CN204481006U - A kind of sealing device for chamber door - Google Patents
A kind of sealing device for chamber door Download PDFInfo
- Publication number
- CN204481006U CN204481006U CN201520146782.XU CN201520146782U CN204481006U CN 204481006 U CN204481006 U CN 204481006U CN 201520146782 U CN201520146782 U CN 201520146782U CN 204481006 U CN204481006 U CN 204481006U
- Authority
- CN
- China
- Prior art keywords
- magnet
- door
- chamber door
- aperture
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of sealing device for chamber door, by arranging the first magnet around the aperture of door outside compartment spacers, chamber door moving area outside dividing plate beyond the first magnet arranges the second magnet, and the 3rd magnet is set in the inner side horizontal slip of chamber door, and utilize homopolar-repulsion between magnet, the principle that there is a natural attraction between the sexes, attracting by producing opposite polarity between the 3rd magnet and the first magnet, make the 3rd magnet by horizontal slip and the first magnet attraction, aperture of door is sealed; Repelling each other by producing identical polar between the 3rd magnet and first, second magnet, the 3rd magnet being separated with the first magnet by horizontal slip, aperture of door is opened.The utility model, after manipulator exits chamber, can carry out magnetic seal to chamber in time, has structure distinguishing feature that is simple, that easily realize, can be widely used in the sealing of the equipment such as semiconductor cleaning, oxidation furnace.
Description
Technical field
The utility model relates to field of semiconductor devices, more specifically, relates to a kind of magnetic sealing means for chamber door.
Background technology
In the production and processing technology process of semiconductor integrated circuit, semiconductor wafer (comprising CD or flat-panel monitor etc.) usually all can through multiple tracks processing steps such as such as thin film deposition, diffusion, heat treatment, etching, polishing, cleanings.Much technique is all carried out and in chamber, is transmitted wafer by manipulator in chamber.In order to ensure chamber and external environment condition to be isolated, preventing the process conditions of chamber to be interfered, avoiding wafer produce bad reaction and polluted, needing to set up good sealing to chamber.
Such as, for the cleaning of wafer, along with the development of semiconductor manufacturing equipment, also more and more higher to the cleaning manufacture process requirement of integrated circuit (IC) wafer.In integrated circuit cleaning process, owing to being used for the chemical liquid major part of clean wafers, all there is highly acid, strong basicity and effumability, there is corrosion impact to the parts of surrounding, so during technique, have higher requirement for the microenvironment of chamber interior residing for wafer.
Therefore, for the chamber comprising the various kinds of equipment such as semiconductor cleaning, oxidation furnace, in order to the inside microenvironment ensureing that formation one is good in chamber, need to seal wafer place processing chamber, completely cut off to make the environment of wafer and surrounding.Simultaneously, because manipulator is in the process of carrying out capturing to wafer and place, inevitably by the folding of chamber door, chamber is communicated with external environment condition again, in the process of cleaning, the impact of external environment condition on it is reduced as much as possible for making wafer, after manipulator exits process environments, also need again to seal in time chamber, to ensure the technological requirement of chamber interior.
The existing sealing to chamber, normally adopt the mode of installing rubber seal in chamber door, comes to set up between chamber aperture of door to seal.But the simple rubber seal that adopts as the defect existing for sealing medium is, rubber seal corrosion-vulnerable or produce distortion by hyperthermia radiation, causes seal failure, and when chamber door fails even pressured chamber aperture of door, also easily causes leakage phenomenon.
Therefore, design is a kind of simple for structure, is easier to the sealing device of the positiver sealing realizing chamber door, becomes industry when previous important topic.
Utility model content
The purpose of this utility model is the above-mentioned defect overcoming prior art existence, provides a kind of sealing device for chamber door, can realize motion and the positiver sealing of chamber door relatively easily, and simple for structure.
For achieving the above object, the technical solution of the utility model is as follows:
For a sealing device for chamber door, comprising:
Compartment spacers, is located between chamber and robot movement region, for by chamber and other regions isolated; Described compartment spacers is provided with aperture of door, gets wafer for manipulator to chamber biography; Described compartment spacers external side parallel is movably equipped with the chamber door matched with described aperture of door, for linearly moving to described aperture of door correspondence position by driving or oppositely remove;
First magnet, the second magnet and the 3rd magnet, described first magnet is located at outside described compartment spacers, and surrounds described aperture of door; Described second magnet is located at outside described compartment spacers, and is positioned at the moving area of the described chamber door beyond described first magnet; The inner side of described chamber door is located in described 3rd magnet horizontal slip;
Wherein, when described chamber door moves to described aperture of door correspondence position, attracting by producing opposite polarity between described 3rd magnet and described first magnet, make described 3rd magnet by horizontal slip and described first magnet attraction, described aperture of door is sealed; Repel each other by producing identical polar between described 3rd magnet and first, second magnet described, described 3rd magnet is separated with described first magnet by horizontal slip, described aperture of door is opened, and keeps gap with described second magnet, move to follow described chamber door.
Preferably, the both sides of described aperture of door are provided with a secondary guide rail, and described guide rail is provided with slide block, and described slide block connects the both sides of described chamber door, and described chamber door is by driving along described guide rail to described aperture of door translation or removing.
Preferably, described guide rail is located at the left and right of described aperture of door or upper and lower both sides.
Preferably, form horizontal slip by the lead that matches and guide groove between described chamber door with described 3rd magnet to be connected.
Preferably, be provided with horizontal cylindricality lead inside described chamber door, described 3rd magnet opposite side is provided with the guide groove matched with described lead.
Preferably, described lead is positioned at the medial center of described chamber door.
Preferably, described chamber door connects driving mechanism.
Preferably, described driving mechanism is cylinder or connecting rod.
Preferably, described first magnet and the 3rd magnet one of them be electromagnet.
Preferably, described first magnet and the 3rd magnet have one at least for electromagnet.
As can be seen from technique scheme, the utility model is by arranging the first magnet around the aperture of door outside compartment spacers, chamber door moving area outside dividing plate beyond the first magnet arranges the second magnet, and the 3rd magnet is set in the inner side horizontal slip of chamber door, and utilize the principle that between magnet, same polarity is repelled, heteropolarity is attracting, attracting by producing opposite polarity between the 3rd magnet and the first magnet, make the 3rd magnet by horizontal slip and the first magnet attraction, aperture of door is sealed; Repelling each other by producing identical polar between the 3rd magnet and first, second magnet, the 3rd magnet being separated with the first magnet by horizontal slip, aperture of door being opened, and keeps gap with the second magnet, moving to follow chamber door; Meanwhile, utilize driving and the guide rail transmission of driving mechanism, chamber door stable movement can be made, locate controlled.The utility model, after manipulator exits chamber, can carry out magnetic seal to chamber in time, has structure distinguishing feature that is simple, that easily realize, can be widely used in the sealing of the equipment such as semiconductor cleaning, oxidation furnace.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of sealing device for chamber door of the utility model one preferred embodiment;
Fig. 2 is the working state schematic representation of the sealing device in Fig. 1 embodiment when all opening;
Working state schematic representation when Fig. 3 is the sealing device Close All in Fig. 1 embodiment.
1. compartment spacers, 2. guide rail, 3. chamber door in figure; 4. slide block; 5. the first magnet; 6. the second magnet; 7. the 3rd magnet; 8. driving mechanism (cylinder); 9. lead; 10. guide groove; 11. aperture of doors.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.
It should be noted that, in following embodiment, when describing execution mode of the present utility model in detail, in order to clearly represent structure of the present utility model so that explanation, special to the structure in accompanying drawing not according to general scale, and carried out partial enlargement, distortion and simplify processes, therefore, should avoid being understood in this, as to restriction of the present utility model.
In following embodiment of the present utility model, refer to Fig. 1, Fig. 1 is the structural representation of a kind of sealing device for chamber door of the utility model one preferred embodiment.As shown in Figure 1, the sealing device for chamber door of the present utility model comprises the compartment spacers 1, chamber door 3, first magnet 5, second magnet 6 (not shown) and the 3rd magnet 7 that have aperture of door 11.
Please continue to refer to Fig. 1.Described compartment spacers 1 is located between the moving region of chamber and manipulator (scheming slightly), for by chamber and other regions isolated.Compartment spacers 1 can be processed into the suitable shape matched with chamber.In Fig. 1 of the present embodiment, exemplarily show a kind of compartment spacers 1 of door-plate shape.Be processed with an aperture of door 11 in the appropriate location of described compartment spacers 1, get wafer for manipulator to chamber biography.Wafer described in this specification can represent polytype pan, such as semiconductor wafer, CD or flat-panel monitor etc.As optional execution mode, aperture of door 11 can be rectangle, circle or other passes be suitable for.The size of aperture of door 11 can be determined according to the size of the size of manipulator and wafer.In Fig. 1 of the present embodiment, exemplarily show a kind of aperture of door 11 of rectangular shape.
Please continue to refer to Fig. 1.Chamber door 3 in a movable manner parallel activity is arranged on the outside of described compartment spacers 1, and connects driving mechanism 8, for linearly moving to the correspondence position of described aperture of door 11 by driving or oppositely removing from the correspondence position of described aperture of door 11.As an Alternate embodiments, described driving mechanism 8 can adopt the form such as cylinder or connecting rod.As preferably, the utility model have employed cylinder 8 as shown in Figure 1 as driving mechanism.The cylinder bar of cylinder 8 is fixedly connected with chamber door 3, chamber door 3 follow cylinder bar can be made to make to be parallel to the rectilinear motion of compartment spacers 1.Adopt air cylinder driven form, the displacement of chamber door can be set, realize the location to its movement, the Lift of chamber door relatively easy to control.
Meanwhile, in order to ensure the easy motion of chamber door 3, can install a secondary guide rail 2 in the both sides of described aperture of door 11, described guide rail 2 is provided with slide block 4, and described slide block 4 connects the both sides of described chamber door 3.For keep balance and motion smooth and easy, can the upper-lower position of chamber door 3 both sides each symmetry install a slide block 4.Like this, described chamber door 3, when being subject to the driving of described cylinder 8, can be removed along described guide rail 2 to the translation of described aperture of door 11 or from described aperture of door 11.As optional execution mode, described guide rail 2 can be installed in parallel in the left and right of described aperture of door 11 or upper and lower both sides.The present embodiment adopts form guide rail 2 being installed in parallel in aperture of door 11 left and right sides, chamber door 3 can be made when the driving of the described driving mechanism cylinder 8 being subject to connecting below it, shift to described aperture of door 11 along described guide rail 2 is parallel vertically upward or removes downwards from described aperture of door 11.The shift position of chamber door 3, also can by arranging position-limit mechanism to realize the positioning control to its Lift at guide rail 2.
Please continue to refer to Fig. 1.Described first magnet 5 is fixedly mounted on the outside (i.e. manipulator enter hand side) of described compartment spacers 1, and is surrounded by described aperture of door 11.In the present embodiment, described first magnet 5 is processed to rectangular ring, and corresponding with the size of aperture of door 11, can be fixedly mounted on aperture of door 11 around.
Refer to Fig. 2 and Fig. 3, operating state when its sealing device shown respectively in the above-described embodiment shown in Fig. 1 all opens and closes.As shown in Figure 2, described second magnet 6 is fixedly mounted on outside described compartment spacers, and is positioned at the moving area of the described chamber door 3 beyond described first magnet 5.In the present embodiment, owing to the moving area of chamber door 3 being designed to move to correspondence position straight up from the below of aperture of door 11, therefore, the fitting limit of described second magnet 6 be from described first magnet 5 annular below, to chamber door 3 initial extreme lower position between height region.
Refer to Fig. 2 and Fig. 3.Described 3rd magnet 7 is located at the inner side of described chamber door 3, and can and chamber door 3 between produce the relative sliding of horizontal direction.In order to realize this function, can by designing the lead 9 and guide groove 10 that match between described chamber door 3 with described 3rd magnet 7, the horizontal slip formed between chamber door 3 with the 3rd magnet 7 is connected.As shown in Figures 2 and 3, as an embodiment, a lead 9 protruded can be processed in the inner side of described chamber door 3, and process a guide groove 10 closed with described lead 9 matching form at the opposite side of described 3rd magnet 7.Further, as a preferred embodiment, described lead 9 can be processed into the cylindricality of level, such as, can be triangular prism to multi-edge column-shaped any one or profiled-cross-section cylindricality or other suitable cylindricalitys.If adopt cylindrical lead, should key pin be set up, prevent the 3rd magnet from rotating.Further preferably, described lead 9 can be made to be positioned at the medial center position of described chamber door 3, to play good balanced action.Like this, described 3rd magnet 7 can between its with described first magnet 5 identical or opposite polarity magneticaction under, carry out horizontal slip along described lead 9.In addition, the size of the 3rd magnet 7 and shape should ensure that it is when with the first magnet 5 phase adhesive, can by the complete closely sealed covering of the first magnet 5, effectively to close aperture of door 11.
When the 3rd magnet 7 is installed with chamber door 3, the guide groove 10 when the 3rd magnet 7 should be made to be inserted in the lead 9 of chamber door 3 after, between chamber door 3 and the vertical plane of the 3rd magnet 7, leave an assemblage gap v, this gap v should be more than or equal to zero (v >=0).
Please continue to refer to Fig. 2 and Fig. 3.As an embodiment, described first magnet 5 and the 3rd magnet 7 one of them can be electromagnet.Like this, when described chamber door 3 is displaced downwardly to the correspondence position of described aperture of door 11 in the driving of driving mechanism cylinder 8, attracting by producing opposite polarity between described 3rd magnet 7 and described first magnet 5, namely by being energized to the first magnet 5 or the 3rd magnet 7 that adopt electromagnet, utilize the principle that dissimilar polarities between magnet is attracting, described 3rd magnet 7 is made to produce horizontal slip under the help of lead 9, guide groove 10 fit structure, with described first magnet 5 adhesive, thus described aperture of door 11 is sealed; When aperture of door 11 opened by needs, repel each other by producing identical polar between described 3rd magnet 7 and first, second magnet 5,6 described, namely by passing to reverse current to the first magnet 5 or the 3rd magnet 7 that adopt electromagnet, utilize the principle that identical polar between magnet repels mutually, described 3rd magnet 7 is separated with described first magnet 5 by horizontal slip, thus described aperture of door 11 is opened.Meanwhile, also maintain clearance t because of two like magnetic poles repel each other between described 3rd magnet 7 and described first magnet 5, second magnet 6, described 3rd magnet 7 can be close in chamber door 3, and follow described chamber door 3 and move.
Further, in described first magnet 5 and the 3rd magnet 7, can have one at least for electromagnet, namely described first magnet 5 and the 3rd magnet 7 can be all electromagnet, only need pass to reverse current, form contrary magnetic pole, just can phase adhesive closing door hole 11; Or pass to same direction current, form identical magnetic pole, just can repel mutually and open aperture of door 11.
Please continue to refer to Fig. 2 and Fig. 3.When needs technique, to adopting the first magnet 5 of electromagnet or/and the 3rd magnet 7 is energized, make the first magnet 5, second magnet 6 identical with the 3rd magnet 7 polarity.Now, under the effect of lead 9, first magnet 5 promotes the 3rd magnet 7 and moves to the direction away from the first magnet 5, until when meeting certain spacing t between the first magnet 5 and the 3rd magnet 7, chamber door 3 and the 3rd magnet 7 is driven to move downward by cylinder 8 again, until chamber door is opened completely, manipulator can be indoor by wafer placed cavity, and again exit.Then, continue when three blocks of magnet 5,6,7 polarity is identical, the first magnet 5 and the second magnet 6 keep certain spacing t with the 3rd magnet 7 all the time, and under the effect of cylinder, chamber door 3 is driven to move upward, until corresponding with aperture of door 11 position on compartment spacers 1.Now, pass to reverse current to the first magnet 5 or the 3rd magnet 7, make polarity both it different, the direction horizontal movement of the 3rd magnet 7 namely along the lead 9 in chamber door 3 to the first magnet 5, until the first magnet 5 and the 3rd magnet 7 phase adhesive, thus realize the sealing of chamber door.
It should be noted that, described 3rd magnet 7 with between described chamber door 3 be lead 9 by matching and guide groove 10 form, and utilize the principle that the dissimilar polarities of magnet is attracting, identical polar repels each other to carry out horizontal slip, realize the sealing of chamber aperture of door 11 and open.In order to ensure moving horizontally distance and can being enough to adhesive to the first magnet 5 of described 3rd magnet 7, and successfully returning along lead 9, needing to ensure that the assemblage gap v between described chamber door 3 and the 3rd magnet 7 is more than or equal to zero (v >=0); And, horizontal clearance s when should make described 3rd magnet 7 and described first magnet 5 adhesive, between lead 9 and guide groove 10 is more than or equal to the maximum spacing t (s >=t > 0) when described 3rd magnet 7 departs from described first magnet 5, thus ensures that cylinder can drive described chamber door to move smoothly.
In sum, the utility model is by arranging the first magnet around the aperture of door outside compartment spacers, chamber door moving area outside dividing plate beyond the first magnet arranges the second magnet, and the 3rd magnet is set in the inner side horizontal slip of chamber door, and utilize the principle that between magnet, same polarity is repelled, heteropolarity is attracting, attracting by producing opposite polarity between the 3rd magnet and the first magnet, make the 3rd magnet by horizontal slip and the first magnet attraction, aperture of door is sealed; Repelling each other by producing identical polar between the 3rd magnet and first, second magnet, the 3rd magnet being separated with the first magnet by horizontal slip, aperture of door being opened, and keeps gap with the second magnet, moving to follow chamber door; Meanwhile, utilize driving and the guide rail transmission of driving mechanism, chamber door stable movement can be made, locate controlled.The utility model, after manipulator exits chamber, can carry out magnetic seal to chamber in time, has structure distinguishing feature that is simple, that easily realize, can be widely used in the sealing of the equipment such as semiconductor cleaning, oxidation furnace.
Above-describedly be only preferred embodiment of the present utility model; described embodiment is also not used to limit scope of patent protection of the present utility model; therefore the equivalent structure that every utilization specification of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in protection range of the present utility model.
Claims (10)
1. for a sealing device for chamber door, it is characterized in that, comprising:
Compartment spacers, is located between chamber and robot movement region, for by chamber and other regions isolated; Described compartment spacers is provided with aperture of door, gets wafer for manipulator to chamber biography; Described compartment spacers external side parallel is movably equipped with the chamber door matched with described aperture of door, for linearly moving to described aperture of door correspondence position by driving or oppositely remove;
First magnet, the second magnet and the 3rd magnet, described first magnet is located at outside described compartment spacers, and surrounds described aperture of door; Described second magnet is located at outside described compartment spacers, and is positioned at the moving area of the described chamber door beyond described first magnet; The inner side of described chamber door is located in described 3rd magnet horizontal slip;
Wherein, when described chamber door moves to described aperture of door correspondence position, attracting by producing opposite polarity between described 3rd magnet and described first magnet, make described 3rd magnet by horizontal slip and described first magnet attraction, described aperture of door is sealed; Repel each other by producing identical polar between described 3rd magnet and first, second magnet described, described 3rd magnet is separated with described first magnet by horizontal slip, described aperture of door is opened, and keeps gap with described second magnet, move to follow described chamber door.
2. sealing device according to claim 1, it is characterized in that, the both sides of described aperture of door are provided with a secondary guide rail, and described guide rail is provided with slide block, described slide block connects the both sides of described chamber door, and described chamber door is by driving along described guide rail to described aperture of door translation or removing.
3. sealing device according to claim 2, is characterized in that, described guide rail is located at the left and right of described aperture of door or upper and lower both sides.
4. sealing device according to claim 1, is characterized in that, forms horizontal slip be connected between described chamber door with described 3rd magnet by the lead that matches and guide groove.
5. sealing device according to claim 4, is characterized in that, is provided with horizontal cylindricality lead inside described chamber door, and described 3rd magnet opposite side is provided with the guide groove matched with described lead.
6. the sealing device according to claim 4 or 5, is characterized in that, described lead is positioned at the medial center of described chamber door.
7. the sealing device according to claim 1,2,4 or 5, is characterized in that, described chamber door connects driving mechanism.
8. sealing device according to claim 7, is characterized in that, described driving mechanism is cylinder or connecting rod.
9. sealing device according to claim 1, is characterized in that, described first magnet and the 3rd magnet one of them be electromagnet.
10. sealing device according to claim 1, is characterized in that, described first magnet and the 3rd magnet have one at least for electromagnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520146782.XU CN204481006U (en) | 2015-03-16 | 2015-03-16 | A kind of sealing device for chamber door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520146782.XU CN204481006U (en) | 2015-03-16 | 2015-03-16 | A kind of sealing device for chamber door |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204481006U true CN204481006U (en) | 2015-07-15 |
Family
ID=53636783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520146782.XU Active CN204481006U (en) | 2015-03-16 | 2015-03-16 | A kind of sealing device for chamber door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204481006U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107785295A (en) * | 2017-11-29 | 2018-03-09 | 上海大族富创得科技有限公司 | One kind spray moisturizing wafer door gear |
| CN109659250A (en) * | 2017-10-12 | 2019-04-19 | 张仁才 | Door gear for chamber |
| CN111214017A (en) * | 2020-01-21 | 2020-06-02 | 吴小花 | Self-dedusting wardrobe with efficient insect prevention function |
-
2015
- 2015-03-16 CN CN201520146782.XU patent/CN204481006U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109659250A (en) * | 2017-10-12 | 2019-04-19 | 张仁才 | Door gear for chamber |
| CN107785295A (en) * | 2017-11-29 | 2018-03-09 | 上海大族富创得科技有限公司 | One kind spray moisturizing wafer door gear |
| CN111214017A (en) * | 2020-01-21 | 2020-06-02 | 吴小花 | Self-dedusting wardrobe with efficient insect prevention function |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204481006U (en) | A kind of sealing device for chamber door | |
| CN102934212B (en) | Attachment system | |
| CN103038873B (en) | Link handling system | |
| JP7037379B2 (en) | A transfer robot equipped with a thin plate-shaped substrate holding device and a holding device. | |
| US9151393B2 (en) | Two way gate valve and substrate processing system having the same | |
| JP7137049B2 (en) | Article conveying device | |
| US20130051967A1 (en) | Substrate inverting apparatus, substrate handling method, and substrate processing apparatus | |
| KR101184111B1 (en) | Substrate treatment apparatus | |
| KR102425864B1 (en) | Substrate processing apparatus | |
| JP2017220561A (en) | Nozzle unit, atmosphere replacement device including nozzle unit, and atmosphere replacement method | |
| JP2012528478A (en) | Device for particle-free handling of substrates | |
| KR20130093534A (en) | Carrier device | |
| CN104733357A (en) | Magnetic sealing device for reaction chamber | |
| KR102069665B1 (en) | Apparatus for vacuum processing of a substrate, a system for the manufacture of devices with organic materials, and a method for sealing the processing vacuum chamber and the maintenance vacuum chamber to one another | |
| CN204481005U (en) | For the sealing device of reaction chamber | |
| JP2015043420A (en) | Plasma processing devices having multi-port valve assemblies | |
| JP2014020552A (en) | Gate valve using inclination driving | |
| WO2011077937A1 (en) | Apparatus for drying substrate and method for drying substrate | |
| TW201900284A (en) | Nozzle unit, atmosphere exchanging device with nozzle unit, and atmosphere exchanging method capable of promptly providing suitable thrust to the nozzle for replacing atmosphere according to the receiving condition of received object in the container | |
| KR20100021150A (en) | Load lock chamber and substrate processing apparatus including the same | |
| KR20110075585A (en) | Substrate treatment apparatus | |
| JP2007160282A (en) | Non-contact type rotation treatment apparatus for object to be treated | |
| KR100855733B1 (en) | Apparatus for processing glass substrate | |
| KR101654619B1 (en) | Apparatus for treating a substrate | |
| JP2003190894A (en) | Method and structure for preventing contamination caused by particle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |