CN204271036U - A kind of have movable sealing structure silicon chip orienting device for ion implantor - Google Patents
A kind of have movable sealing structure silicon chip orienting device for ion implantor Download PDFInfo
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- CN204271036U CN204271036U CN201420619232.0U CN201420619232U CN204271036U CN 204271036 U CN204271036 U CN 204271036U CN 201420619232 U CN201420619232 U CN 201420619232U CN 204271036 U CN204271036 U CN 204271036U
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- rotating shaft
- black box
- axis hole
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Abstract
The utility model proposes a kind ofly has movable sealing structure silicon chip orienting device for ion implantor, comprises working plate; Be provided with the black box of through axis hole through described working plate, its upper end is positioned at vacuum chamber, and lower end is positioned at atmosphere zone; The mid portion of rotating shaft is arranged in described axis hole, and rotating shaft upper end is connected with directed disk and lower end is connected with lifting drive and rotating driving device; The black box part be positioned at below described working plate is provided with the differential extraction mouth be communicated with described axis hole; Described working plate end face is equipped with LED installation component; The two ends up and down of described black box are equipped with sealing gland; The drive unit of larger volume is arranged on outside vacuum chamber by the utility model, ensures that the vacuum degree in vacuum chamber is substantially unaffected, solve design challenges all the time in industry by black box.
Description
Technical field
The utility model relates to a kind of semiconductor device manufacturing control system, and particularly a kind of have movable sealing structure silicon chip orienting device for ion implantor.
Background technology
Along with the development of semiconductor technology, the orientation that can silicon chip stable, for biography sheet system, ion implant systems ever more important, has very large impact to the industrialization of injecting the quality of product, efficiency and ion implantor.Silicon chip orienting device plays vital effect in biography sheet system and ion implantation process, silicon chip orienting device is the medium between valut, manipulator, target platform, whether the accuracy of silicon chip orienting device location is directly connected to the position that silicon chip places target platform, thus be related to the degree of stability of injection technology, the operating efficiency of silicon chip orienting device is directly connected to the efficiency of whole injection technology simultaneously, and the importance of silicon chip orienting device in ion implantor is apparent.At present, the domestic research to silicon chip orienting device aspect is also fewer, there is no suitable equipment to occur, this is because the operating environment requirements of ion implantor is in vacuum chamber, and vacuum chamber often finite volume, cannot hold lower conventional orienting device drive part (as drive motors etc.), design encounters very large difficulty.
Utility model content
Based on the deficiencies in the prior art, what problem to be solved in the utility model was to provide a kind of stability and high efficiency has movable sealing structure silicon chip orienting device for ion implantor.
For solving the problems of the technologies described above, the utility model provides a kind of has movable sealing structure silicon chip orienting device for ion implantor, comprises working plate; Be provided with the black box of through axis hole through described working plate, its upper end is positioned at vacuum chamber, and lower end is positioned at atmosphere zone; The mid portion of rotating shaft is arranged in described axis hole, and rotating shaft upper end is connected with directed disk and lower end is connected with lifting drive and rotating driving device; The black box part be positioned at below described working plate is provided with the differential extraction mouth be communicated with described axis hole; Described working plate end face is equipped with LED installation component; The two ends up and down of described black box are equipped with sealing gland; Described axis hole two ends are provided with axle sleeve for installing described rotating shaft and sealing ring, and described sealing ring makes to form sealing between axis hole and rotating shaft.
Further improvement as technique scheme:
Described rotating driving device comprises electric rotating machine, driving wheel, driven pulley and Timing Belt; The output shaft of described electric rotating machine installs driving wheel; Driven pulley is installed in described rotating shaft lower end; Described driving wheel is connected by Timing Belt with driven pulley.
Described lifting drive comprises lifting motor and lifting arm; One end of described lifting arm is connected with the output shaft of described lifting motor, and other end kink is spacing by rotating shaft step in described rotating shaft lower end.
Described black box forms by being connected in turn and being equipped with the upper seal support of corresponding through axis hole, middle seal receptacle and bottom sealing socket.
Described black box is connected with described working plate by ring flange.
During work, silicon chip is placed on directed disk, and the output shaft of the lifting motor in lifting drive rotates to an angle, and makes lifting arm increase or declines, thus drives silicon chip to move up and down by rotating shaft and directed disk; The output shaft of the electric rotating machine in rotating driving device drives driving wheel to rotate, and driving wheel drives driven pulley to rotate by Timing Belt, thus drives silicon slice rotating motion by rotating shaft and directed disk, realizes the orientation of silicon chip in LED installation component.
Mainly the sealing and the motion of rotating shaft play the guiding role of black box.Be high vacuum region as shown in Figure 6 on the upside of working plate, downside is air, subregion is low vacuum regions.Rotating shaft does the vacuum degree that will inevitably reduce high vacuum region when rotating and move up and down in black box, in order to reduce the motion of rotating shaft to the impact of overall vacuum degree, black box have employed differential extraction design principle, rotating shaft creates comparatively rough vacuum in subregion in motion process, in order to avoid low vacuum regions is on the impact of high vacuum region, differential extraction mouth is devised in low vacuum regions, differential extraction pump is utilized to bleed to low vacuum regions, set up high vacuum, thus reduce the impact of rotating shaft motion on high vacuum.The design of three seal receptacles facilitates installation.
The drive unit of larger volume is arranged on outside vacuum chamber by the utility model, ensures that the vacuum degree in vacuum chamber is substantially unaffected, solve design challenges all the time in industry by black box.
The utility model can realize silicon chip location stability and high efficiency, is pass sheet in ion implantor, inject indispensable device, is that low energy large beam ion injects one of key device of equipment.
Describe the utility model in detail below in conjunction with accompanying drawing, it illustrates principle of the present utility model as the part of this specification by embodiment, and other aspects of the present utility model, feature and advantage thereof will become very clear by this detailed description.
Accompanying drawing explanation
The accompanying drawing forming a part of the present utility model is used to provide further understanding of the present utility model, and schematic description and description of the present utility model, for explaining the utility model, is not formed improper restriction of the present utility model.
Fig. 1 is overall structure schematic diagram of the present utility model;
Fig. 2 is the structural representation bottom the utility model;
Fig. 3 is the combination schematic diagram of lifting drive 1 in the utility model, rotating shaft 3, black box 5 and directed disk 4;
Fig. 4 is the combination schematic diagram of rotating driving device 2 in the utility model, rotating shaft 3, black box 5;
Fig. 5 is the structural representation of LED installation component 6 in the utility model;
The profile of black box 5 in Fig. 6 the utility model.
In Fig. 1-6, the corresponding relation of Reference numeral is:
1-lifting drive; 2-rotating driving device; 3-rotating shaft; The directed disk of 4-; 5-black box; 6-LED lamp installation component; 7-working plate; 8-differential extraction mouth; 9-electric rotating machine; 10-driving wheel; 11-driven pulley; 12-Timing Belt; 13-sealing gland; 14-upper seal support; Seal receptacle in 15-; 16-bottom sealing socket; 17-axle sleeve; 18-sealing ring; 19-lifting motor; 20-lifting arm; 21-ring flange; 22-rotating shaft step.
Embodiment
It should be noted that, when not conflicting, the embodiment in the utility model and the feature in embodiment can combine mutually.Below with reference to the accompanying drawings and describe the utility model in detail in conjunction with the embodiments.For sake of convenience, hereinafter as occur " on ", D score, "left", "right" printed words, only represent consistent with the direction, upper and lower, left and right of accompanying drawing itself, restriction effect is not played to structure.
As shown in figures 1 to 6, the present embodiment have movable sealing structure silicon chip orienting device for ion implantor, comprise working plate 7; Be provided with the black box 5 of through axis hole through working plate 7, its upper end is positioned at vacuum chamber, and lower end is positioned at atmosphere zone; The mid portion of rotating shaft 3 is arranged in axis hole, and rotating shaft 3 upper end is connected with directed disk 4 and lower end is connected with lifting drive 1 and rotating driving device 2; Black box 5 part be positioned at below working plate 7 is provided with the differential extraction mouth 8 be communicated with axis hole; Working plate 7 end face is equipped with LED installation component 6; The two ends up and down of black box 5 are equipped with sealing gland 13; Axis hole two ends are provided with axle sleeve 17 for installing rotating shaft 3 and sealing ring 18, and sealing ring 18 makes to be formed between axis hole and rotating shaft 3 to seal.
Rotating driving device 2 comprises electric rotating machine 9, driving wheel 10, driven pulley 11 and Timing Belt 12; The output shaft of electric rotating machine 9 is installed driving wheel 10; Driven pulley 11 is installed in rotating shaft 3 lower end; Driving wheel 10 is connected by Timing Belt 12 with driven pulley 11.
Lifting drive 1 comprises lifting motor 19 and lifting arm 20; One end of lifting arm 20 is connected with the output shaft of lifting motor 19, and other end kink is spacing by rotating shaft step 22 in rotating shaft 3 lower end.
Black box 5 forms by being connected in turn and being equipped with the upper seal support 14 of corresponding through axis hole, middle seal receptacle 15 and bottom sealing socket 16.
Black box 5 is connected with working plate 7 by ring flange 21.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (5)
1. there is a movable sealing structure silicon chip orienting device for ion implantor, it is characterized in that: comprise working plate (7); Be provided with the black box (5) of through axis hole through described working plate (7), its upper end is positioned at vacuum chamber, and lower end is positioned at atmosphere zone; The mid portion of rotating shaft (3) is arranged in described axis hole, and rotating shaft (3) upper end is connected with directed disk (4) and lower end is connected with lifting drive (1) and rotating driving device (2); Black box (5) part being positioned at described working plate (7) below is provided with the differential extraction mouth (8) be communicated with described axis hole; Described working plate (7) end face is equipped with LED installation component (6); The two ends up and down of described black box (5) are equipped with sealing gland (13); Described axis hole two ends are provided with axle sleeve (17) for installing described rotating shaft (3) and sealing ring (18), and described sealing ring (18) makes to be formed between axis hole and rotating shaft (3) to seal.
2. according to claim 1 have movable sealing structure silicon chip orienting device for ion implantor, it is characterized in that: described rotating driving device (2) comprises electric rotating machine (9), driving wheel (10), driven pulley (11) and Timing Belt (12); The output shaft of described electric rotating machine (9) is installed driving wheel (10); Driven pulley (11) is installed in described rotating shaft (3) lower end; Described driving wheel (10) is connected by Timing Belt (12) with driven pulley (11).
3. according to claim 1 have movable sealing structure silicon chip orienting device for ion implantor, it is characterized in that: described lifting drive (1) comprises lifting motor (19) and lifting arm (20); One end of described lifting arm (20) is connected with the output shaft of described lifting motor (19), and other end kink is spacing by rotating shaft step (22) in described rotating shaft (3) lower end.
4. according to claim 1 have movable sealing structure silicon chip orienting device for ion implantor, it is characterized in that: described black box (5) forms by being connected in turn and being equipped with the upper seal support (14) of corresponding through axis hole, middle seal receptacle (15) and bottom sealing socket (16).
5. according to claim 1 have movable sealing structure silicon chip orienting device for ion implantor, it is characterized in that: described black box (5) is connected with described working plate (7) by ring flange (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420619232.0U CN204271036U (en) | 2014-10-24 | 2014-10-24 | A kind of have movable sealing structure silicon chip orienting device for ion implantor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420619232.0U CN204271036U (en) | 2014-10-24 | 2014-10-24 | A kind of have movable sealing structure silicon chip orienting device for ion implantor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204271036U true CN204271036U (en) | 2015-04-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420619232.0U Active CN204271036U (en) | 2014-10-24 | 2014-10-24 | A kind of have movable sealing structure silicon chip orienting device for ion implantor |
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| Country | Link |
|---|---|
| CN (1) | CN204271036U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107833822A (en) * | 2017-11-02 | 2018-03-23 | 中国科学院合肥物质科学研究院 | A kind of narrow space-closed ultrahigh vacuum chamber system |
| CN110931412A (en) * | 2019-10-15 | 2020-03-27 | 北京烁科中科信电子装备有限公司 | High-precision and high-efficiency silicon wafer orienting device |
| CN112713115A (en) * | 2019-10-25 | 2021-04-27 | 中国电子科技集团公司第四十八研究所 | Vacuum wafer notch positioning device |
-
2014
- 2014-10-24 CN CN201420619232.0U patent/CN204271036U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107833822A (en) * | 2017-11-02 | 2018-03-23 | 中国科学院合肥物质科学研究院 | A kind of narrow space-closed ultrahigh vacuum chamber system |
| CN110931412A (en) * | 2019-10-15 | 2020-03-27 | 北京烁科中科信电子装备有限公司 | High-precision and high-efficiency silicon wafer orienting device |
| CN110931412B (en) * | 2019-10-15 | 2024-02-06 | 北京烁科中科信电子装备有限公司 | High-precision and high-efficiency silicon wafer orientation device |
| CN112713115A (en) * | 2019-10-25 | 2021-04-27 | 中国电子科技集团公司第四十八研究所 | Vacuum wafer notch positioning device |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220509 Address after: 101111 1st floor, building 1, 6 Xingguang 2nd Street, Tongzhou District, Beijing Patentee after: Beijing Scintillation Section Zhongkexin Electronic Equipment Co.,Ltd. Address before: 101100 No. 6 Xingguang 2nd Street, optical electromechanical integration industrial base, Tongzhou District, Beijing Patentee before: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT Co.,Ltd. |
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| TR01 | Transfer of patent right |