Summary of the invention
The purpose of this utility model is defect for prior art and provides a kind of RF high power coupler, and it can meet the needs of four aerofoil profile cavity feed-in power, thus solves the problem of prior art.
For achieving the above object, the technical scheme that the utility model is taked is: described a kind of RF high power coupler, be characterized in comprising outer conductor, inner wire and bowl-shape ceramic window is provided with in outer conductor, described outer conductor comprises cylinder barrel shaped leading portion, taper barrel stage casing and bowl-shape ceramic window construction section, cylinder barrel shaped leading portion front end is provided with rotation lap joint flange, taper barrel stage casing is provided with internal and external conductor combination water route, the front end of bowl-shape ceramic window construction section is provided with the first pivot flange and the second pivot flange, bowl-shape ceramic window construction section rear end is provided with circular flange, described inner wire comprises the electromagnetic coupled ring of semi-circular circulus, electromagnetic coupled ring is connected with circular straighttube by vacuum brazing, circular straighttube rear end is provided with conical varistor, conical varistor afterbody is connected with bowl-shape ceramic window, inner wire water route is provided with in circular straighttube and conical varistor, described bowl-shape ceramic window front end external diameter place is provided with ceramic window supported flange and ceramic window threaded ring, bowl-shape ceramic window back end inside diameter place is provided with transition sleeve, corresponding bowl-shape ceramic window is provided with ceramic window pedestal, ceramic window pedestal rear end is provided with socket, socket is provided with water route in socket.
The first described pivot flange is also provided with bowl-shape ceramic window water route, the bowl-shape ceramic window construction section arranged outside of described outer conductor has outer conductor cooling jacket, outer conductor cooling jacket two ends to be provided with before outer conductor cooling jacket plug after plug and outer conductor cooling jacket, outer conductor cooling jacket are also provided with bowl-shape ceramic window construction section and assist water route.
Be provided with the first sealing ring and power spring between described rotation lap joint flange and outer conductor cavity, rotate the adjustment that lap joint flange is used for the degree of coupling, the first described pivot flange and the second pivot flange are also provided with power spring, described taper barrel stage casing is provided with photodetector conduit, photodetector catheter proximal end forms photodetection port by end flanges under photodetection upper flanges and photoelectricity, described bowl-shape ceramic window construction section is used for fixing bowl-shape ceramic window, cylinder barrel shaped leading portion, taper barrel stage casing and bowl-shape ceramic window construction section adopt vacuum brazing to form a whole, the first described pivot flange and the second pivot flange are arranged between taper barrel stage casing and bowl-shape ceramic window construction section, the second sealing ring is provided with between taper barrel stage casing and the first pivot flange, the 3rd sealing ring is provided with between first pivot flange and bowl-shape ceramic window, described ceramic window supported flange and ceramic window threaded ring are arranged on the first pivot flange, the 4th sealing ring is provided with between ceramic window supported flange and the first pivot flange, described electromagnetic coupled ring and circular straighttube connection are also provided with plug before inner wire, conical varistor rear end is provided with plug after inner wire, described bowl-shape ceramic window inner surface is coated with titanium nitride layer, the front end of transition sleeve is provided with plug before the transition sleeve be connected with plug after inner wire, the rear end of transition sleeve is provided with plug after the transition sleeve be connected by screw with ceramic window pedestal, in described socket, water route is arranged on ceramic window pedestal by water channel plug, socket directly connects lock pin in coaxial feed tube and is connected with external conductor, for feed-in radio-frequency power.
The first described sealing ring, the second sealing ring, the 3rd sealing ring and the 4th sealing ring are thermostable fluorine RUBBER O RunddichtringO, and described power spring is the O type power spring of high frequency galvanic circle; Described taper barrel stage casing is used for the variable resistance of coaxial transmission line, is provided with vaccum seal ring under described photodetection upper flanges and photoelectricity between end flanges; Described circular flange is external-connected port, for adaptive external module, bowl-shape ceramic window construction section is presented pipe by bolt and external standard and is docked, cylinder barrel shaped leading portion and taper barrel stage casing share cooling water channel, bowl-shape ceramic window construction section is independently for water cooling, described ceramic window supported flange is radial thin-walled vacuum soldering oxygen-free copper flange, and described transition sleeve is axial vacuum soldering oxygen-free copper thin-walled transition sleeve.
Described electromagnetic coupled ring adopts two copper pipe to walk abreast bending machining, and electromagnetic coupled ring inside is provided with one-in-and-one-out two-way cooling water, and the two-way cooling water of circular straighttube inside is connected with the cooling water of electromagnetic coupled ring inside.
Described bowl-shape ceramic window adopts 95% little aluminum oxide ceramic of high-frequency loss to reburn through die forming to form bowl structure, bowl-shape ceramic window inner surface is coated with the corona discharge that titanium nitride prevents secondary from causing, described ceramic window supported flange is used for high frequency conduction and vacuum seal, transition sleeve, for connecting leading portion inner wire and back segment RF power fed-in interface, eliminates the dilatancy that inner wire and ceramic window generate heat when through-put power and cause simultaneously.
The beneficial effects of the utility model: described a kind of RF high power coupler, it adopts bowl-shape ceramic window structure and rational production technology, well solve coupler transfer line impedence matching problem, internal and external conductor all adopts oxygen-free copper material to make cylinder type, and be provided with cooling duct, outer conductor forms circulating cooling by many axial water routes, and inner wire is single cooling water channel and outer conductor circuit in series.Bowl-shape ceramic window adopts special welding procedure transition metal flange and ceramic welding to be formed, form the insulation between the isolation of air and vacuum and internal and external conductor, and within it external diameter direction arranges cooling circuit, at the heat that ceramic window inner surface titanium-nitride coating prevents secondary from causing.Its bowl-shape ceramic window structure stress is better, and transmission line impedance does not have mutation problems, can solve resistance matching problem, make the higher heating of high frequency power efficiency of transmission less, under Same Efficieney grade, structure is compacter, for this reason, the use of the cavity body structure coupling power of relatively high power is specially adapted to.
Embodiment
The utility model is described in detail below in conjunction with accompanying drawing.
As illustrated in fig. 1 and 2: described a kind of RF high power coupler, be characterized in comprising outer conductor, inner wire and bowl-shape ceramic window 23 is provided with in outer conductor, described outer conductor comprises cylinder barrel shaped leading portion 4, taper barrel stage casing 11 and bowl-shape ceramic window construction section 32, cylinder barrel shaped leading portion 4 front end is provided with and rotates lap joint flange 6, taper barrel stage casing 11 is provided with internal and external conductor combination water route 35, the front end of bowl-shape ceramic window construction section 32 is provided with the first pivot flange 12 and the second pivot flange 18, bowl-shape ceramic window construction section 32 rear end is provided with circular flange 33, described inner wire comprises the electromagnetic coupled ring 1 of semi-circular circulus, electromagnetic coupled ring 1 is connected with circular straighttube 3 by vacuum brazing, circular straighttube 3 rear end is provided with conical varistor 20, conical varistor 20 afterbody is connected with bowl-shape ceramic window 23, inner wire water route 19 is provided with in circular straighttube 3 and conical varistor 20, described bowl-shape ceramic window 23 front end external diameter place is provided with ceramic window supported flange 16 and ceramic window threaded ring 17, bowl-shape ceramic window 23 back end inside diameter place is provided with transition sleeve 25, corresponding bowl-shape ceramic window 23 is provided with ceramic window pedestal 27, ceramic window pedestal 27 rear end is provided with socket 34, socket 34 is provided with water route 38 in socket.
The first described pivot flange 12 is also provided with bowl-shape ceramic window water route 36, bowl-shape ceramic window construction section 32 arranged outside of described outer conductor has outer conductor cooling jacket 29, outer conductor cooling jacket 29 two ends to be provided with before outer conductor cooling jacket plug 31 after plug 21 and outer conductor cooling jacket, outer conductor cooling jacket 29 are also provided with bowl-shape ceramic window construction section and assist water route 37.
Be provided with the first sealing ring 5 and power spring 40 between described rotation lap joint flange 6 and outer conductor cavity, rotate the adjustment of lap joint flange 6 for the degree of coupling, the first described pivot flange 12 and the second pivot flange 18 are also provided with conduction bullet 40, described taper barrel stage casing 11 is provided with photodetector conduit 10, photodetector conduit 10 front end forms photodetection port 39 by end flanges 8 under photodetection upper flanges 7 and photoelectricity, described bowl-shape ceramic window construction section 32 is for fixing bowl-shape ceramic window 23, cylinder barrel shaped leading portion 4, taper barrel stage casing 11 and bowl-shape ceramic window construction section 32 adopt vacuum brazing to form a whole, the first described pivot flange 12 and the second pivot flange 18 are arranged between taper barrel stage casing 11 and bowl-shape ceramic window construction section 32, the second sealing ring 13 is provided with between taper barrel stage casing 11 and the first pivot flange 12, the 3rd sealing ring 14 is provided with between first pivot flange 12 and bowl-shape ceramic window 23, described ceramic window supported flange 16 and ceramic window threaded ring 17 are arranged on the first pivot flange 12, the 4th sealing ring 15 is provided with between ceramic window supported flange 16 and the first pivot flange 12, described electromagnetic coupled ring 1 and circular straighttube 3 connection are also provided with plug 2 before inner wire, conical varistor 20 rear end is provided with plug 22 after inner wire, described bowl-shape ceramic window 23 inner surface is coated with titanium nitride layer, the front end of transition sleeve 25 is provided with plug 24 before the transition sleeve be connected with plug after inner wire 22, the rear end of transition sleeve 25 is provided with plug 26 after the transition sleeve be connected by screw 30 with ceramic window pedestal 27, in described socket, water route 38 is contained on ceramic window pedestal 27 by water channel plug 28, socket 34 directly connects lock pin in coaxial feed tube and is connected with external conductor, for feed-in radio-frequency power.
Described the first sealing ring 5, second sealing ring 13, the 3rd sealing ring 14 and the 4th sealing ring 15 are thermostable fluorine RUBBER O RunddichtringO, and described power spring 40 is the O type power spring of high frequency galvanic circle; Described taper barrel stage casing 11, for the variable resistance of coaxial transmission line, is provided with vaccum seal ring 9 between end flanges 8 under described photodetection upper flanges 7 and photoelectricity; Described circular flange 33 is external-connected port, for adaptive external module, bowl-shape ceramic window construction section 32 is presented pipe by bolt and external standard and is docked, cylinder barrel shaped leading portion 4 and taper barrel stage casing 11 share cooling water channel, bowl-shape ceramic window construction section 32 is independent of water cooling, described ceramic window supported flange 16 is radial thin-walled vacuum soldering oxygen-free copper flange, and described transition sleeve 25 is axial vacuum soldering oxygen-free copper thin-walled transition sleeve.
Described electromagnetic coupled ring 1 adopts two copper pipe to walk abreast bending machining, and electromagnetic coupled ring 1 inside is provided with one-in-and-one-out two-way cooling water, and the two-way cooling water of circular straighttube 3 inside is connected with the cooling water of electromagnetic coupled ring 1 inside.
95% aluminum oxide ceramic that described bowl-shape ceramic window 23 adopts high-frequency loss little is reburned through die forming and is formed bowl structure, bowl-shape ceramic window 23 inner surface is coated with the corona discharge that titanium nitride prevents secondary from causing, described ceramic window supported flange 16 is for high frequency conduction and vacuum seal, transition sleeve 25, for connecting leading portion inner wire and back segment RF power fed-in interface, eliminates the dilatancy that inner wire and ceramic window generate heat when through-put power and cause simultaneously.
Described a kind of RF high power coupler, its bowl-shape ceramic window utilizes bowl-shape inside and outside curved surfaces effectively to extend creepage distance, and bowl structure bears larger axis at atmosheric pressure to pressure, utilizes the gradual change of bowl-shape circular arc to realize impedance even transition; Bowl-shape ceramic window and coaxial transmission line, for being separated detachable structure, being conducive to safeguarding and cleaning, the dismounting and change when ceramic window coupler damages; Adopt bowl-shape ceramic window simplified design and difficulty of processing, significantly reduce manufacturing cost, the gradual change of bowl-shape circular arc can realize impedance even transition very well, has structure and is simply relatively easy to low cost manufacture.The size of described electromagnetic coupled ring obtains formula by Analysis of Equivalent Circuit:
The area of A needed for institute's coupling loop magnetic flux in formula, S is the cross-sectional area of cavity 1/4th quadrant, Q
0q value when being non-loaded, ω is cavity angular frequency, L
0the inductance of 1/4th quadrants, L
0=μ
0s/l
v, l
vfor chord degree, L
ithe self-induction of coupling loop, R
cit is the characteristic impedance of radio-frequency transmission line.L
ithat the self-induction of coupling loop can be obtained by following formula:
μ in formula
0for permeability of vacuum, μ
rfor the relative permeability of conductor.W and h is respectively the length of coupling loop and wide, and a is the radius of conductor.
Table 1 calculates required parameter
It is 23cm that above parameter substitution formulae discovery is obtained required coupling loop area
2.
Usually determine preliminary parameters by theory calculate and emulation in practice, final data is obtained by experimental test.Ceramic window in coaxial transmission line is the necessary material of isolated chambers vacuum and ambient atmosphere, its intervention changes the impedance operator of the coaxial transmission line under air dielectric, CST software is adopted to do simulation calculation, progressively revise inner conductor outer diameter geometric parameter, make it reach to meet the span line of coaxial transmission line characteristic impedance 50 ohm, emulation sectional drawing is as follows:
The S when frequency of utilization is 162.5MHz can be found out by diagram
11for-27.66db, the impedance corresponding with it is 48.47 ohm, can reach engineering design requirements.
The utility model static and dynamic Status test parameter is as follows:
1. impedance operator 50 ohm is 49.6 ohm with a net point actual measurement
2. frequency of utilization 162.5MHz
3. transmit continuous power and be greater than 80Kw, transmission pulse power is greater than 120kW, duty ratio 50%, pulse frequency 0.1MH z
4. continuous operation 60 fault-free on working day under 80kW/162.5MHz continuous wave power situation, cooling water temperature rise 5 DEG C
5. vacuum leak rate is less than 1*10
-10, vacuum degree is better than 1*10
-6
6. cooling water pressure test: 1Mpa/cm
2, 1 hour time is without step-down.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.