CN204758260U - 一种多管芯特性监测的半导体激光器结构 - Google Patents
一种多管芯特性监测的半导体激光器结构 Download PDFInfo
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Abstract
本实用新型提供了一种多管芯特性监测的半导体激光器结构，将多支激光器安装在同一个热沉底板上，激光器的出光方向均一致，每支激光器对应一路独立的光学单元，该单元包括快轴准直镜、慢轴准直镜、PD反射镜；从激光器出射的光束经过快轴准直镜和慢轴准直镜准直成准平行光束，准直后的准平行光束入射到PD反射镜上，通过PD反射镜采集所对应单元的激光器特性，同时通过PD反射镜将多支激光器出射的准平行光进行合束，合束光由聚焦透镜汇聚成像到光纤端面上耦合输出。该结构使用PD反射镜将多支激光器的光束进行合束且完成各个激光器的功率采集，解除了传统技术方案中不能同时监测多个不同激光器的限制，降低了激光器之间的相互干扰，减少了物料的使用种类，在保证获得好的合束效率的同时还准确监测到了激光器内部的情况。
Description
技术领域
本实用新型涉及一种半导体激光光束的监测结构，尤其涉及一种同时监测多个半导体激光光束的结构。
背景技术
在工业、医学和科研领域中广泛地使用400~1550nm等激光作为工作光源，这些光经常需要大功率连续输出使用，尤其是多种波长同时工作的光源，在使用的过程中无法再次测试工作光源的光电参数如功率、波长等，且测试时需要避免不同波长之间的相互干扰，所以需要提供一个能实时监测工作中的激光输出状态的监测结构。
传统的技术方案是在激光器芯片的发光面背面安装探测器件，对激光器的光电特性进行采集，且无法同时采集多个激光器芯片。在此方案中，多支激光器对应同一个探测器，采集到的光是激光器输出光漏出的部分或者激光器外壳内壁漫反射回来的环境光，光束没有方向性；该环境光的测试数值会根据激光器的数量变化而成非线性变化，且不同波长的激光器需要多种不同波长响应的探测器件，或者探测器件前端加不同波长的滤色片；采集的准确性会受到不同波长光束之间的影响，所以很难长时间稳定的监测激光器输出情况，而且生产工艺较复杂。
发明内容
本实用新型的目的是提供一种多管芯特性监测的半导体激光器结构，该结构使多束激光光束在快轴和慢轴方向都得到了准直，在汇聚成为准平行光束的同时完成了对激光器的监测，解除了传统技术方案中单一探测器监测非线性的限制及不同波长相互干扰的限制，降低了激光器装调的难度，在保证获得最佳监测效果的同时还减少了激光器使用器件的数量，增加激光器内部结构设计的灵活性。
本实用新型采用的技术方案是：一种多管芯特性监测的半导体激光器结构，其特征在于，将多支激光器安装在同一个热沉底板上，激光器的出光方向均一致，每支激光器对应一路独立的光学单元，该单元包括快轴准直镜、慢轴准直镜、PD反射镜；从激光器出射的光束经过快轴准直镜和慢轴准直镜准直成准平行光束，准直后的准平行光束入射到PD反射镜上，通过PD反射镜采集所对应单元的激光器特性，同时通过PD反射镜将多支激光器出射的准平行光进行合束，合束光由聚焦透镜汇聚成像到光纤端面上耦合输出。
其中，多支激光器安装在同一个热沉底板上，可为相同波长相同或是波长不同的激光器，激光器的数量为n，则n≥2。
其中，PD反射镜，由一个光电探测器和镀膜的窗片组成，也可以在光电探测器前端直接镀膜。
其中，光电探测器和窗片，表面镀分光膜，分光膜按照一定比例将激光器芯片发出的光束分成透射光和反射光。分光膜的分光比例可以根据需要设计为任意比例。
其中，透射光和反射光，将入射的光束分束，反射光进行合束后耦合输出，透射光直接入射到光电探测器件中，进行功率采集。
其中，聚焦透镜可以是球面、非球面或自聚焦透镜。
其中，所述光纤端面经过研磨和抛光，并镀增透膜。
本实用新型的有益效果是：通过对激光光束采用快慢轴完全准直的结构，利用PD反射镜进行合束，合束的同时进行监测，解除了多束光无法同时监测且相互干扰的限制，该结构在探测器安装时对其位置的要求不再严苛，调节合束时已将探测器同时安装好，从而降低了激光器装调的难度，并且，针对多种不同波长的激光器芯片，通过探测器和激光器一一对应的方式，达到独立监测的目的，保证获得最佳的检测效果。
附图说明
图1是多管芯功率监测的半导体激光器结构的方案示意图。
图2是PD反射镜结构示意图。
图3是多管芯功率监测的半导体激光器结构的立体示意图。
图中：1.激光器芯片，2.快轴准直透镜，3.慢轴准直透镜，4-1.光电探测器，4-2.镀膜窗片5.聚焦透镜，6.光纤，7.热沉底板。
具体实施方式
下面结合附图和实施例对本实用新型作进一步的描述。图1显示了多管芯功率监测的半导体激光器结构的方案示意图，图3是其立体示图，如图所示，单个光路单元由激光器芯片1，快轴准直透镜2，慢轴准直透镜3，光电探测器4-1，镀膜窗片4-2组成，激光器芯片1出射的光束经过快轴准直透镜2和慢轴准直透镜3后形成平行光束，该平行光束入射到由光电探测器4-1和镀膜窗片4-2组成的PD反射镜中，通过所镀的分光膜使透射光进入到光电探测器中，而反射光则和入射光成90°出射；同样，将多支激光器芯片安装在热沉底板7上，安装方式和安装方法均和激光器芯片1相同，其它激光器芯片的光路单元和激光器芯片1所在的光路单元结构完全相同，透射光进入到光电探测器中，通过调节由光电探测器4-1和镀膜窗片4-2组成的PD反射镜将反射光和激光器芯片1所在单元的反射光合束，最终多个光路单元经过由光电探测器4-1和镀膜窗片4-2组成的PD反射镜后的反射光组成的合束光束通过聚焦透镜5会聚成像到输出光纤6的端面上，即可达到高效耦合输出且实时监测的目的。
最后应说明的是，以上实施例仅用以说明本实用新型的技术方案而非对其限制，并且在应用上可以延伸到其他的修改、变化、应用和实施例，同时认为所有这样的修改、变化、应用、实施例都在本实用新型的精神和范围内。
Claims (7)
1.一种多管芯特性监测的半导体激光器结构，其特征在于，将多支激光器安装在同一个热沉底板上，激光器的出光方向均一致，每支激光器对应一路独立的光学单元，该单元包括快轴准直镜、慢轴准直镜、PD反射镜；从激光器出射的光束经过快轴准直镜和慢轴准直镜准直成准平行光束，准直后的准平行光束入射到PD反射镜上，通过PD反射镜采集所对应单元的激光器特性，同时通过PD反射镜将多支激光器出射的准平行光进行合束，合束光由聚焦透镜汇聚成像到光纤端面上耦合输出。
2.根据权利要求1所述的一种多管芯特性监测的半导体激光器结构，其特征在于，所述多支激光器安装在同一个热沉底板上，可为波长相同或是波长不同的多支激光器，激光器的数量为n，则n≥2。
3.根据权利要求1所述的一种多管芯特性监测的半导体激光器结构，其特征在于，所述PD反射镜，由一个光电探测器和镀膜的窗片组成，也可以在光电探测器前端直接镀膜，其固定方式可为胶合或者机械固定。
4.根据权利要求3所述的一种多管芯特性监测的半导体激光器结构，其特征在于，所述光电探测器和窗片，表面镀分光膜，分光膜按照一定比例将激光器芯片发出的光束分成透射光和反射光，分光膜的分光比例可以根据需要设计成为任意比例。
5.根据权利要求4所述的一种多管芯特性监测的半导体激光器结构，其特征在于，所述的透射光和反射光，将入射的光束分束，反射光进行合束后耦合输出，透射光直接入射到光电探测器件中，进行功率采集。
6.根据权利要求1所述的一种多管芯特性监测的半导体激光器结构，其特征在于，所述聚焦透镜可以是球面、非球面或自聚焦透镜。
7.根据权利要求1所述的一种多管芯特性监测的半导体激光器结构，其特征在于，所述光纤端面经过研磨和抛光，并镀增透膜。
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