CN204374672U - The grand dynamic parallel positioning system of precision under a kind of micro-nano operating environment - Google Patents
The grand dynamic parallel positioning system of precision under a kind of micro-nano operating environment Download PDFInfo
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- CN204374672U CN204374672U CN201420587669.0U CN201420587669U CN204374672U CN 204374672 U CN204374672 U CN 204374672U CN 201420587669 U CN201420587669 U CN 201420587669U CN 204374672 U CN204374672 U CN 204374672U
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Abstract
The utility model discloses the grand dynamic parallel positioning system of precision under a kind of micro-nano operating environment, this system comprises basic machine, caliberating device, the control device that order is connected; Basic machine comprises base, the identical Driven by Ultrasonic Motors side chain of more than three groups and moving platform; Caliberating device, for demarcating the actual value of kinematics parameters, feedback articulated position and correction moving platform initial point; Control device, makes corresponding process for the treatment of each module by signal, and driving device body presses desired trajectory motion.Positioning system of the present utility model, evade the shortcoming of traditional electrical magneto generator, decrease the impact of the non-linear factors such as the friction of additional mechanism providing additional operation, gap, elastic deformation, there is gapless, high rigidity, compact conformation, the feature that can eliminate rigging error and scale error, be applicable to micro-nano operating environment; Positioning precision and the grade stroke of submicron order can be realized, and can be applicable to grand micro-in conjunction with on positioning table.
Description
Technical field
The utility model relates to precision manufactureing, precision measurement, precision positioning field, the grand dynamic parallel positioning system of precision particularly under a kind of micro-nano operating environment.
Background technology
Along with the development of science and technology, precision manufactureing, precision measurement and precision positioning technology occupy more and more consequence in scientific research forward position and commercial production.As at bioengineering, in precision optical machinery engineering or material science, micro-nano operating system often need be used to study sample.Micro-nano operating system comprises observer, locating platform and executor, existing commercial observer is as scanning electron microscope (SEM) etc., and its locating platform be equipped with often adopts cascaded structure, low, the easy cumulative errors of precision, does not meet the requirement of high-accuracy operation.
For reaching high-precision positioning requirements, the shortcoming large for cascaded structure deviation accumulation, rigidity is low, researchers propose the concept of parallel institution; Be difficult to evade the shortcoming such as pair clearance and rigging error for traditional mechanism, propose the concept of compliant mechanism.
Parallel institution refer to moving platform and fixed platform by least two independently kinematic chain be connected, mechanism has two or more degree of freedom, and with a kind of close loop mechanism that parallel way drives.It has the features such as high rigidity, high capacity and quick response.That is used widely at present has Delta mechanism, Stewart mechanism, Tricept mechanism etc.Compliant mechanism refers under external force or moment loading, utilizes elastic properties of materials to be out of shape a kind of kinematic pair form producing the motion of similar traditional mechanism.It has high precision, exempts from the features such as assembling, gapless and friction.Be widely used in microposition at present, the field such as microoperation and micro assemby.
But owing to limiting by principle of work, compliant mechanism only has micron-sized work space usually; Parallel institution can realize the above work space of grade easily, and but difficulty reaches submicron-level positioning accuracy.For solving Long Distances and this contradiction of high precision, researcher proposes the localization method of grand micro-combination, as the people such as K.H. Parker (K.H.PARK transliteration) show experimental prototype in paper " High Speed Micro Positioning System Based on Coarse/Fine Pair Control ".The localization method of grand micro-combination, Neng Shi mechanism has grade stroke and nano grade positioning precision.But the method need ensure that the motion of macro-moving stage accurately can be positioned to the work space interior (being generally micron or submicron order) of micromotion platform, and this proposes high performance requirement just to grand dynamic parallel precise locating platform.
In the localization method of current grand micro-combination, adopt grand dynamic parallel institution relative with the mode that fine motion compliant mechanism combines less.Wherein upper electromagnetic rotating formula motor (comprising servomotor, stepper motor etc.) that usually adopts of grand dynamic parallel institution design drives, need reducing gear to be installed to reduce rotating speed, improve moment, as prosperous in high name show paper: the 3-RRR experimental prototype in " planar parallel robot design and analysis and control ".This had both added the structural complexity of mechanism, was unfavorable for the place application of the narrow spaces such as SEM, made again mechanism inevitably create the impact of the non-linear factors such as gap, elastic deformation and friction, reduce the positioning precision of mechanism.In addition, the mechanical transmission structure that traditional line drives: as the people such as Wang Xiaoyun (Xiaoyun Wang transliteration) show experimental prototype in paper " Experimental Identification and Active Control of Configuration Dependent Linkage Vibration in a Planar Parallel Robot ", the gap error of the parts such as ball-screw, bearing can be introduced, the non-linear factors such as lead error, make mechanism's positioning precision usually can only reach micron order.On the other hand, electromagnetic machine work can generate an electromagnetic field, and to have in the environment for use (as scanning electron microscope vacuum chamber) of strict restriction and inapplicable at some to electromagnetic field.
Publication number is the novel precise locating parallel robot that the patent of CN1562578A proposes a kind of grand micro-integration, and its thinking have employed submissive hinge fraction to replace conventional motion secondary to eliminate gap.The defect of the program is the rigidity of mechanism and bearing capacity are declined, and easily produces vibration in high speed setting movement.
In addition, above mentioned mechanism and reading up the literature at present, does not all consider to eliminate parallel institution side chain rigging error.Parallel institution is plane parallel mechanism especially, and the rigging error of each side chain can cause moving platform to tilt or distortion, affects mechanism's positioning precision.
Utility model content
The purpose of this utility model is that the shortcoming overcoming prior art is with not enough, provides the precision under a kind of micro-nano operating environment grand dynamic parallel positioning system.
The purpose of this utility model is realized by following technical scheme:
The grand dynamic parallel positioning system of precision under a kind of micro-nano operating environment, comprise basic machine, caliberating device and control device that order is connected, the kinematics parameters of basic machine is demarcated by caliberating device, be input to control device and carry out real-Time Compensation, then realize precision positioning by control device driving device body by desired trajectory.
Described basic machine, has the degree of freedom that two translations one are rotated, and comprises base, the identical Driven by Ultrasonic Motors side chain of more than three groups, and moving platform;
Wherein, base is fixedly connected with ground or cavity inner wall; Driven by Ultrasonic Motors side chain is symmetrical and be fixedly connected with base, respect thereto translation and rotation along base central shaft; Moving platform is fixedly connected with Driven by Ultrasonic Motors side chain, rotates relative to Driven by Ultrasonic Motors side chain.
Described caliberating device, comprises laser displacement tracker measurement module and linear grating measurement module;
Wherein, laser displacement tracker measurement module, for demarcating the actual value of kinematics parameters: processed by the signal of laser reflection ball, laser tracker collection input industrial computer; Described laser reflection ball is fixedly connected on basic machine;
Linear grating measurement module, for feeding back articulated position, corrects moving platform initial point: processed via grating reading head segmentation interface input control device by the signal of indium steel grating scale, grating reading head collection; Described indium steel grating scale is fixedly connected on base plate, and described grating reading head is fixedly connected on basic machine.
Described control device, comprises linear electric motors control module, moving platform positioning control module, temperature compensation module; Make corresponding process for the treatment of each module by signal, driving device body presses desired trajectory motion;
Wherein, linear electric motors control module: by industrial computer target position information input control device, controller show that drive volume outputs to linear motor driver as calculated, then the motion of driving device body; Feedback element adopts linear grating measurement module, thus realizes closed-loop control;
Moving platform positioning control module, singular regions is adopted to evade and Escape control strategy, real-time judge moving platform track, when moving platform track is close to singular regions border, takes orbital radius to shorten and the strategy becoming attitude simultaneously, evade, pass through singular regions, when moving platform is away from singular regions time, recover former track and run, wherein track following adopts Self-Tuning Algorithm, real time correction is carried out to moving platform track, realizes track following; When moving platform enters singular regions because of disturbance, singular regions escape mechanism will be adopted, realize the convenient in rapid escape of singular regions;
Temperature compensation module, the temperature signal detected by temperature sensor, is processed by controller input industrial computer; Kinematics parameters according to measuring varies with temperature rule, carries out real-time correction-compensation to kinematics parameters.
Described base, comprises base plate, Eccentric Clamping Mechanism, and wherein Eccentric Clamping Mechanism is made up of multiple identical eccentric wheel post be symmetrically distributed on base plate; Eccentric wheel post embeds in eccentric wheel pilot hole corresponding on base plate, and opposed bottom does and rotates adjustment, and is fixedly connected with base plate with spring shim by screw;
Described Driven by Ultrasonic Motors side chain is made up of active moving sets joint, passive rotation subjoint I, passive rotation subjoint II; Described active moving sets joint is made up of rolling linear bearing, motor fixed rack, web joint, linear ultrasonic motor; Described passive rotation subjoint I is made up of joint frame, rotating shaft I, precision bearing I, precision bearing II, resiliency deformable member, set nut I, pressing plate; Described passive rotation subjoint II is made up of connecting rod, rotating shaft II, precision bearing III, precision bearing IV, end cap, set nut II; Described rolling linear bearing comprises guide rail and slide block; Described linear ultrasonic motor comprises matrix and guide rod;
The inner annexation of Driven by Ultrasonic Motors side chain is: initiatively moving sets joint is fixedly connected with passive rotation subjoint I; Passive rotation subjoint I is fixedly connected with passive rotation subjoint II;
Initiatively moving sets intra articular annexation is: described web joint is fixedly connected with described slide block; Described matrix is fixedly connected with web joint; Described guide rod two ends are fixedly connected on described motor fixed rack;
The inner annexation of passive rotation subjoint I is: described precision bearing I, precision bearing II adopt transition fit, is arranged in the mounting hole of frame top and bottom, described joint respectively; Described rotating shaft I adopts transition fit to be fixedly connected with precision bearing I, precision bearing II inner ring; Described resiliency deformable member is placed between frame lower end, joint mounting hole shoulder block and precision bearing II; Described pressing plate is fixedly connected with rotating shaft I lower surface; Described set nut I is arranged on rotating shaft I upper end, and screw rear set nut I and fit with precision bearing I end face, pressing plate and precision bearing II end face are fitted; Resiliency deformable member's stress deformation, its lower edges is fitted with frame lower end, joint mounting hole shoulder block and precision bearing II upper surface respectively;
The inner annexation of passive rotation subjoint II is: described precision bearing III, precision bearing IV adopt transition fit to be arranged in the mounting hole of described connecting rod; Described end cap is inserted in mounting hole, coordinates the shoulder block of mounting hole to compress precision bearing III, precision bearing IV, makes precision bearing III, precision bearing IV outer ring is fixedly connected with connecting rod; Described rotating shaft II adopts transition fit to be fixedly connected with precision bearing III, precision bearing IV; Described set nut II is arranged on rotating shaft II lower end, screws rear set nut II, compresses precision bearing III, precision bearing IV, makes precision bearing III, precision bearing IV inner ring is fixedly connected with rotating shaft II by rotating shaft II shaft shoulder;
Described indium steel grating scale is fixedly connected on base plate, and described grating reading head is fixedly connected on web joint; Described temperature sensor is fixedly connected on base plate.
Described passive rotation subjoint II adopts bearing to locate the structure of pretension: described precision bearing III, precision bearing IV are the precision corner contact ball bearing of mounted in pairs; Described passive rotation subjoint I adopts the structure of bearing level pressure pretension: described precision bearing I, precision bearing II are precision corner contact ball bearing, are provided with described resiliency deformable member in the rack mounting apertures of described joint.
Described rotating shaft II two ends have the screw thread for adjusting Driven by Ultrasonic Motors side chain and moving platform relative height.
Described micro-nano operating environment comprises scanning electron microscope SEM cavity, scanning probe microscopy SPM cavity.
The grand dynamic localization method in parallel of precision under micro-nano operating environment, comprises scaling method and control method, wherein
Scaling method comprises the step of following order:
S1. laser reflection ball is positioned in the pilot hole of base plate, uses laser tracker to set up world coordinate system to base plate;
S2. in the pilot hole of rotating shaft I, rotating shaft II, moving platform, place laser reflection ball respectively, demarcate kinematics parameters actual value by laser tracker, input industrial computer is revised; Kinematics parameters comprises Δ A
1a
2a
3circumscribed circle diameter, Δ C
1c
2c
3circumscribed circle diameter, and B
1c
1, B
2c
2, B
3c
3length;
S3. the demarcation of moving platform work origin: first make moving platform move to world coordinate system initial point by laser tracker, then by finely tuning the reference zero of indium steel grating scale, grating reading head is overlapped zero point with indium steel grating scale;
S4. system starts; During initialization, by the independently moving of each Driven by Ultrasonic Motors side chain, search indium steel grating scale reference zero; Respectively behind location, moving platform initial point overlaps with world coordinate system initial point;
S5. measure each kinematics parameters actual value for a long time by temperature sensor, record the Changing Pattern of parameter with gradient of temperature; Be in operation according to observed temperature real-Time Compensation kinematics parameters;
Control method comprises the step of following order:
S1. utilize described scaling method, detect moving platform zero-bit by indium steel grating scale reference zero, carry out initial reset operation;
S2. plan moving platform movement locus, utilize indium steel grating scale position signalling, by incremental encoder interface input industrial computer; Industrial computer calculates and generates corresponding control signal, outputs to linear motor driver by D/AC change-over circuit, makes linear ultrasonic motor produce corresponding sports; The real-time conversion temperature sensor temperature signal of A/DC change-over circuit also inputs industrial computer process, realizes the temperature compensation of kinematics parameters;
S3. detect track position in real time according to linear grating measurement module measured signal in motion process, adopt evading and Escape control strategy of singular regions;
S4. carry out forward kinematics solution by linear grating measurement module signal in motion process, calculate moving platform position; The deviation of contrast moving platform end physical location and target location, runs Self-Tuning Algorithm, produces control signal; Control signal outputs to linear motor driver by D/AC change-over circuit, linear ultrasonic motor responsive control signal motion also compensate.
Compared with prior art, tool has the following advantages and beneficial effect the utility model:
One, mechanical part:
In structural design:
(1) adopt high-precision angular contact ball bearing, eliminate play by adjustment, reach the object eliminating rotary joint gap; Adopt the high-accuracy linear guide of pretension, translation joint space can be eliminated;
(2) cooperation of linear guides, joint rotating shaft free beam support pattern and high rigidity rod member is widened, even if make device still positioning precision can be ensured when heavy load;
(3) impact that simple and effective rotating shaft height regulating mechanism brings to moving platform to eliminate each side chain rigging error is devised;
(4) symmetrical 3-PRR configuration, grating scale adopts the indium of low thermal coefficient of expansion firm, the impact that decreasing expands with heat and contract with cold as far as possible brings;
(5) basic machine compact conformation, is conducive to microminiaturization, in the conditional environment for use of size, have extensive practicality;
(6) fixed form of mechanism adopts nondestructive clamping mode, is applicable to closed cavity or the working environment without mounting hole.
Type of drive adopts ultrasonic straight line motor drive:
(1) compare traditional electrical magneto generator fast response time, have cut off self-lock, low-speed and large-torque, the gapless characteristic of motion, thus do not need speed reduction unit, decrease the formation of friction force;
(2) do not produce magnetic field, be applicable to require the environment without magnetic field;
(3) compact conformation, is easy to realize miniaturization and lightweight.
Two, part is demarcated:
(1) adopt laser tracker and grating scale to demarcate moving platform initial point simultaneously, ensure that the accuracy of parameter;
(2) relation of kinematics parameters and temperature variation real-Time Compensation after measuring, drops to the impact that temperature variation produces minimum.
Three, control section:
(1) driving joint adopts grating scale to realize closed-loop control, and joint space uses a model the precision positioning of reference adaptive algorithm realization;
(2) Platform movement adopts Selftuning algorithm to realize precision positioning and track following, and take singular regions to evade and Escape control strategy, assurance mechanism has good exercise performance simultaneously.
Accompanying drawing explanation
Fig. 1 is total schematic diagram of the grand dynamic parallel positioning system of precision under a kind of micro-nano operating environment described in the utility model;
The base portion schematic diagram that Fig. 2 is system described in Fig. 1;
The exploded perspective view in active moving sets joint in the Driven by Ultrasonic Motors side chain that Fig. 3 is system described in Fig. 1;
The exploded perspective view of passive rotation subjoint I in the Driven by Ultrasonic Motors side chain that Fig. 4 is system described in Fig. 1;
The exploded perspective view of passive rotation subjoint II in the Driven by Ultrasonic Motors side chain that Fig. 5 is system described in Fig. 1;
The adjusting mechanism cut-open view for adjusting elimination side chain rigging error that Fig. 6 is system described in Fig. 1;
The mechanical mechanism schematic diagram that Fig. 7 is system described in Fig. 1;
Fig. 8 is the process flow diagram of scaling method in the grand dynamic localization method in parallel of precision under a kind of micro-nano operating environment described in the utility model;
Fig. 9 is the process flow diagram of control method in the grand dynamic localization method in parallel of precision under a kind of micro-nano operating environment described in the utility model;
Figure 10 is that in the grand dynamic localization method in parallel of precision under a kind of micro-nano operating environment described in the utility model, singular regions is evaded and Escape control strategic process figure.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
In Figure of description:
1-base; 11-base plate; 12-Eccentric Clamping Mechanism; 121-eccentric wheel post; 2-Driven by Ultrasonic Motors side chain; 21-is moving sets joint initiatively; 211-rolling linear bearing; 2111-guide rail; 2112-slide block; 212-motor fixed rack; 213-web joint; 214-linear ultrasonic motor; 2141-matrix; 2142-guide rod; 22-passive rotation subjoint I; 221-joint frame; 222-rotating shaft I, 223-precision bearing I; 224-precision bearing II; 225-set nut I; 226-resiliency deformable member; 227-pressing plate; 23-passive rotation subjoint II; 231-connecting rod; 232-precision bearing III; 233-precision bearing IV; 234-rotating shaft II; 235-end cap; 236-set nut II; 3-moving platform; 41-industrial computer; 42-controller; 421-D/AC change-over circuit; 422-incremental encoder interface; 423-A/DC change-over circuit; 43-linear motor driver; 44-grating reading head segmentation interface; 451-laser reflection ball; 452-laser tracker; 461-indium steel grating scale; 462-grating reading head; 47-temperature sensor.
Fig. 1 is the total schematic diagram of the utility model positioning system, shown in figure: the grand dynamic parallel positioning system of the precision under a kind of micro-nano operating environment, comprises basic machine, caliberating device, control device that order is connected; Whole system demarcates the kinematics parameters of basic machine by caliberating device, is input to control device and carries out real-Time Compensation, then realize precision positioning by control device driving device body by desired trajectory.
Basic machine, has the degree of freedom that two translations one are rotated, comprises identical Driven by Ultrasonic Motors side chain 2 and the moving platform 3 of base more than 1, three groups;
Described base 1 is fixedly connected with ground or cavity inner wall, achieves fastening function when not destroying ground or cavity; Described Driven by Ultrasonic Motors side chain 2 is symmetrical and be fixedly connected with base 1 along base 1 central shaft, can respect thereto 1 translation and rotation; Described moving platform 3 is fixedly connected with Driven by Ultrasonic Motors side chain 2, can rotate relative to Driven by Ultrasonic Motors side chain 2.Each group of Driven by Ultrasonic Motors side chain 2 structure is identical and can free movement in its range of movement, can drop to minimum by the brought Accuracy that expands with heat and contract with cold in theory; Adopt the localization method of grand micro-combination, moving platform 3 can be installed as microposition platforms such as compliant mechanism positioning tables, realize the positioning function of large stroke and high precision;
Caliberating device, comprises laser displacement tracker measurement module and linear grating measurement module.
Described laser displacement tracker measurement module, for demarcating the actual value of kinematics parameters: the signal input industrial computer 41 laser reflection ball 451, laser tracker 452 gathered processes;
Described linear grating measurement module, for feeding back articulated position, dressing plate initial point: signal indium steel grating scale 461, grating reading head 462 gathered inputs industrial computer 41 process via grating reading head segmentation interface 44, controller 42;
Control device, comprises linear electric motors control module, moving platform positioning control submodule, temperature compensation module; Make corresponding process for the treatment of each module by signal, driving device body presses desired trajectory motion.
Described linear electric motors control module: by industrial computer 41 target position information input control device 42, controller 42 show that drive volume outputs to linear motor driver 43 as calculated, then the motion of driving device body; Feedback element adopts linear grating measurement module, thus realizes closed-loop control;
Described moving platform positioning control module, singular regions is adopted to evade and Escape control strategy, real-time judge moving platform 3 track, when moving platform 3 track is close to singular regions border, takes orbital radius to shorten and the strategy becoming attitude simultaneously, evade, pass through singular regions, when moving platform 3 is away from singular regions, recover former track and run, wherein track following adopts Self-Tuning Algorithm, real time correction is carried out to moving platform 3 track, realizes track following; When moving platform 3 enters singular regions because of disturbance, singular regions escape mechanism will be adopted, realize the convenient in rapid escape of singular regions;
Described temperature compensation module: the temperature signal detected by temperature sensor 47, inputs industrial computer 41 by controller 42 and processes.Kinematics parameters according to measuring varies with temperature rule, carries out real-time correction-compensation to kinematics parameters.
Further, Fig. 2 is the utility model positioning system base portion schematic diagram.Shown in figure: described base 1 is made up of base plate 11, Eccentric Clamping Mechanism 12.Described Eccentric Clamping Mechanism 12 is made up of multiple identical eccentric wheel post 121 be symmetrically distributed on described base plate 11.
The inner annexation of base 1 is: described eccentric wheel post 121 embeds in eccentric wheel pilot hole corresponding on base plate 11, can do rotation adjustment by opposed bottom 11, and is fixedly connected with base plate 11 with spring shim by screw.In addition, because micro-nano operating environment is usually comparatively narrow and small, inconvenience is installed, and the screw thread therefore in eccentric wheel pilot hole can for loading for the screw of support baseboard 11 with adjustment base plate 11 height in installation process.
Further, described Driven by Ultrasonic Motors side chain 2 is made up of active moving sets joint 21, passive rotation subjoint I 22, passive rotation subjoint II 23.
Fig. 3 is the exploded perspective view that the utility model positioning system drives initiatively moving sets joint in side chain.Shown in figure: described active moving sets joint 21 is made up of rolling linear bearing 211, motor fixed rack 212, web joint 213, linear ultrasonic motor 214.
Linear ultrasonic motor 214 is for the basic machine of drive system.The mode of linear ultrasonic motor Direct driver, the gap that can effectively avoid traditional mechanism to bring, elastic deformation, the problems such as friction, good effect is had to raising kinematic accuracy, and due to the miniaturization of ultrasound electric machine, make detent mechanism can design closely, be applicable to the occasion being applied to size-constrained (as in scanning electron microscope vacuum chamber).When the kinematic accuracy of grand dynamic locating platform reaches submicron order time, usually in the work space of micro-positioning platform, therefore great convenience is provided to the localization method of grand micro-combination.
Rolling linear bearing 211 is for providing supporting and guide effect, thus the external force that receiving mechanism is subject to, make mechanism have very large load capacity.It also avoid the stressed damage of linear ultrasonic motor 214 in addition.Rolling linear bearing 211 is widened bilateral single-row linear rolling guide, and respectively there is a row carrying ball this kind of bearing guide both sides.Structure is light, thin, short and small, and easy to adjust, can bear load up and down and little moment, is conducive to applying in the design being subject to length restriction in the direction of movement.Rolling linear bearing 211, with pretightning force, eliminates the impact of play.
Fig. 4 is the exploded perspective view that the utility model positioning system drives passive rotation subjoint I in side chain.Shown in figure: described passive rotation subjoint I 22 is made up of joint frame 221, rotating shaft I 222, precision bearing I 223, precision bearing II 224, resiliency deformable member 226, set nut I 225, pressing plate 227.
Fig. 5 is the exploded perspective view that the utility model positioning system drives passive rotation subjoint II in side chain.Shown in figure: described passive rotation subjoint II 23 is made up of connecting rod 231, rotating shaft II 234, precision bearing III 232, precision bearing IV 233, end cap 235, set nut II 236.Described rolling linear bearing 211 comprises guide rail 2111 and slide block 2112.
Described linear ultrasonic motor 214 comprises matrix 2141 and guide rod 2142.
From Fig. 1 we: the inner annexation of Driven by Ultrasonic Motors side chain 2 is: initiatively moving sets joint 21 is fixedly connected with passive rotation subjoint I 22.Passive rotation subjoint I 22 is fixedly connected with passive rotation subjoint II 23.
Wherein, initiatively the inner annexation in moving sets joint 21 is: described web joint 213 is fixedly connected with described slide block 2112; Described matrix 2141 is fixedly connected with web joint 213.Described guide rod 2142 two ends are fixedly connected on described motor fixed rack 212, this mounting means, initiatively moving sets articulation structure can be made compact, do not take up room.
Wherein, the inner annexation of passive rotation subjoint I 22 is: described precision bearing I 223, precision bearing II 224 adopt transition fit, are arranged in the mounting hole of frame 221 top and bottom, described joint respectively; Described rotating shaft I 222 adopts transition fit to be fixedly connected with precision bearing I 223, precision bearing II 224 inner ring; Described resiliency deformable member 226 is placed between joint frame 221 lower end mounting hole shoulder block and precision bearing II 224; Described pressing plate 227 is fixedly connected with rotating shaft I 222 lower surface; Described set nut I 225 is arranged on rotating shaft I 222 upper end, and screw rear set nut I 225 and fit with precision bearing I 223 end face, pressing plate 227 and precision bearing II 224 end face are fitted; Resiliency deformable member 226 stress deformation, its lower edges is fitted with joint frame 221 lower end mounting hole shoulder block and precision bearing II 224 upper surface respectively.
Wherein, the inner annexation of passive rotation subjoint II 23 is: described precision bearing III 232, precision bearing IV 233 adopt transition fit to be arranged in the mounting hole of described connecting rod 231; Described end cap 235 is inserted in mounting hole, coordinates the shoulder block of mounting hole to compress precision bearing III 232, precision bearing IV 233, makes precision bearing III 232, precision bearing IV 233 outer ring is fixedly connected with connecting rod 231; Described rotating shaft II 234 adopts transition fit to be fixedly connected with precision bearing III 232, precision bearing IV 233; Described set nut II 236 is arranged on rotating shaft II 234 lower end, screw rear set nut II 236, compress precision bearing III 232, precision bearing IV 233 by rotating shaft II 234 shaft shoulder, make precision bearing III 232, precision bearing IV 233 inner ring is fixedly connected with rotating shaft II 234.
Further, described indium steel grating scale 461 is fixedly connected on base plate 11, and indium steel grating scale 461 material is indium steel, and expansion coefficient is very little, thus reduces the impact of temperature on measuring accuracy as far as possible.Described grating reading head 462 is fixedly connected on web joint 213, and grating reading head upper surface and web joint are fitted, and side does not contact with slide block 2112.Grating reading head 462 and indium steel grating scale 461 distance are subject to web joint 213 size and form and position tolerance when affect, by adding pad adjustment highly; Described temperature sensor 47 is fixedly connected on base plate 11.
Further, described passive rotation subjoint II 23 adopts the structure of bearing location pretension: described precision bearing III 232, precision bearing IV 233 are the precision corner contact ball bearing of mounted in pairs, mounted in pairs angular contact ball bearing is generally matched by production firm and is combined into submission user, because this reducing the mismatch error that quill shoulder etc. causes; Location firmly beforehand means can make bearing meet the requirements of pretension amount, controls bearing clearance size.Compared to other modes, this firmly beforehand means axial rigidity is maximum, is generally used for the occasion needing to improve bearing arrangement axial rigidity.
Described passive rotation subjoint I 22 adopts the structure of bearing level pressure pretension: described precision bearing I 223, precision bearing II 224 are precision corner contact ball bearing, are provided with described resiliency deformable member 226 in frame 221 mounting hole of described joint.Resiliency deformable member 226, can be disk spring, volute spring or O type packing ring.Level pressure pretension can make bearing pre-tightened amount keep steady state value.This mode improves little to bearing arrangement rigidity, but can eliminate temperature variation, the impact that nut degree error etc. causes.
Above two kinds of bearing pre-tightening structures, all can realize the function adjusting bearing clearance, eliminate bearing clearance to the impact of MECHANISM PRECISION.
Fig. 6 is that the grand dynamic positioning system of precision under the utility model micro-nano operating environment is for adjusting the cut-open view of the mechanism eliminating side chain rigging error.Shown in figure: described rotating shaft II 234 two ends have the screw thread for adjusting Driven by Ultrasonic Motors side chain 2 and moving platform 3 relative height.Rotating shaft II 234 does not adopt the shaft shoulder and moving platform 3 to position, and adopts the mode of threaded adjustment, uses nut to adjust each rotating shaft II 234 respectively and moves up or down, until eliminate each side chain height rigging error to make moving platform 3 level.When moving platform 3 is adjusted to base 1 level, screws holding screw by fastening for rotating shaft II 234, take off adjusting nut.
Further, described micro-nano operating environment comprises scanning electron microscope SEM cavity, scanning probe microscopy SPM cavity.
Further, the method for described positioning system, comprises scaling method and control method.Fig. 8 is the scaling method process flow diagram of the utility model positioning system, and Fig. 9 is the control method process flow diagram of the utility model positioning system.
Scaling method comprises the steps:
The first step: laser reflection ball 451 is positioned in the pilot hole of base plate 11, uses laser tracker 452 pairs of base plates 11 to set up world coordinate system;
Second step: place laser reflection ball 451 respectively in the pilot hole of rotating shaft I 222, rotating shaft II 234, moving platform 3, demarcate kinematics parameters actual value by laser tracker 452, input industrial computer 41 is revised; As shown in Figure 7: kinematics parameters comprises Δ A
1a
2a
3circumscribed circle diameter, Δ C
1c
2c
3circumscribed circle diameter, and B
1c
1, B
2c
2, B
3c
3length;
3rd step: the demarcation of moving platform 3 work origin: first make moving platform 3 move to world coordinate system initial point by laser tracker 452, then by finely tuning the reference zero of indium steel grating scale 461, grating reading head 462 is overlapped zero point with indium steel grating scale 461;
4th step: system starts; During initialization, by the independently moving of each Driven by Ultrasonic Motors side chain 2, search indium steel grating scale 461 reference zero; Respectively behind location, moving platform 3 initial point just overlaps with world coordinate system initial point;
5th step: measure each kinematics parameters actual value for a long time by temperature sensor 47, record the Changing Pattern of parameter with gradient of temperature; Be in operation according to observed temperature real-Time Compensation kinematics parameters;
Control method comprises the steps:
The first step, utilizes described scaling method, detects moving platform 3 zero-bit, carry out initial reset operation by indium steel grating scale 461 reference zero;
Second step, planning moving platform 3 movement locus, utilizes indium steel grating scale 461 position signalling, inputs industrial computer 41 by incremental encoder interface 422; Industrial computer 41 calculates and generates corresponding control signal, outputs to linear motor driver 43 by D/AC change-over circuit 421, makes linear ultrasonic motor 214 generate corresponding sports; A/DC change-over circuit 423 in real time conversion temperature sensor 47 temperature signal input industrial computer 41 and process, realizes the temperature compensation of kinematics parameters;
3rd step, detects track position in real time according to linear grating measurement module signal in motion process, adopts evading and Escape control strategy of singular regions, realizes seamlessly transitting of track; The singular regions that Figure 10 is the utility model positioning system is evaded and Escape control strategic process figure;
4th step, carries out forward kinematics solution by linear grating measurement module signal in motion process, calculates moving platform 3 position, and the deviation of contrast moving platform 3 end physical location and target location runs Self-Tuning Algorithm, produces control signal; Control signal outputs to linear motor driver 43 by D/AC change-over circuit 421, and linear ultrasonic motor 214 responsive control signal motion also compensate, makes moving platform 3 realize the good tracking of track.
In the present embodiment, application of installation is in Zeiss company EVO15 scanning electron microscope vacuum chamber, and available geometric space is of a size of
The system mechanics body active centre of motion, moving sets joint 21 line is connected to diameter in being distributed in and being of a size of
in the triangle edges of circle, i.e. Δ A
1a
2a
3circumscribed circle diameter is
passive rotation subjoint II 23 center of rotation is distributed on diameter
on circle, i.e. Δ C
1c
2c
3circumscribed circle diameter is
passive rotation subjoint I 22 and passive rotation subjoint II 23 center of rotation air line distance, i.e. B
1c
1, B
2c
2, B
3c
3distance is 95mm.
Linear ultrasonic motor 214 can adopt German PI Corp. U-264.30 type piezoelectric ceramic ultrasonic linear electric motors, and it effectively drives stroke to be 150mm, maximum driving force 8N, and minimum open loop step pitch is 0.1 μm.
Linear motor driver 43 can adopt the C-872 ultrasonic motor driver of German PI Corp., can the ultrasound electric machine of compatible PI Corp. different model.
Precision bearing I 223, precision bearing II 224 can select Japanese NSK company precision corner contact ball bearing, model 7900CTYNSULP5.Precision bearing III 232, precision bearing IV 233 can select Japanese NSK company precision corner contact ball bearing, model 706CTYNDBLP5.Resiliency deformable member 226 can select German Blve company disk spring, model G20.As requested, medium pretension amount is applied to bearing.According to NSK bearing pre-fastening table, check in pretightning force 30N, the elastic force that namely dish-shaped reed provides is F=30N.If pretightning force error is Δ F=± 5N, when at last proper resiliency deformable member adopts the form of two panels dish reed series connection, total displacement is
s
t＝2×0.026mm＝0.052±0.008mm
Then count from fastening nuts end face and bearing inner race end face are fitted, the angle that set nut I 225 should turn over is
Rolling linear bearing 211 can select the miniature linear bearing of Japanese MISUSI company SSEBWV14G slide rail widened superfinishing level of confidentiality, and its accuracy class is between P4-P5.Substantially specified dynamic load is 3.5kN, and substantially specified static load is 5.3kN, and static state allows that moment is respectively M
1=20.6Nm, M
2=22.3Nm, M
3=52.1Nm.Parameter meets design requirement.
Because SEM cavity should not carry out hole machined, base 1 adopts Eccentric Clamping Mechanism 12.For convenience of adjustment, eccentric wheel impulse stroke s=2.5mm got by eccentric wheel post 121; For making impulse stroke and self-locking scope comparatively large, get clamping force eccentric wheel active section γ
1=75 ° of mm, γ
2=165 ° of mm.
Then offset
Eccentric wheel diameter D >=14e, according to relative dimensions, gets eccentric wheel diameter D=32mm, rotating shaft diameter d=22mm.Eccentric wheel material is aluminium alloy, and cavity inner wall is steel, gets coefficientoffrictionμ=0.17.It is M that facility adds moment of torsion, unit Nm, then clamping force that eccentric wheel provides is
According to physical dimension, when the eccentric wheel of eccentric wheel post 121 just contacts with SEM cavity inner wall, its distance of rotate center inwall distance is d=17.5mm, gets deflection δ=0.2mm, then obtains clamping point angle γ ≈ 150 °.If clamping force is W=2000N, then the pre-fastening moment of each eccentric wheel post 121 of Eccentric Clamping Mechanism 12 is
M≈11.77N·m。
After eccentric wheel post 121 is screwed onto pre-fastening moment, its top bolt is tightened fixing to play fixation.
Laser displacement tracker measuring system can adopt German Leica company laser tracker measuring system, and laser tracker 452 model is AT901 B, and laser reflection ball 451 is of a size of bulb diameter 0.5 inch, and reflection sphere sterad error is ± 0.0006mm.
Linear grating measuring system can adopt the UHV high vacuum compatible family of Renishaw company of Britain, and indium steel grating scale 461 model is RELE IN 20U 1A 0180 A, and grating reading head 462 model is TONICT161130M.
Limit switch 17 can select Japanese Omron Corp optoelectronic switch, model EE-SX674.
Controller 42 can adopt German Dspace company Dspace1103 in ring semi-physical simulation board and terminal box thereof, this board provides 8 road A/DC and 8 road D/AC interfaces, 4 road incremental encoder interfaces, and have serial communication interface and abundant I/O equipment, facilitate the system integration.
Temperature sensor 47 adopts M6 screw-type K type thermopair, and after realizing voltage amplification by operational amplifier, access controller 42 carries out temperature acquisition.
Above-described embodiment is the utility model preferably embodiment; but embodiment of the present utility model is not restricted to the described embodiments; change, the modification done under other any does not deviate from Spirit Essence of the present utility model and principle, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection domain of the present utility model.
Claims (7)
1. the grand dynamic parallel positioning system of precision under a micro-nano operating environment, it is characterized in that: comprise basic machine, caliberating device and control device that order is connected, the kinematics parameters of basic machine is demarcated by caliberating device, be input to control device and carry out real-Time Compensation, then realize precision positioning by control device driving device body by desired trajectory.
2. the grand dynamic parallel positioning system of precision under micro-nano operating environment according to claim 1, it is characterized in that: described basic machine, there is the degree of freedom that two translations one are rotated, comprise base, the identical Driven by Ultrasonic Motors side chain of more than three groups, and moving platform;
Wherein, base is fixedly connected with ground or cavity inner wall; Driven by Ultrasonic Motors side chain is symmetrical and be fixedly connected with base, respect thereto translation and rotation along base central shaft; Moving platform is fixedly connected with Driven by Ultrasonic Motors side chain, rotates relative to Driven by Ultrasonic Motors side chain.
3. the grand dynamic parallel positioning system of precision under micro-nano operating environment according to claim 2, it is characterized in that: described base, comprise base plate, Eccentric Clamping Mechanism, wherein Eccentric Clamping Mechanism is made up of multiple identical eccentric wheel post be symmetrically distributed on base plate; Eccentric wheel post embeds in eccentric wheel pilot hole corresponding on base plate, and opposed bottom does and rotates adjustment, and is fixedly connected with base plate with spring shim by screw.
4. the grand dynamic parallel positioning system of precision under micro-nano operating environment according to claim 3, is characterized in that: described Driven by Ultrasonic Motors side chain, is made up of active moving sets joint, passive rotation subjoint I, passive rotation subjoint II; Described active moving sets joint is made up of rolling linear bearing, motor fixed rack, web joint, linear ultrasonic motor; Described passive rotation subjoint I is made up of joint frame, rotating shaft I, precision bearing I, precision bearing II, resiliency deformable member, set nut I, pressing plate; Described passive rotation subjoint II is made up of connecting rod, rotating shaft II, precision bearing III, precision bearing IV, end cap, set nut II; Described rolling linear bearing comprises guide rail and slide block; Described linear ultrasonic motor comprises matrix and guide rod;
The inner annexation of Driven by Ultrasonic Motors side chain is: initiatively moving sets joint is fixedly connected with passive rotation subjoint I; Passive rotation subjoint I is fixedly connected with passive rotation subjoint II;
Initiatively moving sets intra articular annexation is: described web joint is fixedly connected with described slide block; Described matrix is fixedly connected with web joint; Described guide rod two ends are fixedly connected on described motor fixed rack;
The inner annexation of passive rotation subjoint I is: described precision bearing I, precision bearing II adopt transition fit, is arranged in the mounting hole of frame top and bottom, described joint respectively; Described rotating shaft I adopts transition fit to be fixedly connected with precision bearing I, precision bearing II inner ring; Described resiliency deformable member is placed between frame lower end, joint mounting hole shoulder block and precision bearing II; Described pressing plate is fixedly connected with rotating shaft I lower surface; Described set nut I is arranged on rotating shaft I upper end, and screw rear set nut I and fit with precision bearing I end face, pressing plate and precision bearing II end face are fitted; Resiliency deformable member's stress deformation, its lower edges is fitted with frame lower end, joint mounting hole shoulder block and precision bearing II upper surface respectively;
The inner annexation of passive rotation subjoint II is: described precision bearing III, precision bearing IV adopt transition fit to be arranged in the mounting hole of described connecting rod; Described end cap is inserted in mounting hole, coordinates the shoulder block of mounting hole to compress precision bearing III, precision bearing IV, makes precision bearing III, precision bearing IV outer ring is fixedly connected with connecting rod; Described rotating shaft II adopts transition fit to be fixedly connected with precision bearing III, precision bearing IV; Described set nut II is arranged on rotating shaft II lower end, screws rear set nut II, compresses precision bearing III, precision bearing IV, makes precision bearing III, precision bearing IV inner ring is fixedly connected with rotating shaft II by rotating shaft II shaft shoulder;
Described base plate is fixedly connected with indium steel grating scale, and described web joint is fixedly connected with grating reading head; Described base plate is fixedly connected with temperature sensor;
Described passive rotation subjoint II adopts bearing to locate the structure of pretension: described precision bearing III, precision bearing IV are the precision corner contact ball bearing of mounted in pairs; Described passive rotation subjoint I adopts the structure of bearing level pressure pretension: described precision bearing I, precision bearing II are precision corner contact ball bearing, are provided with described resiliency deformable member in the rack mounting apertures of described joint;
Described rotating shaft II two ends have the screw thread for adjusting Driven by Ultrasonic Motors side chain and moving platform relative height.
5. the grand dynamic parallel positioning system of precision under micro-nano operating environment according to claim 1, is characterized in that: described caliberating device, comprises laser displacement tracker measurement module and linear grating measurement module;
Wherein, laser displacement tracker measurement module, for demarcating the actual value of kinematics parameters: processed by the signal of laser reflection ball, laser tracker collection input industrial computer; Described laser reflection ball is fixedly connected on basic machine;
Linear grating measurement module, for feeding back articulated position, corrects moving platform initial point: processed via grating reading head segmentation interface input control device by the signal of indium steel grating scale, grating reading head collection; Described indium steel grating scale is fixedly connected on base plate, and described grating reading head is fixedly connected on basic machine.
6. the grand dynamic parallel positioning system of precision under micro-nano operating environment according to claim 1, is characterized in that: described control device, comprises linear electric motors control module, moving platform positioning control module, temperature compensation module; Make corresponding process for the treatment of each module by signal, driving device body presses desired trajectory motion;
Wherein, linear electric motors control module: by industrial computer target position information input control device, controller show that drive volume outputs to linear motor driver as calculated, then the motion of driving device body; Feedback element adopts linear grating measurement module, thus realizes closed-loop control;
Moving platform positioning control module, singular regions is adopted to evade and Escape control strategy, real-time judge moving platform track, when moving platform track is close to singular regions border, takes orbital radius to shorten and the strategy becoming attitude simultaneously, evade, pass through singular regions, when moving platform is away from singular regions time, recover former track and run, wherein track following adopts Self-Tuning Algorithm, real time correction is carried out to moving platform track, realizes track following; When moving platform enters singular regions because of disturbance, singular regions escape mechanism will be adopted, realize the convenient in rapid escape of singular regions;
Temperature compensation module, the temperature signal detected by temperature sensor, is processed by controller input industrial computer; Kinematics parameters according to measuring varies with temperature rule, carries out real-time correction-compensation to kinematics parameters.
7. the grand dynamic parallel positioning system of precision under micro-nano operating environment according to claim 1, is characterized in that: described micro-nano operating environment comprises scanning electron microscope SEM cavity, scanning probe microscopy SPM cavity.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN106054806A (en) * | 2016-07-13 | 2016-10-26 | 华南理工大学 | Planar parallel mechanism end tracking control system based on two-dimensional encoder and planar parallel mechanism end tracking control method thereof |
| CN109506561A (en) * | 2018-10-22 | 2019-03-22 | 华南理工大学 | The axis hole trajectory measurement method of the planar multiple-articulation mechanism in the joint of gap containing axis hole |
| CN110147586A (en) * | 2019-04-28 | 2019-08-20 | 江铃汽车股份有限公司 | A kind of link assembly linebore analysis method |
| CN110919689A (en) * | 2019-12-12 | 2020-03-27 | 泉州华中科技大学智能制造研究院 | Joint driving device, joint robot with driving device and driving method |
| CN111438499A (en) * | 2020-03-30 | 2020-07-24 | 华南理工大学 | 5G + industrial AR-based assembly method using constraint-free force feedback |
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2014
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN106054806A (en) * | 2016-07-13 | 2016-10-26 | 华南理工大学 | Planar parallel mechanism end tracking control system based on two-dimensional encoder and planar parallel mechanism end tracking control method thereof |
| CN106054806B (en) * | 2016-07-13 | 2018-11-02 | 华南理工大学 | A kind of plane parallel mechanism end tracking control system and method based on two-dimensional encoded device |
| CN109506561A (en) * | 2018-10-22 | 2019-03-22 | 华南理工大学 | The axis hole trajectory measurement method of the planar multiple-articulation mechanism in the joint of gap containing axis hole |
| CN110147586A (en) * | 2019-04-28 | 2019-08-20 | 江铃汽车股份有限公司 | A kind of link assembly linebore analysis method |
| CN110919689A (en) * | 2019-12-12 | 2020-03-27 | 泉州华中科技大学智能制造研究院 | Joint driving device, joint robot with driving device and driving method |
| CN110919689B (en) * | 2019-12-12 | 2021-08-17 | 泉州华中科技大学智能制造研究院 | Joint driving device, joint robot with driving device and driving method |
| CN111438499A (en) * | 2020-03-30 | 2020-07-24 | 华南理工大学 | 5G + industrial AR-based assembly method using constraint-free force feedback |
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