CN204391053U - Flexible vacuum alignment and lamination equipment - Google Patents
Flexible vacuum alignment and lamination equipment Download PDFInfo
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- CN204391053U CN204391053U CN201420742409.6U CN201420742409U CN204391053U CN 204391053 U CN204391053 U CN 204391053U CN 201420742409 U CN201420742409 U CN 201420742409U CN 204391053 U CN204391053 U CN 204391053U
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- 238000003475 lamination Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 273
- 238000010030 laminating Methods 0.000 claims abstract description 113
- 238000012856 packing Methods 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 239000007779 soft material Substances 0.000 claims description 6
- 239000012780 transparent material Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 17
- 230000008569 process Effects 0.000 abstract description 15
- 238000007789 sealing Methods 0.000 abstract 3
- 238000005086 pumping Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000740 bleeding effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- -1 acryl Chemical group 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a flexible formula vacuum counterpoint laminating equipment, including laminating platform down and last laminating platform. The lower joint platform is used for placing the substrate and bearing the elastic sealing component around the substrate. The upper attaching platform is arranged opposite to the substrate and the elastic sealing component. The upper bonding platform comprises a flexible substrate bearing platform fixed on the upper bonding platform and used for bearing the flexible substrate, a preset gap is formed between the flexible substrate and the substrate, the upper bonding platform, the elastic sealing assembly and the lower bonding platform form a vacuum cavity and contain the substrate and the flexible substrate, and the flexible substrate bearing platform is flexibly deformed towards the substrate and bonded to the substrate from a central area and diffuses outwards by pumping out gas in the vacuum cavity. The utility model provides a flexible substrate receives the problem that tensile results in counterpoint skew with base plate laminating process gassing and flexible substrate.
Description
[technical field]
The utility model relates to a kind of abutted equipment, particularly relates to a kind of bendable vacuum contraposition abutted equipment, in order to accurately, bubble-freely to fit flexible substrate on substrate.
[background technology]
Due to the progress of integrated circuit (integrated circuit) process technique, add that people constantly increase for the demand of Mobile Communications, and then impel information, communication, network and related industry vigorously to develop, for presenting the display of various lteral data pattern and dynamic image, become the necessity that daily life is indispensable; And the characteristic that flat-panel screens is compact, can be widely used in various electronic product, make the promotion of its popularity rate joint, demand is significantly grow up.
Due in the manufacture process of flat-panel screens, great majority be by artificial or machine with roller mode by film adhered on the panel of display, but the performance that its Anawgy accuracy and efficiency all cannot have.Because roller laminating type performs under atmospheric environment, therefore have and can produce bubble at the coated air of interface of film and substrate in laminating roller rolling process.In addition, in the process of laminating, the film that laminating tension force causes contraposition originally to complete and substrate again produce contraposition and offset.Therefore, a kind of new-type abutted equipment is needed to propose with problems such as the contraposition skews solving above-mentioned bubble and thin-film material and stretched caused.
[summary of the invention]
One of the utility model object is to provide a kind of bendable vacuum contraposition abutted equipment, fit under vacuum conditions by flexible substrate and substrate, and the fitting line between flexible substrate and substrate is from central authorities toward peripheral laminating, to avoid coated air, to solve the problem producing bubble in flexible substrate and baseplate-laminating process.
Another object of the utility model is to provide a kind of bendable vacuum contraposition abutted equipment, when flexible substrate plummer forms deflection deformation and when moving towards infrabasal plate by the effect of atmospheric pressure, because flexible substrate and substrate form less predetermined gap, therefore flexible substrate in flexible substrate and baseplate-laminating process can be solved to be subject to stretching the problem causing contraposition to offset, effectively improve the contraposition precision between flexible substrate and substrate.
For reaching above-mentioned purpose, a preferred embodiment of the present utility model provides a kind of bendable vacuum contraposition abutted equipment to comprise lower laminating platform, upper laminating platform.Lower laminating platform, is provided with the annular groove around a substrate placing stage and described substrate placing stage, and described substrate placing stage is in order to hold a substrate, and described annular groove is in order to accept an elastic packing assembly, and upper laminating platform, be oppositely arranged with described lower laminating platform, comprise the flexible substrate plummer carrying a flexible substrate, described flexible substrate and described substrate form a predetermined gap, to fit on described in the described elastic packing component touch of described lower laminating platform platform, make described lower laminating platform, described elastic packing assembly and described upper laminating platform form a vacuum cavity to hold described substrate and described flexible substrate, wherein extract at least a part of gas out by described vacuum cavity, with by the distance of described substrate placing stage to predetermined gap described in described substrate flexible deformation, described substrate is fitted in make described flexible substrate.
In one embodiment, bendable vacuum contraposition abutted equipment more comprises a pedestal, in order to support described lower laminating platform, with at least one party to rise or decline described lower laminating platform.In one embodiment, described at least one party is to comprising four direction (such as X, Y, Z, θ (theta) four-axial).
In one embodiment, flexible substrate plummer described in the described elastic packing component touch of described lower laminating platform.
In one embodiment, the region of the described upper laminating platform beyond flexible substrate plummer described in the described elastic packing component touch of described lower laminating platform.
In one embodiment, described flexible substrate plummer and described flexible substrate are transparent material, can observe the contraposition mark on substrate and flexible substrate in order to device for image.
In one embodiment, bendable vacuum contraposition abutted equipment more comprises device for image, be arranged at the top of described upper laminating platform, control (feedback control), to carry out accurate contraposition to described substrate and described flexible substrate in order to carry out back coupling to described lower laminating platform.
In one embodiment, described substrate at least comprises the first alignment mark and described flexible substrate comprises at least one second alignment mark, described device for image captures the image of the alignment between described at least one first alignment mark and described at least one second alignment mark, to aim at described flexible substrate in described substrate.
In one embodiment, described predetermined gap is between being greater than zero and being less than the thickness of described flexible substrate plummer.
In one embodiment, described predetermined gap is greater than zero and is less than 0.5 millimeter, but is not limited thereto, and can be greater than or be less than 0.5 millimeter.
In one embodiment, when by when extracting at least a part of gas in described vacuum cavity out to make described flexible substrate plummer to described substrate flexural buckling, the middle section of described flexible substrate to predetermined gap described in described substrate flexural buckling to contact the middle section of described substrate and to form a laminating border, until described laminating borderless contact arrives the edge of described substrate, to complete laminating.In other words, to uprise along with vacuum degree and lower laminating platform moves up pressing, laminating border stretches out, and fit area becomes large gradually, till described in laminating borderless contact, the edge of substrate makes two substrates fit completely.
In one embodiment, described flexible substrate plummer is soft materials or rigid material, and described substrate is soft materials or rigid material.
In one embodiment, the hardness of described flexible substrate plummer is less than, equals or is greater than the hardness of described substrate.
In one embodiment, described lower laminating platform more comprises a first passage, to be communicated with the vacuum plant of described vacuum cavity to described vacuum abutted equipment outside, by described vacuum plant to control the vacuum degree of described vacuum cavity.
In one embodiment, the pressure within described vacuum cavity is less than the pressure outside described vacuum cavity.
In one embodiment, by described lower laminating platform out described at least one part gas is extracted to described vacuum cavity.
In one embodiment, by described upper laminating platform out described at least one part gas is extracted to described vacuum cavity.
In one embodiment, described upper laminating platform more comprises a step surface, described upper laminating platform forms at least one second channel at described step surface, to be communicated with a vacuum plant of described bendable vacuum contraposition abutted equipment outside, adsorb described flexible substrate plummer in the surface of described upper laminating platform to utilize vacuum mode.
In one embodiment, described lower laminating platform forms at least one third channel at described substrate placing stage, to be communicated with the vacuum plant of described bendable vacuum contraposition abutted equipment outside, adsorbs described substrate in the surface of described substrate placing stage to utilize vacuum mode.
In one embodiment, described flexible substrate plummer and described flexible substrate are transparent material.
[accompanying drawing explanation]
Above-mentioned purpose of the present invention, feature and advantage specifically will present with institute's accompanying drawings in conjunction with following detailed description in detail.
Fig. 1 illustrates to carry out according to the device for image of bendable vacuum contraposition abutted equipment in the utility model embodiment the schematic diagram aimed at.
Fig. 2 illustrates the schematic diagram according to the elastic packing component touch flexible substrate plummer of bendable vacuum contraposition abutted equipment in the utility model embodiment.
Fig. 3 illustrates according to the gas in vacuum contraposition abutted equipment extraction vacuum cavity bendable in the utility model embodiment with the schematic diagram making described flexible substrate contact described substrate.
Fig. 4 illustrates the top view contacting described substrate according to flexible substrate described in flexible substrate plummer flexure process described in the utility model Fig. 3 gradually.
Fig. 5 illustrates the schematic diagram contacting described substrate according to flexible substrate described in the utility model embodiment completely.
Fig. 6 illustrates the schematic diagram according to flexible substrate plummer and described flexible substrate disengaging in the utility model embodiment.
[embodiment]
With reference to figure 1, it illustrates and carries out according to the device for image of bendable vacuum contraposition abutted equipment in the utility model embodiment the schematic diagram aimed at.Bendable vacuum contraposition abutted equipment of the present utility model comprises pedestal 100, lower laminating platform 102, upper laminating platform 104 and device for image 108.Pedestal 100 and lower laminating platform 102 can be independently board equipment or the equipment be integrated into one out of the ordinary; Flexible substrate plummer 106 and device for image 108 can be independently device out of the ordinary or be integrated in pedestal 100 and or the device of lower laminating platform 102; In one embodiment, device for image 108 can be moved to by different directions lower laminating platform 102 top or away from lower laminating platform 102; Flexible substrate plummer 106 can be independently device out of the ordinary or is integrated in the device of laminating platform 104.
As shown in FIG. 2 and 3, Fig. 2 illustrates the schematic diagram contacting upper laminating platform 104 according to the elastic packing assembly 112 of bendable vacuum contraposition abutted equipment in the utility model embodiment.Fig. 3 illustrates according to the gas in vacuum contraposition abutted equipment extraction vacuum cavity 114 bendable in the utility model embodiment with the schematic diagram making described flexible substrate 110 contact described substrate 116.In bendable vacuum contraposition abutted equipment of the present utility model, lower laminating platform 102 is placed substrate 116 and accept elastic packing assembly 112 around substrate 116.Upper laminating platform 104 is oppositely arranged with substrate 116 and elastic packing assembly 112.In one embodiment, flexible substrate plummer 106 is fixed on laminating platform 104 in order to carry a flexible substrate 110 (such as flexible substrate sample), flexible substrate 110 and substrate 116 form predetermined gap PD, lower laminating platform 102, elastic packing assembly 112 and upper laminating platform 104 form airtight vacuum cavity 114 to hold substrate 116 and flexible substrate 110, gas within wherein being extracted out by vacuum cavity 114, by flexible substrate plummer 106 because atmospheric pressure effect is to substrate 116 flexible deformation, fit in substrate 116 to make flexible substrate 110.The bendable vacuum contraposition abutted equipment of the utility model, fit in the vacuum cavity 114 of vacuum state by flexible substrate 110 and substrate 116, and fitted from central authorities toward periphery in the laminating border 128 between flexible substrate 110 and substrate 116, to avoid the formation of bubble, to solve the problem producing bubble in flexible substrate 110 and substrate 116 laminating process.Further, when the effect that flexible substrate plummer 106 is subject to atmospheric pressure forms deflection deformation and moves towards substrate 116, because flexible substrate 110 and substrate 116 form less predetermined gap PD, therefore flexible substrate 110 and flexible substrate 110 in substrate 116 laminating process can be solved to be subject to stretching the problem causing contraposition offset, the contraposition precision effectively between raising flexible substrate 110 and substrate 116.
Specifically, in embodiment as shown in Figure 1, described flexible substrate plummer 106 and described flexible substrate 110 are transparent material, transparent material such as acryl (Polymethylmethacrylate, PMMA) or the glass material of described flexible substrate plummer 106.Above upper laminating platform 104 and described flexible substrate plummer 106, device for image 108 is set, in order to aim at described substrate 116 and described flexible substrate 110, that is, described flexible substrate 110, by transparent flexible substrate plummer 106 and flexible substrate 110, makes flexible substrate 110 can align substrates 116.As shown in Fig. 1 and Fig. 4, in one embodiment, it (is such as two the first alignment mark 116a that described substrate 116 at least comprises one first alignment mark 116a herein, but be not limited thereto) and described flexible substrate 110 comprise at least one second alignment mark (non-icon), described device for image 108 captures the image of the alignment between described at least one first alignment mark 116a and described at least one second alignment mark, to aim at described flexible substrate 110 in described substrate 116.In other words, when described first alignment mark 116a and described second alignment mark misalignment, the position of lower laminating platform 102 can be adjusted, the first alignment mark 116a of substrate 116a is made to aim at the second alignment mark of described flexible substrate 110, or the position of adjustment upper laminating platform 104, make the first alignment mark 116a of the second alignment mark substrate 116a of described flexible substrate 110.It should be noted, above-mentioned substrate 116 and the aligning of described flexible substrate 110 carried out before flexible substrate plummer 106 contacts with elastic packing assembly 112, as shown in Figure 1.In another embodiment, the operation of aiming at can be carried out after flexible substrate plummer 106 contacts with elastic packing assembly 112, as shown in Figure 2.
With reference to figure 2, it illustrates and contacts the schematic diagram of flexible substrate plummer 106 according to the elastic packing assembly 112 of bendable vacuum contraposition abutted equipment in the utility model embodiment.As shown in Figure 2, pedestal 100 rises along platform 102 of fitting under 118 drives at least one party, makes elastic packing assembly 112 contact flexible substrate plummer 106, elastic packing assembly 112 such as deformable quality of rubber materials or O type ring (Oring); In one embodiment, described at least one party to comprising four direction, such as X, Y, Z, θ (theta) four axial contraposition move, wherein X, Y, Z be distance displacement, θ is the displacement of the anglec of rotation.Specifically, lower laminating platform 102 is fixedly arranged on described pedestal 100, described lower laminating platform 102 is provided with the annular groove 122 around a substrate placing stage 120 and described substrate placing stage 120, described substrate placing stage 120 is in order to hold substrate 116, and described annular groove 122 is in order to accept elastic packing assembly 112.Upper laminating platform 104 is oppositely arranged with described lower laminating platform 102 and described elastic packing assembly 112.In other words, flexible substrate plummer 106 is fixed on described upper laminating platform 104, described flexible substrate plummer 106 is provided with flexible substrate 110, when described lower laminating platform 102 makes described elastic packing assembly 112 contact described flexible substrate plummer 106 along the rise of described direction 118, described elastic packing assembly 112, described flexible substrate plummer 106 and described lower laminating platform 102 are around forming airtight vacuum cavity 114, and described substrate 116 is positioned within described vacuum cavity 114 with described flexible substrate 110.Now, the inside and outside of vacuum cavity 114 is in atmospheric pressure.It should be noted, in one embodiment, the elastic packing assembly 112 of described lower laminating platform 102 contacts described flexible substrate plummer 106, as shown in Figure 2.In another embodiment, the elastic packing assembly 112 of described lower laminating platform 102 contacts the region of the described upper laminating platform 104 beyond described flexible substrate plummer 106, that is, elastic packing assembly 112 does not contact with described flexible substrate plummer 106.
Embodiment as shown in Figure 2, described upper laminating platform 106 more comprises a step surface 134, described upper laminating platform forms at least one second channel 130b at described step surface 134, to be communicated with a vacuum plant 136 of described vacuum abutted equipment outside, adsorb described flexible substrate plummer 106 in the surface of described upper laminating platform 104 to utilize vacuum mode; In other embodiment, locking mode can be utilized flexible substrate plummer 106 to be fixed on the surface of described upper laminating platform 104.Described lower laminating platform 102 forms at least one third channel 130c at described substrate placing stage 120, to be communicated with a vacuum plant 136 of described vacuum abutted equipment outside, adsorbs described substrate 116 in the surface of described substrate placing stage 120 to utilize vacuum mode.It should be noted, vacuum plant 136 can be one or multiple, distinctly to control the vacuum degree of first passage 130a, second channel 130b and third channel 130c, optionally to adsorb or the flexible substrate plummer 106 that Adsorption Phase is not corresponding and described substrate placing stage 120 and optionally adjust the vacuum degree of vacuum cavity 114.
Illustrate according to the gas in vacuum contraposition abutted equipment extraction vacuum cavity 114 bendable in the utility model embodiment with reference to figure 3 and Fig. 4, Fig. 3 with the schematic diagram making described flexible substrate 110 contact described substrate 116.Fig. 4 illustrates the top view contacting described substrate 116 according to flexible substrate 110 described in flexible substrate plummer 106 flexure process described in the utility model Fig. 3 gradually.Specifically, extracted out the gas in described vacuum cavity 114 by described lower laminating platform 102, bend by described flexible substrate plummer 106 along the formation of described direction 118 and move towards described substrate 116, fitting with described substrate 116 to make described flexible substrate 110.Now, the pressure within vacuum cavity 114 is less than the pressure (such as atmospheric pressure) outside vacuum cavity 114.In one embodiment, by described lower laminating platform 102 out described at least one part gas is extracted to described vacuum cavity 114.In another embodiment, by described upper laminating platform 104 out described at least one part gas is extracted to described vacuum cavity 114.
As shown in Figure 4, when to be extracted out the gas in described vacuum cavity 114 with vacuum mode by described lower laminating platform 102, the middle section 124 of described flexible substrate 110 contacts the middle section 124 of described substrate 116 until the outer peripheral areas 126 of described flexible substrate 110 contacts the outer peripheral areas of described substrate 116.In other words, contact in the process of described substrate 116 at described flexible substrate 110, laminating border 128 will by middle section 124 gradually toward the periphery region 126 expand.The bendable vacuum contraposition abutted equipment of the utility model by mediad outdiffusion mode, therefore can solve the problem of bubble with vacuum gas bleeding and laminating border 128.Herein; " vacuum " refer to and extract at least a part of gas out in airtight vacuum cavity 114 and form lower pressure; when the gas extracted out is more; the vacuum degree of vacuum cavity 114 is higher; make flexible substrate 110 larger with the fitting area of substrate 116, form the laminating border 128 of larger area.
In one embodiment, described lower laminating platform 102 more comprises described first passage 130a, to be communicated with the vacuum plant 136 of described vacuum cavity 114 to described vacuum abutted equipment outside.When vacuum plant 136 to the gas bleeding of described vacuum cavity 114 with reduce its gas content and gas clean-up time, air above described flexible substrate plummer 106 applies an external pressure 132 (such as atmospheric pressure) to described flexible substrate plummer 106, wherein the periphery of flexible substrate 110 is fixed on laminating platform 104, its impact by external pressure is less, and the middle section 124 of flexible substrate 110 is far away apart from the periphery of upper laminating platform 104, its impact by external pressure is larger, therefore described flexible substrate 110 can be made to contact described substrate 116 gradually by middle section 124.In one embodiment, predetermined gap PD is between being greater than zero and being less than the thickness of described flexible substrate plummer 106.In another embodiment, described predetermined gap PD is greater than zero and is less than 0.5 millimeter, but is not limited thereto, and can be greater than/equal 0.5 millimeter.In other words, because described predetermined gap PD is much smaller than the length of flexible substrate 110 and/or substrate 116 or width, make flexible substrate 110 and/or substrate 116 utilize device for image 108 aim at after, the state that its spacing is quite little and be close in pressing close to mutually (Proximity Contact), because the displacement of flexible substrate 110 is very little, therefore be conducive to flexible substrate 110 and substrate 116 certain advantage of aiming in laminating process, the offset problem of known techniques can not be caused.That is less predetermined gap PD can make flexible substrate 110 stably fit in substrate 116, can to avoid in laminating process substrate 116 is stretched with the flexible substrate 110 of laminating and be out of shape, offset.
In one embodiment, described substrate 116 is for soft materials or rigid material and described flexible substrate plummer 106 is soft materials or rigid material.In another embodiment, the hardness of described substrate 116 is less than, equals or is greater than the hardness of described flexible substrate plummer 106.
With reference to figure 5, it illustrates the schematic diagram contacting described substrate 116 according to flexible substrate 110 described in the utility model embodiment completely.When vacuum plant 136 is minimum to its vacuum degree to the gas bleeding of described variable spaces 114 through the first channel 130a, lower laminating platform 102 upwards rises further, and described flexible substrate 110 is fitted described substrate 116 completely.Because described elastic packing assembly 112 has compressibility, therefore flexible substrate plummer 106 and substrate 116 fit tightly more.
With reference to figure 6, it illustrates according to the schematic diagram of flexible substrate plummer 106 in the utility model embodiment with the disengaging of described flexible substrate 110.After described flexible substrate 110 fits described substrate 116 completely, vacuum is gone to get back to general atmosphere state through first passage 130a to described variable spaces 114, the lower surface of flexible substrate plummer 106 is separated with described flexible substrate 110, it should be noted, adhesive force between the lower surface of flexible substrate plummer 106 and described flexible substrate 110 is less than the adhesive force between described flexible substrate 110 and substrate 116, therefore when described variable spaces 114 goes vacuum and laminating platform 102 and pedestal 116 reduce downwards instantly, flexible substrate plummer 106 and described flexible substrate 110 can depart from easily.
In sum, the bendable vacuum contraposition abutted equipment of the utility model, fit in the vacuum cavity of vacuum state by flexible substrate and substrate, and the laminating border between flexible substrate and substrate is from central authorities toward peripheral laminating, to avoid the formation of bubble, to solve the problem producing bubble in flexible substrate and baseplate-laminating process.And when flexible substrate plummer forms deflection deformation and when moving towards substrate by the effect of atmospheric pressure, because flexible substrate and substrate form less predetermined gap, therefore flexible substrate in flexible substrate and baseplate-laminating process can be solved to be subject to stretching the problem causing contraposition to offset, effectively improve the contraposition precision between flexible substrate and substrate.
The above is only the preferred embodiments of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (19)
1. a bendable vacuum contraposition abutted equipment, is characterized in that, described bendable vacuum contraposition abutted equipment comprises:
Once fit platform, be provided with the annular groove around a substrate placing stage and described substrate placing stage, described substrate placing stage is in order to hold a substrate, and described annular groove is in order to accept an elastic packing assembly; And
To fit on one platform, be oppositely arranged with described lower laminating platform, comprise the flexible substrate plummer carrying a flexible substrate, described flexible substrate and described substrate form a predetermined gap, to fit on described in the described elastic packing component touch of described lower laminating platform platform, make described lower laminating platform, described elastic packing assembly and described upper laminating platform form a vacuum cavity to hold described substrate and described flexible substrate, wherein extract at least a part of gas out by described vacuum cavity, with by the distance of described substrate placing stage to predetermined gap described in described substrate flexible deformation, described substrate is fitted in make described flexible substrate.
2., according to the bendable vacuum contraposition abutted equipment described in claim 1, more comprise a pedestal, in order to support described lower laminating platform, with at least one party to rise or decline described lower laminating platform.
3., according to the bendable vacuum contraposition abutted equipment described in claim 2, it is characterized in that, described at least one party is to comprising four direction.
4. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, flexible substrate plummer described in the described elastic packing component touch of described lower laminating platform.
5. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, the region of the described upper laminating platform beyond flexible substrate plummer described in the described elastic packing component touch of described lower laminating platform.
6. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, described flexible substrate plummer and described flexible substrate are transparent material.
7. according to the bendable vacuum contraposition abutted equipment described in claim 6, more comprise device for image, be arranged at the top of described upper laminating platform, in order to carry out a back coupling control to described lower laminating platform, to carry out accurate contraposition to described substrate and described flexible substrate.
8. according to the bendable vacuum contraposition abutted equipment described in claim 7, it is characterized in that, described substrate at least comprises one first alignment mark and described flexible substrate comprises at least one second alignment mark, described device for image captures the image of the alignment between described at least one first alignment mark and described at least one second alignment mark, to aim at described flexible substrate in described substrate.
9. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, described predetermined gap is between being greater than zero and being less than the thickness of described flexible substrate plummer.
10., according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, described predetermined gap is greater than zero and is less than 0.5 millimeter.
11. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, when by when extracting described at least one part gas in described vacuum cavity out to make described flexible substrate plummer to described substrate flexural buckling, the middle section of described flexible substrate to predetermined gap described in described substrate flexural buckling to contact the middle section of described substrate and to form a laminating border, until described laminating borderless contact arrives the edge of described substrate, to complete laminating.
12., according to the bendable vacuum contraposition abutted equipment described in claim 1, is characterized in that, described flexible substrate plummer is soft materials or rigid material, and described substrate is soft materials or rigid material.
13., according to the bendable vacuum contraposition abutted equipment described in claim 1, is characterized in that, the hardness of described flexible substrate plummer is less than, equals or is greater than the hardness of described substrate.
14. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, described lower laminating platform more comprises a first passage, to be communicated with the vacuum plant of described vacuum cavity to described vacuum abutted equipment outside, by described vacuum plant to control the vacuum degree of described vacuum cavity.
15. according to the bendable vacuum contraposition abutted equipment described in claim 1, and it is characterized in that, the pressure within described vacuum cavity is less than the pressure outside described vacuum cavity.
16., according to the bendable vacuum contraposition abutted equipment described in claim 1, is characterized in that, extract described at least one part gas by described lower laminating platform out to described vacuum cavity.
17., according to the bendable vacuum contraposition abutted equipment described in claim 1, is characterized in that, extract described at least one part gas by described upper laminating platform out to described vacuum cavity.
18. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, described upper laminating platform more comprises a step surface, described upper laminating platform forms at least one second channel at described step surface, to be communicated with a vacuum plant of described bendable vacuum contraposition abutted equipment outside, adsorb described flexible substrate plummer in the surface of described upper laminating platform to utilize vacuum mode.
19. according to the bendable vacuum contraposition abutted equipment described in claim 1, it is characterized in that, described lower laminating platform forms at least one third channel at described substrate placing stage, to be communicated with a vacuum plant of described bendable vacuum contraposition abutted equipment outside, adsorb described substrate in the surface of described substrate placing stage to utilize vacuum mode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103219878U TWM504009U (en) | 2014-11-10 | 2014-11-10 | Vacuum alignment lamination apparatus with flexible membrance |
| TW103219878 | 2014-11-10 |
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| Publication Number | Publication Date |
|---|---|
| CN204391053U true CN204391053U (en) | 2015-06-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420742409.6U Expired - Fee Related CN204391053U (en) | 2014-11-10 | 2014-12-01 | Flexible vacuum alignment and lamination equipment |
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| CN (1) | CN204391053U (en) |
| TW (1) | TWM504009U (en) |
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| CN108122808A (en) * | 2016-11-30 | 2018-06-05 | 上海微电子装备（集团）股份有限公司 | Vacuum plant, substrate aligning equipment and the method for forming pre- bonding pad |
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| CN110391155A (en) * | 2018-04-19 | 2019-10-29 | 三星显示有限公司 | The method of attaching substrates and equipment for attaching substrates |
| CN110824737A (en) * | 2019-09-24 | 2020-02-21 | 四川省长江华云电子技术有限公司 | Hard-to-hard vacuum full-lamination process |
| CN113314436A (en) * | 2020-02-27 | 2021-08-27 | 铠侠股份有限公司 | Bonding apparatus and bonding method |
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| CN110024102B (en) * | 2019-02-26 | 2020-10-30 | 长江存储科技有限责任公司 | Method and device for sticking adhesive film on surface of wafer |
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2014
- 2014-11-10 TW TW103219878U patent/TWM504009U/en not_active IP Right Cessation
- 2014-12-01 CN CN201420742409.6U patent/CN204391053U/en not_active Expired - Fee Related
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