CN205014944U - Dual -frenquency heterodyne laser interferometer of quadruple journey - Google Patents
Dual -frenquency heterodyne laser interferometer of quadruple journey Download PDFInfo
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- CN205014944U CN205014944U CN201520264628.2U CN201520264628U CN205014944U CN 205014944 U CN205014944 U CN 205014944U CN 201520264628 U CN201520264628 U CN 201520264628U CN 205014944 U CN205014944 U CN 205014944U
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- polarization spectroscope
- laser interferometer
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- polarized light
- wave plate
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Abstract
The utility model discloses a dual -frenquency heterodyne laser interferometer of quadruple journey, including two frequency laser, the polarization spectroscope, two fourth wave plates remove the mirror, fixed mirror and two pyramid prism. Characterized by stability can be good, simple structure, and measuring -signal's quadruple journey light path can improve dual -frenquency heterodyne laser interferometer's measurement accuracy for dual -frenquency heterodyne laser interferometer's resolution ratio reaches 0.15nm, precision measurement field that the manufacturing that mainly is applicable to nanometer technology, ultra -precise machining, microcomputer electric system and detection etc. Relate to.
Description
Technical field
The utility model belongs to Technology of Precision Measurement field, relates to a kind of double frequency heterodyne laser interferometer of four times of journeys.
Background technology
Two-frequency laser interferometer has the advantages that fast response time, measurement range greatly, easily realize high-acruracy survey, can be used for the on-line measurement of precision machine tool, large scale integrated circuit process equipment etc., error correction and control.Two-frequency laser interferometer adopts difference interference measuring principle, overcomes the problem of common Homodyne interferometer measuring-signal DC shift, has the plurality of advantages such as signal noise is little, environment resistant is disturbed, allow light source hyperchannel multiplexing.In recent years, along with the development of science and technology, people have higher requirement to Precision measurement tools, but existing double frequency heterodyne laser interferometer, due to the impact of the factors such as the undesirable of himself optical element performance and environment, also exists not eliminable optical nonlinearity error in Optical length measurement system.
Notification number a kind of two-frequency laser interferometer that has been the patent announcement of CN2727698Y of Chinese utility model patent bulletin, according to doubly journey method by adding the components and parts such as catoptron on the basis of existing two-frequency laser interferometer, propose a kind of double journey laser interferometer, measuring accuracy is doubled.The notification number that Chinese invention patent is announced has been the patent announcement of CN1587896A, and a kind of optics eight segments two-frequency laser interferometer, by adding the components and parts such as prism of corner cube and catoptron, propose a kind of two-frequency laser interferometer of four times of journeys, improve the measuring accuracy of two-frequency laser interferometer, but too increase new optical device simultaneously, add new optical nonlinearity error.
For above-mentioned two-frequency laser interferometer Problems existing, the utility model proposes a kind of four times of journey double frequency heterodyne laser interferometers of new structure.The utility model structure is simple, and good stability, effectively can improve the measuring accuracy of double frequency heterodyne laser interferometer, reduces its optical nonlinearity error.
Utility model content
The problem of the optical nonlinearity error produced when measuring for current double frequency heterodyne laser interferometer, the purpose of this utility model is the double frequency heterodyne laser interferometer providing a kind of four times of journeys, to improve the measuring accuracy of double frequency heterodyne laser interferometer, reduce its optical nonlinearity error.
Technical solution of the present utility model is as follows:
The utility model proposes a kind of double frequency heterodyne laser interferometer of four times of journeys, it comprises:
Two-frequency laser, provides two mutually perpendicular linearly polarized lights in polarization direction, is respectively s polarized light and p polarized light, if its frequency is respectively f1 and f2;
Polarization spectroscope, is arranged on the output light path of two-frequency laser, the s polarized light that two-frequency laser sends through polarization spectroscope back reflection, the transmission after polarization spectroscope of p polarized light;
First quarter-wave plate and the second quarter-wave plate, on the transmission direction being arranged at polarization spectroscope respectively and reflection direction, p polarized light becomes circularly polarized light through the first quarter-wave plate after polarization spectroscope transmission, and s polarized light becomes circularly polarized light through the second quarter-wave plate after polarization spectroscope reflection;
Moving lens and fixed mirror, be arranged at respectively polarization spectroscope transmittance and reflectance direction and on the extended line of polarization spectroscope and quarter-wave plate, light beam respectively through the first quarter-wave plate and the 1/2nd by moving lens and fixed mirror reflection;
First prism of corner cube and the second prism of corner cube, first prism of corner cube is arranged at the direction about polarization spectroscope and fixed mirror symmetry, second prism of corner cube is arranged between two-frequency laser and polarization spectroscope, and light beam reflects through the first prism of corner cube or the second prism of corner cube after polarization spectroscope reflection or transmission;
The utility model devises a kind of four times of journey double frequency heterodyne laser interferometers, light path is made to achieve four times of journeys trends respectively at two interference arms of double frequency heterodyne laser interferometer, improve the measuring accuracy of double frequency heterodyne laser interferometer, the resolution of double frequency heterodyne laser interferometer is improved, and optical nonlinearity error reduces.
Accompanying drawing explanation
Fig. 1 is four times of journey double frequency heterodyne laser interferometer structural representations of the present utility model.
Embodiment
As shown in drawings, Fig. 1 is four times of journey double frequency heterodyne laser interferometer structural representations of the present utility model.As seen from the figure, the utility model four times of journey double frequency heterodyne laser interferometers, comprise a two-frequency laser 1, polarization spectroscope 2, two quarter-wave plates 3,5, moving lens 4, fixed mirror 6, two prism of corner cubes 7,8.
The output light path of two-frequency laser 1 arranges a polarization spectroscope 2, the transmitted light direction of this polarization spectroscope 2 is provided with the first quarter-wave plate 3 and moving lens 4, the reflected light direction of this polarization spectroscope is provided with the second quarter-wave plate 5 and fixed mirror 6, at the second quarter-wave plate 5 and fixed mirror 6, first prism of corner cube 7 is set relative to the direction of polarization spectroscope 2 symmetry, second prism of corner cube 8 is set between two-frequency laser 1 and polarization spectroscope 2, wherein the quick shaft direction of the first quarter-wave plate and the second quarter-wave plate respectively with the polarization direction of the p polarized light through polarization spectroscope 2 transmission and the direction of vibration angle at 45 ° of s polarized light that reflects through polarization spectroscope 2.
Linearly polarized light f1 and f2 that the orthogonal frequency difference of two bundle direction of vibration is 20MHZ is sent by two-frequency laser 1, frequency is that the s polarized light of f1 reflexes to the second quarter-wave plate 5 through polarization spectroscope 2 and becomes circularly polarized light, be reflected back the second quarter-wave plate 5 through fixed mirror 6 again and become p polarized light, this p polarized light is transmitted through the first prism of corner cube 7 through polarization spectroscope 2, after the first prism of corner cube 7 reflexes to polarization spectroscope 2, be transmitted through the second quarter-wave plate 5 become circularly polarized light, reflex to the second quarter-wave plate 5 through fixed mirror 6 and become s polarized light, this s polarized light reflexes to the second prism of corner cube 8 through polarization spectroscope 2, s polarized light after the second prism of corner cube 8 reflects reflexes to the second quarter-wave plate 5 through polarization spectroscope 2 and becomes circularly polarized light, this circularly polarized light reflexes to the second quarter-wave plate through fixed mirror 6 and becomes p polarized light, this p polarized light is transmitted through the first prism of corner cube 7 through polarization spectroscope 2, polarization spectroscope 2 is returned through the first prism of corner cube 7 transmission, circularly polarized light is become through polarization spectroscope 2 transmission second quarter-wave plate 5, reflex to the second quarter-wave plate 5 through fixed mirror 6 and become s polarized light, this s polarized light reflexes to optical fiber Received signal strength through polarization spectroscope 2, frequency is that the p polarized light of f2 is transmitted to the first quarter-wave plate 3 through polarization spectroscope 2 and becomes circularly polarized light, this circularly polarized light becomes s polarized light through the first quarter-wave plate 3 after fixed mirror 4 reflects, this s polarized light reflexes to the first prism of corner cube 7 through polarization spectroscope 2, be reflected back polarization spectroscope 2 through the first prism of corner cube 7 again to reflex to the first quarter-wave plate 3 and become circularly polarized light, reflex to the first quarter-wave plate 3 through moving lens 4 and become p polarized light, the second prism of corner cube 8 is transmitted through through polarization spectroscope 2, after the second prism of corner cube 8 reflects, be transmitted through the first quarter-wave plate 3 through polarization spectroscope 2 become circularly polarized light, this circularly polarized light reflects through moving lens 4 and becomes s linearly polarized light through the first quarter-wave plate 3, this s polarized light reflexes to the first prism of corner cube 7 through polarization spectroscope 2, be reflected back polarization spectroscope 2 through the first prism of corner cube 7 again to reflex to the first quarter-wave plate 3 and become circularly polarized light, this circularly polarized light reflexes to the first quarter-wave plate 3 through moving lens 4 and becomes p polarized light, this p polarized light is transmitted through optical fiber Received signal strength through polarization spectroscope 2.
Suppose that the incident light that two-frequency laser sends is respectively
Wherein φ
1and φ
2be respectively the initial phase of incident light s polarized light and p polarized light, E
01and E
02be respectively the amplitude of s polarized light and p polarized light, the signal that light beam is received by optical fiber after double frequency heterodyne laser interferometer is
I
ph～E
1E
2cos(φ
1-φ
2+Δφ)
Wherein Δ φ is the phase differential of measuring-signal and reference signal.According to optical path difference theorem, the displacement L of moving lens is drawn by the phase differential of optical fiber Received signal strength
Wherein λ is optical wavelength, and N is the light path multiple of double frequency heterodyne ineterferometer.If the undesirable phase error caused of the optical element due to double frequency heterodyne laser interferometer inside is γ, then the displacement of gained moving lens is
The optical nonlinearity error of system is
From theory, the light path multiple N of double frequency heterodyne laser interferometer is larger, its optical nonlinearity error is less, when the light path multiple of double frequency heterodyne laser interferometer is four times, the light path of double frequency heterodyne laser interferometer reaches eight segmentations, system optics nonlinearity erron reduces one times, thus the effective measuring accuracy improving double frequency heterodyne laser interferometer.
The sampled data figure place of phase measurement in experimental system is binary 9, then phase measurement resolution R is
As N=4,
then the resolution of system bits shift measurement is
The utility model relate to a kind of double frequency heterodyne laser interferometer of four times of journeys, lasing light emitter is made respectively to have walked four back and forth at the interference arm of double frequency heterodyne laser interferometer and gage beam, achieve eight segmentations of light path, the displacement measurement resolution of double frequency heterodyne laser interferometer is made to reach 0.15nm, effectively can reduce the optical nonlinearity error of double frequency heterodyne laser interferometer, improve its measuring accuracy.
Claims (2)
1. the double frequency heterodyne laser interferometer of four times of journeys, it is characterized in that comprising a two-frequency laser (1), polarization spectroscope (2), two quarter-wave plates (3), (5), moving lens (4), fixed mirror (6), two prism of corner cubes (7), (8), the output light path of two-frequency laser (1) arranges a polarization spectroscope (2), the first quarter-wave plate (3) and moving lens (4) is provided with in the transmitted light direction of this polarization spectroscope (2), the second quarter-wave plate (5) and fixed mirror (6) is provided with in the reflected light direction of this polarization spectroscope (2), at the second quarter-wave plate (5) and fixed mirror (6) direction symmetrical relative to polarization spectroscope (2), the first prism of corner cube (7) is set, second prism of corner cube (8) is set between two-frequency laser (1) and polarization spectroscope (2).
2. the double frequency heterodyne laser interferometer of four times of journeys according to claim 1, the quick shaft direction that it is characterized in that the first quarter-wave plate (3) and the second quarter-wave plate (5) respectively with the polarization direction of the p polarized light through polarization spectroscope (2) transmission and the direction of vibration angle at 45 ° respectively of s polarized light that reflects through polarization spectroscope (2); Between the direction two-frequency laser and polarization spectroscope of light beam output, arrange the second prism of corner cube (8) makes light path respectively walk four back and forth in two interference arms of double frequency heterodyne laser interferometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520264628.2U CN205014944U (en) | 2015-04-27 | 2015-04-27 | Dual -frenquency heterodyne laser interferometer of quadruple journey |
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|---|---|---|---|
| CN201520264628.2U CN205014944U (en) | 2015-04-27 | 2015-04-27 | Dual -frenquency heterodyne laser interferometer of quadruple journey |
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| CN201520264628.2U Expired - Fee Related CN205014944U (en) | 2015-04-27 | 2015-04-27 | Dual -frenquency heterodyne laser interferometer of quadruple journey |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225667A (en) * | 2016-08-05 | 2016-12-14 | 合肥工业大学 | A kind of single frequency laser interferometer nonlinear error compensation device |
| CN110449993A (en) * | 2019-08-06 | 2019-11-15 | 桂林电子科技大学 | A kind of sports platform straight-line displacement measurement and deflection detection apparatus |
| CN112747667A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Differential interferometer apparatus |
-
2015
- 2015-04-27 CN CN201520264628.2U patent/CN205014944U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225667A (en) * | 2016-08-05 | 2016-12-14 | 合肥工业大学 | A kind of single frequency laser interferometer nonlinear error compensation device |
| CN106225667B (en) * | 2016-08-05 | 2018-10-02 | 合肥工业大学 | A kind of single frequency laser interferometer nonlinear error compensation device |
| CN110449993A (en) * | 2019-08-06 | 2019-11-15 | 桂林电子科技大学 | A kind of sports platform straight-line displacement measurement and deflection detection apparatus |
| CN112747667A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Differential interferometer apparatus |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160203 Termination date: 20170427 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |