CN204714949U - A kind of thermal field of single crystal furnace heat protector - Google Patents
A kind of thermal field of single crystal furnace heat protector Download PDFInfo
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- CN204714949U CN204714949U CN201520421340.1U CN201520421340U CN204714949U CN 204714949 U CN204714949 U CN 204714949U CN 201520421340 U CN201520421340 U CN 201520421340U CN 204714949 U CN204714949 U CN 204714949U
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- bearing plate
- groove
- single crystal
- thermal field
- ring groove
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- 239000013078 crystal Substances 0.000 title claims abstract description 17
- 230000001012 protector Effects 0.000 title claims abstract description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 7
- 239000010439 graphite Substances 0.000 claims abstract description 7
- 238000005516 engineering process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
A kind of thermal field of single crystal furnace heat protector; comprise the groove that is arranged on the graphite pallet inside bottom of single crystal growing furnace; two-layer first soft felt is equipped with successively in groove; ring groove is provided with along the radial direction of bearing plate in the outer upper of bearing plate; in upper ring groove, be provided with three layer of second soft felt successively, be provided with intermediate annular groove at the outer middle side part of bearing plate along the radial direction of bearing plate.The utility model adopts such scheme, under the prerequisite not changing 22 cun of overall thermal fields, local thermal field is transformed, the energy of the 70-75kw/h of expending per hour is needed to be reduced to 52-55kw/h under traditional closed thermal field being maintained the condition that is pulled to of 1420 DEG C, energy-conservationly reach 20%, thus reach reduction power consumption, energy-saving and cost-reducing cost-saving object.
Description
Technical field:
The utility model relates to a kind of thermal field of single crystal furnace heat protector.
Background technology:
At present, existing single crystal growing furnace heat insulation effect is more weak, cause heat loss aborning, make to produce power higher, cause great energy dissipation, make production cost greatly increase simultaneously, and in existing technology, promote the mode mostly complex structure of thermal field of single crystal furnace by other means, and cost is higher, cost-saving object cannot be realized.
Utility model content:
The utility model is in order to make up the deficiencies in the prior art; provide a kind of thermal field of single crystal furnace heat protector; its reasonable in design; under the prerequisite not changing 22 cun of overall thermal fields, local thermal field is transformed; need the energy of the 70-75kw/h of expending per hour to be reduced to 52-55kw/h under traditional closed thermal field being maintained the condition that is pulled to of 1420 DEG C, energy-conservationly reach 20%, thus reach reduction power consumption; energy-saving and cost-reducing cost-saving object, solves problems of the prior art.
The utility model for solving the problems of the technologies described above adopted technical scheme is:
A kind of thermal field of single crystal furnace heat protector, comprise the groove that is arranged on the graphite pallet inside bottom of single crystal growing furnace, two-layer first soft felt is equipped with successively in groove, ring groove is provided with along the radial direction of bearing plate in the outer upper of bearing plate, three layer of second soft felt is provided with successively in upper ring groove, intermediate annular groove is provided with along the radial direction of bearing plate at the outer middle side part of bearing plate, three layer of second soft felt is provided with successively in intermediate annular groove, lower ring groove is provided with along the radial direction of bearing plate in the outer lower portion of bearing plate, three layer of second soft felt is provided with successively in lower ring groove, the soft felt of one deck the 3rd is provided with between the bottom and furnace bottom on leakproof chassis.
The degree of depth of described groove is 30mm, and the width of described upper ring groove, intermediate annular groove and lower ring groove is 90mm, and the degree of depth is 34mm.
The utility model adopts such scheme, under the prerequisite not changing 22 cun of overall thermal fields, local thermal field is transformed, the energy of the 70-75kw/h of expending per hour is needed to be reduced to 52-55kw/h under traditional closed thermal field being maintained the condition that is pulled to of 1420 DEG C, energy-conservationly reach 20%, thus reach reduction power consumption, energy-saving and cost-reducing cost-saving object.
Accompanying drawing illustrates:
Fig. 1 is structural representation of the present utility model.
Fig. 2 is graphite pallet structural representation.
Fig. 3 is ring groove structural representation on bearing plate.
Fig. 4 is leakproof chassis structure schematic diagram.
In figure, 1, graphite pallet, 2, groove, the 3, first soft felt, 4, bearing plate, 5, upper ring groove, the 6, second soft felt, 7, intermediate annular groove, 8, lower ring groove, 9, leakproof chassis, the 10, the 3rd soft felt, 11, furnace bottom.
Embodiment:
For clearly demonstrating the technical characterstic of this programme, below by embodiment, and in conjunction with its accompanying drawing, the utility model is elaborated.
As Figure 1-4, a kind of thermal field of single crystal furnace heat protector, comprise the groove 2 that is arranged on graphite pallet 1 inside bottom of single crystal growing furnace, two-layer first soft felt 3 is equipped with successively in groove 2, ring groove 5 is provided with along the radial direction of bearing plate 4 in the outer upper of bearing plate 4, three layer of second soft felt 6 is provided with successively in upper ring groove 5, intermediate annular groove 7 is provided with along the radial direction of bearing plate 4 at the outer middle side part of bearing plate 4, three layer of second soft felt 6 is provided with successively in intermediate annular groove 7, lower ring groove 8 is provided with along the radial direction of bearing plate 4 in the outer lower portion of bearing plate 4, three layer of second soft felt 6 is provided with successively in lower ring groove 8, the soft felt 10 of one deck the 3rd is provided with between the bottom and furnace bottom 11 on leakproof chassis 9.
The degree of depth of described groove 2 is 30mm, and the width of described upper ring groove 5, intermediate annular groove 7 and lower ring groove 8 is 90mm, and the degree of depth is 34mm.
Be filled in two-layer first soft felt 3 in groove 2 with surfacing, there is no concavo-convex being as the criterion, enable that crucible pallet is steady must to be placed on graphite pallet 1 and not to have shaking phenomenon, add the heat insulation effect in the bottom of a pan, avoid heat and scattered and disappeared by axis; Three layer of second soft felt 6 thickness be arranged on outside bearing plate 4 should not affect bearing plate 4 and the connection of middle heat-preservation cylinder, guarantees that middle insulated tank does not vigorously move, has effectively organized heat to be scattered and disappeared by bearing plate 4 by the use of this second soft felt 6; Leakproof chassis 9 bottom single crystal growing furnace and the 3rd soft felt 10 between furnace bottom 11 can effectively prevent leakproof chassis 9 from transferring heat to furnace bottom 11, effectively ensure that the temperature of thermal field in stove.
Adopt thermal field of single crystal furnace lifting gear of the present utility model, under the prerequisite not changing 22 cun of overall thermal fields, local thermal field is transformed, the energy of the 70-75kw/h of expending per hour is needed to be reduced to 52-55kw/h under traditional closed thermal field being maintained the condition that is pulled to of 1420 DEG C, energy-conservationly reach 20%, thus reach reduction power consumption, energy-saving and cost-reducing cost-saving object.
The utility model does not describe part in detail, is the known technology of those skilled in the art of the present technique.
Claims (2)
1. a thermal field of single crystal furnace heat protector, it is characterized in that: comprise the groove that is arranged on the graphite pallet inside bottom of single crystal growing furnace, two-layer first soft felt is equipped with successively in groove, ring groove is provided with along the radial direction of bearing plate in the outer upper of bearing plate, three layer of second soft felt is provided with successively in upper ring groove, intermediate annular groove is provided with along the radial direction of bearing plate at the outer middle side part of bearing plate, three layer of second soft felt is provided with successively in intermediate annular groove, lower ring groove is provided with along the radial direction of bearing plate in the outer lower portion of bearing plate, three layer of second soft felt is provided with successively in lower ring groove, the soft felt of one deck the 3rd is provided with between the bottom and furnace bottom on leakproof chassis.
2. a kind of thermal field of single crystal furnace heat protector according to claim 1, it is characterized in that: the degree of depth of described groove is 30mm, the width of described upper ring groove, intermediate annular groove and lower ring groove is 90mm, and the degree of depth is 34mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520421340.1U CN204714949U (en) | 2015-06-17 | 2015-06-17 | A kind of thermal field of single crystal furnace heat protector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520421340.1U CN204714949U (en) | 2015-06-17 | 2015-06-17 | A kind of thermal field of single crystal furnace heat protector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204714949U true CN204714949U (en) | 2015-10-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520421340.1U Expired - Fee Related CN204714949U (en) | 2015-06-17 | 2015-06-17 | A kind of thermal field of single crystal furnace heat protector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204714949U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114592235A (en) * | 2022-03-04 | 2022-06-07 | 徐州康信软件技术有限公司 | Single crystal furnace for integrated circuit production |
-
2015
- 2015-06-17 CN CN201520421340.1U patent/CN204714949U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114592235A (en) * | 2022-03-04 | 2022-06-07 | 徐州康信软件技术有限公司 | Single crystal furnace for integrated circuit production |
| CN114592235B (en) * | 2022-03-04 | 2022-12-09 | 徐州康信软件技术有限公司 | Single crystal furnace for integrated circuit production |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151021 |
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| CF01 | Termination of patent right due to non-payment of annual fee |