CN204537990U - 一种基板检测装置 - Google Patents
一种基板检测装置 Download PDFInfo
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CN201520235840.6U CN204537990U (zh) | 2015-04-20 | 2015-04-20 | 一种基板检测装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112233992A (zh) * | 2020-09-10 | 2021-01-15 | 上海华力集成电路制造有限公司 | 晶圆破片检测装置及其使用方法 |
CN113877846A (zh) * | 2021-12-08 | 2022-01-04 | 苏州佳祺仕信息科技有限公司 | 一种用于检测磁通量的检测设备及方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112233992A (zh) * | 2020-09-10 | 2021-01-15 | 上海华力集成电路制造有限公司 | 晶圆破片检测装置及其使用方法 |
CN113877846A (zh) * | 2021-12-08 | 2022-01-04 | 苏州佳祺仕信息科技有限公司 | 一种用于检测磁通量的检测设备及方法 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170401 Address after: 201203 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Patentee after: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT Co.,Ltd. Address before: 201203 Pudong New Area Zhangjiang Road, Shanghai, No. 1 Curie Patentee before: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT Co.,Ltd. Patentee before: Ideal Energy Equipment (Shanghai) Ltd. |
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TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 201306 plant 3, Lane 2699, Jiangshan Road, Lingang xinpian District, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: Ideal Wanlihui Semiconductor Equipment (Shanghai) Co.,Ltd. Address before: Room 403, Building 3, No. 3255, Sixian Road, Songjiang District, Shanghai, March 2012 Patentee before: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT Co.,Ltd. |
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CP03 | Change of name, title or address |