CN204594579U - A kind of sheet glazing spectrometer based on micro-ring and array waveguide grating - Google Patents
A kind of sheet glazing spectrometer based on micro-ring and array waveguide grating Download PDFInfo
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- CN204594579U CN204594579U CN201520200485.9U CN201520200485U CN204594579U CN 204594579 U CN204594579 U CN 204594579U CN 201520200485 U CN201520200485 U CN 201520200485U CN 204594579 U CN204594579 U CN 204594579U
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
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Abstract
The utility model relates to a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating.Compared with conventional spectrograph, described sheet glazing spectrometer is by micro-ring resonator, array waveguide grating and photodetector array are formed, first the spectrum to be measured sent by light source or object to be measured input from the input end of micro-ring resonator, comb δ function formula is become when downloading end exports after the transmission of micro-ring resonator, inputted by the input waveguide of array waveguide grating afterwards, after the transmission of array waveguide grating, different wave length signal exports from the corresponding output waveguide of array waveguide grating, complete the separation of different wave length signal, finally receive each wavelength signals by photodetector array simultaneously, carry out strength detection, thus realize spectrometric function.Described micro-ring resonator, array waveguide grating and photodetector array can adopt semiconductor technology to be integrated on same a slice silicon chip.This sheet glazing spectrometer has that wavelength resolution is high, operating wavelength range is wide, integrated level is high, miniaturization can portable, advantages of simple structure and simple.
Description
Technical field
The utility model relates to sheet glazing spectrograph techniques, utilizes the little and array waveguide grating of micro-ring resonator channel bandwidth to export the features such as channel number is many, adopts semiconductor technology to realize a kind of high resolving power sheet glazing spectrometer based on micro-ring and array waveguide grating.It belongs to field of spectral analysis technology.
Background technology
Spectrometer refers to scientific instrument complex spectrum being decomposed into spectrum line.Conventional spectrometers is generally by an entrance slit, and a dispersion element, an imaging system and one or more exit slit are formed.Dispersion element is made up of prism or diffraction grating etc., by this dispersion element, input spectrum is isolated required wavelength, and carries out strength detection by photodetectors such as photomultipliers to selected wavelength.Be widely used in the field such as environmental monitoring, biomedical detection, food security.There is the problems such as complex structure, volume be large, expensive in conventional spectrometers.
Utility model content
The purpose of this utility model is exactly to overcome the problems referred to above, solves the practical problems, and proposes a kind of sheet glazing spectrometer based on micro-ring resonator and array waveguide grating.This sheet glazing spectrometer has that wavelength resolution is high, operating wavelength range is wide, integrated level is high, miniaturization can portable, advantages of simple structure and simple, has a extensive future.
For achieving the above object, the technical scheme that the utility model adopts is: a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating, it is characterized in that: first the spectrum to be measured sent by light source or object to be measured on integrated silicon chip input from the input end of a micro-ring resonator, comb δ function formula is become when downloading end exports after the transmission of micro-ring resonator, inputted by the input waveguide of array waveguide grating afterwards, after the transmission of array waveguide grating, different wave length signal exports from the corresponding output waveguide of array waveguide grating, complete the separation of different wave length signal, finally receive each wavelength signals by photodetector array simultaneously, carry out strength detection, thus realize spectrometric function.
Micro-ring resonator described in the utility model, array waveguide grating and photodetector array can adopt semiconductor technology to be integrated on same a slice silicon chip.
The Free Spectral Range of micro-ring resonator described in the utility model is equal with the wavelength channel interval of array waveguide grating.
The total output channel number i.e. wavelength channel number of this sheet glazing spectrometer of at least one array waveguide grating described in the utility model.
The wavelength resolution of described in the utility model glazing spectrometer is the Free Spectral Range of micro-ring resonator.
The feature advantage that the utility model has is: 1. structure is simple, volume is little, can carry with; 2. adopted micro-ring resonator channel bandwidth is little, and it is many that array waveguide grating exports channel number, and utilize cascade or thermal tuning mode, can realize the sheet glazing spectrometer that wavelength resolution is high, operating wavelength range is wide; 3. utilize the advantage of semiconductor technology when large-scale production in enormous quantities, the described little cost of glazing spectrometer volume is low.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model
Fig. 2 is the output spectrum figure of micro-ring resonator downloading end in described in the utility model glazing spectrometer obtaining of theory calculate, and wherein the Free Spectral Range of micro-ring resonator is designed to 1nm.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.
As shown in Figure 1, it is a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating, first the spectrum to be measured sent by light source or object to be measured input from the input end (1) of a micro-ring resonator, comb δ function formula is become when downloading end (3) exports after the transmission of micro-ring resonator (2), inputted by the input waveguide (4) of array waveguide grating afterwards, after the transmission of array waveguide grating (5), different wave length signal exports from the corresponding output waveguide (6) of array waveguide grating, complete the separation of different wave length signal, finally receive each wavelength signals by photodetector array (7) simultaneously, carry out strength detection, thus realize spectrometric function, described micro-ring resonator (2), array waveguide grating (5) and photodetector array (7) can adopt semiconductor technology to be integrated on same a slice silicon chip (8).
As shown in Figure 2, it is the spectrogram exported from downloading end (3) that the theory calculate of micro-ring resonator (2) in described glazing spectrometer obtains.This spectrogram is the uniform comb δ function formula in interval.The peak-to-peak wavelength interval of each resonance is the Free Spectral Range FSR of micro-ring resonator.This comb δ function formula inputs from the input waveguide (4) of array waveguide grating, after the demultiplexing function of array waveguide grating (5), different output waveguides respectively from array waveguide grating export by each harmonic peak, realize the separation of different wave length signal.Here micro-ring resonator adopts the structural design of silicon nanowires optical waveguide, and sandwich layer is silicon materials, and covering is earth silicon material, and the radius R of micro-ring resonator is designed to 92.8 μm, central wavelength lambda=1.55 μm, the group index n of silicon nanowires optical waveguide
g=4.12, by formula F SR=λ
2/ (2 π R*n
g) can to calculate Free Spectral Range FSR be 1nm.The wavelength channel interval of array waveguide grating is also 1nm.
Know with those skilled in the art know that, according to method of the present utility model, can plan topology layout again layout, the components and parts in structure are in optimized selection, and protection domain of the present utility model is not limited to above embodiment.
Claims (5)
1. the sheet glazing spectrometer based on micro-ring and array waveguide grating, it is characterized in that: the spectrum to be measured sent by light source or object to be measured on integrated silicon chip (8) first inputs from the input end (1) of micro-ring resonator (2), comb δ function formula is become when downloading end (3) exports after the transmission of micro-ring resonator (2), inputted by the input waveguide (4) of array waveguide grating (5) afterwards, after the transmission of array waveguide grating (5), different wave length signal exports from corresponding output waveguide (6), complete the separation of different wave length signal, finally receive each wavelength signals by photodetector array (7) simultaneously, carry out strength detection, thus realize spectrometric function.
2. a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating according to claim 1, is characterized in that: described micro-ring resonator (2), array waveguide grating (5) and photodetector array (7) all adopt semiconductor technology to be integrated on same a slice silicon chip (8).
3. a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating according to claim 1, is characterized in that: the Free Spectral Range of described micro-ring resonator (2) is equal with the wavelength channel interval of array waveguide grating (5).
4. a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating according to claim 1, is characterized in that: the total output channel number i.e. wavelength channel number of this sheet glazing spectrometer of described array waveguide grating (5).
5. a kind of sheet glazing spectrometer based on micro-ring and array waveguide grating according to claim 1, is characterized in that: the wavelength resolution of described glazing spectrometer is the Free Spectral Range of micro-ring resonator.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520200485.9U CN204594579U (en) | 2015-04-02 | 2015-04-02 | A kind of sheet glazing spectrometer based on micro-ring and array waveguide grating |
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| CN201520200485.9U CN204594579U (en) | 2015-04-02 | 2015-04-02 | A kind of sheet glazing spectrometer based on micro-ring and array waveguide grating |
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| CN204594579U true CN204594579U (en) | 2015-08-26 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105222895A (en) * | 2015-10-14 | 2016-01-06 | 厦门大学 | A kind of spectrometer chip being integrated with array waveguide grating and photodetector |
| CN109991700A (en) * | 2019-03-26 | 2019-07-09 | 昆明理工大学 | A kind of arrayed waveguide grating multiplexer that micro-loop is integrated |
| CN110044484A (en) * | 2019-05-06 | 2019-07-23 | 长春理工大学 | A kind of Fourier transform spectrometer, cascading bicyclic enhancing |
| CN114112873A (en) * | 2021-11-23 | 2022-03-01 | 清华大学 | Waveguide design for on-chip fluorescence dispersive optical path for flow cytometer |
| CN115165762A (en) * | 2022-07-26 | 2022-10-11 | 江苏联格科技有限公司 | Chip with spectrum distinguishing function |
| CN115165102A (en) * | 2022-09-02 | 2022-10-11 | 之江实验室 | Large-bandwidth high-resolution compact on-chip spectrometer and detection method |
| CN116539155A (en) * | 2023-07-04 | 2023-08-04 | 徐州光引科技发展有限公司 | Spectral filter and spectrometer based on multistage resonant cavity structure |
-
2015
- 2015-04-02 CN CN201520200485.9U patent/CN204594579U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105222895A (en) * | 2015-10-14 | 2016-01-06 | 厦门大学 | A kind of spectrometer chip being integrated with array waveguide grating and photodetector |
| CN109991700A (en) * | 2019-03-26 | 2019-07-09 | 昆明理工大学 | A kind of arrayed waveguide grating multiplexer that micro-loop is integrated |
| CN110044484A (en) * | 2019-05-06 | 2019-07-23 | 长春理工大学 | A kind of Fourier transform spectrometer, cascading bicyclic enhancing |
| CN110044484B (en) * | 2019-05-06 | 2021-05-25 | 长春理工大学 | Cascaded dual-ring enhanced Fourier transform spectrometer |
| CN114112873A (en) * | 2021-11-23 | 2022-03-01 | 清华大学 | Waveguide design for on-chip fluorescence dispersive optical path for flow cytometer |
| CN115165762A (en) * | 2022-07-26 | 2022-10-11 | 江苏联格科技有限公司 | Chip with spectrum distinguishing function |
| CN115165762B (en) * | 2022-07-26 | 2023-12-29 | 江苏联格科技有限公司 | Chip with spectrum resolution function |
| CN115165102A (en) * | 2022-09-02 | 2022-10-11 | 之江实验室 | Large-bandwidth high-resolution compact on-chip spectrometer and detection method |
| CN115165102B (en) * | 2022-09-02 | 2023-01-10 | 之江实验室 | Large-bandwidth high-resolution compact on-chip spectrometer and detection method |
| CN116539155A (en) * | 2023-07-04 | 2023-08-04 | 徐州光引科技发展有限公司 | Spectral filter and spectrometer based on multistage resonant cavity structure |
| CN116539155B (en) * | 2023-07-04 | 2023-09-15 | 徐州光引科技发展有限公司 | Spectral filter and spectrometer based on multistage resonant cavity structure |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150826 Termination date: 20160402 |