CN204913051U - Implant device based on scanning galvanometer quick travel laser focus - Google Patents
Implant device based on scanning galvanometer quick travel laser focus Download PDFInfo
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- CN204913051U CN204913051U CN201520725380.5U CN201520725380U CN204913051U CN 204913051 U CN204913051 U CN 204913051U CN 201520725380 U CN201520725380 U CN 201520725380U CN 204913051 U CN204913051 U CN 204913051U
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Abstract
The utility model discloses an implant device based on scanning galvanometer quick travel laser focus, including laser instrument, portable lens, focusing lens, X scanning mirror and Y scanning mirror, X shake mirror and Y shake mirror and control system, the shake motion of mirror of mirror and Y of shaking of control system control X, and then the reflection angle of control X scanning mirror and Y scanning mirror, the laser of laser instrument production passes through portable lens are adjusted, then focus on laser through focusing lens, and laser after the focus reflects the substrate placed in the turbid liquid by the target grain composition on the surface through X scanning mirror and Y scanning mirror. The utility model discloses a mirror technique of shaking, control laser focus scans the motion according to specific movement track and scanning speed, the surface that need implant the subparticle at the substrate, and the turbid liquid constantly provides implants required target, the mirror quick travel laser focus of shaking, the surrounding environment of twice implantation around having guaranteed is in always stabilizes the state.
Description
Technical field
The technical field that the utility model relates to surface fine structure processing, laser is implanted, particularly relates to a kind of implanted device based on the quick mobile laser spot of scanning galvanometer.
Background technology
Microcircuit refers to have high density equivalent-circuit component and (or) parts, and can be used as the microelectronic component of separate piece.MEMS (MEMS) refers to that size is at several millimeters and even less high-tech device, its internal structure is generally in micron even nanometer scale, it is an independently intelligence system, primarily of sensor, actuator (actuator) and micro-energy three parts composition, there is microminiaturization, intellectuality, multi-functional, high integration and be suitable for producing these features in enormous quantities.Have a wide range of applications in electronics, medical science, industry, automobile and aerospace system.Microfluidic system, also known as microfluidic analysis chip, micro-total analysis system (μ TAS) or chip lab, Micrometer-Nanometer Processing Technology is utilized to be integrated on one piece of microchip by various functional units such as microchannel, Micropump, micro-valve, microreactor, microsensor, micro-detectors, by controlling solution flowing wherein, carry out the micro-analysis system of the functions such as the sample preparation involved by the fields such as biological and chemical, mixing, reaction, separation, detection, biochemical analysis.In bioanalysis, microchemical analysis and detection, microelectronic device cools, and microsatellite bearing adjusts, and the fields such as portable fuel battery all present good application prospect.
Continuous microstructure, particularly continuous metal micro-structural, have important application value in fields such as microcircuit, fine electronic devices and components, micro-fluidic and MEMSs, people more and more pay close attention to induced with laser and shift forward the method preparing metal continuous microstructure in recent years.Jacob(JamesA.Grant-Jacob, BenjaminMills, MatthiasFeinaeugleetal.Micron-scalecopperwiresprintedusi ngfemtosecondlaser-inducedforwardtransferwithautomateddo norreplenishment.OpticalMaterialsExpress, 2013,3 (6): 747-754.) etc. propose one " automatic target supply technology ", prepare the micro-line of continuous metal in conjunction with " induced with laser is transfer techniques forward ".In laser pulse melting and while target micelle of dishing out, continuous mobile target, make post laser pulsed irradiation on new target region, and make the continuous stacking deposition of follow-up micelle of dishing out, form continuous micro-line, as shown in Figure 1, their profit in this way success prepared on a silicon substrate some tens of pm wide, reach micro-copper cash of several millimeters.
In order to improve the uniformity of continuous structure deposition, have scholar's liquid towards target forward transfer techniques be studied, " liquid target forwards moves technology " applies the liquid target sheet material layers of some tens of pm on transparent restraint layer, as particle suspension, Polymer Solution, colloid and biofluid etc., in order to absorbing laser energy, often need to prepare absorbed layer (sacrifice layer) (as Fig. 2 (a)) on liquid target, or in target, add light energy absorption material, with absorbing laser energy, provide the motive force of dishing out needed for target.Another benefit adopting sacrifice layer to protect liquid target, reduces the heat effect impact of laser.Florian(C.Floriana, F.Caballero-Lucasa, J.M.Fernandez-Pradasaetal.Conductivesilverinkprintingthr oughthelaser-inducedforwardtransfertechnique.AppliedSurf aceScience, 2015, etc. inpress.) induced with laser that have studied silver-colored ink shifts forward, in order at deposition on substrate micro wire, experiment finds the continuous micro-line obtained by drop repeatedly stacking, compare micro-line that solid target material deposition obtains, its uniformity is better, microscopic appearance is more smooth (Fig. 2 (b)) also.
The time of laser action is about a millisecond rank, in the preparation of continuous microstructure, need to adopt stacking method, repeatedly carry out implantation process, the time interval of Millisecond is still long, this makes " automatic target supply technology " and " liquid target forwards moves technology " treatment effeciency is lower, and " automatic target supply technology " and " liquid target forwards moves technology " are all use single light path to implant, and do not have the scheme that similar use galvanometer is implanted simultaneously.
Utility model content
For deficiency of the prior art, the technical problem that the utility model solves is the implanted device based on the quick mobile laser spot of scanning galvanometer that a kind of double light path of proposition carries out implanting, control laser beam with specific movement locus and sweep speed, quick mobile laser spot, needing the substrate surface implanting subparticle to carry out scanning motion, improve the implantation efficiency of large area continuous microstructure.
In order to solve the problems of the technologies described above, implement the implanted device based on the quick mobile laser spot of scanning galvanometer of the present utility model and comprise laser instrument, movable lens, condenser lens, X scanning mirror and Y scanning mirror, X galvanometer and Y galvanometer, and control system, the motion of described control system control X galvanometer and Y galvanometer, and then the reflection angle of control X scanning mirror and Y scanning mirror, the laser that laser instrument produces is regulated by described movable lens, then through condenser lens, laser is focused on, laser after focusing reflexes on the surface of the base material in the suspension being positioned over and being made up of target particle through X scanning mirror and Y scanning mirror.
Accordingly, the method for implantation based on the quick mobile laser spot of scanning galvanometer that the utility model embodiment provides, comprises the following steps:
S1: base material is positioned in the suspension be made up of target particle;
S2: laser is regulated by movable lens, then focuses on laser through condenser lens;
S3: laser beam incides on X scanning mirror and Y scanning mirror;
S4: the motion using control system control X galvanometer and Y galvanometer, and then the reflection angle of control X scanning mirror and Y scanning mirror;
S5:X scanning mirror and Y scanning mirror respectively along X, Y axis scanning, can realize laser spot according to specific movement locus, carry out scanning motion with specific sweep speed on the surface of base material, make laser spot scans to base material surface all to be processed;
S6: when the laser energy focused on is greater than the breakdown threshold of suspension, laser breakdown suspension, produces Cathode plasma explosion and gives off plasma stock wave;
S7: also externally give off shock wave when inducing the cavitation bubble of generation to crumble and fall after plasma disappearance;
S8: cavitation bubble and substrate surface interact and produce high-speed micro-jet;
S9: the shock wave that induction produces and high-speed micro-jet, promotes subparticle and impacts implantation base material.
The implanted device based on the quick mobile laser spot of scanning galvanometer that the utility model embodiment provides, has following beneficial effect:
In the implanted device based on the quick mobile laser spot of scanning galvanometer that the utility model embodiment provides, control laser beam with specific movement locus and sweep speed, quick mobile laser spot, needing the substrate surface implanting subparticle to carry out scanning motion, improve the implantation efficiency of large area continuous microstructure; The utility model uses the motion of control system control X galvanometer and Y galvanometer, and then the reflection angle of control X scanning mirror and Y scanning mirror, these two scanning mirrors can respectively along X, Y axis scanning, thus realize laser spot according to specific movement locus, scanning motion is carried out on the surface of base material with specific sweep speed, use two light paths to implant, the environment before and after ensureing around twice implantation is in stable state always, ensures the uniformity of continuous microstructure.The position that implanted device based on the quick mobile laser spot of scanning galvanometer of the present utility model uses galvanometer to be set required for the base material by laser reflection, the region of adjacent twice implantation can be separated by very large, the surrounding environment of twice implantation in front and back is in stable state always, improve and implant efficiency, ensure the uniformity of continuous microstructure.The utility model have employed mirror techniques, controls laser spot according to specific movement locus and sweep speed, needs the surface of implanting subparticle to carry out scanning motion, so improve implantation efficiency at base material; Suspension constantly provides the target required for implantation, ensure that the uniformity of continuous microstructure; The quick mobile laser spot of galvanometer, ensure that the surrounding environment of twice implantation in front and back is in stable state always.
Accompanying drawing explanation
Fig. 1 a is the schematic diagram of the automatic target supply shifting forward the micro-copper cash of preparation based on the induced with laser of automatic target supply.
Fig. 1 b is the structural representation shifting forward the fine copper cash that the micro-copper cash of preparation deposits on a silicon substrate based on the induced with laser of automatic target supply.
Fig. 2 a is the general principle figure that the induced with laser of fluent material shifts forward.
Fig. 2 b is the continuous micro-line structure schematic diagram adopting nano-Ag particles ink to deposit on a glass substrate.
Fig. 3 is the structural representation of the implanted device based on the quick mobile laser spot of scanning galvanometer that the utility model preferred embodiment provides.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
See Fig. 3, the structural representation of the implanted device based on the quick mobile laser spot of scanning galvanometer that the utility model preferred embodiment provides, the utility model adopts scanning galvanometer to control laser spot according to specific movement locus, with specific sweep speed, need to implant the surface of subparticle at base material and carry out scanning motion, make laser spot scans to base material surface all to be processed, quick mobile laser spot, repeatedly implant, the region of adjacent twice implantation can be separated by very large.
In the implanted device based on the quick mobile laser spot of scanning galvanometer of the present embodiment, high energy pulse laser 7 is produced by laser instrument, the energy of laser and frequency-adjustable, laser is regulated by movable lens 6, then through condenser lens 5, laser is focused on, laser 7 bundle incides on X scanning mirror 2 and Y scanning mirror 4, use the motion of control system control X galvanometer 1 and Y galvanometer 3, and then the reflection angle of control X scanning mirror 2 and Y scanning mirror 4, these two scanning mirrors can respectively along X, Y axis scanning, thus realize laser spot according to specific movement locus, scanning motion is carried out on the surface of base material 8 with specific sweep speed, make laser spot scans to base material 8 surface all to be processed.Wherein, base material 8 and package unit are put in the suspension be made up of target particle, when the laser energy focused on is greater than the breakdown threshold of suspension, laser breakdown suspension, produce Cathode plasma explosion and give off plasma stock wave, when inducing the cavitation bubble of generation to crumble and fall after plasma disappearance, also externally give off shock wave; Cavitation bubble and substrate surface interact and produce high-speed micro-jet, the shock wave that induction produces and high-speed micro-jet, can promote subparticle and impact implantation base material 8.
The utility model is implemented to comprise laser instrument based on the implanted device of the quick mobile laser spot of scanning galvanometer, movable lens 6, condenser lens 5, X scanning mirror 2 and Y scanning mirror 4, X galvanometer 1 and Y galvanometer 3, and control system, the motion of described control system control X galvanometer 1 and Y galvanometer 3, and then the reflection angle of control X scanning mirror 2 and Y scanning mirror 4, the laser that laser instrument produces is regulated by described movable lens 6, then through condenser lens 5, laser is focused on, laser after focusing reflexes on the surface of the base material 8 in the suspension being positioned over and being made up of target particle through X scanning mirror 2 and Y scanning mirror 4.
In the implanted device based on the quick mobile laser spot of scanning galvanometer that the utility model embodiment provides, control laser beam with specific movement locus and sweep speed, quick mobile laser spot, needing the substrate surface implanting subparticle to carry out scanning motion, improve the implantation efficiency of large area continuous microstructure; The utility model uses the motion of control system control X galvanometer 1 and Y galvanometer 3, and then the reflection angle of control X scanning mirror 2 and Y scanning mirror 4, these two scanning mirrors can respectively along X, Y axis scanning, thus realize laser spot according to specific movement locus, scanning motion is carried out on the surface of base material 8 with specific sweep speed, use two light paths to implant, the environment before and after ensureing around twice implantation is in stable state always, ensures the uniformity of continuous microstructure.The position that implanted device based on the quick mobile laser spot of scanning galvanometer of the present utility model uses galvanometer to be set required for the base material by laser reflection, the region of adjacent twice implantation can be separated by very large, the surrounding environment of twice implantation in front and back is in stable state always, improve and implant efficiency, ensure the uniformity of continuous microstructure.
The utility model have employed mirror techniques, controls laser spot according to specific movement locus and sweep speed, needs the surface of implanting subparticle to carry out scanning motion, so improve implantation efficiency at base material; Suspension constantly provides the target required for implantation, ensure that the uniformity of continuous microstructure; The quick mobile laser spot of galvanometer, ensure that the surrounding environment of twice implantation in front and back is in stable state always.
The above is preferred embodiment of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications are also considered as protection domain of the present utility model.
Claims (1)
1. the implanted device based on the quick mobile laser spot of scanning galvanometer, it is characterized in that, comprise laser instrument, movable lens (6), condenser lens (5), X scanning mirror (2) and Y scanning mirror (4), X galvanometer (1) and Y galvanometer (3), and control system, the motion of described control system control X galvanometer (1) and Y galvanometer (3), and then the reflection angle of control X scanning mirror (2) and Y scanning mirror (4), the laser that laser instrument produces is regulated by described movable lens (6), then through condenser lens (5), laser is focused on, laser after focusing reflexes on the surface of the base material (8) in the suspension being positioned over and being made up of target particle through X scanning mirror (2) and Y scanning mirror (4).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520725380.5U CN204913051U (en) | 2015-09-18 | 2015-09-18 | Implant device based on scanning galvanometer quick travel laser focus |
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| CN201520725380.5U CN204913051U (en) | 2015-09-18 | 2015-09-18 | Implant device based on scanning galvanometer quick travel laser focus |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105397282A (en) * | 2015-09-18 | 2016-03-16 | 广东工业大学 | Implanting method and device based on rapid moving laser focus of scanning galvanometer |
| CN105727433A (en) * | 2016-01-28 | 2016-07-06 | 中山大学 | Micropore medicine patch, precise transdermal medicine delivery system adopting laser impact and medicine delivery method |
| CN106492715A (en) * | 2016-12-19 | 2017-03-15 | 广东工业大学 | A kind of method and device for preparing microgranule |
-
2015
- 2015-09-18 CN CN201520725380.5U patent/CN204913051U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105397282A (en) * | 2015-09-18 | 2016-03-16 | 广东工业大学 | Implanting method and device based on rapid moving laser focus of scanning galvanometer |
| CN105727433A (en) * | 2016-01-28 | 2016-07-06 | 中山大学 | Micropore medicine patch, precise transdermal medicine delivery system adopting laser impact and medicine delivery method |
| CN106492715A (en) * | 2016-12-19 | 2017-03-15 | 广东工业大学 | A kind of method and device for preparing microgranule |
| CN106492715B (en) * | 2016-12-19 | 2023-02-10 | 广东工业大学 | Method and device for preparing particles |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151230 Termination date: 20160918 |
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| CF01 | Termination of patent right due to non-payment of annual fee |