CN204882416U - Corner crystal tester - Google Patents
Corner crystal tester Download PDFInfo
- Publication number
- CN204882416U CN204882416U CN201520385690.7U CN201520385690U CN204882416U CN 204882416 U CN204882416 U CN 204882416U CN 201520385690 U CN201520385690 U CN 201520385690U CN 204882416 U CN204882416 U CN 204882416U
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- China
- Prior art keywords
- main shaft
- worm
- rack sleeve
- corner
- pointer
- Prior art date
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- Expired - Fee Related
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Abstract
The utility model provides a corner crystal tester, includes the work platen, establishes X ray generator, sample platform, X ray receiver, angular instrument on the work platen. The angular instrument include tester casing, main shaft, rack sleeve, worm -wheel shaft, worm subassembly, encoder, calibrated scale, main shaft pointer, main shaft carousel, corner pointer and hand wheel. The worm -wheel shaft has the encoder by solid dress left and right bearing frame location on the tester casing, worm -wheel shaft left end hookup, and the hand wheel is installed to the right -hand member, and the worm -wheel shaft is adorned integrative worm subassembly admittedly with the main shaft and is constituteed worm gear transmission group. The rack sleeve embeds the main shaft, and two upper and lower main shaft bearing of rack sleeve installation are with the main shaft accurate positioning. Main shaft pointer dress is on the main shaft top cap, and the calibrated scale cup joints in the rack sleeve upper end, and the main shaft carousel is adorned on the rack sleeve, and the corner pointer is fixed on the main shaft carousel correspondingly with the calibrated scale. The utility model discloses the corner of simple structure, convenient to use, crystal reads convenience, measuring accuracy height.
Description
Technical field
The utility model relates to X ray corner crystal checker, particularly relates to applying X-ray diffraction principle, to a kind of corner crystal checker of the different size such as monocrystalline silicon, sapphire crystalline material.
Background technology
The various diameter single crystal crystal ingots grown out are before being processed into crystal bar, wafer, and need monocrystalline crystal angle accurate, mensuration mode is that the crystal test angle of the standard angle of reference standard sheet and the crystalline material of processing contrasts, and finds out the corner of crystal.Traditional corner crystal checker, the sample measuring accuracy of its angular instrument is low, Workpiece carrier scarce capacity, measurement range are little, has limited to the application specification of monocrystalline ingot material, cannot meet the test of all size monocrystalline ingot material corner crystal.
Utility model content
The technical problems to be solved in the utility model is, there is provided one can test different size monocrystalline ingot material corner crystal, reduce the measuring error because corner crystal test set produces, the effective outer corner measurement precision improving tested crystal, measures easy corner crystal checker.
The technical scheme adopted is:
A kind of corner crystal checker, comprises working plate, is located at the x ray generator on working plate, sample stage, X ray receiver, angular instrument.Described angular instrument comprises tester housing, main shaft, rack sleeve, worm-wheel shaft, worm component, scrambler, index dial, main shaft pointer, spindle turntable, corner pointer and handwheel.Worm-wheel shaft two ends are by being packed in left shaft holder on tester housing, right bearing seat supports location, and worm-wheel shaft left end is connected with scrambler, and right-hand member is provided with handwheel, and the worm component that worm-wheel shaft and main shaft are fixedly mounted with one forms Worm Wheel System group.Rack sleeve is packed on tester housing, the built-in main shaft of rack sleeve, and main shaft is accurately located by two main shaft bearings up and down that described rack sleeve is installed, and rotates handwheel, and worm-wheel shaft drives worm component to rotate, and worm component drives main axis.Main shaft pointer is contained in mainshaft and covers, index dial is socketed in rack sleeve upper end, is positioned at below main shaft pointer, index dial is installed with index dial lock-screw, spindle turntable is contained in the shaft shoulder place of rack sleeve top ladder, and corner pointer is fixed by screws on spindle turntable corresponding with index dial.Described x ray generator is arranged on working plate side, and sample stage is installed at the spindle top of angular instrument, and the optical gate on x ray generator faced by X ray receiver is also connected with spindle turntable by link.
Above-mentioned corner crystal checker is equiped with digital display device, and worm-wheel shaft encoder output can show at display after carrying out data processing by control system.
Above-mentioned working plate is equiped with adjustable for height working plate leg.
The utility model compared with prior art has the following advantages:
1, structure corner that is simple, easy to use, crystal reads convenient, measuring accuracy advantages of higher, solves a difficult problem for monocrystalline crystal angle test.
2, scrambler and worm-wheel shaft direct connection, eliminates other kinematic train driving angle gap error.
3, this instrument electrical control gear is setting X-ray tube size of current, and by microampere meter determination crystal peak value precision, the scrambler that inclinometer scrambler and rotary table connect and the direct on line of display, improve crystal angle measuring accuracy.
Accompanying drawing explanation
Fig. 1 is angular instrument front view of the present utility model.
Fig. 2 is angular instrument right view of the present utility model.
Fig. 3 is structural representation of the present utility model.
Embodiment
A kind of corner crystal checker, comprises working plate 1, is located at the x ray generator 18 on working plate, sample stage 22, X ray receiver 21, angular instrument 23.Described angular instrument 23 comprises tester housing 16, main shaft 9, rack sleeve 6, worm-wheel shaft 2, worm component 3, scrambler 11, index dial 5, main shaft pointer 7, spindle turntable 13, corner pointer 14 and handwheel 17.Worm-wheel shaft 2 two ends are by being packed in left shaft holder 12 on tester housing 16, right bearing seat 15 supporting and location, worm-wheel shaft 2 left end is connected with scrambler 11, right-hand member is provided with handwheel 17, and the worm component 3 that worm-wheel shaft 2 and main shaft 9 are fixedly mounted with one forms Worm Wheel System group.Rack sleeve 6 is packed on tester housing 16, the built-in main shaft 9 of rack sleeve 6, and main shaft 9 is accurately located by two main shaft bearings 4 up and down that described rack sleeve 6 is installed, and rotates handwheel, and worm-wheel shaft drives worm component to rotate, and worm component drives main axis.Main shaft pointer 7 is contained in mainshaft and covers, index dial 5 is socketed in rack sleeve 6 upper end, be positioned at below main shaft pointer, index dial 5 is installed with index dial lock-screw 8, spindle turntable 13 is contained in the shaft shoulder place of rack sleeve 6 top ladder, and corner pointer 14 is fixed by screws on spindle turntable 13 corresponding with index dial 5.Described x ray generator 18 is arranged on working plate 1 side, and sample stage 20 is installed at main shaft 9 top of angular instrument 23, and the optical gate 19 on x ray generator 18 faced by X ray receiver 21 is also connected with spindle turntable 13 by link 22.Described working plate 1 is equiped with adjustable for height working plate leg 10, and height-adjustable is in a horizontal position to working plate.Corner crystal checker is equiped with digital display device, and worm-wheel shaft encoder output can show at display after carrying out data processing by control system.
Principle of work
Main shaft is accurately located by two main shaft bearings up and down rotating the installation of handwheel rack sleeve, worm-wheel shaft drives worm component to rotate, main shaft rotates thereupon, main axis angle can be delivered to after control system carries out data processing by the scrambler of worm-wheel shaft left end, can show angle of eccentricity angle at display.Standard film is first placed on sample stage during corner crystal measurement, rotation hand wheel, adjustment sample stage is to coupling part and stopping, index dial is adjusted to main shaft pointer 0 position and is locked by index dial lock-screw, the corner pointed 2 γ position of simultaneously together rotating with spindle turntable, coupling part, X ray receiver; Take off standard film and place corner crystal test piece on sample stage, by the anglec of rotation of main shaft pointer main shaft when index dial reads the most strong position of X ray that X ray receiver receives, the measured angular angle value of reading is exactly the corner of crystal.
Claims (2)
1. a corner crystal checker, comprise working plate (1), be located at the x ray generator (18) on working plate, sample stage (22), X ray receiver (21), angular instrument (23), it is characterized in that described angular instrument (23) comprises tester housing (16), main shaft (9), rack sleeve (6), worm-wheel shaft (2), worm component (3), scrambler (11), index dial (5), main shaft pointer (7), spindle turntable (13), corner pointer (14) and handwheel (17), worm-wheel shaft (2) two ends are by being packed in the upper left shaft holder (12) of tester housing (16), right bearing seat (15) supporting and location, worm-wheel shaft (2) left end is connected with scrambler (11), right-hand member is provided with handwheel (17), the worm component (3) that worm-wheel shaft (2) and main shaft (9) are fixedly mounted with one forms Worm Wheel System group, rack sleeve (6) is packed on tester housing (16), rack sleeve (6) built-in main shaft (9), main shaft (9) is located by two main shaft bearings (4) up and down that rack sleeve (6) is installed, and rotates handwheel, worm-wheel shaft drives worm component to rotate, and worm component drives main axis, main shaft pointer (7) is contained in mainshaft and covers, index dial (5) is socketed in rack sleeve (6) upper end, be positioned at below main shaft pointer, index dial (5) is installed with index dial lock-screw (8), spindle turntable (13) is contained in the shaft shoulder place of rack sleeve (6) top ladder, and it is upper corresponding with index dial (5) that corner pointer (14) is fixed by screws in spindle turntable (13), described x ray generator (18) is arranged on working plate (1) side, sample stage (20) is installed at main shaft (9) top of angular instrument (23), and the optical gate (19) on x ray generator (18) faced by X ray receiver (21) is also connected with spindle turntable (13) by link (22).
2. a kind of corner crystal checker according to claim 1, is characterized in that described working plate (1) is equiped with adjustable for height working plate leg (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520385690.7U CN204882416U (en) | 2015-06-08 | 2015-06-08 | Corner crystal tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520385690.7U CN204882416U (en) | 2015-06-08 | 2015-06-08 | Corner crystal tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204882416U true CN204882416U (en) | 2015-12-16 |
Family
ID=54826777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520385690.7U Expired - Fee Related CN204882416U (en) | 2015-06-08 | 2015-06-08 | Corner crystal tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204882416U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110779470A (en) * | 2019-11-26 | 2020-02-11 | 广东嘉仪仪器集团有限公司 | Static friction angle tester |
-
2015
- 2015-06-08 CN CN201520385690.7U patent/CN204882416U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110779470A (en) * | 2019-11-26 | 2020-02-11 | 广东嘉仪仪器集团有限公司 | Static friction angle tester |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151216 Termination date: 20180608 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |