CN204976198U - A precision measurement device for measuring embedded microminiature work piece cutting output - Google Patents
A precision measurement device for measuring embedded microminiature work piece cutting output Download PDFInfo
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- CN204976198U CN204976198U CN201520728192.8U CN201520728192U CN204976198U CN 204976198 U CN204976198 U CN 204976198U CN 201520728192 U CN201520728192 U CN 201520728192U CN 204976198 U CN204976198 U CN 204976198U
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- firm banking
- capacitance displacement
- displacement sensor
- measuring
- cutting output
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Abstract
The utility model relates to a precision measurement device for measuring embedded microminiature work piece cutting output belongs to precision finishing and precision measurement field. Constitute by main interval regulating unit, vice interval regulating unit and slider regulating unit. The utility model has the advantages that novel structure is applicable to the precision measurement of the difficult holding workpiece's of embedded microminiature cutting output. To lead, vice displacement sensor relative placement, place a movable block in the middle of two displacement sensor to install the measured workpiece side by side on a movable plate with main displacement sensor, through measuring the cutting output of measuring the measured workpiece indirectly of distance value between two displacement sensor and the movable block, measurement accuracy is high, can reach the nanometer.
Description
Technical field
The utility model belongs to Precision Machining and cutting output field of precision measurement, particularly a kind of precision measurement apparatus for measuring embedded Micro-parts cutting output.
Background technology
Along with the development of science and technology and the increase of social demand, the application of micro parts in industrial products is increasing, various micro parts is is constantly manufactured and designed out, brings huge facility, as miniature gears, miniature bearing etc. to the life of the mankind.At present, various micro parts is widely used in the fields such as communication, optics, Aero-Space and machining, and these micro parts appearance and sizes are generally between tens microns to several millimeters, although lightweight function is strong all the better.
The clamping of Micro-parts is very difficult with location, and its volume is little, easily lose and damage, and each function surface is little, and reorientate it and clamp unreliable and be easily out of shape, the lighter can cause machining accuracy to lose, and severe one can cause workpiece to be scrapped.In order to improve machining accuracy and the working (machining) efficiency of Micro-parts, wherein the most practical method is that Micro-parts is firmly embedded in a miniature workpiece substrate, then this miniature workpiece substrate is arranged on large-scale jig to facilitate processing.And cannot take out because Micro-parts is embedded in a miniature workpiece substrate, the method directly measured if take, then certainty of measurement can be produced low, finished surface is had to the problems such as damage, consider that cutting output has important directive significance for the shape and precision detecting the workpiece processed, so the cutting output of the embedded Micro-parts of accurate measurement is most important, and also there is no the feasible device of a set of accurate measurement for measuring embedded Micro-parts cutting output at present.
Summary of the invention
The utility model provides a kind of precision measurement apparatus for measuring embedded Micro-parts cutting output, being difficult to the problem of accurate measurement with the cutting output solving current Micro-parts, being devoted to provide a kind of precision, reliable, easy measurement mechanism for measuring embedded Micro-parts cutting output.
The technical scheme that the utility model is taked is, main spacing regulon, slide block regulon and secondary spacing regulon are installed on base plate.
The structure of described main spacing regulon is: firm banking a is arranged on base plate, adjusting screw(rod) a is arranged on firm banking a, mobile support saddle a is arranged on firm banking a, and be slidably connected with firm banking a, and can by the distance between adjusting screw(rod) a adjustment mobile support saddle a and firm banking a, movable plate is arranged on mobile support saddle a by holding screw one, workpiece substrates is fixedly connected with firm banking a by holding screw two, measured workpiece embeds and is arranged in workpiece substrates, main capacitance displacement transducer is arranged on movable plate side by side through a hole on movable plate and workpiece substrates, guiding trestle a is arranged on movable plate by holding screw three, guiding trestle a has square hole, positive square guide pillar a penetrates in this hole, for main capacitance displacement transducer plays axially directed effect, it is an entirety that main capacitance displacement transducer is connected with positive square guide pillar a, wire one is drawn from square guide pillar, vernier knob a is threaded with main capacitance displacement transducer, and between guiding trestle a and movable plate, main capacitance displacement transducer moves axially along rotary fine adjustment knob a, holding screw four is for the axial restraint of main capacitance displacement transducer.
The structure of described slide block regulon is: measure touch panel and be arranged on base plate, steel ball embeds to be arranged on to be measured on touch panel, as cutting output measuring basis, movable block is arranged in the hole measuring touch panel, and move axially along this hole, adjustment screw six is threaded with the ledge of movable block, block is arranged on by holding screw five to be measured on touch panel, the nut of adjustment screw six is by the small boss axial limiting on block and measurement touch panel, vernier knob c is arranged on the end of adjustment screw six, and undertaken two-sided fixing by nut one and nut two, the axial displacement of the adjustable movable block of rotary fine adjustment knob c.
The structure of described secondary spacing regulon is: firm banking b is arranged on base plate, adjusting screw(rod) b is arranged on firm banking b, mobile support saddle b is arranged on firm banking b, and be slidably connected with firm banking b, and available adjustment screw rod b regulates the axial distance between mobile support saddle b and firm banking b, cylinder body is arranged in the hole of mobile support saddle b by holding screw nine, cylindrical piston is arranged in cylinder body, can realize moving axially in cylinder body and around the rotation of axis, to regulate the secondary capacitance displacement sensor that is positioned at end relative to the distance of the movable block of slide block regulon and angle, the end of cylindrical piston is pruned a part to install the displacement micro-adjusting mechanism of secondary capacitance displacement sensor, secondary capacitance displacement sensor is positioned at the end aperture of cylindrical piston, guiding trestle b is installed in the end truncated section of cylindrical piston by holding screw eight, it is an entirety that secondary capacitance displacement sensor is connected with positive square guide pillar b, wire two is drawn from square guide pillar b, positive square guide pillar b is that secondary capacitance displacement sensor plays axially directed effect, the threaded portion of vernier knob b and capacitance displacement sensor screws, and between guiding trestle b and cylindrical piston, rotary fine adjustment knob b, secondary capacitance displacement sensor can move along its axis, holding screw seven is for the axial restraint of secondary capacitance displacement sensor.
The utility model has the advantages that novel structure, to carry out the cutting output of the difficult holding workpiece of the embedded microminiature of accurate measurement indirectly by measuring major and minor displacement transducer relative to the distance of movable block; Have employed a point situation measuring principle, when cutting output is less than the initial distance of status of a sovereign displacement sensor and movable block, only need measure the distance variable quantity of status of a sovereign displacement sensor and movable block; When cutting output is greater than the initial distance of status of a sovereign displacement sensor and movable block, need to measure major and minor displacement transducer and movable block spacing variable quantity; Described measuring method is not damaged workpiece; Adopt capacitance displacement sensor as measuring cell, certainty of measurement is high, can reach nanoscale.The utility model is applicable to the accurate measurement of the cutting output of the difficult holding workpiece of embedded microminiature.
Accompanying drawing explanation
Fig. 1 is measuring principle schematic diagram of the present utility model;
Fig. 2 is the structural representation of the utility model measurement mechanism;
Fig. 3 is the structural representation of the utility model measurement mechanism;
Fig. 4 is the structural representation of the utility model measurement mechanism;
Fig. 5 is the structural representation of the main spacing regulon of the utility model measurement mechanism;
Fig. 6 is the structural representation of the main spacing regulon of the utility model measurement mechanism;
Fig. 7 is the structural representation of the slide block regulon of the utility model measurement mechanism;
Fig. 8 is the structural representation of the slide block regulon of the utility model measurement mechanism;
Fig. 9 is the sectional view of the slide block regulon of the utility model measurement mechanism;
Figure 10 is the structural representation of the secondary spacing regulon of the utility model measurement mechanism;
Figure 11 is the structural representation of the secondary spacing regulon of the utility model measurement mechanism;
In figure: main spacing regulon 1, slide block regulon 2, secondary spacing regulon 3 and base plate 4;
Mobile support saddle a101, movable plate 102, holding screw 1, firm banking a104, adjusting screw(rod) a105, guiding trestle a106, vernier knob a107, holding screw 2 108, workpiece substrates 109, measured workpiece 110, main capacitance displacement transducer 111, holding screw 3 112, holding screw 4 113, positive square guide pillar a114, wire 1;
Measure touch panel 201, holding screw 5 202, movable block 203, steel ball 204, adjustment screw 6 205, small boss 206, block 207, nut 1, vernier knob c209 and nut 2 210;
Cylindrical piston 301, holding screw 7 302, secondary capacitance displacement sensor 303, holding screw 8 304, cylinder body 305, holding screw 9 306, adjusting screw(rod) b307, mobile support saddle b308, firm banking b309, wire 2 310, positive square guide pillar b311, vernier knob b312 and guiding trestle b313.
Detailed description of the invention
Main spacing regulon 1, slide block regulon 2, secondary spacing regulon 3 and base plate 4; Main spacing regulon 1, slide block regulon 2 are installed on base plate 4 with secondary spacing regulon 3.
Described firm banking a104 is arranged on base plate 4, adjusting screw(rod) a105 is arranged on firm banking a104, mobile support saddle a101 is arranged on firm banking a104, be slidably connected with firm banking a104, and available adjustment screw rod a105 regulates the distance between mobile support saddle a101 and firm banking a104, movable plate 102 is arranged on mobile support saddle a101 by holding screw 1, workpiece substrates 109 is fixedly connected with firm banking a104 by holding screw 2 108, measured workpiece 110 embeds and is arranged in workpiece substrates 109, main capacitance displacement transducer 111 is arranged on movable plate 102 through a hole on movable plate 102 and workpiece substrates 109 side by side, guiding trestle a106 is arranged on movable plate 102 by holding screw 3 112, guiding trestle a106 has square hole, positive square guide pillar a114 penetrates in this hole, for main capacitance displacement transducer 111 plays axially directed effect, it is an entirety that main capacitance displacement transducer 111 is connected with positive square guide pillar a114, wire 1 is drawn from square guide pillar 114, vernier knob a107 is threaded with main capacitance displacement transducer 111, and between guiding trestle a106 and movable plate 102, main capacitance displacement transducer 111 moves axially along rotary fine adjustment knob a107, holding screw 4 113 is for the axial restraint of main capacitance displacement transducer 111.
Described measurement touch panel 201 is arranged on base plate 4, steel ball 204 embeds to be arranged on to be measured on touch panel 201, as cutting output measuring basis, movable block 203 is arranged in the hole measuring touch panel 201, and move axially along this hole, adjustment screw 6 205 is threaded with the ledge of movable block 203, block 207 is arranged on by holding screw 5 202 to be measured on touch panel 201, the nut of adjustment screw 6 205 is by small boss 206 axial limiting on block 207 and measurement touch panel 201, vernier knob c209 is arranged on the end of adjustment screw 6 205, and undertaken two-sided fixing by nut 1 and nut 2 210, the axial displacement of the adjustable movable block 203 of rotary fine adjustment knob c209.
Described firm banking b309 is arranged on base plate 4, adjusting screw(rod) b307 is arranged on firm banking b309, mobile support saddle b308 is arranged on firm banking b309, and be slidably connected with firm banking b309, and available adjustment screw rod b307 regulates the axial distance between mobile support saddle b308 and firm banking b309, cylinder body 305 is arranged in the hole of mobile support saddle b308 by holding screw 9 306, cylindrical piston 301 is arranged in cylinder body 305, can realize moving axially in cylinder body 305 and around the rotation of axis, to regulate the secondary capacitance displacement sensor 303 that is positioned at end relative to the distance of the movable block 203 of slide block regulon 2 and angle, the end of cylindrical piston 301 is pruned a part to install the displacement micro-adjusting mechanism of secondary capacitance displacement sensor 303, secondary capacitance displacement sensor 303 is positioned at the end aperture of cylindrical piston 301, guiding trestle b313 is installed in the end truncated section of cylindrical piston 301 by holding screw 8 304, it is an entirety that secondary capacitance displacement sensor 303 is connected with positive square guide pillar b311, wire 2 310 is drawn from square guide pillar b311, positive square guide pillar b311 is that secondary capacitance displacement sensor 303 plays axially directed effect, the threaded portion of vernier knob b312 and capacitance displacement sensor 303 screws, and between guiding trestle b313 and cylindrical piston 301, rotary fine adjustment knob b312, secondary capacitance displacement sensor 303 can move along its axis, holding screw 7 302 is for the axial restraint of secondary capacitance displacement sensor 303.
The operation principle of this device, see Fig. 1:
(1) workpiece substrates 109 and main capacitance displacement transducer 111 that are inlaid with unprocessed measured workpiece 5 are arranged on the movable plate 102 on mobile platform a100 side by side;
(2) the adjusting screw(rod) a105 of turn mobile platform a100, contacts measured workpiece 5 with the spherical substrate 204 of measuring on touch panel 201, and measures the distance S of main capacitance displacement transducer 111 and movable block 203
1;
(3) take off measured workpiece 5 from the movable plate 102 mobile platform a100, processing measured workpiece 5, removes certain thickness;
(4) workpiece substrates 109 with the measured workpiece 5 processed is reinstalled on movable plate 102, and the adjusting screw(rod) a105 of turn mobile platform a100 again;
If 1. measured workpiece 5 first contacts with the spherical substrate 204 of measuring on touch panel 201, and main capacitance displacement transducer 111 not yet contacts with movable block 203, i.e. Δ R≤S
1, then the cutting output of workpiece 5 is:
ΔR=S
1-S
2
Wherein, S
2for now main capacitance displacement transducer 111 and the distance of movable block 203;
If 2. main capacitance displacement transducer 111 first contacts with movable block 203, and measured workpiece 5 not yet contacts with the spherical substrate 204 of measuring on touch panel 201, i.e. Δ R>S
1, then the cutting output of workpiece 5 is:
ΔR=S
1+S
3-S
4
Wherein, S
3for the distance of the secondary capacitance displacement sensor 303 measured in advance and movable block 203, S
4after movable block 203 is moved certain distance to secondary capacitance displacement sensor 303, the adjusting screw(rod) a105 of turn mobile platform a100, until when measured workpiece 5 can contact with spherical substrate 204, the distance between secondary capacitance displacement sensor 303 and movable block 203.
Claims (4)
1. for measuring a precision measurement apparatus for embedded Micro-parts cutting output, it is characterized in that: main spacing regulon, slide block regulon and secondary spacing regulon are installed on base plate.
2. the precision measurement apparatus for measuring embedded Micro-parts cutting output according to claim 1, it is characterized in that: the structure of described main spacing regulon is: firm banking a is arranged on base plate, adjusting screw(rod) a is arranged on firm banking a, mobile support saddle a is arranged on firm banking a, and be slidably connected with firm banking a, and can by the distance between adjusting screw(rod) a adjustment mobile support saddle a and firm banking a, movable plate is arranged on mobile support saddle a by holding screw one, workpiece substrates is fixedly connected with firm banking a by holding screw two, measured workpiece embeds and is arranged in workpiece substrates, main capacitance displacement transducer is arranged on movable plate side by side through a hole on movable plate and workpiece substrates, guiding trestle a is arranged on movable plate by holding screw three, guiding trestle a has square hole, positive square guide pillar a penetrates in this hole, it is an entirety that main capacitance displacement transducer is connected with positive square guide pillar a, wire one is drawn from square guide pillar, vernier knob a is threaded with main capacitance displacement transducer, and between guiding trestle a and movable plate, holding screw four is for the axial restraint of main capacitance displacement transducer.
3. the precision measurement apparatus for measuring embedded Micro-parts cutting output according to claim 1, it is characterized in that: the structure of described slide block regulon is: measure touch panel and be arranged on base plate, steel ball embeds to be arranged on to be measured on touch panel, movable block is arranged in the hole measuring touch panel, and move axially along this hole, adjustment screw six is threaded with the ledge of movable block, block is arranged on by holding screw five to be measured on touch panel, the nut of adjustment screw six is by the small boss axial limiting on block and measurement touch panel, vernier knob c is arranged on the end of adjustment screw six, and undertaken two-sided fixing by nut one and nut two.
4. the precision measurement apparatus for measuring embedded Micro-parts cutting output according to claim 1, it is characterized in that: the structure of described secondary spacing regulon is: firm banking b is arranged on base plate, adjusting screw(rod) b is arranged on firm banking b, mobile support saddle b is arranged on firm banking b, and be slidably connected with firm banking b, cylinder body is arranged in the hole of mobile support saddle b by holding screw nine, cylindrical piston is arranged in cylinder body, the end of cylindrical piston is pruned a part to install the displacement micro-adjusting mechanism of secondary capacitance displacement sensor, secondary capacitance displacement sensor is positioned at the end aperture of cylindrical piston, guiding trestle b is installed in the end truncated section of cylindrical piston by holding screw eight, it is an entirety that secondary capacitance displacement sensor is connected with positive square guide pillar b, wire two is drawn from square guide pillar b, the threaded portion of vernier knob b and capacitance displacement sensor screws, and between guiding trestle b and cylindrical piston, rotary fine adjustment knob b, secondary capacitance displacement sensor can move along its axis, holding screw seven is for the axial restraint of secondary capacitance displacement sensor.
Priority Applications (1)
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CN201520728192.8U CN204976198U (en) | 2015-09-19 | 2015-09-19 | A precision measurement device for measuring embedded microminiature work piece cutting output |
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CN201520728192.8U CN204976198U (en) | 2015-09-19 | 2015-09-19 | A precision measurement device for measuring embedded microminiature work piece cutting output |
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CN201520728192.8U Expired - Fee Related CN204976198U (en) | 2015-09-19 | 2015-09-19 | A precision measurement device for measuring embedded microminiature work piece cutting output |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105081885A (en) * | 2015-09-19 | 2015-11-25 | 吉林大学 | Precision measuring method and device for measuring cutting amount of embedded miniature workpiece |
-
2015
- 2015-09-19 CN CN201520728192.8U patent/CN204976198U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105081885A (en) * | 2015-09-19 | 2015-11-25 | 吉林大学 | Precision measuring method and device for measuring cutting amount of embedded miniature workpiece |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160120 Termination date: 20180919 |
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CF01 | Termination of patent right due to non-payment of annual fee |