltage effect, and striking pin contacts with stainless steel target surface, then flicks the electric arc that ignites.The autonomous working of electric arc is provided by power supply.The anode of power supply is body of heater, negative electrode is stainless material, the last position of negative electrode is cathode flange, mainly negative electrode is fixed on the body of heater of anode, by the insulcrete isolation that polytetrafluoroethylmaterial material does between negative electrode and anode, have control arc permanent magnet after target, magnet ducks in drink, cold lack of water enters from water inlet pipe, and rising pipe flows out.The plasma body that arc-over produces forms high density plasma at the surf zone of stainless material.
By stainless material with after acetone ultrasonic cleaning, dry, be loaded on the negative electrode pedestal in vacuum chamber, the air-bleed system be made up of mechanical pump and molecular pump bleeding point in vacuum chamber vacuumizes, then pass into through mass flow controller the silane and argon gas that volume ratio is 1:9, carry out arc-over in surface of stainless steel; Infiltrated in the form of an ion at stainless steel surface by the Si of arc ions.
Above-mentioned metal targets is various stainless material, and stainless steel quantity is 1, and stainless steel size diameter is 50-300mm, thickness 5-40mm, and reactant gases (silane+argon gas) flow range is 50-300sccm; Siliconising time 5-20 minute; The electric current of surface of stainless steel is 50-120 ampere.
Stainless steel cathode arc-over carries out under 1-10Pa condition, siliconising temperature 100-500 DEG C, siliconising 1-20 minute, and when passing into 50-300sccm reactant gases, along with the increase of silane flow rate, Si atomic percent increases gradually.And Ni, Cr, Fe content in matrix remains unchanged substantially.
As shown from the above technical solution, the utility model utilizes high-density arc discharge device to produce plasma body, carries out oozing Si in surface of stainless steel.The strong plasma body ionization that this device utilizes arc-over to produce passes into the silane in vacuum chamber, and silane is dissociated into Si ion and H ion (wherein argon gas uses as diluent gas).Si element infiltrates stainless target surface in the form of an ion.The Si content of stainless steel surface infiltration then directly can be controlled by the flow controlling silane.The utility model apparatus structure is simple, significantly simplifies siliconising process, only need adopt a stainless steel target, a kind of silicon-containing gas, reduce the cost of siliconising.
Metal parts can be improved to the anticorrosive of seawater, acids, salt and molten metal and oxidation-resistance property in steel surface siliconising, and be used for improving metallic surface hardness and wear resistance, thus extend the work-ing life of workpiece.And this device carries out oozing Si on stainless steel target surface, because its technical superiority makes it, not only preparation method is simple, and equipment is easy to operate, and preparation temperature is lower simultaneously, and energy consumption is less, has a good application prospect in stainless steel siliconising process.
Accompanying drawing explanation
Fig. 1 is for using the ion siliconising device schematic diagram adopted in the utility model;
Fig. 2 is the XRD figure under the different silane flow conditions using the utility model device to obtain after stainless steel siliconising.
Embodiment
Below in conjunction with specific embodiment, the technical solution of the utility model is described further:
The utility model comprises the vacuum cavity 1 with bleeding point 13 and silane gas import; Cathode cavity 2 and stainless steel target 8 is provided with in vacuum cavity 1, cathode cavity 2 is connected with vacuum cavity 1 by insulating material 9, stainless steel target 8 to be positioned at above cathode cavity 2 and to be connected with cathode cavity 2 by insulating material, be provided with the striking pin 3 contacted with stainless steel target surface in vacuum cavity 1, striking pin 3 is connected with striking power supply 6 by control coil 10; Cathode cavity 2 is provided with water-in 4 and water outlet 5, and water coolant enters cathode cavity 2 and from water outlet out from water-in, be provided with control arc permanent magnet 12 in cathode cavity 2, is immersed in water coolant after control arc permanent magnet 12 is arranged in stainless steel target 8; Cathode cavity 2 is connected by stabilising arc power supply 7 with vacuum cavity 1.
Described vacuum cavity is the opening door cavity with door 15.
Above-mentioned silane gas import is provided with the mass flow controller 14 regulating silane flow rate.
Well heater 16 is provided with in above-mentioned vacuum cavity.
Described stainless steel target 8 diameter is 50-300mm, and thickness is 5-40mm.
Embodiment 1: open air-bleed system, is evacuated in vacuum cavity, passes into silane gas, utilizes striking pin to utilize the strong plasma body ionization silane of stainless steel cathode surface arcing electric discharge generation, silane is dissociated into Si ion and H ion.Si ion diffuse, in metal lattice, internally infiltrates along metallic surface.The flow wherein passing into silane gas is 50sccm; The electric current of metallic target is 50 amperes; Siliconising time controling was at 5 minutes.
Above-mentioned metallic target cathodic arc discharge carries out under 1Pa condition, preparation temperature 150 DEG C.After siliconising, the massfraction of the Si element of target material surface reaches 1.1%, higher than original sample Si constituent content 0.99%; Fe2Si phase is defined by the known target material surface of XRD analysis.
Embodiment 2: open air-bleed system, is evacuated in vacuum cavity, in vacuum chamber, pass into reactant gases, and the strong plasma body ionization silane utilizing arc-over to produce, is dissociated into Si ion and H ion silane.Si ion diffuse, in metal lattice, internally infiltrates along metallic surface.The flow wherein passing into acetylene gas is 300sccm; The electric current of metallic target is 120 amperes; Siliconising time controling was at 20 minutes.
Above-mentioned metallic target cathodic arc discharge carries out under 3Pa condition, preparation temperature 300 DEG C.After siliconising, the massfraction of the Si element of target material surface is 3.23%, higher than original sample Si constituent content 0.99%; Fe2Si phase is defined by the known target material surface of XRD analysis.
Embodiment 3: open air-bleed system, is evacuated in vacuum cavity, in vacuum chamber, pass into reactant gases, and the strong plasma body ionization silane utilizing arc-over to produce, is dissociated into Si ion and H ion silane.Si ion diffuse, in metal lattice, internally infiltrates along metallic surface.The flow wherein passing into acetylene gas is 150sccm; The electric current of metallic target is 80 amperes; Siliconising time controling was at 15 minutes.
Above-mentioned metallic target cathodic arc discharge carries out under 2Pa condition, preparation temperature 200 DEG C.After siliconising, the massfraction of the Si element of target material surface is 2.8%, higher than original sample Si constituent content 0.99%; Fe2Si phase is defined by the known target material surface of XRD analysis.
The ion siliconising apparatus structure schematic diagram that Fig. 1 adopts for the utility model, device is opening door vacuum system, and the vacuum chamber 1 of device is surrounded by furnace wall, is connected with the earth, forms anode.Vacuum chamber height is 0.5-1.5 rice.Vacuum cavity 1 is 304 stainless material manufactures, and side has door 15, to facilitate the handling of target.Bleeding point is positioned at the trailing flank of device, vacuumizes unit and is vacuumized vacuum chamber by vacuum orifice, and vacuumize unit and be made up of mechanical pump and molecular pump, highest attainable vacuum can reach 8 × 10-4Pa.Negative electrode is 304 stainless steel manufactures, and isolated by insulating material 2 and anode 1, negative electrode has water inlet pipe 4 and rising pipe 5, mainly cools negative electrode, and electric arc is triggered by striking pin 3, forms high density plasma region 11 at stainless steel target surface.Cathode target electric current is adjustable in 50-120A, is control arc magnet 12 after target, the motion of major control stainless steel surface electric arc, stove built with well heater 16, for hot donut.Working gas is the mixed gas of silane and argon gas, is controlled by mass flow meter controller 14.
The utility model passes into acetylene gas flow and is respectively 50sccm, 100sccm, 150sccm, 200sccm, 300sccm, siliconising 20 minutes, Super304H siliconising rear surface scanning electron microscope (SEM) figure can find out the increase along with silane flow rate, on stainless steel target matrix except the vestige that electric arc burns, there is spherical particle, and with the increase of silane flow rate, spherical particle is assembled gradually.
Fig. 2 is the XRD figure under the differential responses gas flow condition of the utility model acquisition after Super304H siliconising.As can be seen from the figure, Super304H after arc plasma siliconising, except original γ phase (Cr
0.19fe
0.7ni
0.11) and nickel chromium triangle phase (Cr, Ni) outward, also detects the Fe making new advances and formed
2si phase, Si and the Fe matrix reaction that namely stainless steel surface infiltrates forms cenotype.
Claims (5)
1. a stainless steel surface ion siliconising device, is characterized in that: comprise the vacuum cavity with bleeding point and silane gas import; Cathode cavity and stainless steel target is provided with in vacuum cavity, cathode cavity is connected with vacuum cavity by insulating material, stainless steel target to be positioned at above cathode cavity and to be connected with cathode cavity by insulating material, be provided with the striking pin contacted with stainless steel target surface in vacuum cavity, striking pin is connected with direct supply by control coil; Be connected with water coolant in cathode cavity, in cathode cavity, be provided with control arc permanent magnet, be immersed in water coolant after control arc permanent magnet is arranged in stainless steel target; Cathode cavity is connected by stabilising arc power supply with vacuum cavity.
2. stainless steel surface ion siliconising device according to claim 1, is characterized in that: described vacuum cavity is opening door cavity.
3. stainless steel surface ion siliconising device according to claim 1 and 2, is characterized in that: silane gas import is provided with the mass flow controller regulating silane flow rate.
4. stainless steel surface ion siliconising device according to claim 1 and 2, is characterized in that: be provided with well heater in vacuum cavity.
5. stainless steel surface ion siliconising device according to claim 1 and 2, it is characterized in that: described stainless steel target diameter is 50-300mm, thickness is 5-40mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520574188.0U CN205035458U (en) | 2015-08-03 | 2015-08-03 | Stainless steel surface ion silicizing device |
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|---|---|---|---|
| CN201520574188.0U CN205035458U (en) | 2015-08-03 | 2015-08-03 | Stainless steel surface ion silicizing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106065461A (en) * | 2016-07-01 | 2016-11-02 | 北京理工大学 | A kind of method utilizing electric spark siliconising technology to prepare high-silicon silicon steel sheet |
| CN107937866A (en) * | 2017-11-17 | 2018-04-20 | 华北理工大学 | A kind of fused salt siliconising stove for high-efficiency and continuous production Fe 6.5%Si strips |
| CN108914052A (en) * | 2018-06-07 | 2018-11-30 | 界首市金龙机械设备有限公司 | A kind of forming method for the lockable mechanism locking plate overturning driver's cabin |
-
2015
- 2015-08-03 CN CN201520574188.0U patent/CN205035458U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106065461A (en) * | 2016-07-01 | 2016-11-02 | 北京理工大学 | A kind of method utilizing electric spark siliconising technology to prepare high-silicon silicon steel sheet |
| CN106065461B (en) * | 2016-07-01 | 2019-01-04 | 北京理工大学 | A method of high-silicon silicon steel sheet is prepared using electric spark siliconising technology |
| CN107937866A (en) * | 2017-11-17 | 2018-04-20 | 华北理工大学 | A kind of fused salt siliconising stove for high-efficiency and continuous production Fe 6.5%Si strips |
| CN107937866B (en) * | 2017-11-17 | 2019-11-22 | 华北理工大学 | A kind of fused salt siliconising furnace for high-efficiency and continuous production Fe-6.5%Si strip |
| CN108914052A (en) * | 2018-06-07 | 2018-11-30 | 界首市金龙机械设备有限公司 | A kind of forming method for the lockable mechanism locking plate overturning driver's cabin |
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