CN204768008U - Flashback tank - Google Patents
Flashback tank Download PDFInfo
- Publication number
- CN204768008U CN204768008U CN201520404717.2U CN201520404717U CN204768008U CN 204768008 U CN204768008 U CN 204768008U CN 201520404717 U CN201520404717 U CN 201520404717U CN 204768008 U CN204768008 U CN 204768008U
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- China
- Prior art keywords
- box
- flashback tank
- overflow
- upper box
- liquid
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- Expired - Fee Related
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Abstract
The utility model discloses a flashback tank, the power distribution box comprises a box body, the box top is equipped with the overflow to interface and negative pressure tonifying qi mouth, be equipped with a blowdown pipe on the negative pressure tonifying qi mouth, the box is built -in to have a baffle to incite somebody to action box and lower box are split into to the box, go up the box with the box was connected through at least one communicating pipe down, the bottom half is equipped with the output tube that is used for the overflow and gives vent to anger. Adopt the utility model discloses the moisturizing guan ke who sets up thinks that flashback tank replenishes the liquid of spill losses, coordinates the overflow of the control liquid that the liquid level valve can be better simultaneously.
Description
Technical field
The utility model relates to ultra-pure water and makes field, in particular a kind of flashback tank.
Background technology
Along with semiconductor technology is constantly flourish, the element of various product is tending towards microminiaturized.But along with the rising of element complexity and integrated level, tiny flaw (minutedefects) and the trace impurity (traceimpurities) of wafer surface will be seriously more aobvious on the impact of element function.The tiny flaw of wafer surface and trace impurity not only can the characteristic of deteriorated element and reliabilitys, notably also can reduce the yield rate of wafer.Therefore, in semiconductor processing, be attached to the clean technique of useless material in wafer surface in order to clean wafer just seem quite important to remove.
Ultra-clean technology (ultracleantechnology) is that a kind of ultra-pure water that utilizes is with the technology of clean wafer.If use former water (rawwater) to clean wafer, due to the impurity containing all kinds of form in former water, impurity is easily deposited in deterioration wafer surface causing on the contrary chip element, therefore, being used in the water that wafer cleans step, must be the ultra-pure water after purification.
The flashback tank of prior art just inserts the closed box structure of storage column overflow pipe, and when the water level in flashback tank arrives flood level, the ultra-pure water in flashback tank is flowed out by flashback tank overflow pipe.The flashback tank clean-up effect of prior art and overflow control not good.
Therefore, prior art has yet to be improved and developed.
Utility model content
In view of above-mentioned the deficiencies in the prior art, the purpose of this utility model is to provide a kind of flashback tank, can improve clean-up effect and overflow control.
The technical solution of the utility model is as follows:
A kind of flashback tank, comprise casing, described casing top is provided with overflow docking port and negative pressure gas supplementing opening, and described negative pressure gas supplementing opening is provided with a blowdown pipe; Described casing is built-in with a dividing plate and described casing is divided into upper box and lower box, and described upper box is connected by least one communicating pipe with described lower box; Described bottom half is provided with for overflow and the efferent duct of giving vent to anger.
Described flashback tank, wherein, described casing top is also provided with a filling pipe, and the liquid internal of described upper box is sunk in described filling pipe bottom.
Described flashback tank, wherein, described communicating pipe top concordant with liquid level in described upper box, described communicating pipe bottom sink to the liquid internal of described lower box.
Described flashback tank, wherein, described overflow docking port, described blowdown pipe and described efferent duct end are equipped with adpting flange.
Described flashback tank, wherein, described upper box and lower box inside are equipped with liquid level valve.
Described flashback tank, wherein, described flashback tank entirety is made by Ya Like material.
Flashback tank provided by the utility model, owing to have employed double-deck overflow casing, improves air purification effect.The filling pipe arranged can supplement the liquid of spill losses for flashback tank, and cooperation liquid level valve better can control the overflow of liquid simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of flashback tank preferred embodiment in the utility model.
Detailed description of the invention
The utility model provides a kind of flashback tank, for making the purpose of this utility model, technical scheme and effect clearly, clearly, further describes the utility model referring to accompanying drawing examples.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
As shown in Figure 1, the flashback tank that the utility model provides, comprises casing 10, and described casing 10 top is provided with overflow docking port 2 and negative pressure gas supplementing opening.Shown negative pressure gas supplementing opening is communicated with extraneous air, and preferably on described negative pressure gas supplementing opening, establish a blowdown pipe 1, described blowdown pipe 1 bottom is sunk in the liquid in casing 10, ensures that the gas supplemented is through liquid filtering.Described casing 10 is built-in with a dividing plate 6 and described casing 10 is divided into upper box 8 and lower box 5.Described upper box 8 is connected by least one communicating pipe 4 with described lower box 5.Described dividing plate 6 is circular slab, it has some installing holes.Described installing hole is for installing described communicating pipe 4, and the air after purification in upper box 8 is input in lower box 5 and again purifies by described communicating pipe 4.Be provided with bottom described casing 10 for overflow and the efferent duct 9 of giving vent to anger.Air after double purification is input in storage column by efferent duct 9, and unnecessary liquid is then outputted to by efferent duct 9 in the sewer pipe be connected with described efferent duct 9, thus effluent discharge.
In the utility model, the air of negative pressure gas supplementing opening enters is by Stress control in storage column, when gas pressure deficiency in storage column needs supplementary air, air in lower box 5 liquid level enters in storage column, now in lower box 5, air is under-voltage, air in upper box 8 will fill in lower box 5, and negative pressure gas supplementing opening starts and supplements air in upper box 8.
Further, described casing 10 top is also provided with a filling pipe 3, and the liquid internal of described upper box 8 is sunk in described filling pipe 3 bottom.Described upper box 8 and lower box 5 inside are equipped with liquid level valve.When liquid level valve detects fluid low in upper box 8 or lower box 5, filling pipe 3 injects the supreme casing 8 of liquid, if lower box 5 fluid low, then fill upper box 8 and make liquid by communicating pipe 4 overflow in lower box 5, ensure that the liquid in upper and lower casing 5 is balanced.Be noted that liquid level in upper box 8 is lower than the liquid level in lower box 5.Top of described communicating pipe 4 is wherein concordant with liquid level in described upper box 8, described communicating pipe 4 bottom sink to the liquid internal of described lower box 5.
Described overflow docking port 2, described blowdown pipe 1 and described efferent duct 9 end are equipped with adpting flange.Described flashback tank entirety is made by Ya Like material, alleviates the overall weight of flashback tank.
As a preferred embodiment of the present utility model, the diameter of described casing 10 is 900mm, is highly 950mm.Wherein lower box 5 liquid level height is 480mm, and the above 110mm of liquid level is air layer; Described upper box 8 liquid level height is 205mm, and the above 105mm of liquid level is air layer.Communicating pipe 4 diameter being communicated with upper and lower casing 5 is 90mm.
In sum, flashback tank provided by the utility model, owing to have employed double-deck overflow casing, improves air purification effect.The filling pipe arranged can supplement the liquid of spill losses for flashback tank, and cooperation liquid level valve better can control the overflow of liquid simultaneously.
Should be understood that; application of the present utility model is not limited to above-mentioned citing, for those of ordinary skills, can be improved according to the above description or convert; such as, all these improve and convert the protection domain that all should belong to the utility model claims.
Claims (6)
1. a flashback tank, is characterized in that, comprises casing, and described casing top is provided with overflow docking port and negative pressure gas supplementing opening, and described negative pressure gas supplementing opening is provided with a blowdown pipe; Described casing is built-in with a dividing plate and described casing is divided into upper box and lower box, and described upper box is connected by least one communicating pipe with described lower box; Described bottom half is provided with for overflow and the efferent duct of giving vent to anger.
2. flashback tank according to claim 1, is characterized in that, described casing top is also provided with a filling pipe, and the liquid internal of described upper box is sunk in described filling pipe bottom.
3. flashback tank according to claim 1, is characterized in that, described communicating pipe top concordant with liquid level in described upper box, described communicating pipe bottom sink to the liquid internal of described lower box.
4. flashback tank according to claim 1, is characterized in that, described overflow docking port, described blowdown pipe and described efferent duct end are equipped with adpting flange.
5. flashback tank according to claim 1, is characterized in that, described upper box and lower box inside are equipped with liquid level valve.
6. flashback tank according to claim 1, is characterized in that, described flashback tank entirety is made by Ya Like material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520404717.2U CN204768008U (en) | 2015-06-12 | 2015-06-12 | Flashback tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520404717.2U CN204768008U (en) | 2015-06-12 | 2015-06-12 | Flashback tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204768008U true CN204768008U (en) | 2015-11-18 |
Family
ID=54508140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520404717.2U Expired - Fee Related CN204768008U (en) | 2015-06-12 | 2015-06-12 | Flashback tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204768008U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105435569A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Two-layer oil filtering type air filter used between straight pull furnace and vacuum pump and filtering method |
| CN108528938A (en) * | 2018-05-21 | 2018-09-14 | 兆德（南通）电子科技有限公司 | A kind of water-closing-barrel |
-
2015
- 2015-06-12 CN CN201520404717.2U patent/CN204768008U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105435569A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Two-layer oil filtering type air filter used between straight pull furnace and vacuum pump and filtering method |
| CN108528938A (en) * | 2018-05-21 | 2018-09-14 | 兆德（南通）电子科技有限公司 | A kind of water-closing-barrel |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518034, 9 floor, Sunshine Golf tower, No. 7008 Shennan Avenue, Shenzhen, Guangdong, Futian District Patentee after: Shenzhen first environmental protection Limited by Share Ltd Address before: 518034, 9 floor, Sunshine Golf tower, No. 7008 Shennan Avenue, Shenzhen, Guangdong, Futian District Patentee before: SHENZHEN HDN WATER TREATMENT EQUIPMENT CO., LTD. |
|
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518034, 9 floor, Sunshine Golf tower, No. 7008 Shennan Avenue, Shenzhen, Guangdong, Futian District Patentee after: First, environmental protection (Shenzhen) Limited by Share Ltd Address before: 518034, 9 floor, Sunshine Golf tower, No. 7008 Shennan Avenue, Shenzhen, Guangdong, Futian District Patentee before: Shenzhen first environmental protection Limited by Share Ltd |
|
| CP02 | Change in the address of a patent holder |
Address after: 518000, six, Guoxin Securities Building, 1012 Hongling Middle Road, Guiyuan Road, Luohu District, Shenzhen, Guangdong. Patentee after: First, environmental protection (Shenzhen) Limited by Share Ltd Address before: 518034, 9 floor, Sunshine Golf building, 7008 Shennan Road, Futian District, Shenzhen, Guangdong. Patentee before: First, environmental protection (Shenzhen) Limited by Share Ltd |
|
| CP02 | Change in the address of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151118 Termination date: 20200612 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |