CN204286623U - A kind of film temperature sensor measured for quick response temperature - Google Patents
A kind of film temperature sensor measured for quick response temperature Download PDFInfo
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- CN204286623U CN204286623U CN201420695951.0U CN201420695951U CN204286623U CN 204286623 U CN204286623 U CN 204286623U CN 201420695951 U CN201420695951 U CN 201420695951U CN 204286623 U CN204286623 U CN 204286623U
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Abstract
The utility model discloses a kind of film temperature sensor measured for quick response temperature, comprise substrate, described substrate is coated with film thermocouple, the positive pole of described film thermocouple is connected by hot junction with negative pole; Two external connection end of described film thermocouple are connected with external lead wire respectively by a pad; Described film thermocouple is coated with protective seam.Temperature sensor of the present utility model has the advantages that the quick response temperature of high temperature is measured, and can be used in the temperature environment thermometric of 1600 DEG C; The response time of film temperature sensor is very fast, and the response time is several milliseconds; Film temperature sensor is due to small volume, less to the interference of the warm field of test, improves the measuring accuracy of temperature sensor, can meet the dynamic temperature measurement demand of response fast at present.
Description
Technical field
The utility model relates to a kind of film temperature sensor measured for quick response temperature.
Background technology
Temperature sensor is widely used in Aero-Space, Thermal Power Engineering etc., the application of temperature sensor trends towards the application conditions that high temperature responds fast, the dynamic temperature measurement demand of traditional temperature sensor quick response because hot junction thickness cannot meet more greatly, simultaneously because traditional temperature sensor is larger for the measured target body heat conducting interference in surface, advection heat conduction change between thermopair and measured surface is also relatively large, thus cause the deviation of thermopair indicated value and measured value, have impact on the precision of temperature sensor.
Summary of the invention
Technical problem to be solved in the utility model is, for above-mentioned the deficiencies in the prior art, provides a kind of film temperature sensor measured for quick response temperature, meets the dynamic temperature measurement demand of response fast at present.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of film temperature sensor measured for quick response temperature, comprise substrate, described substrate is coated with film thermocouple, the positive pole of described film thermocouple is connected by hot junction with negative pole, and described hot junction thickness is identical with described thin film thermoelectric dual thickness; Two external connection end of described film thermocouple are connected with external lead wire respectively by a pad; Described film thermocouple is coated with protective seam.
Described thin film thermoelectric dual thickness is 1 μm.
Ta is provided with between protective seam described in described thin film thermoelectric even summation
2o
5transition bed.
Described Ta
2o
5transition region thickness is 200nm.
Described bond pad surface is coated with the gluey material of high temperature resistant inorganic.
Described substrate is Al
2o
3ceramic substrate.
Described R type film thermocouple material is the one in the Type B thermocouple material of the K type thermocouple material of nickel chromium triangle-nisiloy, the R type thermocouple material of platinum rhodium 13-platinum, the S type thermocouple material of platinum rhodium 10-platinum, platinum rhodium 30-platinum rhodium 6.
The material of described external lead wire is identical with the material of coupled pad, the accuracy exported with the signal improving sensor.
Compared with prior art, the beneficial effect that the utility model has is: temperature sensor of the present utility model adopts film thermocouple, the hot junction thickness of its correspondence compared to existing technology in the thickness of hot junction greatly reduce, therefore temperature sensor of the present utility model has the advantages that the quick response temperature of high temperature is measured, and can be used in the temperature environment thermometric of 1600 DEG C; The response time of film temperature sensor is very fast, and the response time is several milliseconds; Film temperature sensor is due to small volume, less to the interference of the warm field of test, improves the measuring accuracy of temperature sensor, can meet the dynamic temperature measurement demand of response fast at present.
Accompanying drawing explanation
Fig. 1 is the utility model film temperature sensor thermopair pictorial diagram;
Fig. 2 is film temperature sensor protective seam and lead-in wire welding schematic diagram in the utility model.
Embodiment
As depicted in figs. 1 and 2, the utility model one embodiment substrate 1 is coated with film thermocouple, described film thermocouple is connected to form by hot junction 5 by the platinum rhodium film pattern of positive pole 3 and the platinum film figure of negative pole 2, both positive and negative polarity thermopair film thickness is 1 μm, and hot junction thickness 5 is identical with thin film thermoelectric dual thickness; Described film thermocouple is coated with Ta
2o
5transition bed; Described Ta
2o
5transition bed is provided with protective seam 6, and described protective seam 6 covers described thermopair figure and around substrate 1 is surperficial; Two external connection end of described thermopair are connected through a pad 4 and respective external lead wire (platinum go between 7, platinum rhodium go between 8) respectively, and bond pad surface is coated with the gluey material of high temperature resistant inorganic, as inorganic silicon-aluminum silicate material.
The preparation process of the utility model film temperature sensor is as follows: be of a size of 5mm × 10mm(long × wide) Al
2o
3ceramic substrate 1 is through precise polished, subsequently ultrasonic cleaning is carried out to substrate 1 surface, adopt ion beam sputtering deposition mode at the R type film thermocouple of substrate surface plating figure as shown in Figure 1, namely hocketed by the technique of photoetching and ion beam sputtering deposition, respectively at substrate surface plating Pt film and PtRh13 film, thus forming R type thermopair, the thickness of thermocouple film is 1 μm.Film thermocouple material can be K type thermocouple material, the R type thermocouple material of platinum rhodium 13-platinum, the S type thermocouple material of platinum rhodium 10-platinum, the Type B thermocouple material of platinum rhodium 30-platinum rhodium 6 of nickel chromium triangle-nisiloy.Concrete selection exports according to the serviceability temperature of temperature sensor and signal and requires to determine.
Above-mentioned thermocouple substrate carries out ultrasonic cleaning, installs steel disc mask plate on the substrate 1 subsequently, the substrate of cleaning is aimed at mask plate, adopts the mode plating Ta of ion beam sputtering deposition
2o
5transition bed, this transition bed is in order to the protective seam 6 of extenuating follow-up preparation and substrate 1 and the lattice parameter of thermocouple material and the mismatch of thermal expansivity, and the thickness of transition bed is about 200nm.At transition bed substrate surface plating SiO
2protective seam 6; because film thermocouple will adapt to high temperature hostile environment for use; therefore very high requirement is proposed to the film quality of thermopair membraneous material; this requires make film dense uniform by controlling coating process and have very little internal stress; simultaneously have stronger adhesion with base material, the film therefore prepared through the heat treatment process of one section of thermograde to eliminate the unrelieved stress of film inside.
The lead packages technique of film temperature sensor adopts encapsulation process as shown in Figure 2 to carry out, the pad 4 of substrate 1 utilizes electronic spot welder to weld together with corresponding lead-in wire, carry out lead-in wire at weld locations coated with conductive glue to fix, lead-in wire socket high temperature fiber sleeve pipe, bond pad surface and pigtail splice position apply the gluing material of certain thickness high temperature resistant inorganic subsequently, through cooling curing and subsequent treatment, complete the lead packages process of temperature sensor.Lead material described in above-mentioned technique is all same material with the corresponding pad welded, and exports accuracy with the signal improving sensor.
Claims (9)
1. the film temperature sensor measured for quick response temperature, comprise substrate (1), it is characterized in that, (1) is coated with film thermocouple to described substrate, the positive pole (3) of described film thermocouple is connected by hot junction (5) with negative pole (2), and described hot junction (5) thickness is identical with described thin film thermoelectric dual thickness; Two external connection end of described film thermocouple are connected with external lead wire respectively by a pad (4); Described film thermocouple is coated with protective seam (6).
2. the film temperature sensor measured for quick response temperature according to claim 1, is characterized in that, described thin film thermoelectric dual thickness is 1 μm.
3. the film temperature sensor measured for quick response temperature according to claim 1 and 2, is characterized in that, is provided with Ta described in described thin film thermoelectric even summation between protective seam
2o
5transition bed.
4. the film temperature sensor measured for quick response temperature according to claim 3, is characterized in that, described Ta
2o
5transition region thickness is 200nm.
5. the film temperature sensor measured for quick response temperature according to claim 4, is characterized in that, described pad (4) surface is coated with the gluey material of high temperature resistant inorganic.
6. the film temperature sensor measured for quick response temperature according to claim 5, is characterized in that, described substrate is Al
2o
3ceramic substrate.
7. the film temperature sensor measured for quick response temperature according to claim 6, it is characterized in that, described R type film thermocouple material is the one in the Type B thermocouple material of the K type thermocouple material of nickel chromium triangle-nisiloy, the R type thermocouple material of platinum rhodium 13-platinum, the S type thermocouple material of platinum rhodium 10-platinum, platinum rhodium 30-platinum rhodium 6.
8. the film temperature sensor measured for quick response temperature according to claim 7, is characterized in that, described protective seam (6) material is SiO
2.
9. the film temperature sensor measured for quick response temperature according to claim 8, is characterized in that, the material of described external lead wire is identical with the material of coupled pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201420695951.0U CN204286623U (en) | 2014-11-19 | 2014-11-19 | A kind of film temperature sensor measured for quick response temperature |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420695951.0U CN204286623U (en) | 2014-11-19 | 2014-11-19 | A kind of film temperature sensor measured for quick response temperature |
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| CN204286623U true CN204286623U (en) | 2015-04-22 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105318983A (en) * | 2015-10-30 | 2016-02-10 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor and preparation method thereof |
| CN105806503A (en) * | 2016-04-20 | 2016-07-27 | 中国科学院工程热物理研究所 | Multipoint film thermocouple structure for fluid dynamic temperature measurement |
| CN106017738A (en) * | 2016-07-20 | 2016-10-12 | 上海交通大学 | High-temperature dynamic testing system and method for thin film thermocouple |
| CN107101735A (en) * | 2017-06-13 | 2017-08-29 | 北京卫星环境工程研究所 | For the sheet film thermocouple temperature measurement system of measurement surface transient temperature and application |
| CN107489554A (en) * | 2016-06-10 | 2017-12-19 | 福特环球技术公司 | For the system and method based on the fuel rail temperature adjustment fuel injection through determination |
| CN109556750A (en) * | 2019-01-23 | 2019-04-02 | 浙江泰索科技有限公司 | A kind of high temperature resisting thermocouple exhaust gas temperature sensor |
| CN112345107A (en) * | 2020-12-02 | 2021-02-09 | 中北大学 | Temperature measuring device integrated with thin film thermocouple and micro-transducer element and preparation method thereof |
| WO2021237602A1 (en) * | 2020-05-28 | 2021-12-02 | 南昌欧菲显示科技有限公司 | Thin film type thermocouple, temperature sensor, and intelligent wearable device |
-
2014
- 2014-11-19 CN CN201420695951.0U patent/CN204286623U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105318983A (en) * | 2015-10-30 | 2016-02-10 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor and preparation method thereof |
| CN105806503A (en) * | 2016-04-20 | 2016-07-27 | 中国科学院工程热物理研究所 | Multipoint film thermocouple structure for fluid dynamic temperature measurement |
| CN107489554A (en) * | 2016-06-10 | 2017-12-19 | 福特环球技术公司 | For the system and method based on the fuel rail temperature adjustment fuel injection through determination |
| CN107489554B (en) * | 2016-06-10 | 2021-11-12 | 福特环球技术公司 | System and method for adjusting fuel injection based on determined fuel rail temperature |
| CN106017738A (en) * | 2016-07-20 | 2016-10-12 | 上海交通大学 | High-temperature dynamic testing system and method for thin film thermocouple |
| CN107101735A (en) * | 2017-06-13 | 2017-08-29 | 北京卫星环境工程研究所 | For the sheet film thermocouple temperature measurement system of measurement surface transient temperature and application |
| CN109556750A (en) * | 2019-01-23 | 2019-04-02 | 浙江泰索科技有限公司 | A kind of high temperature resisting thermocouple exhaust gas temperature sensor |
| CN109556750B (en) * | 2019-01-23 | 2024-02-20 | 浙江泰索科技有限公司 | High-temperature-resistant thermocouple exhaust temperature sensor |
| WO2021237602A1 (en) * | 2020-05-28 | 2021-12-02 | 南昌欧菲显示科技有限公司 | Thin film type thermocouple, temperature sensor, and intelligent wearable device |
| CN112345107A (en) * | 2020-12-02 | 2021-02-09 | 中北大学 | Temperature measuring device integrated with thin film thermocouple and micro-transducer element and preparation method thereof |
| CN112345107B (en) * | 2020-12-02 | 2023-05-19 | 中北大学 | Temperature measuring device integrated with film thermocouple and micro-transducer and preparation method thereof |
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