CN204591638U - For the oil filter formula air filter between Czochralski furnace and vacuum pump - Google Patents
For the oil filter formula air filter between Czochralski furnace and vacuum pump Download PDFInfo
- Publication number
- CN204591638U CN204591638U CN201520129611.6U CN201520129611U CN204591638U CN 204591638 U CN204591638 U CN 204591638U CN 201520129611 U CN201520129611 U CN 201520129611U CN 204591638 U CN204591638 U CN 204591638U
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- CN
- China
- Prior art keywords
- vacuum pump
- filtering tank
- filter screen
- filter
- czochralski furnace
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Abstract
The utility model discloses a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump.The design comprises the filtering tank that fluid is housed, double layer of metal filter screen is set above oil level and is fixed on filtering tank upper interior surface by vertical fixing rod, the side of filtering tank is provided with suction port, on be covered with air outlet and observation panel, sewage draining exit is provided with at the bottom of tank, suction port is connected with Czochralski furnace by pipe joint, and air outlet is connected with vacuum pump by pipe joint, and sewage draining exit is equipped with valve by pipe joint.Adopt the utility model, the dirty air in Czochralski furnace can be made to suck oily filter formula air filter by vacuum pump suction function, and the Impurity deposition such as particulate, dust is in the bottom of fluid, and clean air is discharged and enters vacuum pump, ensure vacuum pump safe and reliable operation, there is structure simple, easy and simple to handle, extend the features such as service life of vacuum pump, thus reduce and avoid vacuum pump and often damage, maintenance rate increases, and affects manufacturing efficiency, increases the problems such as maintenance cost.
Description
Technical field
The utility model relates to the air cleaning unit of Czochralski furnace, particularly relates to a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump.
Background technique
Existing air filter does not have medium and adopts the filter type of single filter screen, and filtering effect is bad.The Main Function being particularly useful for the air filter between Czochralski furnace and vacuum pump clears up particulate, dust and the impurity in Czochralski furnace.Dust impurity etc. enters vacuum pump, causes vacuum pump often to damage, and maintenance rate increases, and have impact on manufacturing efficiency, adds maintenance cost.
Summary of the invention
In view of above-mentioned prior art Problems existing and defect, the utility model design is a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump.
The technological scheme that the utility model is taked is: a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump, it is characterized in that: comprise the filtering tank that fluid is housed, double layer of metal filter screen is set above the oil level in filtering tank, double layer of metal filter screen is fixed on the upper interior surface central position of filtering tank by vertical fixing rod, one side of filtering tank is provided with suction port, the upper cover of filtering tank is respectively equipped with air outlet and liquid level observation panel, sewage draining exit is provided with at the bottom of the tank of filtering tank, wherein suction port is connected with Czochralski furnace by gas-tpe fitting, air outlet is connected with vacuum pump by gas-tpe fitting, sewage draining exit is equipped with valve by gas-tpe fitting.
The beneficial effect that the utility model produces is: adopt the utility model, the dirty air in Czochralski furnace can be made to suck oily filter formula air filter by the effect of vacuum pump negative pressure, particulate, the bottom of the Impurity depositions such as dust fluid in filtering tank, clean air is discharged and enters vacuum pump, reach contamination-free, clean effect, ensure vacuum pump safe and reliable operation, there is structure simple, easy and simple to handle, extend the features such as the working life of vacuum pump, thus reduce and avoid vacuum pump and often damage, maintenance rate increases, affect manufacturing efficiency, increase the problems such as maintenance cost.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
Oil filter formula air filter is connected between Czochralski furnace and vacuum pump, and Czochralski furnace and vacuum pump are known equipment in the industry.
With reference to Fig. 1, oily filter formula air filter comprises the filtering tank 1 that fluid is housed, and arranges double layer of metal filter screen above the oil level in filtering tank 1, double layer of metal filter screen, its upper strata is thin metal filter screen 2, and lower floor is crude metal filter screen 3, and the order number of thin metal filter screen 2 is 10; The order number of crude metal filter screen 3 is 4.Double layer of metal filter screen is fixed on the upper cover 1.1 internal surface central position of filtering tank 1 by vertical fixing rod 4, and the lower end of vertical fixing rod 4 is welded with double layer of metal filter screen; Upper end is welded with upper cover 1.1 internal surface.One side of filtering tank 1 is provided with suction port 5, the upper cover 1.1 of filtering tank 1 is respectively equipped with air outlet 6 and liquid level observation panel 7, at the bottom of the tank of filtering tank 1,1.2 are provided with sewage draining exit 8, wherein suction port 5 is connected with Czochralski furnace by links such as metal bellowss, air outlet 6 is connected with vacuum pump by links such as metal bellowss, and sewage draining exit 8 is equipped with valve by gas-tpe fitting.
The working principle of oil filter formula air filter: above the inherent oil level of filtering tank, double layer of metal filter screen is set, and by the adhesion of oil film and the multiple stack structure of metal filter screen, form Multi-channel filtering wave band, with particulate, the vitiated air of the impurity such as dust enters in fluid, by under vacuum pump suction function, can automatically roll at fluid turning in during air flowing, air forms the bubble of a large amount of oil film parcel when rising to liquid level, particulate in air, dirt ash waits impurity to repeat to filter in Multi-channel filtering wave band, oil film bubble is broken by double layer of metal filter screen, particulate, the Impurity depositions such as dust are in the bottom of filtering tank fluid.Fluid itself has good stickiness, and degerming, filtered air is pure and fresh pleasant.Clean air is discharged.Be deposited in bottom filtering tank dirty by blowdown valve periodic exhaustion.
Oil filter formula air filter covers and is provided with peep hole, can observe the working state of liquid level and equipment at any time, bottom is provided with blowdown valve, periodical blowdown.
Fluid in filtering tank can be divided into: mineral oil, vegetable oil, biological wet goods, also can utilize used oil, and fluid dirtier bottom filtering tank can supplement part fluid by suction port, without the need to whole replacing after discharging.Suction port tracheae enters in filtering tank to oil level.
Double layer of metal filter screen is divided into thickness two trace overlap to filter wave band, and adopt 304 stainless steels, corrosion-resistant, not easily get rusty, repair rate is low.The design of metal filter screen, makes to discharge air purity and significantly promotes.
Oil filter formula air filter is independent and device that is that establish one's own system, is equipped with the link of corresponding size, is just applicable to the vacuum pump of various different model, specification according to the vacuum pump of different model, specification.The utility model also can be widely used in the industries such as chemical industry, metallurgy, oil, food and in various vacuum oil-filter.
Claims (3)
1. filter formula air filter for the oil between Czochralski furnace and vacuum pump for one kind, it is characterized in that: comprise the filtering tank (1) that fluid is housed, above oil level in filtering tank (1), double layer of metal filter screen is set, double layer of metal filter screen is fixed on upper cover (1.1) the internal surface central position of filtering tank (1) by vertical fixing rod (4), one side of filtering tank (1) is provided with suction port (5), the upper cover (1.1) of filtering tank (1) is respectively equipped with air outlet (6) and liquid level observation panel (7), at the bottom of the tank of filtering tank (1), (1.2) are provided with sewage draining exit (8), wherein suction port (5) is connected with Czochralski furnace by gas-tpe fitting, air outlet (6) is connected with vacuum pump by gas-tpe fitting, sewage draining exit (8) is equipped with valve by gas-tpe fitting.
2. according to claim 1 for the oil filter formula air filter between Czochralski furnace and vacuum pump, it is characterized in that: described double layer of metal filter screen, its upper strata is thin metal filter screen (2), and lower floor is crude metal filter screen (3).
3. according to claim 2 for the oil filter formula air filter between Czochralski furnace and vacuum pump, it is characterized in that: the order number of described thin metal filter screen (2) is 10; The order number of crude metal filter screen (3) is 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520129611.6U CN204591638U (en) | 2015-03-06 | 2015-03-06 | For the oil filter formula air filter between Czochralski furnace and vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520129611.6U CN204591638U (en) | 2015-03-06 | 2015-03-06 | For the oil filter formula air filter between Czochralski furnace and vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204591638U true CN204591638U (en) | 2015-08-26 |
Family
ID=53927798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520129611.6U Expired - Fee Related CN204591638U (en) | 2015-03-06 | 2015-03-06 | For the oil filter formula air filter between Czochralski furnace and vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204591638U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104696200A (en) * | 2015-03-06 | 2015-06-10 | 天津中环半导体股份有限公司 | Oil filtering type air filter used between czochralski furnace and vacuum pump |
| CN107684795A (en) * | 2016-08-03 | 2018-02-13 | 隆基绿能科技股份有限公司 | Tail gas filter and vacuum system of single-crystal furnace |
-
2015
- 2015-03-06 CN CN201520129611.6U patent/CN204591638U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104696200A (en) * | 2015-03-06 | 2015-06-10 | 天津中环半导体股份有限公司 | Oil filtering type air filter used between czochralski furnace and vacuum pump |
| CN107684795A (en) * | 2016-08-03 | 2018-02-13 | 隆基绿能科技股份有限公司 | Tail gas filter and vacuum system of single-crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150826 |