CN204251704U - A kind of automatic feeding for continous vacuum evaporation - Google Patents
A kind of automatic feeding for continous vacuum evaporation Download PDFInfo
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- CN204251704U CN204251704U CN201420788004.6U CN201420788004U CN204251704U CN 204251704 U CN204251704 U CN 204251704U CN 201420788004 U CN201420788004 U CN 201420788004U CN 204251704 U CN204251704 U CN 204251704U
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Abstract
The utility model relates to a kind of automatic feeding for continous vacuum evaporation, belongs to vacuum plating and surface working field, can be applicable in the chamber of various vacuum evaporation equipment; A kind of automatic feeding for continous vacuum evaporation, described automatic feeding comprises vacuum chamber, also comprise the power unit being fixed on vacuum chamber outside and the automatic feeding assembly being fixed on vacuum chamber inside, described power unit is connected by magnetic current sealing axle with automatic feeding assembly; Wherein automatic feeding assembly comprises motion-work wheel, follow-up pulley, silk Kun, wire feed guider and deposition unit; The beneficial effects of the utility model: provide power by buncher, sustainablely carry out wire feed, realize continuous coating.Save a lot of time, man power and material.
Description
Technical field
The utility model relates to a kind of automatic feeding for continous vacuum evaporation, belongs to vacuum plating and surface working field, can be applicable in the chamber of various vacuum evaporation equipment.
Background technology
Vacuum plating is a very important technology in modern manufacturing industry and Surface Treatment Industry, especially in recent years along with the fast development of information technology and electronic product, vacuum plating is also further promoted in the application in the fields such as preparation and fabrication optics and electron device.Wherein, vacuum thermal evaporation plated film and evaporated device can deposit the film of various material and the cost of relative moderate quickly and easily because of it and be used widely.Vacuum evaporation technology by various ways such as resistive heating, induction heating, LASER HEATING, plasma heating or beam bombardments, starting material is distilled or evaporation becomes high-temperature steam, then cooling deposit to the various materials such as plastics, metal, pottery and glass matrix on formation there is the film of certain function.
When vacuum evaporation, ground state and cavity environment relatively easily keep stable, but the lasting consumption of evaporation raw material can cause some negative impacts to coating process and quality.For the thin film deposition of short-term, because evaporation raw material can not consume significantly, so do not need supplementary raw material, the vaporator rate of evaporation source and the work output of gas molecule are also very stable, and therefore the proterties of deposition process and film can keep stablizing, evenly.But when the long-term continuous coating of needs, under the situations such as such as extensive deposition, thick film deposition or multi-work piece successive sedimentation, evaporation raw material often needs once even repeatedly to supplement.If raw material supplements the process needing repeatedly to carry out opening chamber, supplement raw material and again vacuumizing, huge additional cost can be brought to vacuum evaporation, and affect the quality of plated film to a great extent.Preparing a large amount of high-quality thin film continuously, is expeditiously the important objective requirement that modern manufacturing industry proposes vacuum evaporation, therefore how to improve the efficiency of supplementing evaporation raw material and reduces raw material to supplement the impact of process on continous vacuum vapor-deposited film quality be vacuum evaporation industry problem demanding prompt solution.
For this focal issue, from the second half in last century, many insiders and researchist just start to provide many different solutions, but also continue to bring out new problem.Research group from moral La Vier university of the U.S. once proposed the design of two chambers and multi-chamber respectively in US Patent No. 4401052A and US4325986A, a chamber is in vacuum working environment by the opening and closing of valve, equipment have been remained, and other chambers can carry out filler work at ambient pressure.This design can save the cost vacuumized, and multi-vaporizing-source also can be provided to meet the preparation of complex component film simultaneously.It is not unique, but has its counterpart, and Chinese patent CN201020188782 and CN201310092816 also proposes the design of major-minor chamber and multi-chamber respectively, main chamber evaporation, the feeding of secondary chamber.And multiple crucible is placed in chamber by Chinese patent CN201320858786 more compactly, achieves raw material by adjustment heat source position and supplement.Some equipment are also had directly to employ super large crucible and excessive raw material to ensure the supply of raw material.Comprehensively these results above-mentioned are not difficult to find out, multi-chamber, many crucibles and super large crucible can reduce and reload cost and improve evaporation efficiency.But the common drawback of these schemes is when reloading, and vaporator rate can change, affect continuous, the homoepitaxial of film.Such as many crucibles or multi-chamber are when changing raw material, and virgin material can produce larger vaporator rate than the old material being about to exhaust; And when once putting into excess raw material, because raw material constantly consumed and reduced volume one period of long period, its vaporator rate can decline linearly over time.
Also has some to design cleverly not only to have solved in specific field and scope the efficiency but also ensure continuous, the uniform deposition of film of reloading.Such as Chinese patent CN201320689762 keeps the continuous supply of evaporation source by storing steam, and the circulating liquid evaporation source of CN200810123705 also can provide continuous print evaporation source, but obviously both is only applicable to the evaporation of the relatively low liquid state organics of boiling point.Similar, Chinese patent CN201310045492 proposes the mode of transporting granular material with pipeline, neither affect the vacuum environment of chamber, short grained material shapes also can provide stable vaporator rate, but it is only applicable to the raw material easily obtaining a large amount of particle, the raw material of some hard will be processed into a large amount of particle inherently needs great number cost.
Utility model content
The purpose of this utility model improves the efficiency of supply of evaporation raw material of vacuum evaporation equipment, improve while reducing costs its continuously, the ability of uniform coated, be a kind of automatic feeding for continous vacuum evaporation.
A kind of automatic feeding for continous vacuum evaporation, described automatic feeding comprises vacuum chamber, also comprise the power unit being fixed on vacuum chamber outside and the automatic feeding assembly being fixed on vacuum chamber inside, described power unit is connected by magnetic current sealing axle with automatic feeding assembly;
Wherein automatic feeding assembly comprises motion-work wheel, follow-up pulley, silk Kun, wire feed guider and deposition unit;
Preferentially, one end of described magnetic current sealing axle is placed in vacuum chamber, and connects automatic feeding assembly, and the described magnetic current sealing axle the other end is placed in vacuum chamber outside, and connects power unit;
Preferentially, one end of described magnetic current sealing axle is fixedly connected with motion-work wheel, described follow-up pulley is fixed on vacuum chamber inwall, and engage each other with motion-work wheel, engagement center is provided with a draw-in groove, and described silk Kun has the initiative above wheel, and described wire feed guider is fixed on vacuum chamber inwall, and the corresponding draw-in groove of wire feed guider one end position, the corresponding deposition unit in the other end position;
Preferentially, the central shaft of described motion-work wheel, follow-up pulley and silk Kun point-blank;
Preferentially, automatic feeding assembly also comprises follow-up pulley hold-down mechanism, and follow-up pulley hold-down mechanism is fixed on vacuum chamber interior bottom portion, and follow-up pulley is fixed on follow-up pulley hold-down mechanism;
Preferentially, described follow-up pulley hold-down mechanism comprises pressure strip and set screw, and described pressure strip is fixed on vacuum chamber interior bottom portion by set screw;
Preferentially, described draw-in groove internal diameter regulation range is at 0.5mm ~ 5mm;
Preferentially, described deposition unit is evaporation crucible;
Preferentially, described power unit comprises buncher.
The beneficial effects of the utility model: provide power by buncher, sustainablely carry out wire feed, realize continuous coating.Save a lot of time, man power and material.
Accompanying drawing explanation
Fig. 1 is the front view of a kind of automatic feeding for continous vacuum evaporation of the utility model;
Fig. 2 is the left view of a kind of automatic feeding for continous vacuum evaporation of the utility model.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is explained in further detail.Should be appreciated that specific embodiment described herein only for explaining the utility model, and be not used in restriction the utility model.
On the contrary, the utility model is contained any by the substituting of making on marrow of the present utility model and scope of defining of claim, amendment, equivalent method and scheme.Further, in order to make the public have a better understanding to the utility model, in hereafter details of the present utility model being described, detailedly describe some specific detail sections.Do not have the description of these detail sections can understand the utility model completely for a person skilled in the art yet.
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.As shown in Figure 1 and Figure 2, the utility model is a kind of automatic feeding for continous vacuum evaporation, and described automatic feeding comprises vacuum chamber 10, automatic feeding assembly, power unit and magnetic current sealing axle 7.Automatic feeding assembly comprises motion-work wheel 2, follow-up pulley 3, follow-up pulley hold-down mechanism 4, silk Kun 5, silk Kun stationary shaft 6, wire feed guider 8 and evaporator crucible 9; Described power unit comprises buncher 1.
Above-mentioned magnetic current sealing axle 7 is as the tightness system of vacuum chamber 10, ensure that vacuum chamber 10 inside is operationally in vacuum state, simultaneously as the equipment connecting automatic feeding assembly and power unit, magnetic current sealing axle 7 one end is placed in vacuum chamber 10, be connected with the motion-work wheel 2 in automatic feeding assembly, the other end is placed in outside vacuum chamber 10, be connected with power unit buncher 1, above-mentioned magnetic current sealing axle 7, the central shaft of motion-work wheel 2 and buncher 1 point-blank, run through vacuum chamber 10 inner and outside, above-mentioned buncher 1 is positioned at the propulsion source of vacuum chamber 10 outside as automatic feeding, the electric driving force that above-mentioned buncher 1 provides is passed to the motion-work wheel 2 being positioned at vacuum chamber 10 inside by above-mentioned magnetic current sealing axle 7.
Obtain above-mentioned motion-work wheel 2 rotary work of electric driving force, the follow-up pulley 3 being positioned at vacuum chamber 10 inside is fixed on above-mentioned follow-up pulley hold-down mechanism 4, above-mentioned follow-up pulley hold-down mechanism 4 is by set screw, pressure strip forms, pressure strip is provided with set screw draw-in groove, by set screw, pressure strip is fixed on the bottom of vacuum chamber 10 inside, pressure strip can be elevated by turning adjusting screw, follow-up pulley 3 is fixed on pressure strip top, lifting along with pressure strip is elevated by follow-up pulley 3, above-mentioned follow-up pulley 3 engages with above-mentioned motion-work wheel 2, there is draw-in groove motion-work wheel 2 and center, follow-up pulley 3 position of engagement, by regulating set screw lifting pressure strip thus regulating engaging of follow-up pulley 3 and motion-work wheel 2, the internal diameter size of draw-in groove can be changed, the scope of draw-in groove internal diameter size adjustment is between 0.5mm and 5mm, draw-in groove is as the filament mouth of evaporator wire material, by the diameter regulating the internal diameter of draw-in groove to obtain the evaporator wire material needed.
The evaporator wire material that evaporate process becomes to need is wrapped on above-mentioned silk Kun 5, evaporator wire material twining amount needs according to actual evaporation and determines, because evaporator wire material is wrapped on above-mentioned silk Kun 5, shared volume is few, a large amount of evaporator wire materials can be stored by above-mentioned silk Kun 5, the silk Kun 5 twined is fixed on above-mentioned silk Kun stationary shaft 6, silk Kun stationary shaft 6 is arranged on the side of vacuum chamber 10 inside, orthogonal with above-mentioned wire feed guider 8 fixed face, but be not limited to above-mentioned position, the central shaft of above-mentioned motion-work wheel 2, follow-up pulley 3 and silk Kun 5 point-blank.
Above-mentioned follow-up pulley 3 does not have propulsion source with upper silk Kun 5, the motion-work wheel 2 obtaining propulsion source engages with follow-up pulley 3, drive follow-up pulley 3 rotates by motion-work wheel 2, evaporator wire material is positioned at the draw-in groove at motion-work wheel 2 and center, follow-up pulley 3 position of engagement, pass through frictional force, evaporator wire material by certain speed from draw-in groove wire vent, the wire vent of evaporator wire material will drive the rotation of above-mentioned silk Kun 5, make a Kun 5 transmit evaporator wire material continually, be transferred to above-mentioned evaporator crucible 9 from draw-in groove evaporator wire material out by above-mentioned wire feed guider 8 and carry out evaporation.Above-mentioned evaporator crucible 9 is arranged on the inner bottom side of vacuum chamber 10, with above-mentioned follow-up pulley hold-down mechanism 4 in side.The wire feed rate of evaporator wire material is determined by the speed of rotation of motion-work wheel 2, the speed of rotation of above-mentioned motion-work wheel 2 is determined by the power of above-mentioned buncher 1, by arranging the speed of rotation of the power determination motion-work wheel 2 of buncher 1, thus determine the wire feed rate of evaporator wire material, the scope of wire feed rate is between 1mm/min and 200mm/min.
Claims (9)
1. the automatic feeding for continous vacuum evaporation, described automatic feeding comprises vacuum chamber, it is characterized in that: also comprise the power unit being fixed on vacuum chamber outside and the automatic feeding assembly being fixed on vacuum chamber inside, described power unit is connected by magnetic current sealing axle with automatic feeding assembly;
Wherein automatic feeding assembly comprises motion-work wheel, follow-up pulley, silk Kun, wire feed guider and deposition unit.
2. automatic feeding according to claim 1, it is characterized in that, one end of described magnetic current sealing axle is placed in vacuum chamber, and connects automatic feeding assembly, and the described magnetic current sealing axle the other end is placed in vacuum chamber outside, and connects power unit.
3. automatic feeding according to claim 2, it is characterized in that, described motion-work wheel is fixedly connected on one end of magnetic current sealing axle, described follow-up pulley is fixed on vacuum chamber inwall, and engages each other with motion-work wheel, and center, engagement place is provided with a draw-in groove, described silk Kun has the initiative above wheel, described wire feed guider is fixed on vacuum chamber inwall, and the corresponding draw-in groove of described wire feed guider one end position, the corresponding deposition unit in the other end position.
4. automatic feeding according to claim 3, it is characterized in that, described motion-work wheel, follow-up pulley and silk Kun are on same straight line.
5. automatic feeding according to claim 3, it is characterized in that, automatic feeding assembly also comprises follow-up pulley hold-down mechanism, and described follow-up pulley hold-down mechanism is fixed on bottom vacuum chamber inwall, and described follow-up pulley is fixed on follow-up pulley hold-down mechanism.
6. automatic feeding according to claim 5, is characterized in that, described follow-up pulley hold-down mechanism comprises pressure strip and set screw, and described pressure strip is fixed on vacuum chamber interior bottom portion by set screw.
7. automatic feeding according to claim 3, it is characterized in that, described draw-in groove internal diameter regulation range is at 0.5mm ~ 5mm.
8. automatic feeding according to claim 1, is characterized in that, described deposition unit is evaporation crucible.
9. automatic feeding according to claim 1, is characterized in that, described power unit comprises buncher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420788004.6U CN204251704U (en) | 2014-12-11 | 2014-12-11 | A kind of automatic feeding for continous vacuum evaporation |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420788004.6U CN204251704U (en) | 2014-12-11 | 2014-12-11 | A kind of automatic feeding for continous vacuum evaporation |
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| CN204251704U true CN204251704U (en) | 2015-04-08 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104388909A (en) * | 2014-12-11 | 2015-03-04 | 北京泰科诺科技有限公司 | Automatic feeding device for continuous vacuum evaporation |
| CN107640909A (en) * | 2017-08-25 | 2018-01-30 | 北方夜视技术股份有限公司 | For preparing Steaming structure, the method for uniform film inside thin mouth, large scale glass bulb |
| CN111270204A (en) * | 2020-03-25 | 2020-06-12 | 江苏集萃有机光电技术研究所有限公司 | Evaporation device and evaporation method |
-
2014
- 2014-12-11 CN CN201420788004.6U patent/CN204251704U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104388909A (en) * | 2014-12-11 | 2015-03-04 | 北京泰科诺科技有限公司 | Automatic feeding device for continuous vacuum evaporation |
| CN104388909B (en) * | 2014-12-11 | 2017-07-04 | 北京泰科诺科技有限公司 | A kind of automatic feeding for continuous vacuum evaporation |
| CN107640909A (en) * | 2017-08-25 | 2018-01-30 | 北方夜视技术股份有限公司 | For preparing Steaming structure, the method for uniform film inside thin mouth, large scale glass bulb |
| CN111270204A (en) * | 2020-03-25 | 2020-06-12 | 江苏集萃有机光电技术研究所有限公司 | Evaporation device and evaporation method |
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