CN204559882U - 一种mems麦克风的封装结构 - Google Patents
一种mems麦克风的封装结构 Download PDFInfo
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- CN204559882U CN204559882U CN201520288447.3U CN201520288447U CN204559882U CN 204559882 U CN204559882 U CN 204559882U CN 201520288447 U CN201520288447 U CN 201520288447U CN 204559882 U CN204559882 U CN 204559882U
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- Prior art keywords
- vibrating diaphragm
- sound
- chamber
- encapsulating
- packaging
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- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000004806 packaging method and process Methods 0.000 claims description 29
- 239000010409 thin film Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
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Priority Applications (1)
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CN201520288447.3U CN204559882U (zh) | 2015-05-06 | 2015-05-06 | 一种mems麦克风的封装结构 |
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CN201520288447.3U CN204559882U (zh) | 2015-05-06 | 2015-05-06 | 一种mems麦克风的封装结构 |
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CN204559882U true CN204559882U (zh) | 2015-08-12 |
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CN201520288447.3U Expired - Fee Related CN204559882U (zh) | 2015-05-06 | 2015-05-06 | 一种mems麦克风的封装结构 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104822118A (zh) * | 2015-05-06 | 2015-08-05 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构 |
CN112804629A (zh) * | 2021-01-19 | 2021-05-14 | 潍坊歌尔微电子有限公司 | 麦克风结构和电子设备 |
-
2015
- 2015-05-06 CN CN201520288447.3U patent/CN204559882U/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104822118A (zh) * | 2015-05-06 | 2015-08-05 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构 |
WO2016176993A1 (zh) * | 2015-05-06 | 2016-11-10 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构 |
CN112804629A (zh) * | 2021-01-19 | 2021-05-14 | 潍坊歌尔微电子有限公司 | 麦克风结构和电子设备 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200806 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150812 |