CN204829285U - Single crystal growing furnace pneumatics nitrogen gas security system for unit - Google Patents
Single crystal growing furnace pneumatics nitrogen gas security system for unit Download PDFInfo
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- CN204829285U CN204829285U CN201520609217.2U CN201520609217U CN204829285U CN 204829285 U CN204829285 U CN 204829285U CN 201520609217 U CN201520609217 U CN 201520609217U CN 204829285 U CN204829285 U CN 204829285U
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- growing furnace
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Abstract
The utility model provides a single crystal growing furnace pneumatics nitrogen gas security system for unit, include pneumatic unit and nitrogen gas stand -by unit to single crystal growing furnace supply compressed air, pneumatic unit passes through compressed air pipe and says to single crystal growing furnace stove top cushion gas point supply compressed air, and set gradually the main valve door and normally open the break -make of pneumatic valve with control compressed air on compressed air pipe says, nitrogen gas stand -by unit includes the total pipeline of nitrogen gas to single crystal growing furnace stove top cushion gas point supply nitrogen gas, supply the bye -pass of nitrogen gas and install the electric contact pressure gauge on compressed air pipe says to normally opening the pneumatic valve. The utility model discloses regard stable nitrogen gas as reserve air supply, when abnormal conditions appear in pneumatic unit, the pneumatic means auto -action, the incessant cuts the single crystal growing furnace with pressing the empty set all with nitrogen gas to guarantee the normal production of single crystal stove, ability furthest reduces because of pressing the empty set the unusual influence that leads to the fact the single crystal growing furnace all to appear.
Description
Technical field
The utility model relates to the single crystal growing furnace atmospheric control field in monocrystalline silicon production, specifically a kind of single crystal growing furnace pneumatic unit nitrogen security system.
Background technique
Single crystal growing furnace normally runs needs Pneumatic actuator to control to open or close main vacuum valve, various small-sized actuating mechanism also needs pressurized air as driving source of the gas to complete normal work simultaneously, and continual pressurized air supply guarantee single crystal growing furnace is produced normally.
Single crystal growing furnace normal work period passes into argon gas from stove upper end; the waste gas that silicon material and dopant volatilize under 1500 degree of conditions of high temperature is taken away from stove lower end; be in argon shield state in stove always; under in stove, working pressure is stabilized in the vacuum state of about 15Torr, the graphite heater in protection stove and various graphite device are not oxidized because contacting ambient air with silicon material etc.The control gear of the main vacuum valve of single crystal growing furnace is by compressed air-driven, when air compressor or air supply system there are abnormal conditions and can not normally air feed time, this valve control mechanism can cut out by automatic rebounding, and argon gas also can count in stove endlessly, if main vacuum valve can not be opened in time, in stove, volatile matter can not be taken away in time, product within about 3 minutes, will be caused directly to scrap, if find not in time, argon gas is not closed in time, within about 10 minutes, argon gas will be full of in stove, reach the atmospheric pressure of 760Torr, extraneous air is made to enter system, polycrystalline silicon material in stove will be caused, graphite heater and various graphite device are all scrapped because of oxidation, loss greatly, the waste gas simultaneously volatilized enters operation room also can cause personal injury to operative employee.
Model utility content
For solving in prior art because air supply system fault causes the series of problems of generation in single crystal growing furnace operation, the utility model provides a kind of single crystal growing furnace pneumatic unit nitrogen security system, using nitrogen as bailout gas, automatically cut air feed when abnormal conditions appear in compressed air system, ensure that monocrystalline furnace gas moves device and there will not be closedown suddenly and cause more serious accident.
The utility model is the technological scheme solving the problems of the technologies described above employing: a kind of single crystal growing furnace pneumatic unit nitrogen security system, comprise and supply compressed-air actuated pneumatic unit and nitrogen stand-by unit to single crystal growing furnace, described pneumatic unit supplies pressurized air by compressed air line to single crystal growing furnace table cushion gas point, and on compressed air line, set gradually main valve and Chang Kai pneumatic valve to control compressed-air actuated break-make, described nitrogen stand-by unit comprises the nitrogen header pipe road to single crystal growing furnace table cushion gas point the supply of nitrogen, to the bye-pass often opening pneumatic valve the supply of nitrogen and the pressure gauge with electric contact be arranged on compressed air line, wherein, nitrogen header pipe road sets gradually nitrogen main valve and normally-closed pneumatic valve, one end of described bye-pass is connected with the pneumatic mechanism often driving pneumatic valve, the other end is connected to the position on nitrogen header pipe road between nitrogen main valve and normally-closed pneumatic valve, and the pneumatic mechanism of normally-closed pneumatic valve is communicated with bye-pass by a lateral, bye-pass is provided with nitrogen electric control valve, nitrogen electric control valve line bud be connected on power supply with the lower limit normal opened contact of pressure gauge with electric contact, described pressure gauge with electric contact is arranged on the position on compressed air line between main valve and Chang Kai pneumatic valve, to monitor the change of compressed air line internal air pressure.
The position of described compressed air line often being opened between pneumatic valve and single crystal growing furnace table cushion gas point is provided with one-way valve I, position on described nitrogen header pipe road between normally-closed pneumatic valve and single crystal growing furnace table cushion gas point is provided with one-way valve II, thus prevents gas from altering mutually in compressed air line and nitrogen header pipe road.
One end, described nitrogen header pipe road is connected with stable source nitrogen, and the other end is incorporated into the position on compressed air line between one-way valve I and single crystal growing furnace table cushion gas point.
Described compressed air line is connected with backup line, the position that one end of backup line is connected to main valve and often opens between pneumatic valve, the other end connects single crystal growing furnace table bailout gas.
Described bye-pass is provided with nitrogen manually-operated gate, and the position of nitrogen manually-operated gate between nitrogen electric control valve and nitrogen header pipe road.
Described pressure gauge with electric contact is arranged on a nitrogen lateral end, and the head end of this nitrogen lateral is connected to the position on compressed air line between main valve and Chang Kai pneumatic valve, and nitrogen lateral is provided with pressure gauge with electric contact manually-operated gate.
Beneficial effect: the utility model using stable nitrogen as bailout gas, through the control of pneumatic valve, when there are abnormal conditions in pneumatic unit, Pneumatic actuator auto-action, do-nothing system pressed by continual single crystal growing furnace of being cut by nitrogen, thus ensures the normal production of single crystal growing furnace, transform a backup line to use as scene is auxiliary simultaneously, this technical operation is convenient, and Safety performance is good, can reduce to greatest extent because the abnormal impact caused single crystal growing furnace appears in pressure do-nothing system.
Accompanying drawing explanation
Fig. 1 is electrical schematic diagram of the present utility model;
Fig. 2 be pressure gauge with electric contact and nitrogen electric control valve electricly connect figure;
Reference character: 1, main valve, 2, pressure gauge with electric contact manually-operated gate, 3, pressure gauge with electric contact, 301, lower limit normal opened contact, 4, often drive pneumatic valve, 5, one-way valve I, 6, compressed air line, 7, single crystal growing furnace table cushion gas point, 8, single crystal growing furnace table bailout gas, 9, backup line, 10, nitrogen header pipe road, 11, one-way valve II, 12, normally-closed pneumatic valve, 13, nitrogen electric control valve, 1301, line bud, 14, nitrogen manually-operated gate, 15, nitrogen main valve, 16, bye-pass.
Embodiment
As shown in the figure, a kind of single crystal growing furnace pneumatic unit nitrogen security system, comprise and supply compressed-air actuated pneumatic unit and nitrogen stand-by unit to single crystal growing furnace, described pneumatic unit supplies pressurized air by compressed air line 6 to single crystal growing furnace table cushion gas point 7, and on compressed air line 6, set gradually main valve 1 and Chang Kai pneumatic valve 4 to control compressed-air actuated break-make, described nitrogen stand-by unit comprises the nitrogen header pipe road 10 to single crystal growing furnace table cushion gas point 7 the supply of nitrogen, to the bye-pass 16 often opening pneumatic valve 4 the supply of nitrogen and the pressure gauge with electric contact 3 be arranged on compressed air line 6, wherein, nitrogen header pipe road 10 sets gradually nitrogen main valve 15 and normally-closed pneumatic valve 12, one end of described bye-pass 16 is connected with the pneumatic mechanism often driving pneumatic valve 4, the other end is connected to the position on nitrogen header pipe road 10 between nitrogen main valve 15 and normally-closed pneumatic valve 12, and the pneumatic mechanism of normally-closed pneumatic valve 12 is communicated with bye-pass 16 by a lateral, bye-pass 16 is provided with nitrogen electric control valve 13, nitrogen electric control valve 13 line bud 1301 be connected on power supply with the lower limit normal opened contact 301 of pressure gauge with electric contact 3, described pressure gauge with electric contact 3 is arranged on the position on compressed air line 6 between main valve 1 and Chang Kai pneumatic valve 4, to monitor the change of compressed air line 6 internal air pressure.
Be more than basic embodiment of the present utility model, can make further improvements on above basis or limit:
As, the position of described compressed air line 6 often being opened between pneumatic valve 4 and single crystal growing furnace table cushion gas point 7 is provided with one-way valve I 5, position on described nitrogen header pipe road 10 between normally-closed pneumatic valve 12 and single crystal growing furnace table cushion gas point 7 is provided with one-way valve II 11, thus prevents gas from altering mutually in compressed air line 6 and nitrogen header pipe road 10;
And for example, one end, described nitrogen header pipe road 10 is connected with stable source nitrogen, and the other end is incorporated into the position on compressed air line 6 between one-way valve I 5 and single crystal growing furnace table cushion gas point 7;
And for example, described compressed air line 6 is connected with backup line 9, the position that one end of backup line 9 is connected to main valve 1 and often opens between pneumatic valve 4, the other end connects single crystal growing furnace table bailout gas 8;
And for example, described bye-pass 16 is provided with nitrogen manually-operated gate 14, and the position of nitrogen manually-operated gate 14 between nitrogen electric control valve 13 and nitrogen header pipe road 10;
For another example, described pressure gauge with electric contact 3 is arranged on a nitrogen lateral end, the head end of this nitrogen lateral is connected to the position on compressed air line 6 between main valve 1 and Chang Kai pneumatic valve 4, and nitrogen lateral is provided with pressure gauge with electric contact manually-operated gate 2.
In the utility model, when pneumatic unit occurs abnormal, pressure gauge with electric contact 3 pressure reduces, lower limit normal opened contact 301 closes, nitrogen electric control valve 13 line bud 1301 electric, action, nitrogen enters the pneumatic mechanism often driving pneumatic valve 4 and normally-closed pneumatic valve 12 by nitrogen electric control valve 13, often drive pneumatic valve 4 and switch to normally off by often opening, pneumatic unit loop is cut off, normally-closed pneumatic valve 12 switches to normally open from normally closed, nitrogen is cut single crystal growing furnace for air circuit, realize bailout gas and automatically cut.
Claims (6)
1. a single crystal growing furnace pneumatic unit nitrogen security system, comprise and supply compressed-air actuated pneumatic unit and nitrogen stand-by unit to single crystal growing furnace, described pneumatic unit supplies pressurized air by compressed air line (6) to single crystal growing furnace table cushion gas point (7), and on compressed air line (6), set gradually main valve (1) and often drive pneumatic valve (4) to control compressed-air actuated break-make, it is characterized in that: described nitrogen stand-by unit comprises the nitrogen header pipe road (10) to single crystal growing furnace table cushion gas point (7) the supply of nitrogen, to the bye-pass (16) often opening pneumatic valve (4) the supply of nitrogen and the pressure gauge with electric contact (3) be arranged on compressed air line (6), wherein, nitrogen header pipe road (10) sets gradually nitrogen main valve (15) and normally-closed pneumatic valve (12), one end of described bye-pass (16) is connected with the pneumatic mechanism often driving pneumatic valve (4), the other end is connected to upper position between nitrogen main valve (15) and normally-closed pneumatic valve (12), nitrogen header pipe road (10), and the pneumatic mechanism of normally-closed pneumatic valve (12) is communicated with bye-pass (16) by a lateral, bye-pass (16) is provided with nitrogen electric control valve (13), nitrogen electric control valve (13) the lower limit normal opened contact (301) of line bud (1301) and pressure gauge with electric contact (3) be connected on power supply, the position that described pressure gauge with electric contact (3) is arranged on the upper main valve (1) of compressed air line (6) and often opens between pneumatic valve (4), to monitor the change of compressed air line (6) internal air pressure.
2. a kind of single crystal growing furnace pneumatic unit nitrogen security system according to claim 1, it is characterized in that: the position of often opening on described compressed air line (6) between pneumatic valve (4) and single crystal growing furnace table cushion gas point (7) is provided with one-way valve I (5), the upper position between normally-closed pneumatic valve (12) and single crystal growing furnace table cushion gas point (7) of described nitrogen header pipe road (10) is provided with one-way valve II (11), thus prevents gas from altering mutually in compressed air line (6) and nitrogen header pipe road (10).
3. a kind of single crystal growing furnace pneumatic unit nitrogen security system according to claim 2, it is characterized in that: described nitrogen header pipe road (10) one end is connected with stable source nitrogen, the other end is incorporated into the upper position between one-way valve I (5) and single crystal growing furnace table cushion gas point (7) of compressed air line (6).
4. a kind of single crystal growing furnace pneumatic unit nitrogen security system according to claim 1, it is characterized in that: described compressed air line (6) is connected with backup line (9), the position that one end of backup line (9) is connected to main valve (1) and often opens between pneumatic valve (4), the other end connects single crystal growing furnace table bailout gas (8).
5. a kind of single crystal growing furnace pneumatic unit nitrogen security system according to claim 1, it is characterized in that: described bye-pass (16) is provided with nitrogen manually-operated gate (14), and nitrogen manually-operated gate (14) is positioned at the position between nitrogen electric control valve (13) and nitrogen header pipe road (10).
6. a kind of single crystal growing furnace pneumatic unit nitrogen security system according to claim 1, it is characterized in that: described pressure gauge with electric contact (3) is arranged on a nitrogen lateral end, the position that the head end of this nitrogen lateral is connected to the upper main valve (1) of compressed air line (6) and often opens between pneumatic valve (4), and nitrogen lateral is provided with pressure gauge with electric contact manually-operated gate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520609217.2U CN204829285U (en) | 2015-08-14 | 2015-08-14 | Single crystal growing furnace pneumatics nitrogen gas security system for unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520609217.2U CN204829285U (en) | 2015-08-14 | 2015-08-14 | Single crystal growing furnace pneumatics nitrogen gas security system for unit |
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| Publication Number | Publication Date |
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| CN204829285U true CN204829285U (en) | 2015-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520609217.2U Expired - Fee Related CN204829285U (en) | 2015-08-14 | 2015-08-14 | Single crystal growing furnace pneumatics nitrogen gas security system for unit |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108220557A (en) * | 2016-12-14 | 2018-06-29 | 天津建筑机械厂 | Air and nitrogen conversion equipment during box atmosphere controllable multi-purpose furnace power-off |
| CN111102173A (en) * | 2019-12-31 | 2020-05-05 | 中国科学院合肥物质科学研究院 | Vacuum air inlet system and air inlet control method |
| WO2020177375A1 (en) * | 2019-03-07 | 2020-09-10 | 隆基绿能科技股份有限公司 | Furnace pressure abnormality processing method and device, and storage medium |
-
2015
- 2015-08-14 CN CN201520609217.2U patent/CN204829285U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108220557A (en) * | 2016-12-14 | 2018-06-29 | 天津建筑机械厂 | Air and nitrogen conversion equipment during box atmosphere controllable multi-purpose furnace power-off |
| WO2020177375A1 (en) * | 2019-03-07 | 2020-09-10 | 隆基绿能科技股份有限公司 | Furnace pressure abnormality processing method and device, and storage medium |
| CN111102173A (en) * | 2019-12-31 | 2020-05-05 | 中国科学院合肥物质科学研究院 | Vacuum air inlet system and air inlet control method |
| CN111102173B (en) * | 2019-12-31 | 2024-01-26 | 中国科学院合肥物质科学研究院 | Vacuum air inlet system and air inlet control method |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20170814 |
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| CF01 | Termination of patent right due to non-payment of annual fee |