CN204281893U - A kind of directional solidification thermal-preservation thermal field - Google Patents
A kind of directional solidification thermal-preservation thermal field Download PDFInfo
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- CN204281893U CN204281893U CN201420710143.7U CN201420710143U CN204281893U CN 204281893 U CN204281893 U CN 204281893U CN 201420710143 U CN201420710143 U CN 201420710143U CN 204281893 U CN204281893 U CN 204281893U
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Abstract
A kind of directional solidification thermal-preservation thermal field, comprise heat insulating cage, heat exchange platform, crucible, well heater, the medial surface of heat-insulation cage body arranges the first warming plate, the second warming plate and the 3rd warming plate, first warming plate, the second warming plate are inwardly corresponding in turn to the whole medial surface of top and the sidewall pasting heat-insulation cage body from medial surface, 3rd warming plate pastes a part for the second warming plate medial surface, the 3rd warming plate upwards corresponding 1/2 ~ 2/3 At The Height pasting heat-insulation cage body bottom heat-insulation cage body; The outer side wall of crucible arranges three layers of thermal insulation layer, and the bottom of crucible arranges two-layer thermal insulation layer; Between 3rd warming plate of heat-insulation cage body and the outermost thermal insulation layer of crucible wall, small―gap suture coordinates.The utility model sets up lagging material by the weak link at thermal-preservation thermal field, and controls height and the tolerance clearance each other of lagging material, forms balanced thermal-preservation thermal field, thus better can control the directed uniform growth of silicon crystal.
Description
Technical field
The utility model relates to polycrystalline silicon ingot or purifying furnace design field, a kind of for the thermal-preservation thermal field with directional solidification growth performance in polycrystalline silicon ingot or purifying furnace specifically.
Background technology
Polycrystalline silicon ingot or purifying furnace is the equipment for casting large-scale polycrystal silicon ingot, and it by directional freeze crystallization, makes the silicon ingot of formation uniform orientation by after silicon material high-temperature fusion, thus reaches the requirement of solar cell to silicon chip quality.
Existing polycrystalline silicon ingot or purifying furnace mainly comprises body of heater, crucible, heat insulating cage, body of heater is offered the aspirating hole for vacuumizing, and crucible and heat insulating cage are arranged in the burner hearth of body of heater.Burner hearth bottom fixes some support posts, and the very strong heat exchange platform of a thermal conductivity is fixed in the upper end of support post, and crucible is placed on heat exchange platform.Heat insulating cage is enclosed in crucible outside, and heat insulating cage is made up of lower warming plate and heat-insulation cage body, and lower warming plate is fixed on the support post below heat exchange platform, and heat-insulation cage body coordinates with lower warming plate and is located at outside crucible.Arrange in heat insulating cage respectively to crucible top and sidewall heating top heater and side heater.The top of heat-insulation cage body connects lifting gear, mentions for whole or put down heat-insulation cage body.Usual heat-insulation cage body and crucible are square structure, the inner side of the top of heat-insulation cage body and four sidewalls evenly arranges warming plate, the bottom of crucible and the uniform thermal insulation layer of the coated thickness of sidewall, the thermal insulation layer of heat-insulation cage body, bottom warming plate, crucible, heat exchange platform, well heater form the thermal-preservation thermal field of polycrystalline silicon growth jointly.
The working process of polycrystalline silicon ingot or purifying furnace is: be placed on heat exchange platform after the interior crucible scribbling supercoat is loaded silicon material; Vacuumize after closing burner hearth, connect the power supply of top and side heater, silicon material is melted completely; Slowly upwards promote heat insulating cage afterwards, expose the lower surface of lower warming plate, heat exchange platform, by heat exchange platform by the heat radiation that discharges during the crystallization of silicon material on the water-cooled inwall of burner hearth; Thus in silicon material in crucible, forming a vertical thermograde, this thermograde makes the silicon material in crucible solidify from bottom, slowly grows into silicon ingot from bottom to top; After through annealing, cooled whole ingot casting process.
Grain shape in control polycrystal silicon ingot process of setting and size are the important means of the performance improving polysilicon solar cell, and casting ingot process process is depended in the control of polycrystal silicon ingot crystal grain and shape to a great extent, namely strictly should control the thermograde in vertical direction, obtain desirable setting rate, make solid-liquid interface as far as possible straight, thus grow the good column of polysilicon of orientation, its electric property is all had unanimously.Above-mentioned factor, except depending on the heat distribution of well heater, the heat dispersal situations of heat exchange platform, also has an important factor to be exactly the performance of the thermal field formed by the thermal insulation layer of heat insulating cage and crucible.
Existing thermal-preservation thermal field, because crucible and heat-insulation cage body are square structure, and the consumption of the upper and lower lagging material of the sidewall of heat-insulation cage body is the same, and corner and the heat-insulation cage body space distance of crucible can affect long crystalloid amount.At the long brilliant initial stage, the edge temperature of crucible is scattered and disappeared too fast, and silicon liquid easily begins to cool down from sidewall, such that crystal grain is less than normal, crystal orientation tilts, energy consumption is larger; And in the long brilliant middle and later periods, crystal increases, liquid reduces, and the distance between solid and well heater also reduces, and heat loss mainly by heat exchange platform, dispels the heat uneven.
Utility model content
The utility model technical issues that need to address are to provide the directional solidification thermal-preservation thermal field of the directed uniform growth of a kind of silicon crystal.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is:
A kind of directional solidification thermal-preservation thermal field, comprise and be connected with the heat insulating cage be made up of heat-insulation cage body and lower warming plate of lifting gear, the heat exchange platform be arranged in heat insulating cage, the crucible be placed on heat exchange platform, be arranged on the well heater of crucible top and sidewall, after improvement
The medial surface of described heat-insulation cage body arranges the first warming plate, the second warming plate and the 3rd warming plate, first warming plate correspondence pastes the top of heat-insulation cage body and the whole medial surface of sidewall, second warming plate correspondence pastes the whole medial surface of the first warming plate, described 3rd warming plate pastes a part for the second warming plate medial surface, and the 3rd warming plate is corresponding position upwards corresponding 1/2 ~ 2/3 At The Height pasting heat-insulation cage body pasting the second warming plate bottom heat-insulation cage body;
The outer side wall of described crucible arranges three layers of thermal insulation layer, and the bottom of crucible arranges two-layer thermal insulation layer;
Gap between 3rd warming plate of described heat-insulation cage body and the outermost thermal insulation layer of crucible wall is 10 ~ 15mm.
Above-mentioned directional solidification thermal-preservation thermal field, the thermal insulation layer of described first warming plate, the second warming plate, the 3rd warming plate and crucible is graphite fibre sheet material matter.
Above-mentioned directional solidification thermal-preservation thermal field, described first warming plate, the second warming plate, the 3rd warming plate are bolted to connection.
Above-mentioned directional solidification thermal-preservation thermal field, described heat-insulation cage body is set to upper warming plate and the heat insulation side cage of split, upper warming plate is that first warming plate at heat-insulation cage body top and the second warming plate merge integrative-structure, heat insulation side cage is by closely cooperating around the overlap joint ring and upper warming plate that are overlapped on upper warming plate upper surface, and lifting gear is arranged on warming plate.
Above-mentioned directional solidification thermal-preservation thermal field, the bottom of described heat-insulation cage body arranges the heat insulation loop extended internally, and arranges the interface mutually agreed with between heat insulation loop and lower warming plate.
The utility model, after employing technique scheme, has the effect of following technical progress:
The utility model sets up lagging material by the weak link at thermal-preservation thermal field, and control height and the tolerance clearance each other of lagging material, form balanced thermal-preservation thermal field, thus better can control the directed uniform growth of silicon crystal, solve the crystal growth polytropism that the unbalanced insulation difference of Yin Wendu causes, produce dendrite and tiltedly brilliant problem.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure, each label is expressed as: 1, lifting gear, and 2, lower warming plate, 3, upper warming plate, 4, heat insulation side cage, 41, the first warming plate, the 42, second warming plate, the 43, the 3rd warming plate, 44, heat insulation loop, 5, well heater, 6, crucible, 61, thermal insulation layer, 7, heat exchange platform.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further details:
A kind of directional solidification thermal-preservation thermal field as shown in Figure 1, comprises the heat insulating cage of the burner hearth inside being positioned at polycrystalline silicon ingot or purifying furnace, heat exchange platform 7, crucible 6, well heater 5.Described heat insulating cage is made up of upper warming plate 3, lower warming plate 2 and heat insulation side cage 4.Heat exchange platform 7 is supported by the support post in burner hearth, and be positioned at heat insulating cage, crucible 6 is placed on above heat exchange platform 7, and well heater 5 is arranged on top and the sidewall of crucible 6.
Described heat insulating cage is the square hexahedron structure of hollow, lower warming plate 2 is fixed on the support post below heat exchange platform 7, heat insulation side cage 4 to be located on lower warming plate 2 and collar heat exchange platform 7, crucible 6 and well heater 5, the inside top of heat insulation side cage 4 arranges warming plate 3, and upper warming plate 3 is connected with lifting gear 1.
The medial surface of described heat insulation side cage 4 arranges the first warming plate 41, second warming plate 42 and the 3rd warming plate 43.First warming plate 41 is covered in the whole medial surface of cage 4 top, heat insulation side and sidewall, and the second warming plate 42 correspondence is covered in the whole medial surface of the first warming plate 41.Described 3rd warming plate 43 is covered in a part for the medial surface of the second warming plate 42, and the 3rd warming plate 43 is corresponding position upwards corresponding 1/2 ~ 2/3 At The Height pasting heat insulation side cage 4 pasting the second warming plate 42 bottom heat insulation side cage 4.Described first warming plate 41, second warming plate 42, the 3rd warming plate 43 are bolted to connection.The top of described heat insulation side cage 4 arranges the overlap joint ring of the annular extended internally, and the bottom of heat insulation side cage 4 arranges the heat insulation loop 44 that the thickness extended internally is the first warming plate thickness of more than three times.
Described upper warming plate 3 to equal or slightly larger than the one insulating plate structure of the first warming plate 41, second warming plate 42 thickness sum for thickness.It is inner that upper warming plate 3 is inlaid in heat insulation side cage 4 by lifting gear 1, for closely cooperating between four limits of upper warming plate 3 and heat insulation side cage 4, heat insulation side cage 4 is arranged on upper warming plate 3 by overlap joint ring, and the upper warming plate 3 of further guarantee is synchronized with the movement with heat insulation side cage 4.
Described lower warming plate 2 coordinates with the bottom of heat insulation side cage 4, and four interfaces mutually agreed with along setting and heat insulation loop 44 on lower warming plate 2 top are ladder convex shape as shown in Figure 1.
The outer side wall of described crucible 6 arranges the three layer thermal insulation layer 61 highly equal with crucible 6, and the bottom of crucible 6 arranges the two-layer thermal insulation layer 61 corresponding with crucible bottom size.
The thermal insulation layer 61 of described first warming plate 41, second warming plate 42, the 3rd warming plate 43 and crucible is graphite fibre sheet material matter.When crucible 6 is placed in heat insulation side cage 4, heat insulation side cage 4 gap between the 3rd warming plate 43 of the inside one deck and the outermost thermal insulation layer 61 of crucible wall is 10 ~ 15mm, ensures to form stable directional solidification thermal field.
Claims (5)
1. a directional solidification thermal-preservation thermal field, comprise the heat insulating cage be made up of heat-insulation cage body and lower warming plate (2) being connected with lifting gear (1), the heat exchange platform (7) be arranged in heat insulating cage, the crucible (6) be placed on heat exchange platform (7), be arranged on the well heater (5) of crucible (6) top and sidewall, it is characterized in that:
The medial surface of described heat-insulation cage body arranges the first warming plate (41), the second warming plate (42) and the 3rd warming plate (43), first warming plate (41) correspondence pastes the top of heat-insulation cage body and the whole medial surface of sidewall, second warming plate (42) correspondence pastes the whole medial surface of the first warming plate (41), described 3rd warming plate (43) pastes a part for the second warming plate (42) medial surface, and the 3rd warming plate (43) pastes position upwards corresponding 1/2 ~ 2/3 At The Height pasting heat-insulation cage body of the second warming plate (42) from correspondence bottom heat-insulation cage body;
The outer side wall of described crucible (6) arranges three layers of thermal insulation layer (61), and the bottom of crucible (6) arranges two-layer thermal insulation layer (61);
Gap between 3rd warming plate (43) of described heat-insulation cage body and the outermost thermal insulation layer (61) of crucible wall is 10 ~ 15mm.
2. a kind of directional solidification thermal-preservation thermal field according to claim 1, is characterized in that: the thermal insulation layer (61) of described first warming plate (41), the second warming plate (42), the 3rd warming plate (43) and crucible is graphite fibre sheet material matter.
3. a kind of directional solidification thermal-preservation thermal field according to claim 2, is characterized in that: described first warming plate (41), the second warming plate (42), the 3rd warming plate (43) are bolted to connection.
4. a kind of directional solidification thermal-preservation thermal field according to claim 3, it is characterized in that: described heat-insulation cage body is set to upper warming plate (3) and heat insulation side cage (4) of split, the first warming plate (41) that upper warming plate (3) is heat-insulation cage body top and the second warming plate (42) merge integrative-structure, heat insulation side cage (4) is by closely cooperating around the overlap joint ring and upper warming plate (3) that are overlapped on upper warming plate upper surface, and lifting gear (1) is arranged on warming plate (3).
5. a kind of directional solidification thermal-preservation thermal field according to claim 4, is characterized in that: the bottom of described heat-insulation cage body arranges the heat insulation loop (44) extended internally, and arranges the interface mutually agreed with between heat insulation loop (44) and lower warming plate (2).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420710143.7U CN204281893U (en) | 2014-11-24 | 2014-11-24 | A kind of directional solidification thermal-preservation thermal field |
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| CN201420710143.7U CN204281893U (en) | 2014-11-24 | 2014-11-24 | A kind of directional solidification thermal-preservation thermal field |
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| CN204281893U true CN204281893U (en) | 2015-04-22 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637394A (en) * | 2016-09-23 | 2017-05-10 | 江苏美科硅能源有限公司 | Device for achieving material floating through increasing bottom temperature of polycrystalline furnace |
| CN107236986A (en) * | 2017-07-11 | 2017-10-10 | 江苏星特亮科技有限公司 | A kind of grower for artificial lens |
-
2014
- 2014-11-24 CN CN201420710143.7U patent/CN204281893U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637394A (en) * | 2016-09-23 | 2017-05-10 | 江苏美科硅能源有限公司 | Device for achieving material floating through increasing bottom temperature of polycrystalline furnace |
| CN107236986A (en) * | 2017-07-11 | 2017-10-10 | 江苏星特亮科技有限公司 | A kind of grower for artificial lens |
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Address after: 064100, 88, Tangshan City, Yutian County, Hebei Patentee after: Tangshan Haitai new energy Polytron Technologies Inc Address before: 064100, 88, Tangshan City, Yutian County, Hebei Patentee before: Tangshan Haitai New Energy Technology Co., Ltd. |