CN204805119U - Turbomolecular pump - Google Patents
Turbomolecular pump Download PDFInfo
- Publication number
- CN204805119U CN204805119U CN201520399548.8U CN201520399548U CN204805119U CN 204805119 U CN204805119 U CN 204805119U CN 201520399548 U CN201520399548 U CN 201520399548U CN 204805119 U CN204805119 U CN 204805119U
- Authority
- CN
- China
- Prior art keywords
- stator
- stream
- thread groove
- pumping section
- towards
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005086 pumping Methods 0.000 claims description 44
- 239000007795 chemical reaction product Substances 0.000 abstract description 9
- 239000000567 combustion gas Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The utility model provides a turbomolecular pump, exhaust gas molecule and can piling up by the inhibited reaction product smoothly in the flow path between turbopump portion and thread groove pump portion. Turbomolecular pump includes: turbopump portion (TP) has a plurality of fixed blade level (21) and rotating vane level (12) that dispose in turn, thread groove pump portion (SP) has the rotor drum portion (13) and stator (22) that set up in the downstream side of turbopump portion (TP), and is forming the screw slot part in one of them of rotor drum portion (13) and stator (22), and flow path (200), will follow turbopump portion (TP) combustion gas molecule and guide to thread groove pump portion (SP). And, setting up on flow path (200) towards up end (201) of up end (221) and base (20) of stator (22) of flow path, come as towards rotor drum portion's (13) direction and the inclined plane of downward sloping.
Description
Technical field
The utility model relates to a kind of pump, especially relates to the turbomolecular pump that one comprises turbine pump (turbopump) portion and thread groove pumping section.
Background technique
Such as, that records in such as citing document 1 comprises in the turbomolecular pump of turbine pumping section and thread groove pumping section, utilize the turbine pumping section comprising turbine blade level that the gas molecule flowed into from intakeport is delivered to thread groove pumping section, and then, utilize the thread groove pumping section playing degassing function to carry out pressurized gas molecule in the side that degree of vacuum is lower.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2014-95315 publication
Summary of the invention
[model utility problem to be solved]
And say, under most cases, the suction side open area of thread groove pumping section is less than the exhaust side open area of turbine pumping section, and rotor shaft side is leaned on than described exhaust side open area in the position of described suction side open area (thread groove open area).In described structure, the gas molecule of being discharged by turbine pumping section cannot successfully flow in thread groove, thus has the tendency of the increased retention in the stream between turbine pumping section and thread groove pumping section.Therefore, have following worry, that is, when being discharged by the gas of easy hill reaction resultant, the accumulation of the reaction product in stream becomes remarkable.
[technological means of dealing with problems]
The turbomolecular pump of preferred implementation of the present utility model comprises: turbine pumping section, has multiple stator blade level and pivoting leaf chip level; Thread groove pumping section, has cylindrical rotor and stator, described cylindrical rotor and described stator one of them on form thread groove; And stream, the gas molecule of discharging from described turbine pumping section is guided to described thread groove pumping section, described stream is arranged the downward-sloping plane of inclination towards described cylindrical rotor direction.
In preferred mode of execution, the wall towards the described stator of described stream is described plane of inclination.
In preferred mode of execution, comprise the base being fixed wtih described stator, the wall towards the described base of described stream is described plane of inclination.
In preferred mode of execution, comprising: base, be fixed wtih described stator; And annular component, there is the face in opposite directions, front end with the rotation blade of the most downstream side being configured at described turbine pumping section, and being fixed on described base, the wall of the wall towards the described stator of described stream and the described annular component towards described stream is described plane of inclination.
[effect of model utility]
According to the utility model, in the stream between turbine pumping section and thread groove pumping section, can successfully Exhaust Gas molecule, and can pile up by inhibiting reaction resultant.
Accompanying drawing explanation
Fig. 1 is the figure of the mode of execution representing turbomolecular pump of the present utility model.
Fig. 2 is the enlarged view of the part shown in dotted line A of Fig. 1.
Fig. 3 (a), Fig. 3 (b) are the figure of the relation in the shape of the upper-end surface that stator is described and the scattering direction of gas molecule.
Fig. 4 is the figure of an example of the wall configuration of the stream representing existing turbomolecular pump.
Fig. 5 is the figure of the first variation representing present embodiment.
Fig. 6 is the figure of the second variation representing present embodiment.
Fig. 7 is the figure of the 3rd variation representing present embodiment.
Fig. 8 is the figure of the vapor pressure curve L1 representing aluminium chloride.
[primary component symbol description]
1: pump unit 10: rotor
11: rotor shaft 12: pivoting leaf chip level
12L: the pivoting leaf chip level 13 of most subordinate: rotor cylindrical part
19,29: spacer element 20: base
21: stator blade level 22: stator
22g: thread groove portion (thread groove) 23: pump case
26: outlet pipe 30: cover body
32: radial direction magnetic bearing 33: axial magnetic bearing
34: motor 35a, 35b: mechanical bearing
40: annular component 41: coolant path
42: heater 200: stream
201,221: upper-end surface 201a: double dot dash line, plane of inclination
220: lip part 401: the face towards stream of annular component
Cos θ: length G1, G2: gas molecule
L1: vapor pressure curve n: normal
P: some R: curve
SP: thread groove pumping section TP: turbine pumping section
θ: scattering angle
Embodiment
Below, be described in order to implement form of the present utility model with reference to figure.Fig. 1 is the figure of the mode of execution representing turbomolecular pump of the present utility model, and is the sectional drawing of the schematic configuration representing pump unit 1.Turbomolecular pump comprises the control unit (not shown) of the pump unit 1 shown in Fig. 1 and driven pump unit 1.In addition, the turbomolecular pump shown in Fig. 1 is magnetic force suspending type turbomolecular pump, but the utility model is not limited to magnetic force suspending type turbomolecular pump.
Pump unit 1 comprises and forms the rotor 10 of multistage pivoting leaf chip level 12 and rotor cylindrical part 13.In the inner side of pump case 23, to be configured with the mode of the described multistage pivoting leaf chip level 12 stator blade level 21 of stacking multilevel accordingly.Be configured on base 20 across spacer element 29 respectively in the multistage stator blade level 21 of rotor shaft direction superimposed layer.Each pivoting leaf chip level 12 has multiple turbine blade.Each stator blade level 21 uses the rotation blade partly splitting shape a pair with multiple turbine blade and forms.Multiple pivoting leaf chip level 12 and stator blade level 21 form turbine pumping section TP.
Configure the stator 22 of drum across micro-gap at the outer circumferential side of rotor cylindrical part 13.The lip part 220 of stator 22 is screwed in base 20.Form thread groove in one of them of the outer circumferential face of rotor cylindrical part 13 or the inner peripheral surface of stator 22, utilize rotor cylindrical part 13 and stator 22 to form thread groove pumping section (sometimes also referred to as traction pump (dragpump) portion) SP.In example shown in Fig. 1, stator 22 is formed thread groove 22g.The gas molecule of being discharged by turbine pumping section TP compresses further through thread groove pumping section SP, and finally, utilization is connected to the rear pump of the outlet pipe 26 of base 20 and discharges.
Rotor 10 is fixed on rotor shaft 11, and this rotor shaft 11 is supported by radial direction magnetic bearing 32 and axial magnetic bearing 33, and utilizes motor 34 rotary actuation.Magnetic bearing 32, magnetic bearing 33 are when inoperative, and rotor shaft 11 is supported by mechanical bearing 35a, mechanical bearing 35b.Radial direction magnetic bearing 32, axial magnetic bearing 33, motor 34 and mechanical bearing 35b are accommodated in and are fixed in the cover body 30 of base 20.
Fig. 2 is the enlarged view of the part shown in dotted line A of Fig. 1.The curve R of attached arrow is by the curve of the flow imaging of the gas of discharge.The gas molecule of being discharged by turbine pumping section TP enters into the stream 200 be formed between turbine pumping section TP and thread groove pumping section SP, and flow into thread groove portion 22g from this stream 200 further.
And say, the pressure in stream 200 also depends on the flow of the gas of discharge, may become molecular fluid, viscous fluid and be in the fluid in the middle of molecular fluid and viscous fluid.In molecular fluid region, think compared to gas molecule collision each other, and the collision of gas molecule and wall become mastery, with the distribution foundation cosine law (cosinelaw) in the scattering direction of the gas molecule of collision with wall.Therefore, the gas molecule flowing into stream 200 from turbine pumping section TP not merely flow into thread groove portion 22g with the track such as curve R.
Fig. 3 (a), Fig. 3 (b) are the figure of the relation in the shape of the upper-end surface 221 that stator 22 is described and the scattering direction of gas molecule.Fig. 3 (a) represents the situation that the upper-end surface 221 of stator 22 is vertical relative to rotor shaft.Be recited as the diameter tangent with upper-end surface 221 be 1 circle (ball of three-dimensional shaped) represent the probability (probability of scattering 301) of gas molecule 302 to the scattering of scatteringangleθ direction.That is, the gas molecule 302 inciding the some P of upper-end surface 221 is proportional with the length cos θ of the string extended to scatteringangleθ direction from a P to the probability of scatteringangleθ direction scattering.As shown in Fig. 3 (b), when the upper-end surface 221 of stator 22 tilts, about the normal n of this plane of inclination, also carry out scattering in the same manner as the situation of Fig. 3 (a).
Consider Fig. 3 (a), the probability of scattering 301 shown in Fig. 3 (b), in present embodiment, the wall as shown in Figure 2 towards stream 200 is configured to towards rotor shaft direction downward-sloping.Specifically, as shown in Figure 2, roll oblique mode with the direction of the normal of the upper-end surface 221 of the upper-end surface 201 of base 20 and stator 22 (shown in the arrow n of Fig. 3 (b)) towards rotor cylindrical part 13, upper-end surface 201, upper-end surface 221 are tilted.
Fig. 4 is the figure of an example of the wall configuration of the stream 200 representing existing turbomolecular pump.As present embodiment, do not consider the scattering direction of the gas molecule caused by the wall of stream 200 in the past, and each upper-end surface 201 of base 20 and stator 22, upper-end surface 221 are formed as substantially vertical relative to rotor shaft.And the radial position of the thread groove 22g of thread groove pumping section SP is arranged on the position of the root of blade of the pivoting leaf chip level 12L near most subordinate.
The part flowing into the gas molecule of stream 200 from turbine pumping section TP is directly incident on thread groove portion 22g, and remaining major part incides the surface (upper-end surface 201 or side) of the base 20 towards stream 200 or the upper-end surface 221 of stator 22.Then, the gas molecule of described is incided according to cosine law scattering.Such as, as shown in Figure 4, to reflect through the pivoting leaf chip level 12L of most subordinate to the gas molecule G2 of diagram right oblique direction (rotor shaft direction) scattering and flow into the thread groove 22g of thread groove pumping section SP, and utilizing thread groove pumping section SP to transmit to further downstream side.
But the normal of the upper-end surface 201 shown in Fig. 4, upper-end surface 221 is vertical relative to rotor shaft, therefore by the reverse flow and probability towards turbine pumping section TP is the highest as the gas molecule G1 of Fig. 4 of the gas molecule of upper-end surface 201, upper-end surface 221 scattering.Therefore, infer that the probability of the thread groove 22g of smooth guide thread groove pumping section SP is relatively little as gas molecule G2, most gas molecule is stranded in the time lengthening of stream 200.Like this, the holdup time is longer, then the pressure in stream 200 is higher, thus easy hill reaction resultant.
On the other hand, in present embodiment shown in Fig. 2, the normal n of upper-end surface 201, upper-end surface 221 tilts towards rotor shaft direction, namely, upper-end surface 201, upper-end surface 221 are downward-sloping towards rotor cylindrical part 13 direction, thus, to the gas molecule of rotor shaft direction scattering ratio Fig. 4 shown in situation large.As a result, the probability flowing into the thread groove 22g of thread groove pumping section SP also improves, and the holdup time of the gas molecule in stream 200 shortens.And, can suppress at wall (surface of base 20, the upper-end surface 221 of stator 22, the most pivoting leaf chip level 12L of subordinate or the surface etc. of rotor cylindrical part 13) the hill reaction resultant towards stream 200.
In general, when the gas of easy hill reaction resultant is discharged, the temperature (with reference to the 3rd variation described later) using heater etc. to increase base 20 or stator 22 more.And degree of vacuum lower (that is, pressure is higher), then the sublimation temperature of the reaction product of chlorine system or sulfuration fluorine system is higher, more easily piles up.Such as, if represent an example of the vapor pressure curve of reaction product, then vapor pressure curve L1 is as shown in Figure 8 become when aluminium chloride.In the turbomolecular pump of present embodiment, because the delay of the gas in stream 200 can be improved, so can must be lower than existing situation by the pressure restraining in stream 200.As a result, according to Fig. 8, the temperature of base 20 or stator 22 can be made to reduce the amount reduced corresponding to the pressure in stream 200.
In addition, in the existing formation shown in Fig. 4, sometimes also can opposite angle implement chamfering or R chamfering etc., in this tiny area, the normal in face is towards rotor shaft direction.But, in the chamfering being defined in this kind of tiny area or R chamfering, the effect making upper-end surface 201 as shown in Figure 2, upper-end surface 221 tilts cannot be expected, thus chamfering or R chamfering etc. form and should be distinguished with the formation of the application's model utility.
In example shown in Fig. 2, normal n as upper-end surface 201, upper-end surface 221 tilts to rotor shaft direction, namely, the example of downward-sloping plane of inclination towards rotor cylindrical part 13, the plane of inclination being set to section is the shape (part for conical surface) represented by straight line, but is not limited thereto.
(variation 1)
Fig. 5 is the figure of the first variation representing present embodiment.In example shown in Fig. 2, be fixing plane of inclination (shape identical with conical surface) by the tilt angle be set to as shown in the double dot dash line 201a of Fig. 5, upper-end surface of the upper-end surface of base 20 and stator 22.On the other hand, in the variation shown in Fig. 5, the upper-end surface 201 of the base 20 in the wall towards stream 200 and the upper-end surface 221 of stator 22 are formed as relative to the concave surface of plane of inclination 201a to diagram downside depression.Arbitrary concave surface (upper-end surface 201, upper-end surface 221) is all downward-sloping towards rotor cylindrical part 13, and the normal n of upper-end surface 201, upper-end surface 221 rolls tiltedly to rotor shaft.Therefore, the effect identical with the situation of Fig. 2 can be obtained.
(variation 2)
Fig. 6 is the figure of the second variation representing present embodiment.In variation shown in Fig. 5, the upper-end surface 201 of the base 20 in the wall towards stream 200 and the upper-end surface 221 of stator 22 are formed as the plane of inclination 201a that fixes relative to tilt angle and the convex surface outstanding to diagram upside.Arbitrary convex surface (upper-end surface 201, upper-end surface 221) is all downward-sloping towards rotor cylindrical part 13, and the normal n of upper-end surface 201, upper-end surface 221 rolls tiltedly to rotor shaft.Therefore, the effect identical with the situation of Fig. 2 can be obtained.
(variation 3)
Fig. 7 is the figure of the 3rd variation representing present embodiment.In 3rd variation, base 20 configures annular component 40, the face 401 towards stream 200 of this annular component 40 is formed as the downward-sloping plane of inclination towards rotor cylindrical part 13.And the upper-end surface 221 of stator 22 becomes the plane of inclination identical with the situation of Fig. 2.Like this, when when base 20 also configuring except stator 22 component as annular component 40, make the shape in the face towards stream 200 of this component become the downward-sloping plane of inclination towards rotor cylindrical part 13, the effect identical with the situation of the formation of Fig. 2 can be obtained thus.
Below, the function of annular component 40 is described.When discharging the gas easily producing reaction product, as shown in Figure 7, adopt forms as follows, namely, heater 42 is set at base 20 and stator 22 is heated up, and in order to make the temperature of pivoting leaf chip level 12 can not be too high and across stator blade level 21 to cool pivoting leaf chip level 12.In Fig. 7, the coolant path 41 flow through is set near the upper end of base 20, spacer element 19 and stator blade level 21 are cooled for refrigerant.
When for described formation, when without annular component 40, the front end of the pivoting leaf chip level 12L of most subordinate wall in opposite directions because of cooling, temperature reduces.As a result, there is following worry: at the easy hill reaction resultant of wall in opposite directions, and the reaction product piled up can disturb with the front end of pivoting leaf chip level 12L.Arranging annular component 40 is to prevent end in contact before piled up reaction product and rotation blade.The annular component 40 configured in the mode be inserted between rotation blade front end and wall in opposite directions (base wall) is fixed near the position being fixed wtih stator 22 of base 20.Therefore, annular component 40 utilizes heater 42 and is indirectly heated, thus becomes the temperature with stator 22 same degree.As a result, the accumulation of inhibiting reaction resultant annular component 40 in opposite directions to the front end with pivoting leaf chip level 12L, can prevent the front end of pivoting leaf chip level 12L as the situation without annular component 40 and reaction product from disturbing.
As described above, the turbomolecular pump of present embodiment comprises: turbine pumping section TP, has multiple stator blade level 21 and pivoting leaf chip level 12; Thread groove pumping section SP, has rotor cylindrical part 13 and stator 22, and forms thread groove portion in one of them of rotor cylindrical part 13 and stator 22; And stream 200, the gas molecule of discharging from turbine pumping section TP is guided to thread groove pumping section SP.And, stream 200 arrange to rotor cylindrical part 13 direction downward-sloping plane of inclination (upper-end surface 201 shown in Fig. 2, upper-end surface 221).
By a part for the wall towards stream 200 is formed as described plane of inclination, distribution deflection rotor cylindrical part 13 direction of the gas molecule of scattering because of plane of inclination, thus easily flow into thread groove portion 22g.As a result, the holdup time of the gas molecule in stream 200 shortens, and can suppress the accumulation of the reaction product in stream 200.
Be formed as to rotor cylindrical part 13 direction and the configuration example of downward-sloping plane of inclination towards a part for the wall of stream 200 as making, such as, plane of inclination can be formed as by stator 22 as Fig. 2 with stream 200 face in opposite directions, also the upper-end surface 201 towards stream 200 of base 20 can be formed as described plane of inclination.And, when such as annular component 40 being fixed on base 20 as Fig. 7, preferably except the upper-end surface 221 of stator 22, also the face 401 towards stream 200 of annular component 40 is formed as the downward-sloping plane of inclination to rotor cylindrical part 13 direction.
In addition, in Fig. 2, Fig. 5, Fig. 6, upper-end surface 201, both upper-end surfaces 221 are formed as plane of inclination, but also only one can be formed as plane of inclination.Similarly, in Fig. 7 by towards stream 200 face 221, both faces 401 are square becomes plane of inclination, even if but only one to be formed as plane of inclination also harmless.
Described each embodiment can separately use or combinationally use.This is because the effect in each embodiment can be realized separately or synthetically.And only otherwise destroy feature of the present utility model, then the utility model is not by any restriction of described mode of execution.
The above, it is only preferred embodiment of the present utility model, not any pro forma restriction is done to the utility model, although the utility model discloses as above with preferred embodiment, but and be not used to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be the content not departing from technical solutions of the utility model, according to any simple modification that technical spirit of the present utility model is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (4)
1. a turbomolecular pump, is characterized in that comprising:
Turbine pumping section, has multiple stator blade level and pivoting leaf chip level;
Thread groove pumping section, has cylindrical rotor and stator, described cylindrical rotor and described stator one of them on form thread groove; And
Stream, is formed between described turbine pumping section and described thread groove pumping section,
Described stream is arranged the downward-sloping plane of inclination towards described cylindrical rotor direction.
2. turbomolecular pump according to claim 1, is characterized in that:
Wall towards the described stator of described stream is described plane of inclination.
3. turbomolecular pump according to claim 1 and 2, characterized by further comprising:
Be fixed wtih the base of described stator,
Wall towards the described base of described stream is described plane of inclination.
4. turbomolecular pump according to claim 1, characterized by further comprising:
Base, is fixed wtih described stator; And
Annular component, has the face in opposite directions, front end with the rotation blade of the most downstream side being configured at described turbine pumping section, and is fixed on described base,
The wall of the wall towards the described stator of described stream and the described annular component towards described stream is described plane of inclination.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-140467 | 2014-07-08 | ||
| JP2014140467A JP6414401B2 (en) | 2014-07-08 | 2014-07-08 | Turbo molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204805119U true CN204805119U (en) | 2015-11-25 |
Family
ID=54589954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520399548.8U Active CN204805119U (en) | 2014-07-08 | 2015-06-11 | Turbomolecular pump |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6414401B2 (en) |
| CN (1) | CN204805119U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018059459A (en) * | 2016-10-06 | 2018-04-12 | エドワーズ株式会社 | Vacuum pump, spiral plate disposed in vacuum pump, spacer, and rotary cylindrical body |
| CN108691787A (en) * | 2017-04-03 | 2018-10-23 | 株式会社岛津制作所 | Vacuum pump |
| CN113748267A (en) * | 2019-05-15 | 2021-12-03 | 埃地沃兹日本有限公司 | Vacuum pump and fixing parts of thread groove pump part thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6882624B2 (en) * | 2017-09-25 | 2021-06-02 | 株式会社島津製作所 | Turbo molecular pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3919282B2 (en) * | 1997-03-05 | 2007-05-23 | 株式会社大阪真空機器製作所 | Molecular pump |
| JP2003287463A (en) * | 2002-03-28 | 2003-10-10 | Boc Edwards Technologies Ltd | Radiation-temperature measuring apparatus and turbo- molecular pump with the same mounted |
-
2014
- 2014-07-08 JP JP2014140467A patent/JP6414401B2/en active Active
-
2015
- 2015-06-11 CN CN201520399548.8U patent/CN204805119U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018059459A (en) * | 2016-10-06 | 2018-04-12 | エドワーズ株式会社 | Vacuum pump, spiral plate disposed in vacuum pump, spacer, and rotary cylindrical body |
| CN108691787A (en) * | 2017-04-03 | 2018-10-23 | 株式会社岛津制作所 | Vacuum pump |
| US10837449B2 (en) | 2017-04-03 | 2020-11-17 | Shimadzu Corporation | Vacuum pump |
| CN113748267A (en) * | 2019-05-15 | 2021-12-03 | 埃地沃兹日本有限公司 | Vacuum pump and fixing parts of thread groove pump part thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016017454A (en) | 2016-02-01 |
| JP6414401B2 (en) | 2018-10-31 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |