CN204596442U - Scattering-low dosage-rotation energetic ion irradiation device - Google Patents

Scattering-low dosage-rotation energetic ion irradiation device Download PDF

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Publication number
CN204596442U
CN204596442U CN201520152427.3U CN201520152427U CN204596442U CN 204596442 U CN204596442 U CN 204596442U CN 201520152427 U CN201520152427 U CN 201520152427U CN 204596442 U CN204596442 U CN 204596442U
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China
Prior art keywords
scattering
rotation
stepper motor
low dosage
ion irradiation
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Withdrawn - After Issue
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CN201520152427.3U
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Chinese (zh)
Inventor
宋银
缑洁
张崇宏
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Institute of Modern Physics of CAS
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Institute of Modern Physics of CAS
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Abstract

The utility model relates to a kind of scattering-low dosage-rotation energetic ion irradiation device, and the low dosage be mainly used in normal temperature environment carries energy ion irradiation material experiment, is particularly suitable for the irradiation test of small sample in enormous quantities.A kind of scattering-low dosage-rotation energetic ion irradiation device, its principal feature is that including stepper motor support is fixed on vacuum flange, stepper motor support is fixed with stepper motor, driving stepper motor rotates target disc, be provided with fan shape baffle in the front rotating target disc, fan shape baffle is connected on stepper motor support; Before Beams detection appliance stand is positioned at fan shape baffle, which is provided with Beams detection device.The utility model has the advantage of and obtain large-area scattered-out beam, substantially increase the efficiency of irradiation experiment.

Description

Scattering-low dosage-rotation energetic ion irradiation device
Technical field
The utility model relates to a kind of scattering-low dosage-rotation energetic ion irradiation device, and the low dosage be mainly used in normal temperature environment carries energy ion irradiation material experiment, is particularly suitable for the irradiation test of small sample in enormous quantities.
Background technology
Because heavy ion has the large advantage of damage, defect can be introduced fast in the middle of material, and defect is controlled, the accumulation of defect that had the life appraisal of some civilian devices also to relate at present, compared to the defect that electric current produces, use the method for heavy ion irradiation, defect can be introduced fast, and the defects count introduced is controlled.Want the defect that analog current produces, need little irradiation dose, this test unit can be dispersed in common beam intensity on a relatively large area in the terminal of accelerator bunch, thus reduces the dose rate of line.Utilize the difference of beam current density on different Scatter radium, can the sample of irradiation various dose at one time, which greatly enhances the efficiency of ion beam irradiation experiment.Rotate target disc by step motor control, irradiation can be carried out respectively to 8 covering of the fans in once testing, use this two technology, in once testing, almost can cover dosage range widely.Although the line after scattering is a gradient distribution along radial direction, current civilian device area is all very little, and within usually all square at 1 square millimeter, the gradient distribution that therefore scattered-out beam is formed does not affect the uniformity coefficient of irradiation sample.In sum, the birth of this test unit substantially increases the efficiency of irradiation experiment, has widened the range of application of ion irradiation experiment, has been expected among the life appraisal for civilian device in future.
Utility model content
The purpose of this utility model is avoid the deficiencies in the prior art part and provide a kind of scattering-low dosage-rotation energetic ion irradiation device.To lack for current the low dose irradiation device being applicable to assessment civilian device lifetime.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of scattering-low dosage-rotation energetic ion irradiation device, its principal feature is that including stepper motor support is fixed on vacuum flange, stepper motor support is fixed with stepper motor, driving stepper motor rotates target disc, be provided with fan shape baffle in the front rotating target disc, fan shape baffle is connected on stepper motor support; Before Beams detection appliance stand is positioned at fan shape baffle, which is provided with Beams detection device.
Described scattering-low dosage-rotation energetic ion irradiation device, is also included and is provided with bundle spot fluorescent target pick-up unit in the front being positioned at rotary target dish, be connected by vacuum flange, vacuum corrugated pipe with fluorescent target retractor device.
Described scattering-low dosage-rotation energetic ion irradiation device, described Beams detection device is Au Si surface barrier detector or si multi-strip detector.
Described scattering-low dosage-rotation energetic ion irradiation device, described fan shape baffle is the disk of covering of the fan opening plate washer having 1/8.
Described scattering-low dosage-rotation energetic ion irradiation device, rotation target disc under described fan shape baffle is as scattering line sample stage, Faraday cylinder is provided with in the central authorities of fan shape baffle, the barrel of Faraday cylinder is provided with bottom, the sample stage of main beam stream centered by bottom, the screw described rotation target disc having donut indentation and fix for sample.Described scattering-low dosage-rotation energetic ion irradiation device, also includes and is provided with scattering target film at the front 55-65cm of described rotation target disc, and scattering target film is attached most importance to metal film Au film.
Described scattering-low dosage-rotation energetic ion irradiation device, described rotation target disc and stepper motor, fan shape baffle are all in vacuum chamber, and its vacuum tightness is 10 -5pa, is provided with LED illumination lamp in vacuum chamber.
The beneficial effects of the utility model:
Overcome heavy particle irradiation test beam intensity large, target spot area is little, the shortcoming of inefficiency, can obtain the sample of different irradiation dose at one time, thus make swift heavy ion irradiation experiment can simulate the defect introduced in galvanization, be more suitable for the life appraisal of civilian device.Have employed rotation target disc, the dosage range of irradiation is improve seven times.Utilize this two technology, can complete the sample of covering almost dosage range more comprehensively at short notice, this has larger using value in the life appraisal of device.The utility model has the advantage of and obtain large-area scattered-out beam, substantially increase the efficiency of irradiation experiment.
Accompanying drawing illustrates:
The schematic front view of Fig. 1 scattering-low dosage-rotation energetic ion irradiation device;
Fig. 2 is for rotating target disc schematic front view;
Fig. 3 is the Au film of pipeline front 55-65cm
Fig. 4 is the upward view of Fig. 1;
Fig. 5 is the left view of Fig. 4;
Fig. 6 is the schematic perspective view of Fig. 4.
In figure: 1. Beams detection appliance stand; 2. Beams detection device; 3. fan shape baffle; 4. rotate target disc; 5. stepper motor; 6. stepper motor support; 7. vacuum corrugated pipe; 8. restraint spot fluorescent target pick-up unit; 9. vacuum flange; 10. fluorescent target retractor device.
Embodiment
Be described principle of the present utility model and feature below in conjunction with embodiment, example, only for explaining the utility model, is not intended to limit scope of the present utility model.Below content of the present utility model is described in detail.
Embodiment 1: a kind of scattering-low dosage-rotation energetic ion irradiation device, including stepper motor support 6 is fixed on vacuum flange 9, stepper motor support 6 is fixed with stepper motor 5, stepper motor 5 drives and rotates target disc 4, be provided with fan shape baffle 3 in the front rotating target disc 4, fan shape baffle 3 is connected on stepper motor support 6; Before Beams detection appliance stand 1 is positioned at fan shape baffle 3, which is provided with Beams detection device 2.
Be provided with bundle spot fluorescent target pick-up unit 8 in the front being positioned at rotary target dish 4, be connected with fluorescent target retractor device 10 by vacuum flange 9, vacuum corrugated pipe 7.
Described Beams detection device 11 is Au Si surface barrier detector or si multi-strip detector.
Described fan shape baffle 3 is the disk of covering of the fan opening plate washer having 1/8.
Rotation target disc 4 under described fan shape baffle 3 can be used as scattering line sample stage, Faraday cylinder 2 is provided with in the central authorities of fan shape baffle 3, the barrel of Faraday cylinder 2 is provided with bottom 12, the sample stage of main beam stream centered by bottom 12, the screw described rotation target disc 4 having donut indentation and fix for sample, is shown in Fig. 2.
At the front 55-65cm of described rotation target disc 4, be provided with scattering target film, see Fig. 3, scattering target film is attached most importance to metal film Au film.
Described rotation target disc 4 and stepper motor 5, fan shape baffle 3 are all in vacuum chamber, and its vacuum tightness is 10 -5pa, is provided with LED illumination lamp in vacuum chamber.
Experimental example: a kind of scattering-low dosage-rotation energetic ion irradiation device, comprise scattering target film (), rotate target disc, stepper motor, fan shape baffle, be positioned at fan shape baffle before Beams detection device, target chamber interior lighting power supply, be positioned at rotate termination and vacuum chamber beyond the Beams detection device after target disc, lifting bundle spot pick-up unit, vacuum chamber, view window, vacuum chamber with the connection of inner sample stage, be positioned at stepping motor control apparatus beyond vacuum chamber.Realize being positioned at vacuum cavity by the stepping motor control apparatus be positioned at beyond vacuum cavity to rotate with inner rotation target disc, thus make the sample of swift heavy ion irradiation at least seven covering of the fans.Scattering target film can spread out on disk that a radius is about 7cm (see Fig. 2) line, utilize scattered-out beam gradient distribution in the radial direction, the series of samples of different irradiation dose can be obtained at one time on different radiuses, which greatly enhances the efficiency of ion irradiation sample.The series of samples of the very heavy dose of scope of covering can be obtained at short notice, and can once prepare a large amount of samples, obtain test figure more reliably.
During use, in plant running process, sample is positioned at and rotates on target disc, as on the 1#-7# covering of the fan of figure mono-, the different radii of 0# covering of the fan is placed a series of Beams detection device, after line situation is determined, controls by stepper motor and stop means the covering of the fan rotating target disc.According to demand to different covering of the fan irradiation separately want seeking time, thus obtain the irradiation sample of a 7 × annulus number of turns dose point.
Above-described embodiment is the utility model preferably embodiment; but embodiment of the present utility model is not restricted to the described embodiments; change, the modification done under other any does not deviate from Spirit Essence of the present utility model and principle, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection domain of the present utility model.

Claims (7)

1. scattering-low dosage-rotation energetic ion irradiation device, it is characterized in that including stepper motor support is fixed on vacuum flange, stepper motor support is fixed with stepper motor, driving stepper motor rotates target disc, be provided with fan shape baffle in the front rotating target disc, fan shape baffle is connected on stepper motor support; Before Beams detection appliance stand is positioned at fan shape baffle, which is provided with Beams detection device.
2. scattering-low dosage-rotation energetic ion irradiation device as claimed in claim 1, be characterized by further comprising and be provided with bundle spot fluorescent target pick-up unit in the front being positioned at rotary target dish, be connected by vacuum flange, vacuum corrugated pipe with fluorescent target retractor device.
3. scattering-low dosage-rotation energetic ion irradiation device as claimed in claim 2, is characterized in that described Beams detection device is Au Si surface barrier detector or si multi-strip detector.
4. scattering-low dosage-rotation energetic ion irradiation device as claimed in claim 1, is characterized in that described fan shape baffle is the disk of covering of the fan opening plate washer having 1/8.
5. scattering-low dosage-rotation energetic ion irradiation device as claimed in claim 1, it is characterized in that rotation target disc under described fan shape baffle is as scattering line sample stage, Faraday cylinder is provided with in the central authorities of fan shape baffle, the barrel of Faraday cylinder is provided with bottom, the sample stage of main beam stream centered by bottom, the screw described rotation target disc having donut indentation and fix for sample.
6. scattering-low dosage-rotation energetic ion irradiation device as claimed in claim 1, characterized by further comprising and be provided with scattering target film at the front 55-65cm of described rotation target disc, and scattering target film is attached most importance to metal film Au film.
7. scattering-low dosage-rotation energetic ion irradiation device as claimed in claim 1, it is characterized in that described rotation target disc and stepper motor, fan shape baffle are all in vacuum chamber, its vacuum tightness is 10 -5pa, is provided with LED illumination lamp in vacuum chamber.
CN201520152427.3U 2015-03-17 2015-03-17 Scattering-low dosage-rotation energetic ion irradiation device Withdrawn - After Issue CN204596442U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520152427.3U CN204596442U (en) 2015-03-17 2015-03-17 Scattering-low dosage-rotation energetic ion irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520152427.3U CN204596442U (en) 2015-03-17 2015-03-17 Scattering-low dosage-rotation energetic ion irradiation device

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CN204596442U true CN204596442U (en) 2015-08-26

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104810073A (en) * 2015-03-17 2015-07-29 中国科学院近代物理研究所 Scattering-low dosage-rotary energetic ion irradiation device
CN111175806A (en) * 2020-01-08 2020-05-19 中国科学院近代物理研究所 Beam scattering target device and beam energy dissipation analyzer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104810073A (en) * 2015-03-17 2015-07-29 中国科学院近代物理研究所 Scattering-low dosage-rotary energetic ion irradiation device
CN104810073B (en) * 2015-03-17 2017-04-19 中国科学院近代物理研究所 Scattering-low dosage-rotary energetic ion irradiation device
CN111175806A (en) * 2020-01-08 2020-05-19 中国科学院近代物理研究所 Beam scattering target device and beam energy dissipation analyzer
CN111175806B (en) * 2020-01-08 2022-03-01 中国科学院近代物理研究所 Beam scattering target device and beam energy dissipation analyzer

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Granted publication date: 20150826

Effective date of abandoning: 20170419

AV01 Patent right actively abandoned

Granted publication date: 20150826

Effective date of abandoning: 20170419