CN204964008U - A MEMS microphone that is used for multi -direction test high -speed railway noise - Google Patents

A MEMS microphone that is used for multi -direction test high -speed railway noise Download PDF

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Publication number
CN204964008U
CN204964008U CN201520617033.0U CN201520617033U CN204964008U CN 204964008 U CN204964008 U CN 204964008U CN 201520617033 U CN201520617033 U CN 201520617033U CN 204964008 U CN204964008 U CN 204964008U
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base body
noise
spherical housing
semisphere
flattened spherical
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CN201520617033.0U
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Chinese (zh)
Inventor
李晖
王源
王化明
赵子瑾
李鹤
许卓
王一冰
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Northeastern University China
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Northeastern University China
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Abstract

The utility model provides a MEMS microphone that is used for multi -direction test high -speed railway noise, belongs to noise measuring technical field. Including multi -direction adjuster, MCU, sound sensor, signal amplification circuit, sampling circuit, TF card, photoelectricity demonstration and warning circuit and power module, signal amplification circuit's input is connected to the output of sound sensor, and sampling circuit's input is connected to signal amplification circuit's output, and sampling circuit's output is connected to MCU, and MCU still is connected with warning circuit and power module with TF card, photoelectricity demonstration simultaneously, multi -direction adjuster includes the hemisphere base body, annular cover lid and sets up the flat spherical shell of implication on the hemisphere base body, annular cover lid overlapped this flat spherical shell upper end and hemisphere base body fixed connection, appeared and reversed flat spherical shell in the flat spherical shell upper end of external of annular upper shield as handheld end, can a plurality of orientations obtain the noise data, easy operation low cost can obtain the voice signal that noise level corresponds.

Description

A kind of MEMS microphone for multi-direction test high ferro noise
Technical field
The utility model belongs to noise measuring technical field, is specifically related to a kind of MEMS microphone for multi-direction test high ferro noise.
Background technology
The noise that high ferro locomotive produces can have a strong impact on the comfort level of high ferro passenger.Easily hearing impairment is caused under being in noisy environment for a long time.Therefore to the monitoring of noise signal with analyze and improve comfort of passenger for strick precaution noise and have great significance.Simultaneously due to the periodicity of high ferro noise signal, traditional noise-measuring instrument generally adopts artificial one-point measurement to obtain the noise data of a certain period, the method also exists larger limitation, be mainly manifested in: 1. often adopt artificial mode to control sensor and carry out collection signal, the noise signal of sensor collection needs cannot be controlled according to the decibel of noise flexibly; 2. while acquisition noise signal, the real-time information such as warning or working sensor state cannot be given, so that judge the size of current noise; 3. cannot facilitate and freely adjust noise-measuring direction.
MEMS sensor adopts microelectronics and the produced novel sensor of micromachining technology.The silicon microphone of MEMS sensor technology manufacture is utilized to have good acoustical behavior, simultaneously high temperature resistant, reliability, homogeneity, power consumption, and size design has very large flexibility ratio.
Utility model content
For the deficiency that prior art exists, the utility model provides a kind of MEMS microphone for multi-direction test high ferro noise.
The technical solution of the utility model:
For a MEMS microphone for multi-direction test high ferro noise, comprise multi-direction adjuster, MCU, sound transducer, signal amplification circuit, sample circuit, TF card, photoelectric display and warning circuit and power module; The wherein input end of the output terminal connection signal amplifying circuit of sound transducer, the output terminal of signal amplification circuit connects the input end of sample circuit, the output terminal of sample circuit is connected to MCU, and MCU is also connected with power module with warning circuit with TF card, photoelectric display simultaneously;
This MEMS microphone comprises two kinds of circuit board forms, and the first form: MCU, sound transducer, signal amplification circuit, sample circuit, TF card photoelectric display and warning circuit and power module are integrated on one piece of circuit board; Power module is for powering for all parts on circuit board, and this circuit board is fixedly encapsulated in the flattened spherical enclosure interior of described multi-direction adjuster;
The second form: MCU, sound transducer, signal amplification circuit and sample circuit are integrated on first piece of circuit board, and first piece of circuit board package is fixed on the ball top place in episphere or the ball top place in lower semisphere; TF card, photoelectric display and warning circuit, power module are integrated on second piece of circuit board, and correspondingly second piece of circuit board package is fixed on the ball top place in lower semisphere or the ball top place in episphere; Connected by a flexible winding displacement between first piece of circuit board and second piece of circuit board; Power module is for powering for all parts on first piece of circuit board and second piece of circuit board.
Described multi-direction adjuster comprises semisphere base body, annular sleeve lid and encapsulates fixing flattened spherical housing for carrying out circuit board, described flattened spherical housing is made up of the two parts be fixedly connected with, and is defined as episphere and lower semisphere respectively, and the top of upper and lower hemisphere is flat, flattened spherical housing is arranged on semisphere base body, annular sleeve lid overlapped this flattened spherical housing upper end and was fixedly connected with semisphere base body, and flattened spherical housing upper end is emerging in annular sleeve lid portion outside, this flattened spherical housing upper end being emerging in annular sleeve lid portion outside is as handheld terminal, flattened spherical housing is reversed for manual, flattened spherical housing can slide arbitrarily adjustment under the effect of twisting resistance in semisphere base body, the noise signal measurement direction realizing the sound transducer in flattened spherical housing is consistent with noise measuring point direction interested, thus the object that can realize from multiple directions test high ferro noise,
The described flattened spherical housing upper end being emerging in annular sleeve lid portion outside arranges one can make noise enter the slot of flattened spherical enclosure interior and arrange 3 holes that three are respectively used to install 3 LED light in fixing photoelectricity display circuit; Further, this slot is provided with for avoiding in noise testing compared with the windproof screening glass that strong wind rapid-curing cutback is disturbed;
On described annular sleeve lid, be provided with the jig of bolt structure form further, this jig to penetrate in annular sleeve lid and rigid contact direct with flattened spherical housing outside annular sleeve lid;
Further, the bottom surface of described semisphere base body is provided with powerful magnet, meanwhile, is also provided with threaded hole bottom base body; When selected structure near noise position to be measured is ferrous material, by the method for magnetic-adsorption, semisphere base body is fixedly connected on the surface of selected structure; When mechanism to be measured is non-ferrous material, the threaded hole arranged bottom semisphere base body is utilized to be fixed on selected body structure surface by semisphere base body by stud.
Again further, slideway is also installed in the bottom of described semisphere base body, and this slideway can coordinate with harmless paster, by the mode in harmless paster bottom surface glue coated, is fixed on selected body structure surface by semisphere base body.
Beneficial effect: the utility model is on the basis of novel MEMS microphone, a kind of MEMS microphone for multi-direction test high ferro noise proposed, it not only has noise testing and memory function, can also by the multi-direction adjuster of design, under the condition without the need to being equipped with data collecting instrument, realizing the acquisition of multiple directions noise data, the Measurement accuracy of noise signal can be realized, and simple to operate with low cost, complicated working environment can be adapted to.Meanwhile, also have noise and trigger and photoelectric display function, can obtain voice signal corresponding to required noise grade neatly, it has broad application prospects in high ferro walkaway field.
Accompanying drawing explanation
Fig. 1 is the structural representation of the circuit board 90 of the first embodiment of the utility model;
Fig. 2 is the stereographic map of the comprehensive adjuster 10 of a kind of embodiment of the utility model;
Fig. 3 is the flattened spherical housing of the utility model the second embodiment and the assembling schematic diagram of circuit board;
Fig. 4 is the vertical view that the utility model is emerging in flattened spherical housing 102 upper end of annular sleeve lid 101 outside;
Fig. 5 is MSP430F435 type single-chip microcomputer and the peripheral circuit diagram thereof of the utility model embodiment;
Fig. 6 is the sound transducer of a kind of embodiment of the utility model and the annexation figure of signal amplification circuit;
Fig. 7 is the sample circuit figure of a kind of embodiment of the utility model;
Fig. 8 is 473521001 type TF card socket circuit figure of a kind of embodiment of the utility model;
Fig. 9 is the photoelectric display circuit diagram of a kind of embodiment of the utility model;
Figure 10 is the warning circuit figure of a kind of embodiment of the utility model.
Embodiment
Below in conjunction with accompanying drawing, a kind of embodiment of the present utility model is elaborated.
MEMS microphone for multi-direction test high ferro noise of the present utility model, comprising: multi-direction adjuster 10, MCU20, sound transducer 30, sample circuit 50, signal amplification circuit 80, TF card (Trans-flashCard) 40, photoelectric display and warning circuit 60 and power module 70.The wherein input end of the output terminal connection signal amplifying circuit 80 of sound transducer 30, the output terminal of signal amplification circuit 80 connects the input end of sample circuit 50, the output terminal of sample circuit 50 is connected to MCU20, and MCU20 is also connected with power module 70 with warning circuit 60 with TF card 40, photoelectric display simultaneously;
The first embodiment of the present utility model is integrated on one piece of circuit board 90 by MCU20, sound transducer 30, TF card (Trans-flashCard) 40, sample circuit 50, signal amplification circuit 80, photoelectric display and warning circuit 60 and power module 70, as shown in Figure 1, wherein power module 70 is for powering for all parts on circuit board 90, the flattened spherical housing 102 that circuit board 90 is fixedly encapsulated in multi-direction adjuster 10 is inner, power module adopts chargeable button cell in a first embodiment, and capacity is 120 ~ 180mA; The lithium battery power supply chip of what corresponding charging circuit adopted is TI, the adjustment of charging process experience, constant current, constant voltage three links.
In order to as far as possible for MEMS microphone provides longer electrification time, high capacity cell 83 can be adopted, simultaneously, for the ease of changing battery 83, make full use of microphone space, reduce microphone volume, the second embodiment of the present utility model is integrated on first piece of circuit board 81 MCU20, sound transducer 30, signal amplification circuit 80 and sample circuit 50, and first piece of circuit board 81 is encapsulated the ball top place that is fixed in episphere or the ball top place in lower semisphere; TF card (Trans-flashCard) 40, photoelectric display and warning circuit 60 and power module 70 are integrated on second piece of circuit board 82, and correspondingly second piece of circuit board 82 are encapsulated the ball top place that is fixed in lower semisphere or the ball top place in episphere; As shown in Figure 3, first piece of circuit board 81 encapsulates the ball top place be fixed in episphere, and correspondingly the second fast-circuit plate 82 encapsulates the ball top place be fixed in lower semisphere; Connected by a flexible winding displacement between first piece of circuit board 81 and second piece of circuit board 82 in the second embodiment, MCU20 is connected with power module 70 with warning circuit 60 with TF card 40, photoelectric display simultaneously;
Described multi-direction adjuster 10 comprises semisphere base body 100, annular sleeve lid 101 further and encapsulates fixing flattened spherical housing 102 for carrying out circuit board, as shown in Figures 2 and 3, described flattened spherical housing 102 is made up of the two parts be fixedly connected with, and is defined as episphere 1021 and lower semisphere 1022 respectively, and the top of upper and lower hemisphere 1021,1022 is flat, this microphone is when mounted: (1) first, in the first embodiment of the present utility model, circuit board 80 encapsulated and be fixed on flat position place, episphere 1021 top or the flat position place, lower semisphere 1022 top of flattened spherical housing 102, moving to avoid circuit board 80, in the second embodiment of the present utility model, first piece of circuit board package is fixed on the flat position place, episphere 1021 top of flattened spherical housing 102, second piece of circuit board package is fixed on the flat position place, lower semisphere 1022 top of flattened spherical housing 102, moves to avoid circuit board 80, (2) then, hemisphere 1021 and lower semisphere 1022 are together by a threaded connection formation flattened spherical housing 102, (3) following, this flattened spherical housing 102 is placed on semisphere base body 100, (4) subsequently, annular sleeve lid 101 was overlapped this flattened spherical housing 102 upper end to be fixedly connected with thread forms with semisphere base body 100, be emerging in the upper end 10211 of the flattened spherical housing 102 of annular sleeve lid 101 outside as handheld terminal, flattened spherical housing 102 is reversed for manual, flattened spherical housing 102 can slide arbitrarily adjustment under the effect of twisting resistance in semisphere base body 100, the noise signal measurement direction realizing the MEMS acceleration transducer 30 in flattened spherical housing 102 is consistent with noise measuring point direction interested, thus multi-direction test high ferro noise can be realized.
Described flattened spherical housing 102 upper end being emerging in annular sleeve lid 101 outside arranges one can make noise enter the hole 1023 of flattened spherical enclosure interior, as shown in Figure 4, and 3 holes 1024 that three are respectively used to install 3 LED light in fixing photoelectricity display circuit are set.Present embodiment hole 1023 is rectangular opening, as shown in Figure 4, and on this hole, is provided with windproof screening glass 1025, and to avoid wind speed interference larger in noise testing, it can be cut into by the material such as resin, sponge.
In addition, annular sleeve lid 101 is provided with the jig 103 of bolt structure form, as shown in Figure 2, this jig 103 to penetrate outside annular sleeve lid 101 in annular sleeve lid 101 and with flattened spherical housing 102 directly rigid contact, with fixing flattened spherical housing 102, avoid sliding between flattened spherical housing 102 and semisphere base body 100 in noise signal test process.
When applying described MEMS microphone, semisphere base body 100 need be fixed on and need selected structure near test noise position (such as, wall, door-plate, window etc.) on, for realizing this purpose, the bottom surface of semisphere base body 100 of the present utility model is provided with powerful magnet, meanwhile, also threaded hole is provided with bottom base body 100; When selected structure near noise position to be measured is ferrous material, by the method for magnetic-adsorption, semisphere base body 100 is fixedly connected on the surface of selected structure; When mechanism to be measured is non-ferrous material, the threaded hole arranged bottom semisphere base body 100 is utilized to be fixed on selected body structure surface by stud 104 by semisphere base body 100; In addition, the bottom of semisphere base body 100 there is also mounted slideway 105, and as shown in Figures 2 and 3, this slideway 105 can coordinate with harmless paster 106, by the mode in harmless paster 106 bottom surface glue coated, semisphere base body 100 is fixed on selected body structure surface.
What described MCU adopted is MSP430F435 type single-chip microcomputer, MSP430F435 type single-chip microcomputer as shown in Figure 5 and peripheral circuit diagram thereof; What the sound transducer of present embodiment adopted is model is the sound transducer of HUC1002 type; As shown in Figure 6, the output terminal of sound transducer is connected with the input end of signal amplification circuit.The operational amplifier cascade that the signal amplification circuit of present embodiment is LM2904 by two models is formed, as shown in Figure 6.The sampling A/D chip of to be model the be AD7888 that sample circuit adopts in present embodiment, as shown in Figure 7.The analog signals that sound transducer will collect, after signal amplification circuit, pass to AD7888 sampling A/D chip, the noise simulation transform electrical signals collected is noisy digit electric signal by AD7888 sampling A/D chip, carries out data interaction by SPI interface and MSP430F435 type single-chip microcomputer.The output terminal of signal amplification circuit is connected to the AIN1 pin of AD7888 sampling A/D chip; The pin of AD7888 sampling A/D chip rEF, SCLK, DOUT, DIN are connected with pin P3.0, VREF+, P3.3, P3.2, P3.1 of MSP430F435 type single-chip microcomputer respectively.
The sudden strain of a muscle enlightening TF card of what the TF card of present embodiment adopted is 8G as shown in Figure 8, is by TF card insertion 473521001 type TF card socket when applying TF card; Present embodiment utilizes the SPI interface of MSP430F435 type single-chip microcomputer to carry out read-write operation to TF card, operates data to be stored.The pin P1.1 to P1.4 of MSP430F435 type single-chip microcomputer couples together with CS, DI, SCLK and DO of 473521001 type TF card sockets respectively.
Described photoelectric display and warning circuit are made up of photoelectric display circuit and warning circuit two parts, and respectively as shown in Figure 9 and Figure 10, wherein photoelectric display circuit comprises 3 LED light, is used to indicate the duty of microphone.When microphone is energized, amber light is bright; The green light when microphone can normally work measuring-signal in range; When measuring-signal exceedes range, when red when microphone cannot normally work, simultaneously trigger alarm circuit, give audible alarm prompting.Linked together by the I/O port of MSP430F435 type single-chip microcomputer and the LED light of photoelectric display circuit and the hummer of warning circuit, what LED light utilized is the I/O signal of Low level effective, hummer relies on MSP430F435 type single-chip microcomputer to be driven by triode, utilization be the effective I/O signal of high level.
The method of the MEMS microphone for multi-direction test high ferro noise described in employing, comprises the steps:
Step 1: according to the needs of test sound signal, is correspondingly arranged on one or more measuring point predetermined needing the near zone of test noise signal by one or more microphone;
Step 2: the noise direction interested first determining measuring point, then jig 103 is loosened and make flattened spherical housing 102 can be freely movable, subsequently by described handheld terminal hand-turning flattened spherical housing 102, after making the measurement direction of sound transducer consistent with noise direction interested, locking clamping apparatus 103 again, to make flattened spherical housing 102 fix, avoid vibration;
Step 3: the high ferro vibrating diaphragm that the sound wave of noise that produces can trigger HUC1002 type sound transducer that is in operation bends, and then the electric capacity between vibrating diaphragm and backboard changes, thus voice signal is converted into analog electrical signal, then by signal amplification circuit, this analog electrical signal is amplified, finally by sample circuit transform electrical signals is digital electric signal and this digital telecommunication number is passed through I 2c bus sends MSP430F435 type single-chip microcomputer to;
Step 3-1: when first time powers on to circuit board, first MSP430F435 type single-chip microcomputer carries out initialization to its peripheral hardware and reset work, is then waken up from deep sleep state by Mailbox order HUC1002 type sound transducer.
Step 3-2:MSP430F435 type single-chip microcomputer is by triggering START signal to I 2c bus represents the transmission starting data, now I 2data line (SDA line) in C bus jumps to low level by high level and represents that bus enters busy state.And then after START signal, MSP430F435 type single-chip microcomputer as main frame can send a byte data, front 7 bit representation slave addresses, the 8th is used to indicate data direction is read (utilizing 1 expression data from from machine to main frame) or write (utilizing 0 expression data from main frame to from machine).I afterwards 2in C bus all from machine by the address of oneself with compare from the address that bus receives, matching addresses is the equipment that main frame is chosen.Now single-chip microcomputer is namely by certain sequential access I 2c bus realizes reading to digital signal and write.When SDA line is switched to high level by low level time, represent stop condition, stop condition will stop the transmission of this secondary data.
The noisy digit electrical signal data received and the threshold value preset contrast by step 4:MCU in real time, and according to comparing result, the noise signal of corresponding noise grade are filtered out as noise signal to be stored;
Step 4-1: present embodiment presets two noise thresholds in MSP430F435 type single-chip microcomputer: the uncomfortable noise threshold values 80dB and hearing impairment noise threshold values 110dB of hearing; Noise signal due to high ferro has very strong sudden and instantaneity, in special time period, have again certain periodicity, pays close attention to the noise signal exceeding some setting values just meaningful, and without the need to the noise signal of record lower than the setting value corresponding moment.
Uncomfortable to the noisy digit electrical signal data received and the hearing preset noise threshold values 80dB and hearing impairment noise threshold values 110dB contrasts by step 4-2:MSP430F435 type single-chip microcomputer, if when current high ferro locomotive noise signal is more than or equal to the uncomfortable noise threshold values 80dB of hearing and is less than threshold value hearing impairment noise threshold values 110dB, then show that current noise has exceeded normal range, can make us doing not feel like oneself under such noise circumstance for a long time, but be not also extremely ear-piercing noise, this noise grade also can not cause serious damage to the sense of hearing of people.But be necessary very much current noise signal to store, so that further analyze and monitoring, for the noise reduction measure of follow-up employing provides experimental data; If current high ferro locomotive noise signal is less than hearing uncomfortable noise threshold values 80dB, then show that current noise size meets normal standard, the noise that now high ferro produces in traveling process can't allow people produce dislike or uncomfortable, does not therefore need current noise signal to store; If current high ferro locomotive noise signal is more than or equal to hearing impairment noise threshold values 110dB, then show that current noise is extremely ear-piercing, have a strong impact on the sense of hearing and the physical and mental health of passenger, must above-mentioned noise signal be gathered and be stored, so that follow-up employing noise reduction measure improves.First judge that the method for noise grade selects the noise signal needing to gather intelligently by this, while ensureing accurate acquisition to be concerned about noise signal, also reduce the power consumption of sensor.
Step 5:MCU sends to TF card to store after the data that needs store are carried out filtering process.
Step 5-1:MCU is first by I 2data in C bus are deposited in buffer queue, carry out filtering process afterwards to the data in buffer queue;
Step 5-2: filtered data can be written into TF Ka Shuojuzancunqu, TF card data processing function by after Data Segmentation, names into multiple sizeable file by acquisition time according to intelligent segmentation algorithm;
Step 5-3:TF card according to cryptographic algorithm by segmentation after data encryption and be stored in each file above-mentioned after data are compressed;
Step 5-4:TF card read/write function can in real time by the file after segmentation, by the file system that establishes during the initialization of spi bus writing system, so that host computer is further analyzed data and processes.

Claims (10)

1. for a MEMS microphone for multi-direction test high ferro noise, it is characterized in that: comprise multi-direction adjuster (10), MCU (20), sound transducer (30), signal amplification circuit (80), sample circuit (50), TF card (40), photoelectric display and warning circuit (60) and power module (70);
Described MCU (20), sound transducer (30), signal amplification circuit (80), sample circuit (50), TF card (40), photoelectric display and warning circuit (60) and power module (70) are integrated on one piece of circuit board (90); Power module (70) is for powering for all parts on this circuit board (90), and it is inner that circuit board (90) is fixedly encapsulated in flattened spherical housing (102);
Described multi-direction adjuster (10) comprises semisphere base body (100), annular sleeve lid (101) and encapsulates fixing flattened spherical housing (102) for carrying out circuit board; Described flattened spherical housing (102) is made up of the two parts be fixedly connected with, and is defined as episphere (1021) and lower semisphere (1022) respectively; The top of upper and lower hemisphere (1021,1022) is flat; Flattened spherical housing (102) is arranged on semisphere base body (100), annular sleeve lid (101) overlapped this flattened spherical housing (102) upper end and was fixedly connected with semisphere base body (100), and flattened spherical housing upper end is emerging in annular sleeve lid (101) outside; Flattened spherical housing (102), as handheld terminal, is reversed for manual in the upper end (10211) being emerging in the outside flattened spherical housing (102) of annular sleeve lid (101); Flattened spherical housing (102) can slide arbitrarily adjustment under the effect of twisting resistance in semisphere base body (100), the noise signal measurement direction realizing the sound transducer (30) in flattened spherical housing (102) is consistent with noise measuring point direction interested, thus can realize multi-direction test high ferro noise; Described flattened spherical housing (102) upper end being emerging in annular sleeve lid (101) outside arranges one can make noise enter the hole (1023) of flattened spherical enclosure interior.
2. for a MEMS microphone for multi-direction test high ferro noise, it is characterized in that: comprise multi-direction adjuster (10), MCU (20), sound transducer (30), signal amplification circuit (80), sample circuit (50), TF card (40), photoelectric display and warning circuit (60) and power module (70);
Described MCU (20), sound transducer (30), signal amplification circuit (80) and sample circuit (50) are integrated on first piece of circuit board (81), and first piece of circuit board (81) encapsulation is fixed on episphere (1021) interior ball top place or lower semisphere (1022) interior ball top place; TF card (40), photoelectric display and warning circuit (60) and power module (70) are integrated on second piece of circuit board (82), and correspondingly the encapsulation of second piece of circuit board (82) is fixed on the ball top of lower semisphere (1022) interior ball top place or episphere (1021); Connected by flexible winding displacement between first piece of circuit board (81) and second piece of circuit board (82), MCU is coupled together with TF card, photoelectric display and warning circuit and power module simultaneously;
Described multi-direction adjuster (10) comprises semisphere base body (100), annular sleeve lid (101) and encapsulates fixing flattened spherical housing (102) for carrying out circuit board; Described flattened spherical housing (102) is made up of the two parts be fixedly connected with, and is defined as episphere (1021) and lower semisphere (1022) respectively; The top of upper and lower hemisphere (1021,1022) is flat; Flattened spherical housing (102) is arranged on semisphere base body (100), annular sleeve lid (101) overlapped this flattened spherical housing (102) upper end and was fixedly connected with semisphere base body (100), and flattened spherical housing upper end is emerging in annular sleeve lid (101) outside; Flattened spherical housing (102), as handheld terminal, is reversed for manual in the upper end (10211) being emerging in the outside flattened spherical housing (102) of annular sleeve lid (101); Flattened spherical housing (102) can slide arbitrarily adjustment under the effect of twisting resistance in semisphere base body (100), the noise signal measurement direction realizing the sound transducer (30) in flattened spherical housing (102) is consistent with noise measuring point direction interested, thus can realize multi-direction test high ferro noise; Described flattened spherical housing (102) upper end being emerging in annular sleeve lid (101) outside arranges one can make noise enter the hole (1023) of flattened spherical enclosure interior.
3. the MEMS microphone of multi-direction test high ferro noise according to claim 1 and 2, is characterized in that: be provided with on described hole (1023) for avoiding in noise testing compared with the windproof screening glass (1025) that strong wind rapid-curing cutback is disturbed.
4. the MEMS microphone of multi-direction test high ferro noise according to claim 1 and 2, it is characterized in that: the jig (103) being provided with bolt structure form on described annular sleeve lid (101), this jig (103) to penetrate from annular sleeve lid (101) outside in annular sleeve lid (101) and with flattened spherical housing (102) directly rigid contact.
5. the MEMS microphone of multi-direction test high ferro noise according to claim 3, it is characterized in that: the jig (103) being provided with bolt structure form on described annular sleeve lid (101), this jig (103) to penetrate from annular sleeve lid (101) outside in annular sleeve lid (101) and with flattened spherical housing (102) directly rigid contact.
6. the MEMS microphone of multi-direction test high ferro noise according to claim 3, it is characterized in that: the bottom surface of described semisphere base body (100) is provided with powerful magnet, meanwhile, base body (100) bottom is also provided with threaded hole; When selected structure near noise position to be measured is ferrous material, by the method for magnetic-adsorption, semisphere base body (100) is fixedly connected on the surface of selected structure; When mechanism to be measured is non-ferrous material, semisphere base body (100) is fixed on selected body structure surface by stud (104) by the threaded hole utilizing semisphere base body (100) bottom to arrange.
7. the MEMS microphone of multi-direction test high ferro noise according to claim 4, it is characterized in that: the bottom surface of described semisphere base body (100) is provided with powerful magnet, meanwhile, base body (100) bottom is also provided with threaded hole; When selected structure near noise position to be measured is ferrous material, by the method for magnetic-adsorption, semisphere base body (100) is fixedly connected on the surface of selected structure; When mechanism to be measured is non-ferrous material, semisphere base body (100) is fixed on selected body structure surface by stud (104) by the threaded hole utilizing semisphere base body (100) bottom to arrange.
8. the MEMS microphone of multi-direction test high ferro noise according to claim 5, it is characterized in that: the bottom surface of described semisphere base body (100) is provided with powerful magnet, meanwhile, base body (100) bottom is also provided with threaded hole; When selected structure near noise position to be measured is ferrous material, by the method for magnetic-adsorption, semisphere base body (100) is fixedly connected on the surface of selected structure; When mechanism to be measured is non-ferrous material, semisphere base body (100) is fixed on selected body structure surface by stud (104) by the threaded hole utilizing semisphere base body (100) bottom to arrange.
9. the MEMS microphone of multi-direction test high ferro noise according to claim 7, it is characterized in that: slideway (105) is installed in the bottom of described semisphere base body (100), this slideway (105) can coordinate with harmless paster (106), by the mode in harmless paster (106) bottom surface glue coated, semisphere base body (100) is fixed on selected body structure surface.
10. the MEMS microphone of multi-direction test high ferro noise according to claim 8, it is characterized in that: slideway (105) is installed in the bottom of described semisphere base body (100), this slideway (105) can coordinate with harmless paster (106), by the mode in harmless paster (106) bottom surface glue coated, semisphere base body (100) is fixed on selected body structure surface.
CN201520617033.0U 2015-08-17 2015-08-17 A MEMS microphone that is used for multi -direction test high -speed railway noise Expired - Fee Related CN204964008U (en)

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CN105157815A (en) * 2015-08-17 2015-12-16 东北大学 MEMS sensor for multidirectional high-speed rail noise test and method of MEMS sensor
CN110300361A (en) * 2019-06-20 2019-10-01 钰太芯微电子科技(上海)有限公司 A kind of MEMS microphone with Wireless charging coil
CN115032686A (en) * 2022-05-20 2022-09-09 江苏名欧精密机械有限公司 Geophone device for geophysical exploration in hole

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105157815A (en) * 2015-08-17 2015-12-16 东北大学 MEMS sensor for multidirectional high-speed rail noise test and method of MEMS sensor
CN105157815B (en) * 2015-08-17 2018-10-23 东北大学 A kind of application method of MEMS microphone for multi-direction test high ferro noise
CN110300361A (en) * 2019-06-20 2019-10-01 钰太芯微电子科技(上海)有限公司 A kind of MEMS microphone with Wireless charging coil
CN115032686A (en) * 2022-05-20 2022-09-09 江苏名欧精密机械有限公司 Geophone device for geophysical exploration in hole

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