CN204255069U - A kind of sintering furnace - Google Patents
A kind of sintering furnace Download PDFInfo
- Publication number
- CN204255069U CN204255069U CN201420712758.3U CN201420712758U CN204255069U CN 204255069 U CN204255069 U CN 204255069U CN 201420712758 U CN201420712758 U CN 201420712758U CN 204255069 U CN204255069 U CN 204255069U
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- air
- pipe
- burner hearth
- furnace shell
- guiding roller
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Abstract
The utility model discloses a kind of sintering furnace of the temperature remained constant that can make in burner hearth.This sintering furnace comprises furnace shell, exhaust column, guipure and drive unit, is provided with burner hearth in described furnace shell, burner hearth is provided with air inlet and exhaust outlet.The air inlet of this sintering furnace is connected with circulating fan by supply air line, described supply air line comprises the main air supply pipe be connected with the gas outlet of circulating fan, multiple sub-air supply pipe, described sub-air supply pipe is connected with air inlet through furnace shell, the air inlet of described circulating fan is connected with air-breathing supervisor, multiple air-breathing pipe, the sub-pipe of described air-breathing stretches into the space burner hearth and furnace shell through furnace shell, after high temperature air in space between burner hearth and furnace shell is passed into burner hearth by circulating fan, enter the air themperature in burner hearth like this and the temperature difference in burner hearth little, the temperature substantially constant in burner hearth can be ensured, battery efficiency discreteness is less.Be adapted at silicon chip of solar cell process equipment field to apply.
Description
Technical field
The utility model relates to silicon chip of solar cell process equipment field, especially a kind of sintering furnace.
Background technology
In the whole technological process of production of solar cell silicon wafer, diffusion, printing and sintering three process are topmost.Wherein, sintering process is mainly used in drying the slurry being printed on silicon chip surface, burn the organic solvent volatilized from slurry, the positive and negative of synchronous sintering solar cell silicon wafer, printing is made to form good Ohmic contact to the metal electrode in silicon chip spreading mass and silicon chip, the electric current being beneficial to battery exports, and the efficiency that battery should reach is brought into play.If the Ohmic contact between silicon chip and electrode is bad, then portion of electrical current can be caused to export, thus reduce the energy conversion efficiency of cell piece.That is sintering circuit is the vital step making crystal silicon chip really have photoelectric converting function, and the quality of sintering quality directly affects the height of final solar cell piece efficiency.Therefore, the performance quality of agglomerating plant directly affects the quality of cell piece.
Existing agglomerating plant mainly adopts sintering furnace to realize, existing sintering furnace comprises furnace shell, exhaust column, guipure and the drive unit driving guipure to move, described exhaust column is horizontally set on above furnace shell, exhaust column one end seals, the other end is connected with air exhauster, exhaust column is provided with multiple exhausting pipe, described exhausting pipe vertically arranges and the mouth of pipe of the sub-pipe of exhausting is downward, polylith dividing plate is provided with in described furnace shell, space in furnace shell is divided into multiple sintering zone by described polylith dividing plate, described dividing plate is provided with the through hole passed for guipure, burner hearth is provided with in described sintering zone, upper space in described burner hearth is provided with a row top heating tube, lower space in burner hearth is provided with row's bottom-heated pipe, it is heating region between top heating tube and bottom-heated pipe, described guipure is successively horizontal through multiple heating region, described burner hearth is provided with air inlet and exhaust outlet, described air inlet is connected with air inlet pipe, described air inlet pipe is positioned at furnace shell, described exhaust outlet connects an organic discharge pipe, described organic discharge pipe is connected through sub pipe of furnace shell and exhausting, described air inlet pipe is connected with air compressor, in use there is following problem in this sintering furnace: existing sintering furnace is all pass in burner hearth after directly being compressed by outside air, because in burner hearth, temperature is higher, outside air temperature is lower, once outside air is passed in burner hearth, the temperature in burner hearth will be caused unstable, cause battery efficiency discreteness larger.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of sintering furnace of the temperature remained constant that can make in burner hearth.
The utility model solves the technical scheme that its technical problem adopts: this sintering furnace, comprise furnace shell, exhaust column, guipure and the drive unit driving guipure to move, described exhaust column is horizontally set on above furnace shell, exhaust column one end seals, the other end is connected with air exhauster, exhaust column is provided with multiple exhausting pipe, described exhausting pipe vertically arranges and the mouth of pipe of the sub-pipe of exhausting is downward, polylith dividing plate is provided with in described furnace shell, space in furnace shell is divided into multiple sintering zone by described polylith dividing plate, described dividing plate is provided with the through hole passed for guipure, burner hearth is provided with in described sintering zone, upper space in described burner hearth is provided with a row top heating tube, lower space in burner hearth is provided with row's bottom-heated pipe, it is heating region between top heating tube and bottom-heated pipe, described guipure is successively horizontal through multiple heating region, described burner hearth is provided with air inlet and exhaust outlet, described exhaust outlet connects an organic discharge pipe, described organic discharge pipe is connected through sub pipe of furnace shell and exhausting, described furnace shell is outside equipped with a circulating fan, described air inlet is connected with circulating fan by supply air line, described supply air line comprises the main air supply pipe be connected with the gas outlet of circulating fan, described main air supply pipe is connected with multiple sub-air supply pipe, the quantity of described sub-air supply pipe and the quantity one_to_one corresponding of sintering zone, described sub-air supply pipe is connected with air inlet through furnace shell, the air inlet of described circulating fan is connected with air-breathing supervisor, described air-breathing supervisor is connected with multiple air-breathing pipe, the quantity of the sub-pipe of described air-breathing and the quantity one_to_one corresponding of sintering zone, the sub-pipe of described air-breathing stretches into the space burner hearth and furnace shell through furnace shell.
Further, the port of the sub-pipe of described air-breathing is connected with trumpet-shaped cylindrical shell.
Further, the afterbody of described furnace shell is provided with silicon chip erection device.
Be further, described silicon chip erection device comprises the first guiding roller of the multiple rotations be arranged on the left of guipure, be arranged on the second guiding roller of the multiple rotations on the right side of guipure, described first guiding roller, the moving direction of the second guiding central axis of roller and guipure is orthogonal, sideline is guided in described multiple first guiding roll row formation in alignment first, sideline is guided in described multiple second guiding roll row formation in alignment second, described first guiding sideline, angle between second guiding sideline and the moving direction of guipure is 30-60 degree, described first guiding sideline, second guiding sideline forms along the moving direction of guipure the boot section that a width diminishes gradually, the width of the place that described guiding area width is the narrowest and silicon chip matches.
Be further, the below of described first guiding roller is provided with the first base, the upper surface of described first base is provided with multiple first chute parallel to each other, the lower end of described first guiding roller roll shaft is positioned at the first chute and can slidably reciprocates along the first chute, the roll shaft of described first guiding roller is provided with the locking device for being fixed on by the roll shaft of the first guiding roller in the first chute; The below of described second guiding roller is provided with the second base, the upper surface of described second base is provided with multiple second chute parallel to each other, the lower end of described second guiding roller roll shaft is positioned at the second chute and can slidably reciprocates along the second chute, the roll shaft of described second guiding roller is provided with the locking device for being fixed on by the roll shaft of the second guiding roller in the second chute.
Further, described locking device is locking nut.
The beneficial effects of the utility model are: the air inlet of this sintering furnace is connected with circulating fan by supply air line, described supply air line comprises the main air supply pipe be connected with the gas outlet of circulating fan, described main air supply pipe is connected with multiple sub-air supply pipe, the quantity of described sub-air supply pipe and the quantity one_to_one corresponding of sintering zone, described sub-air supply pipe is connected with air inlet through furnace shell, the air inlet of described circulating fan is connected with air-breathing supervisor, described air-breathing supervisor is connected with multiple air-breathing pipe, the quantity of the sub-pipe of described air-breathing and the quantity one_to_one corresponding of sintering zone, the sub-pipe of described air-breathing stretches into the space burner hearth and furnace shell through furnace shell, the air in the space between burner hearth and furnace shell is made along air-breathing sub-pipe inhale supervisor then again by main air supply pipe by circulating fan, sub-air supply pipe enters in burner hearth, because the air themperature in the space between burner hearth and furnace shell is higher, almost close to the temperature in burner hearth, therefore, after the high temperature air at this place is passed into burner hearth by circulating fan, enter the air themperature in burner hearth like this and the temperature difference in burner hearth little, temperature in burner hearth can not be affected greatly, the temperature substantially constant in burner hearth can be ensured, battery efficiency discreteness is less, and the air in space between burner hearth and furnace shell is through air-breathing pipe, air-breathing is responsible for, main air supply pipe, after sub-air supply pipe buffering, the air pressure of air reaches unanimity substantially, larger fluctuation can not be caused to the air pressure in burner hearth, can further make battery efficiency discreteness less, in addition, the heating of air be utilize burner hearth to distribute heat automatically to the air heat near it, heat is fully used, avoid the waste of the energy.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model sintering furnace;
Fig. 2 is the auto-strengthening apparatus structure schematic diagram described in the utility model sintering furnace;
Be labeled as in figure: furnace shell 1, exhaust column 2, guipure 3, drive unit 4, air exhauster 5, the sub-pipe 6 of exhausting, dividing plate 7, burner hearth 8, top heating tube 9, bottom-heated pipe 10, air inlet 11, exhaust outlet 12, organic discharge pipe 14, circulating fan 15, supply air line 16, main air supply pipe 161, sub-air supply pipe 162, air-breathing supervisor 163, the sub-pipe 164 of air-breathing, trumpet-shaped cylindrical shell 17, silicon chip erection device 18, first guiding roller 181, second guiding roller 182, first base 183, first chute 184, second base 185, second chute 186.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is further illustrated.
As shown in Figure 1, this sintering furnace, comprise furnace shell 1, exhaust column 2, guipure 3 and the drive unit 4 driving guipure 3 to move, described exhaust column 2 is horizontally set on above furnace shell 1, exhaust column 2 one end seals, the other end is connected with air exhauster 5, exhaust column 2 is provided with the sub-pipe 6 of multiple exhausting, the sub-pipe of described exhausting 6 vertically arranges and the mouth of pipe of the sub-pipe of exhausting 6 is downward, polylith dividing plate 7 is provided with in described furnace shell 1, space in furnace shell 1 is divided into multiple sintering zone by described polylith dividing plate 7, described dividing plate 7 is provided with the through hole passed for guipure 3, burner hearth 8 is provided with in described sintering zone, upper space in described burner hearth 8 is provided with a row top heating tube 9, lower space in burner hearth 8 is provided with row's bottom-heated pipe 10, heating region is formed between top heating tube 9 and bottom-heated pipe 10, described guipure 3 is successively horizontal through multiple heating region, described burner hearth 8 is provided with air inlet 11 and exhaust outlet 12, described exhaust outlet 12 connects an organic discharge pipe 14, described organic discharge pipe 14 is connected with the sub-pipe 6 of exhausting through furnace shell 1, described furnace shell 1 is outside equipped with a circulating fan 15, described air inlet 11 is connected with circulating fan 15 by supply air line 16, described supply air line 16 comprises the main air supply pipe 161 be connected with the gas outlet of circulating fan 15, described main air supply pipe 161 is connected with multiple sub-air supply pipe 162, the quantity of described sub-air supply pipe 162 and the quantity one_to_one corresponding of sintering zone, described sub-air supply pipe 162 is connected with air inlet 11 through furnace shell 1, the air inlet of described circulating fan 15 is connected with air-breathing supervisor 163, described air-breathing supervisor 163 is connected with the sub-pipe 164 of multiple air-breathing, the quantity of the sub-pipe 164 of described air-breathing and the quantity one_to_one corresponding of sintering zone, the sub-pipe 164 of described air-breathing stretches into the space burner hearth 8 and furnace shell 1 through furnace shell 1.The air inlet 11 of this sintering furnace is connected with circulating fan 15 by supply air line 16, described supply air line 16 comprises the main air supply pipe 161 be connected with the gas outlet of circulating fan 15, described main air supply pipe 161 is connected with multiple sub-air supply pipe 162, the quantity of described sub-air supply pipe 162 and the quantity one_to_one corresponding of sintering zone, described sub-air supply pipe 162 is connected with air inlet 11 through furnace shell 1, the air inlet of described circulating fan 15 is connected with air-breathing supervisor 163, described air-breathing supervisor 163 is connected with the sub-pipe 164 of multiple air-breathing, the quantity of the sub-pipe 164 of described air-breathing and the quantity one_to_one corresponding of sintering zone, the sub-pipe 164 of described air-breathing stretches into the space burner hearth 8 and furnace shell 1 through furnace shell 1, the air in the space between burner hearth 8 and furnace shell 1 is made to be responsible for 163 then again by main air supply pipe 161 along air-breathing sub-pipe 164 inhale by circulating fan 15, sub-air supply pipe 162 enters in burner hearth 8, because the air themperature in the space between burner hearth 8 and furnace shell 1 is higher, almost close to the temperature in burner hearth 8, therefore, after the high temperature air at this place is passed into burner hearth 8 by circulating fan 15, enter the air themperature in burner hearth 8 like this and the temperature difference in burner hearth 8 little, temperature in burner hearth 8 can not be affected greatly, the temperature substantially constant in burner hearth 8 can be ensured, battery efficiency discreteness is less, and the air in space between burner hearth 8 and furnace shell 1 is through the sub-pipe 164 of air-breathing, air-breathing supervisor 163, main air supply pipe 161, after sub-air supply pipe 162 cushions, the air pressure of air reaches unanimity substantially, larger fluctuation can not be caused to the air pressure in burner hearth 8, can further make battery efficiency discreteness less, in addition, the heating of air be utilize burner hearth 8 to distribute heat automatically to the air heat near it, heat is fully used, avoid the waste of the energy.
In order to make the inspiratory effects of circulating fan 15 better, the port of described circulating fan 15 is connected with trumpet-shaped cylindrical shell 17, can play the effect of gather qi together.
Due to the flowing of air in burner hearth 8, silicon chip is made to shake sometimes, conveniently the silicon chip after sintering is collected, the afterbody of described furnace shell 1 is provided with silicon chip erection device 18, the silicon chip being processed deviation position by silicon chip erection device 18 carries out righting, so that operating personnel take away, also facilitate automated job simultaneously.
Concrete, as shown in Figure 2, described silicon chip erection device 18 comprises the first guiding roller 181 of the multiple rotations be arranged on the left of guipure 3, be arranged on the second guiding roller 182 of the multiple rotations on the right side of guipure 3, described first guiding roller 181, the moving direction of the second guiding central axis of roller 182 and guipure 3 is orthogonal, sideline is guided in described multiple first guiding roller 181 formation first of arranging in a line, sideline is guided in described multiple second guiding roller 182 formation second of arranging in a line, described first guiding sideline, angle between second guiding sideline and the moving direction of guipure 3 is 30-60 degree, described first guiding sideline, second guiding sideline forms along the moving direction of guipure 3 boot section that a width diminishes gradually, the width of the place that described guiding area width is the narrowest and silicon chip matches.After silicon chip enters boot section, if the position of silicon chip offsets, the first guiding roller 181 or the second guiding roller 182 will be encountered, described first guiding roller 181 or the second guiding roller 182 freely rotate under the driving of drive unit 4, the place the narrowest due to guiding area width and the width of silicon chip match, therefore when silicon chip is by behind guiding area, the silicon chip departing from origin-location will be directed to original position by the first guiding roller 181 of rotation or the second guiding roller 182.
The below of described first guiding roller 181 is provided with the first base 183, the upper surface of described first base 183 is provided with multiple first chute 184 parallel to each other, the lower end of described first guiding roller 181 roll shaft is positioned at the first chute 184 and can slidably reciprocates along the first chute 184, the roll shaft of described first guiding roller 181 is provided with the locking device for being fixed on by the roll shaft of the first guiding roller 181 in first chute 184; The below of described second guiding roller 182 is provided with the second base 185, the upper surface of described second base 185 is provided with multiple second chute 186 parallel to each other, the lower end of described second guiding roller 182 roll shaft is positioned at the second chute 186 and can slidably reciprocates along the second chute 186, the roll shaft of described second guiding roller 182 is provided with the locking device for being fixed on by the roll shaft of the second guiding roller 182 in second chute 186.When needing adjustment first to guide the position of roller 181 and the second guiding roller 182, only locking device need be opened, then mobile first guiding roller 181 and the second guiding roller 182, when being moved to assigned address, then is fixed with locking device.Further, described locking device can adopt the realization such as latch, fastening bolt, and in order to convenient disassembly, described locking device is locking nut.
Claims (6)
1. a sintering furnace, comprise furnace shell (1), exhaust column (2), guipure (3) and the drive unit (4) driving guipure (3) to move, described exhaust column (2) is horizontally set on furnace shell (1) top, exhaust column (2) one end seals, the other end is connected with air exhauster (5), exhaust column (2) is provided with multiple exhausting son pipe (6), described exhausting son pipe (6) vertically arranges and the mouth of pipe of exhausting son pipe (6) is downward, polylith dividing plate (7) is provided with in described furnace shell (1), space in furnace shell (1) is divided into multiple sintering zone by described polylith dividing plate (7), described dividing plate (7) is provided with the through hole passed for guipure (3), burner hearth (8) is provided with in described sintering zone, upper space in described burner hearth (8) is provided with row top heating tube (9), lower space in burner hearth (8) is provided with row's bottom-heated pipe (10), be heating region between top heating tube (9) and bottom-heated pipe (10), described guipure (3) is successively horizontal through multiple heating region, described burner hearth (8) is provided with air inlet (11) and exhaust outlet (12), the upper connection organic discharge pipe (14) of described exhaust outlet (12), described organic discharge pipe (14) is managed (6) through furnace shell (1) with exhausting and is connected, it is characterized in that: described furnace shell (1) is outside equipped with a circulating fan (15), described air inlet (11) is connected with circulating fan (15) by supply air line (16), described supply air line (16) comprises the main air supply pipe (161) be connected with the gas outlet of circulating fan (15), described main air supply pipe (161) is connected with multiple sub-air supply pipe (162), the described quantity of sub-air supply pipe (162) and the quantity one_to_one corresponding of sintering zone, described sub-air supply pipe (162) is connected with air inlet (11) through furnace shell (1), the air inlet of described circulating fan (15) is connected with air-breathing supervisor (163), described air-breathing supervisor (163) is connected with multiple air-breathing son pipe (164), the described air-breathing pipe quantity of (164) and the quantity one_to_one corresponding of sintering zone, described air-breathing son pipe (164) stretches into the space burner hearth (8) and furnace shell (1) through furnace shell (1).
2. sintering furnace as claimed in claim 1, is characterized in that: the port of described air-breathing son pipe (164) is connected with trumpet-shaped cylindrical shell (17).
3. sintering furnace as claimed in claim 2, is characterized in that: the afterbody of described furnace shell (1) is provided with silicon chip erection device (18).
4. sintering furnace as claimed in claim 3, it is characterized in that: described silicon chip erection device (18) comprises the first guiding roller (181) of the multiple rotations being arranged on guipure (3) left side, be arranged on the second guiding roller (182) of multiple rotations on guipure (3) right side, described first guiding roller (181), central axis and the moving direction of guipure (3) of the second guiding roller (182) are orthogonal, sideline is guided in described multiple first guiding roller (181) formation first of arranging in a line, sideline is guided in described multiple second guiding roller (182) formation second of arranging in a line, described first guiding sideline, angle between second guiding sideline and the moving direction of guipure (3) is 30-60 degree, described first guiding sideline, second guiding sideline forms along the moving direction of guipure (3) boot section that a width diminishes gradually, the width of the place that described guiding area width is the narrowest and silicon chip matches.
5. sintering furnace as claimed in claim 4, it is characterized in that: the below of described first guiding roller (181) is provided with the first base (183), the upper surface of described first base (183) is provided with multiple first chute (184) parallel to each other, the lower end of described first guiding roller (181) roll shaft is positioned at the first chute (184) and can slidably reciprocates along the first chute (184), the roll shaft of described first guiding roller (181) is provided with the locking device for being fixed on by the roll shaft of the first guiding roller (181) in the first chute (184), the below of described second guiding roller (182) is provided with the second base (185), the upper surface of described second base (185) is provided with multiple second chute (186) parallel to each other, the lower end of described second guiding roller (182) roll shaft is positioned at the second chute (186) and can slidably reciprocates along the second chute (186), the roll shaft of described second guiding roller (182) is provided with the locking device for being fixed on by the roll shaft of the second guiding roller (182) in the second chute (186).
6. sintering furnace as claimed in claim 5, is characterized in that: described locking device is locking nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420712758.3U CN204255069U (en) | 2014-11-24 | 2014-11-24 | A kind of sintering furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420712758.3U CN204255069U (en) | 2014-11-24 | 2014-11-24 | A kind of sintering furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204255069U true CN204255069U (en) | 2015-04-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420712758.3U Expired - Fee Related CN204255069U (en) | 2014-11-24 | 2014-11-24 | A kind of sintering furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204255069U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109539782A (en) * | 2018-11-12 | 2019-03-29 | 上海申和热磁电子有限公司 | The method of top and the sintering of bottom two-way oxygen formula high temperature sintering furnace and its oxygenation |
-
2014
- 2014-11-24 CN CN201420712758.3U patent/CN204255069U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109539782A (en) * | 2018-11-12 | 2019-03-29 | 上海申和热磁电子有限公司 | The method of top and the sintering of bottom two-way oxygen formula high temperature sintering furnace and its oxygenation |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150408 Termination date: 20201124 |