CN204298452U - Microwave pulse plasma vacuum coating apparatus - Google Patents
Microwave pulse plasma vacuum coating apparatus Download PDFInfo
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- CN204298452U CN204298452U CN201420640302.0U CN201420640302U CN204298452U CN 204298452 U CN204298452 U CN 204298452U CN 201420640302 U CN201420640302 U CN 201420640302U CN 204298452 U CN204298452 U CN 204298452U
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Abstract
The utility model relates to microwave pulse plasma vacuum coating apparatus, comprise: a support being provided with the first vacuum chamber and the second vacuum chamber, one " Y " shape vacuum pipe and plural sealing Microwave cover, the bottom of described first vacuum chamber and the second vacuum chamber arranges the first bleeding point and the second bleeding point respectively, vacuum pipe first on end interface be connected with the first bleeding point and the second bleeding point respectively with end interface on second, the lower end interface of vacuum pipe connects vavuum pump, described sealing Microwave cover is arranged on support end face, and be communicated with the first vacuum chamber or the second vacuum chamber respectively.Improve the uniformity of vacuum in the uniformity of vacuum between each sealing Microwave cover and single sealing Microwave cover, thus guarantee the uniformity of the rete of workpiece, simplify the structure of this coating apparatus, cost-saving, and save space.
Description
Technical field
The utility model relates to technical field of vacuum plating, is specifically related to microwave pulse plasma vacuum coating apparatus.
Background technology
Microwave pulse plasma vacuum coating apparatus is a kind of device surface of the work being carried out to plated film, generally comprise support, vacuum pipe and sealing Microwave cover, a vacuum chamber is provided with in described support, the bottom of described vacuum chamber is communicated with vacuum pipe by a bleeding point, top arranges multiple opening, and be communicated with seal glass cover by opening, described opening and sealing Microwave cover one_to_one corresponding, workpiece geometrical clamp is provided with in described sealing Microwave cover, for workpiece to be coated being fixed in sealing Microwave cover, described vacuum pipe is a direct piping, described vacuum pipe is also communicated with vavuum pump.Before plated film, workpiece to be coated need be fixed in sealing Microwave cover by workpiece geometrical clamp, then taken away by the vacuum chamber air of vavuum pump by support, and then the air taken away in sealing Microwave cover, make also to form vacuum environment in sealing Microwave cover, finally by microwave pulse, plated film is carried out to workpiece.
At present, the vacuum chamber of microwave pulse plasma vacuum coating apparatus is cuboid dress, and length is generally between 450mm-900mm, and sealing Microwave cover is evenly arranged on support top along the length direction of vacuum chamber.But because the bottom of vacuum chamber is only provided with a bleeding point, this bleeding point is different from the distance respectively sealed between Microwave cover, cause the vacuum between each sealing Microwave cover inconsistent, vacuum in even same sealing Microwave cover also there are differences, affect uniformity and the uniformity of the thickness of workpiece film forming, and then affect the quality of workpiece plated film.
Utility model content
The purpose of this utility model overcomes shortcomings and deficiencies of the prior art, provides a kind of microwave pulse plasma vacuum coating apparatus, improves the uniformity of workpiece plated film.
The purpose of this utility model is achieved through the following technical solutions: microwave pulse plasma vacuum coating apparatus, comprise: a support being provided with the first vacuum chamber and the second vacuum chamber, one " Y " shape vacuum pipe and plural sealing Microwave cover, the bottom of described first vacuum chamber and the second vacuum chamber arranges the first bleeding point and the second bleeding point respectively, vacuum pipe first on end interface be connected with the first bleeding point and the second bleeding point respectively with end interface on second, the lower end interface of vacuum pipe connects vavuum pump, described sealing Microwave cover is arranged on support end face, and be communicated with the first vacuum chamber or the second vacuum chamber respectively.
As preferably, the distance of the bleeding point of each sealing Microwave cover vacuum chamber of being communicated with corresponding to it is all equal.
As preferably, described first vacuum chamber and the second vacuum chamber separate.
As preferably, described first bleeding point and the second bleeding point are inverted trapezoidal shape, make the speed of evacuation of each vacuum chamber consistent on the one hand, the path of smooth air discharge on the other hand, avoid in vacuum chamber and air generation turbulent flow in sealing Microwave cover, improve in vacuum chamber and seal the speed and efficiency that in Microwave cover, air is discharged.
As preferably, described vacuum pipe comprises the first upper end pipeline, the second upper end pipeline and lower channel, and the upper interface of the first upper end pipeline is connected with the first bleeding point, and lower interface is connected with the upper interface of lower channel; The upper interface of the second upper end pipeline is connected with the second bleeding point, and lower interface is connected with the upper interface of lower channel; The lower interface of lower channel is connected with vavuum pump; Described first upper end pipeline and the second upper end pipeline are concave arc shape, the path that further smooth air flows out, avoid in vacuum chamber further and air generation turbulent flow in sealing Microwave cover, thus improve in vacuum chamber and seal the speed and efficiency that in Microwave cover, air is discharged.
As preferably, described first upper end pipeline and the second upper end pipeline are integrative-structures, simplify the structure of vacuum pipe.
As preferably, described first upper end pipeline and the second upper end pipeline equal diameters, length are equal, guarantee the uniformity of the vacuum in each vacuum chamber and in each sealing Microwave cover further.
As preferably, the number of described sealing Microwave cover is 8, and is set in qually spaced in support end face in two row's four row modes, and described first vacuum chamber and the second vacuum chamber seal Microwave cover with 4 respectively and be communicated with.
The utility model comprises following advantage and beneficial effect compared to existing technology:
The utility model by arranging the first vacuum chamber and the second vacuum chamber and arranging the first bleeding point and the second bleeding point respectively in the bottom of the first vacuum chamber and the second vacuum chamber respectively in support, improve the uniformity of vacuum in the uniformity of vacuum between each sealing Microwave cover and single sealing Microwave cover, thus guarantee the uniformity of the rete of workpiece, in addition, by arranging " Y " shape vacuum pipe, vacuum pipe first on end interface be connected with the first bleeding point and the second bleeding point respectively with end interface on second, simplify the structure of this coating apparatus, cost-saving, and saving space.
Accompanying drawing explanation
Fig. 1 is the sectional view of microwave pulse plasma vacuum coating apparatus in embodiment;
Fig. 2 is the top view of microwave pulse plasma vacuum coating apparatus in embodiment.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment
As shown in Figure 1 and Figure 2, microwave pulse plasma vacuum coating apparatus, comprising: one is provided with support 1, " Y " the shape vacuum pipe 2 of the first separate vacuum chamber 101 and the second vacuum chamber 102 and two or more sealing Microwave cover 3.The bottom of described first vacuum chamber and the second vacuum chamber arranges the first bleeding point 1011 and the second bleeding point 1021 respectively, vacuum pipe first on end interface 2011 be connected with the first bleeding point and the second bleeding point respectively with end interface on second 2021, the lower end interface 2031 of vacuum pipe connects vavuum pump (not shown), described sealing Microwave cover is arranged on support end face, and is communicated with the first vacuum chamber or the second vacuum chamber respectively.Described first bleeding point and the second bleeding point are separately positioned on the first vacuum chamber bottom centre position and the second vacuum chamber bottom centre position.In the present embodiment, the number of described sealing Microwave cover is 8, and is set in qually spaced in support end face in two row's four row modes, and described first vacuum chamber and the second vacuum chamber seal Microwave cover with 4 respectively and be communicated with.The distance of the bleeding point of each sealing Microwave cover vacuum chamber of being communicated with corresponding to it is all equal.The sealing Microwave cover of this coating apparatus, vacuum chamber, vacuum pipe and vavuum pump are communicated with successively, form a vacuum pumping channel.
The workpiece geometrical clamp 5 for fixing workpiece 4 to be coated is provided with in described sealing microwave pulse cover.Before plated film, workpiece to be coated need be fixed in sealing Microwave cover by workpiece geometrical clamp, then taken away by the vacuum chamber air of vavuum pump by support, and then the air taken away in sealing Microwave cover, make also to form vacuum environment in sealing Microwave cover, finally by microwave pulse, plated film is carried out to workpiece.In the present embodiment by being provided with the first vacuum chamber and the second vacuum chamber, the bottom of the first vacuum chamber and the second vacuum chamber arranges the first bleeding point and the second bleeding point respectively, improve the uniformity of vacuum in the uniformity of vacuum between each sealing Microwave cover and single sealing Microwave cover, thus guarantee the uniformity of the rete of workpiece.In addition, by arranging " Y " shape vacuum pipe in the present embodiment, vacuum pipe first on end interface is connected with the first bleeding point and the second bleeding point respectively with end interface on second, simplify the structure of this coating apparatus, cost-saving, and saving space.
In the present embodiment, described first bleeding point and the second bleeding point are inverted trapezoidal shape, the path that smooth air is discharged, and avoid in vacuum chamber and air generation turbulent flow in sealing Microwave cover, improve in vacuum chamber and seal the speed and efficiency that in Microwave cover, air is discharged.
Particularly, the upper interface that described vacuum pipe comprises the first upper end pipeline 201, second upper end pipeline 202 and lower channel 203, first upper end pipeline is connected with the first bleeding point, and lower interface is connected with the upper interface of lower channel; The upper interface of the second upper end pipeline is connected with the second bleeding point, and lower interface is connected with the upper interface of lower channel; The lower interface of lower channel is connected with vavuum pump.The upper interface of described first upper end pipeline be vacuum pipe first on end interface, the upper interface of the second upper end pipeline be vacuum pipe second on end interface, the lower interface of lower channel is the lower end interface of vacuum pipe.Described first upper end pipeline and the second upper end pipeline are concave arc shape.The path that further smooth air flows out, avoids in vacuum chamber further and air generation turbulent flow in sealing Microwave cover, thus improves in vacuum chamber and seal the speed and efficiency that in Microwave cover, air is discharged.
In the present embodiment, described first upper end pipeline and the second upper end pipeline are integrative-structures, be specially half circular pipe, the public lower interface of an opening as the first upper end pipeline and the second upper end pipeline is offered in the middle part of pipeline, the both ends open of semicircle pipeline is respectively the upper interface of the first upper end pipeline and the upper interface of the second upper end pipeline, makes the first upper end pipeline and the second upper end pipeline equal diameters, length equal.Adopt integrated design, simplify the structure of vacuum pipe, cost-saving and space, guarantee the uniformity of the vacuum in each vacuum chamber and in each sealing Microwave cover simultaneously further.
The above embodiment only have expressed embodiment of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (8)
1. microwave pulse plasma vacuum coating apparatus, it is characterized in that, comprise: a support (1) being provided with the first vacuum chamber (101) and the second vacuum chamber (102), one " Y " shape vacuum pipe (2) and plural sealing Microwave cover (3), the bottom of described first vacuum chamber and the second vacuum chamber arranges the first bleeding point (1011) and the second bleeding point (1021) respectively, vacuum pipe first on end interface (2011) be connected with the first bleeding point and the second bleeding point respectively with end interface on second (2021), the lower end interface (2031) of vacuum pipe connects vavuum pump, described sealing Microwave cover is arranged on support end face, and be communicated with the first vacuum chamber or the second vacuum chamber respectively.
2. microwave pulse plasma vacuum coating apparatus according to claim 1, is characterized in that: the distance of the bleeding point of each sealing Microwave cover vacuum chamber of being communicated with corresponding to it is all equal.
3. microwave pulse plasma vacuum coating apparatus according to claim 1, is characterized in that: described first vacuum chamber and the second vacuum chamber separate.
4. microwave pulse plasma vacuum coating apparatus according to claim 1, is characterized in that: described first bleeding point and the second bleeding point are inverted trapezoidal shape.
5. microwave pulse plasma vacuum coating apparatus according to claim 1, it is characterized in that: described vacuum pipe comprises the first upper end pipeline (201), the second upper end pipeline (202) and lower channel (203), the upper interface of the first upper end pipeline is connected with the first bleeding point, and lower interface is connected with the upper interface of lower channel; The upper interface of the second upper end pipeline is connected with the second bleeding point, and lower interface is connected with the upper interface of lower channel; The lower interface of lower channel is connected with vavuum pump; Described first upper end pipeline and the second upper end pipeline are concave arc shape.
6. microwave pulse plasma vacuum coating apparatus according to claim 5, is characterized in that: described first upper end pipeline and the second upper end pipeline are integrative-structures.
7. microwave pulse plasma vacuum coating apparatus according to claim 5, is characterized in that: described first upper end pipeline and the second upper end pipeline equal diameters, length are equal.
8. the microwave pulse plasma vacuum coating apparatus according to any one of claim 1 to 7, it is characterized in that: the number of described sealing Microwave cover is 8, and being set in qually spaced in support end face in two row's four row modes, described first vacuum chamber and the second vacuum chamber seal Microwave cover with 4 respectively and are communicated with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420640302.0U CN204298452U (en) | 2014-10-29 | 2014-10-29 | Microwave pulse plasma vacuum coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420640302.0U CN204298452U (en) | 2014-10-29 | 2014-10-29 | Microwave pulse plasma vacuum coating apparatus |
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| CN204298452U true CN204298452U (en) | 2015-04-29 |
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| CN201420640302.0U Active CN204298452U (en) | 2014-10-29 | 2014-10-29 | Microwave pulse plasma vacuum coating apparatus |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106091709A (en) * | 2016-06-30 | 2016-11-09 | 陕西友力实业有限公司 | A kind of microwave vacuum smelts vacuum extractor |
-
2014
- 2014-10-29 CN CN201420640302.0U patent/CN204298452U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106091709A (en) * | 2016-06-30 | 2016-11-09 | 陕西友力实业有限公司 | A kind of microwave vacuum smelts vacuum extractor |
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