CN204758626U - Little inertial sensor based on synovial membrane damping - Google Patents
Little inertial sensor based on synovial membrane damping Download PDFInfo
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- CN204758626U CN204758626U CN201520341906.XU CN201520341906U CN204758626U CN 204758626 U CN204758626 U CN 204758626U CN 201520341906 U CN201520341906 U CN 201520341906U CN 204758626 U CN204758626 U CN 204758626U
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Abstract
The utility model relates to a little inertial sensor based on synovial membrane damping. Big, the poor stability of noise of current sensor, range and bandwidth are little. The utility model discloses a detection of first base plate and upper surface is with alternately the broach form is fixed to the electrode, be fixed in the sensor anchor point on the first base plate, fixed quality piece anchor point, hanging in the bar sensor quality piece of first base plate top of second base plate, with sensor anchor point and the continuous U -shaped sensor supporting beam of bar sensor quality piece, it is right that the double grid shape oscillator of comb shape movable electrode is connected in the outside, with bar sensor quality piece and the U -shaped sensor tie -beam of double grid shape oscillator to linking to each other, comb shape fixed electrode on the fixed quality piece, the outside extraction electrode of sensor, the electric insulation layer, drive wire and drive wire extraction electrode. The utility model discloses a little inertial sensor novel structure, resolution ratio and sensitivity are high.
Description
Technical field
The utility model belongs to micro-electronic mechanical skill field, relates to a kind of micro-inertia sensor, is specifically related to a kind of double grid shape oscillator that contains to the high resolving power micro-inertia sensor utilizing air slide-film damping.
Background technology
Recently for over ten years, obtain develop rapidly with the accelerometer that micro mechanical technology makes.Its main acceleration detection technology has piezoresistive detection, piezoelectric detection, heat detection, resonance detection, electromagnetic detection, light detection, tunnel current detection and capacitance detecting etc.In addition, some accelerometers based on these detection techniques are also had, as acceleration by light degree meter, electromagnetic accelerometer, capacitance accelerometer etc.The development of acceleration by light degree meter, mainly in order to the advantage in conjunction with light and micromechanics, makes the sensor of high electromagnetic screen or the good linearity.In these sensors, capacitance acceleration transducer, little owing to having temperature coefficient, highly sensitive, the advantages such as good stability are maximum class acceleration transducers of development at present.The method for making of micromechanic al capacitive sensor has surface micromachined method and bulk silicon micro mechanic job operation.Adopt surface micromachined technique can and ic process compatibility, thus the peripheral circuit of integrated sensor, cost is low, but the noise of sensor is large, poor stability, range and bandwidth little.Adopt bulk micromachining can improve the quality of sensor chip, thus reduce noise, improve stability, improve sensitivity.Shortcoming is that volume is slightly large, but can produce the micromachined process of superhigh precision.In order to obtain the complicacy of higher measurement sensistivity and reduction peripheral circuit, the method for the quality can passing through increase sensor vibration generator and the static test electric capacity increasing sensor, thus reduction mechanical noise and circuit noise.And for etching the capacitance type sensor of the comb teeth-shaped that (DeepRIE) processes with bulk silicon technological such as dark reaction particle, the depth-to-width ratio of its plates capacitance is generally less than 27:1, the quality which limits sensor vibration generator increases and the reduction of capacitor plate spacing.And for Small Distance plates capacitance, its squeeze film air damping is comparatively large, increase the mechanical noise of sensor.Reduce this mechanical noise and by etching amortisseur bar on pole plate, or electric capacity can be changed into the mode of variable area, make damping show as slide-film damping, and one of method reducing circuit noise passes through increasing detection capacitance.
Summary of the invention
The purpose of this utility model is to provide a kind of and embedded in on, oscillator the high resolving power micro-inertia sensor that transversely movable electrodes utilizes air slide-film damping containing grid shape oscillator.
The detection intersection comb teeth-shaped that the utility model comprises first substrate and upper surface thereof is fixing to electrode, be fixed on the sensor anchor point on first substrate, fixed mass block anchor point, the bar shaped sensor mass be suspended from above first substrate of second substrate, by the U-shaped sensor brace summer that sensor anchor point is connected with bar shaped sensor mass, outside connects the double grid shape oscillator pair of comb-shaped movable electrode, by bar shaped sensor mass with double grid shape oscillator to the U-shaped sensor tie-beam be connected, comb shape fixed electorde on fixed mass block, the outside extraction electrode of sensor, electric insulation layer, drive wire and drive wire extraction electrode.
Described bar shaped sensor mass is positioned at second substrate center, bar shaped sensor mass is made up of rectangular block and bar shaped sensor mass rectangular preiection, and the cross central line along bar shaped sensor mass is symmetrically arranged with bar shaped sensor mass rectangular preiection.
Described double grid shape oscillator is to comprising two responsive grid masses, responsive grid mass lays respectively at the both sides of bar shaped sensor mass, and each responsive grid mass is made up of longitudinally equidistant, laterally parallel grid electrode, the frame connecting grid electrode and responsive grid mass rectangular preiection.The longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Responsive grid mass rectangular preiection is relative with bar shaped sensor mass rectangular preiection, forms electric capacity adjusting play.Be connected by two U-shaped sensor tie-beams between each responsive grid mass and bar shaped sensor mass, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of bar shaped sensor mass, and these two U-shaped sensor tie-beams are symmetrical arranged along the longitudinal centre line of bar shaped sensor mass with the another two U-shaped sensor tie-beams being positioned at bar shaped sensor mass opposite side.Described every root U-shaped sensor tie-beam starts from one jiao of the frame of responsive grid mass, the corresponding angles of rectangular block finally, near the cross central line of bar shaped sensor mass bottom its U-shaped.
Described comb-shaped movable electrode is made up of with the comb-shaped movable electrode rectangular strip being connected comb-shaped movable electrode comb n equally spaced comb-shaped movable electrode comb, n >=1, comb-shaped movable electrode comb is vertical with comb-shaped movable electrode rectangular strip to be arranged, and comb-shaped movable electrode rectangular strip is vertical with responsive grid mass side to be arranged.M bar comb-shaped movable electrode be arranged in parallel composition one group of silicon strip group, m >=2.Outside each responsive grid mass frame, correspondence arranges three groups of silicon strip groups respectively.
Comb-shaped movable electrode in the silicon strip group of responsive grid mass frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass.
Described sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, the outside extraction electrode of sensor is arranged on sensor anchor point.
Described fixed mass block comprises fixed mass block anchor point and m bar comb shape fixed electorde, and fixed mass block is fixed on first substrate by described fixed mass block anchor point, and each fixed mass block is corresponding with often organizing silicon strip group to be arranged.Described comb shape fixed electorde is made up of with the comb shape fixed electorde rectangular strip being connected n comb shape fixed electorde comb n equally spaced comb shape fixed electorde comb.Comb shape fixed electorde is relative with the comb-shaped movable electrode position in silicon strip group, and comb shape fixed electorde comb is corresponding with comb-shaped movable electrode comb arranged in a crossed manner.
Described driving wire has two, longitudinally be arranged on the inner side frame of corresponding responsive grid mass respectively, every root drives one end of wire by being connected with corresponding driving wire extraction electrode along corresponding U-shaped sensor tie-beam, rectangular block corner end with the plain conductor that U-shaped sensor brace summer is laid.Electric insulation layer is provided with between the metal level driving the metal contact wires on wire, plain conductor, rectangular block corner end and responsive grid mass, driving wire extraction electrode composition and responsive grid mass corresponding part.
Described electric capacity adjusting play is less than the horizontal spacing between the corresponding comb on corresponding comb-shaped movable electrode and comb shape fixed electorde more than one micron.
Described detection intersects that comb teeth-shaped is fixing has three groups to electrode, and each group is made up of the comb electrodes of confront crosswise and extraction electrode respectively, and the interelectrode gap of each adjacent fingers is not less than one micron, the comb electrodes correspondence composition comb electrodes pair of intersection.
Described grid electrode be positioned at corresponding comb electrodes right directly over.
The micro-inertia sensor that the utility model relates to includes transversely movable grid shape oscillator pair, the initial separation that can design sensor Detection capacitance is larger, thus solve dark reaction particle etching depth-to-width ratio and be less than 27:1 and can not do thick restriction to the quality of sensor vibration generator, then by the responsive grid mass of field drives, reduce Detection capacitance spacing, thus the initial detecting electric capacity of increase sensor is to reduce testing circuit noise, and sensor does the thick oscillator quality that increases, thus also reduce the mechanical noise of sensor, and double to add Detection capacitance containing two responsive grid masses.In addition, the size by changing sensor brace summer and mass can also change range and the response characteristic of sensor.
Meanwhile, the high precision micro-inertia sensor novel structure that the utility model relates to, resolution and highly sensitive, manufacture craft is simple, is conducive to reducing costs and improving yield rate, be a kind of can the micro-inertia sensor of practical application.
Accompanying drawing explanation
Fig. 1 (a) for first substrate of the present utility model and on detection to intersect comb teeth-shaped fixing to electrode schematic diagram;
Fig. 1 (b) in Fig. 1 (a) along A-A
'to the decomposition profile diagram of device architecture;
Fig. 2 (a) is the structural representation on second substrate of the present utility model;
Fig. 2 (b) in Fig. 2 (a) along B-B
'to the decomposition profile diagram of device architecture;
Fig. 3 is that Fig. 1 (b) combines with the sectional drawing of Fig. 2 (b);
Fig. 4 is the enlarged drawing of a pair comb-shaped movable electrode of the present utility model and comb shape fixed electorde.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is further illustrated, but the utility model is only limitted to by no means introduced embodiment.
With reference to figure 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, the detection intersection comb teeth-shaped forming two group switching centre symmetries is on first substrate 1 fixing to electrode, the butt coupling electrode 2 of corresponding fixed mass interblock, and the connecting line between butt coupling electrode 2 and extraction electrode 4, detection intersection comb teeth-shaped is fixed and is made up of the comb electrodes 3 of transversely confront crosswise and extraction electrode electrode, second substrate is formed the sensor anchor point 13 be fixed on first substrate 1, second substrate be suspended from bar shaped sensor mass 25 above first substrate 1, two U-shaped sensor brace summers 9 that sensor anchor point 13 is connected with bar shaped sensor mass 25, two responsive grid masses 20 that composition double grid shape oscillator is right, by the U-shaped sensor tie-beam 17 that responsive grid mass is connected with bar shaped sensor mass, comb shape fixed electorde on fixed mass block 6, the outside extraction electrode 12 of sensor, electric insulation layer 28 under metal level 29, driving wire on electric insulation layer 27 and drive extraction electrode 14 on the right side of wire.As shown in Fig. 2 (a), 2 (b), Fig. 3 and Fig. 4, form the horizontal spacing G between corresponding comb-shaped movable electrode comb 15 and comb shape fixed electorde comb 7
4, the gap 32 between first substrate 1 and responsive grid mass 20, as the G in Fig. 3
1shown in; Formed responsive grid mass and the detection on first substrate intersect comb teeth-shaped to fix electrode between gap 30; Gap 31 between two comb electrodes that comb electrodes is internal, the internal gap of each comb electrodes is identical.A corresponding comb-shaped movable electrode and a comb shape fixed electorde partner comb electric capacity pair, and form the longitudinal pitch that adjacent fingers electric capacity is right, its value is not less than 30 microns.
Composition graphs 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, structure of the present utility model is described.
With reference to figure 2 (a), 2 (b), bar shaped sensor mass is positioned at second substrate center, bar shaped sensor mass is made up of rectangular block 23 and bar shaped sensor mass rectangular preiection 21, and the cross central line along bar shaped sensor mass is symmetrically arranged with bar shaped sensor mass rectangular preiection.
With reference to figure 2 (a), 2 (b), double grid shape oscillator is to comprising two responsive grid masses 20, responsive grid mass lays respectively at the both sides of bar shaped sensor mass, each responsive grid mass is made up of longitudinally equidistant, laterally parallel grid electrode 26, the frame 24 connecting grid electrode and responsive grid mass rectangular preiection 22, and the longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Responsive grid mass rectangular preiection is relative with bar shaped sensor mass rectangular preiection, forms electric capacity adjusting play 18.Be connected by two U-shaped sensor tie-beams 17 between each responsive grid mass and bar shaped sensor mass, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of bar shaped sensor mass, and these two U-shaped sensor tie-beams are symmetrical arranged along the longitudinal centre line of bar shaped sensor mass with the another two U-shaped sensor tie-beams being positioned at bar shaped sensor mass opposite side.Every root U-shaped sensor tie-beam starts from one jiao of the frame 24 of responsive grid mass, the corresponding angles of rectangular block finally, near the cross central line of bar shaped sensor mass bottom its U-shaped.
With reference to figure 2 (a), 2 (b), comb-shaped movable electrode is made up of with the comb-shaped movable electrode rectangular strip 16 being connected comb-shaped movable electrode comb eight equally spaced comb-shaped movable electrode comb 15, comb-shaped movable electrode comb is vertical with comb-shaped movable electrode rectangular strip to be arranged, and comb-shaped movable electrode rectangular strip is vertical with responsive grid mass side to be arranged.Article two, comb-shaped movable electrode be arranged in parallel composition one group of silicon strip group.Outside each responsive grid mass frame, correspondence arranges three groups of silicon strip groups respectively.
With reference to figure 2 (a), 2 (b), the comb-shaped movable electrode in the silicon strip group of responsive grid mass frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass.
With reference to figure 2 (a), 2 (b), sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, the outside extraction electrode 12 of sensor is arranged on a sensor anchor point.
With reference to figure 2 (a), 2 (b), fixed mass block 6 comprises fixed mass block anchor point and two comb shape fixed electordes, fixed mass block is fixed on first substrate by fixed mass block anchor point, and each fixed mass block is corresponding with often organizing silicon strip group to be arranged.Comb shape fixed electorde is made up of with the comb shape fixed electorde rectangular strip 8 being connected eight comb shape fixed electorde comb eight equally spaced comb shape fixed electorde comb 7.Comb shape fixed electorde is relative with the comb-shaped movable electrode position in silicon strip group, and comb shape fixed electorde comb is corresponding with comb-shaped movable electrode comb arranged in a crossed manner, and comb shape fixed electorde comb and comb-shaped movable electrode comb form gap 19.
With reference to figure 2 (a), Fig. 2 (b), Fig. 3, wire 27 is driven to have two, longitudinally be arranged on the inner side frame of corresponding responsive grid mass respectively, every root drives one end of wire by being connected with corresponding driving wire extraction electrode along corresponding U-shaped sensor tie-beam, rectangular block corner end with the plain conductor 10 that U-shaped sensor brace summer is laid.Electric insulation layer is provided with between the metal level 29 driving the metal contact wires on wire, plain conductor, rectangular block corner end and responsive grid mass, driving wire extraction electrode composition and responsive grid mass corresponding part.
With reference to figure 2 (a) and Fig. 4, electric capacity adjusting play forms the horizontal spacing G in gap than corresponding comb shape fixed electorde comb and comb-shaped movable electrode comb
4little more than one micron, the initial detection spacing of sensor capacitance is electric capacity adjusting play and horizontal spacing G
4between difference.
With reference to figure 1 (a), Fig. 1 (b), detection intersects that comb teeth-shaped is fixing has two groups to electrode, and each group is made up of the comb electrodes 3 of transversely confront crosswise and extraction electrode 4 respectively, and the comb electrodes correspondence composition comb electrodes of intersection is to 5.
With reference to figure 3, directly over two corresponding gaps 31 between two internal two comb electrodes of comb electrodes of grid electrode difference.
Composition graphs 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, on the responsive grid mass of formation, the thickness of grid electrode is less than second substrate thickness.
In order to each spacing of clearer and more definite description Detection capacitance, composition graphs 3 and Fig. 4 further describe, and comb electrodes to the distance between both sides as indicated by the arrows in fig. 3, uses G
0represent, its value is greater than the width of grid electrode; Comb-shaped movable electrode comb 15 on responsive grid mass and the gap G between the comb shape fixed electorde comb 7 on fixed mass block 6
4represent, as shown in the corresponding arrow in Fig. 4, span is ten microns to 50 microns; Comb-shaped movable electrode comb on responsive grid mass and the longitudinal size superposed between the comb shape fixed electorde comb on fixed mass block, as shown in the corresponding arrow in Fig. 4, use G
2represent, its value is not less than one micron; Spacing between the comb-shaped movable electrode comb of often pair of comb electric capacity centering and corresponding comb shape fixed electorde rectangular strip, as shown in the corresponding arrow in Fig. 4, uses G
3represent, its value is not less than ten microns.The lower surface of each grid electrode and the detection intersection comb teeth-shaped of correspondence to fix electrode between gap 30 be greater than four microns, be not more than the width of grid electrode; The width of grid electrode is greater than gap 31.
Electric capacity adjusting play 18 between bar shaped sensor mass rectangular preiection 21 and responsive grid mass rectangular preiection 22 represents with d1, and comb shape fixed electorde comb 7 and comb-shaped movable electrode comb 15 form gap 19 and use G
4represent, and G
4=(d1+x), (x is transducer dwell initial capacitance spacing, x>=1, unit: micron).The driving wire be positioned on the left of bar shaped sensor mass, by outside gold ball bonding technology, with gold thread, extraction electrode 11 on the left of driving wire is connected respectively on encapsulating package pin, and accesses constant current source.The driving wire be positioned on the right side of bar shaped sensor mass, by outside gold ball bonding technology, with gold thread, extraction electrode 14 on the right side of driving wire is connected respectively on encapsulating package pin, and the constant current source of the driving wire opposite phase in access and left side.The outside extraction electrode of sensor is connected to encapsulating package pin, and is connected to ground, and extraction electrode 4 is connected respectively to encapsulating package pin, and represents with V1 and V2 respectively, when with micromechanical process processed sensor, and G
4, d1 can arrange higher value, process thicker sensor mass block, thus mass quality is larger.The uniform magnetic field of proper orientation is set in the encapsulating package cap directly over sensor construction, the direction of the Ampère force produced in two metal driving lead is made all to point to the longitudinal centre line of bar shaped sensor mass, and vertical with the longitudinal centre line of bar shaped sensor mass.Two drive the Ampère force on wire to make the electric capacity adjusting play 18 between bar shaped sensor mass rectangular preiection 21 and responsive grid mass rectangular preiection 22 be decreased to zero, and now, the static initial capacitance spacing of testing sensor is G
4-d1, because the spacing of electric capacity reduces greatly, thus the initial detecting electric capacity of sensor increases greatly.Power up carrier signal respectively at V1, V2 end again, movable mass is connected to ground by anchor point.When sensitive direction there being acceleration signal, due to the effect of inertial force, produce displacement, thus cause the grid electrode 26 on responsive grid mass 20 and detection intersection comb teeth-shaped to fix the comb electrodes of the electrode superposition area change to the differential capacitance of the superposition area change of the differential capacitances of 5 compositions and corresponding comb shape fixed electorde comb 7 and comb-shaped movable electrode comb 15 correspondence composition, and then the change causing electric capacity larger, the size of this change electric capacity and outside inertial signal is linear, the size that just can obtain acceleration on sensitive direction is changed by Detection capacitance, and due to sensor construction design feature, Detection capacitance is differential variation, which increase the range of linearity and the range of sensor.
The high precision micro-inertia sensor that the utility model relates to, because available Ampère force drives wire to cause comb electric capacity spacing to reduce, thus increase oscillator quality and Detection capacitance when not increasing lateral dimension, and double grid shape oscillator doubles to add Detection capacitance to containing two responsive grid masses, these factors make the mechanical noise of sensor and circuit noise greatly reduce, thus make the precision that sensor can reach very high, the utility model adopts micro mechanical technology to make simultaneously, technique is simple, is conducive to improving yield rate and reducing manufacturing cost.
Claims (1)
1. based on the micro-inertia sensor of slide-film damping, the detection intersection comb teeth-shaped comprising first substrate and upper surface thereof is fixing to electrode, be fixed on the sensor anchor point on first substrate, fixed mass block anchor point, the bar shaped sensor mass be suspended from above first substrate of second substrate, by the U-shaped sensor brace summer that sensor anchor point is connected with bar shaped sensor mass, outside connects the double grid shape oscillator pair of comb-shaped movable electrode, by bar shaped sensor mass with double grid shape oscillator to the U-shaped sensor tie-beam be connected, comb shape fixed electorde on fixed mass block, the outside extraction electrode of sensor, electric insulation layer, drive wire and drive wire extraction electrode, it is characterized in that:
Described bar shaped sensor mass is positioned at second substrate center, bar shaped sensor mass is made up of rectangular block and bar shaped sensor mass rectangular preiection, and the cross central line along bar shaped sensor mass is symmetrically arranged with bar shaped sensor mass rectangular preiection;
Described double grid shape oscillator is to comprising two responsive grid masses, responsive grid mass lays respectively at the both sides of bar shaped sensor mass, and each responsive grid mass is made up of longitudinally equidistant, laterally parallel grid electrode, the frame connecting grid electrode and responsive grid mass rectangular preiection; The longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Responsive grid mass rectangular preiection is relative with bar shaped sensor mass rectangular preiection, forms electric capacity adjusting play; Be connected by two U-shaped sensor tie-beams between each responsive grid mass and bar shaped sensor mass, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of bar shaped sensor mass, and these two U-shaped sensor tie-beams are symmetrical arranged along the longitudinal centre line of bar shaped sensor mass with the another two U-shaped sensor tie-beams being positioned at bar shaped sensor mass opposite side; Described every root U-shaped sensor tie-beam starts from one jiao of the frame of responsive grid mass, the corresponding angles of rectangular block finally, near the cross central line of bar shaped sensor mass bottom its U-shaped;
Described comb-shaped movable electrode is made up of with the comb-shaped movable electrode rectangular strip being connected comb-shaped movable electrode comb n equally spaced comb-shaped movable electrode comb, n >=1, comb-shaped movable electrode comb is vertical with comb-shaped movable electrode rectangular strip to be arranged, and comb-shaped movable electrode rectangular strip is vertical with responsive grid mass side to be arranged; M bar comb-shaped movable electrode be arranged in parallel composition one group of silicon strip group, m >=2; Outside each responsive grid mass frame, correspondence arranges three groups of silicon strip groups respectively;
Comb-shaped movable electrode in the silicon strip group of responsive grid mass frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass;
Described sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, the outside extraction electrode of sensor is arranged on sensor anchor point;
Described fixed mass block comprises fixed mass block anchor point and m bar comb shape fixed electorde, and fixed mass block is fixed on first substrate by described fixed mass block anchor point, and each fixed mass block is corresponding with often organizing silicon strip group to be arranged; Described comb shape fixed electorde is made up of with the comb shape fixed electorde rectangular strip being connected n comb shape fixed electorde comb n equally spaced comb shape fixed electorde comb; Comb shape fixed electorde is relative with the comb-shaped movable electrode position in silicon strip group, and comb shape fixed electorde comb is corresponding with comb-shaped movable electrode comb arranged in a crossed manner;
Described driving wire has two, longitudinally be arranged on the inner side frame of corresponding responsive grid mass respectively, every root drives one end of wire by being connected with corresponding driving wire extraction electrode along corresponding U-shaped sensor tie-beam, rectangular block corner end with the plain conductor that U-shaped sensor brace summer is laid; Electric insulation layer is provided with between the metal level driving the metal contact wires on wire, plain conductor, rectangular block corner end and responsive grid mass, driving wire extraction electrode composition and responsive grid mass corresponding part;
Described electric capacity adjusting play is less than the horizontal spacing between the corresponding comb on corresponding comb-shaped movable electrode and comb shape fixed electorde more than one micron;
Described detection intersects that comb teeth-shaped is fixing has three groups to electrode, and each group is made up of the comb electrodes of confront crosswise and extraction electrode respectively, and the interelectrode gap of each adjacent fingers is not less than one micron, the comb electrodes correspondence composition comb electrodes pair of intersection;
Described grid electrode be positioned at corresponding comb electrodes right directly over.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520341906.XU CN204758626U (en) | 2015-05-24 | 2015-05-24 | Little inertial sensor based on synovial membrane damping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520341906.XU CN204758626U (en) | 2015-05-24 | 2015-05-24 | Little inertial sensor based on synovial membrane damping |
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| Publication Number | Publication Date |
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| CN204758626U true CN204758626U (en) | 2015-11-11 |
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|---|---|---|---|
| CN201520341906.XU Expired - Fee Related CN204758626U (en) | 2015-05-24 | 2015-05-24 | Little inertial sensor based on synovial membrane damping |
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| Country | Link |
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| CN (1) | CN204758626U (en) |
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2015
- 2015-05-24 CN CN201520341906.XU patent/CN204758626U/en not_active Expired - Fee Related
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151111 Termination date: 20160524 |