CN204241670U - Based on the high sensitivity magnetic field sensor of amorphous alloy material - Google Patents

Based on the high sensitivity magnetic field sensor of amorphous alloy material Download PDF

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CN204241670U
CN204241670U CN201420806065.0U CN201420806065U CN204241670U CN 204241670 U CN204241670 U CN 204241670U CN 201420806065 U CN201420806065 U CN 201420806065U CN 204241670 U CN204241670 U CN 204241670U
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magnetic core
magnetic field
receiving coil
magnetic
high sensitivity
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王国安
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Hebson Technology (shenzhen) Co Ltd
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Abstract

The utility model discloses a kind of high sensitivity magnetic field sensor based on amorphous alloy material, place or the parallel up and down and magnetic core (2) joining end to end, mutually connect of processing even number bar insulated substrate (1) is upper, the left and right two ends of every bar magnetic core (2) connect one section of nonmagnetic conductive metal (3) respectively; The nonmagnetic metal receiving coil (4) of one or one group structural symmetry is wound around in magnetic core (2) outside of series connection.The upper input terminal (a) of magnetic core, lower input terminal (b) are close to each other and be positioned at the side of sensor, and the upper lead-out terminal (c) of metal receiving coil signal and lower lead-out terminal (d) close to each other and be positioned at the opposite side of sensor.The utility model high sensitivity magnetic field sensor reduces distorted signals, improves the signal to noise ratio (S/N ratio) of sensor output signal, and conveniently can control magnetic field detection scope and the magnetic field sensitivity of sensor.

Description

Based on the high sensitivity magnetic field sensor of amorphous alloy material
Technical field
The utility model belongs to field of magnetic field sensors, particularly relates to a kind of high sensitivity magnetic field sensor based on amorphous alloy material.
Background technology
Prior art generally uses wall scroll (or many parallel connections) high permeability amorphous wire, noncrystal membrane or amorphous ribbon as magnetic core, is around with the structure of a receiving coil or receiving coil+feedback compensation coil.By flowing through a high frequency alternating current or high-frequency pulse current as excitation on magnetic core, and the voltage signal detected on now receiving coil is to sense the externally-applied magnetic field on core length direction, the voltage signal size on receiving coil is corresponding with the size of externally-applied magnetic field.
Prior art has the following disadvantages:
1. when flowing through an exciting current on magnetic core, this electric current can produce the magnetic field around direction of current flow around magnetic core, because receiving coil can not be accomplished completely parallel with the magnetic induction line in this magnetic field, the angle that existence one is very little between the two, in the moment that exciting current is switched on or switched off, the changes of magnetic field produced by exciting current can produce inductive coupled on receiving coil, thus forms an induced voltage on receiving coil.This induced voltage can be added in final output signal, causes output signal distortion, and reduces the signal to noise ratio (S/N ratio) of output signal.
2. under the structure adopted in prior art, owing to there is stray capacitance between receiving coil and magnetic core, when magnetic core flows through an exciting current, capacitive coupling can be produced between magnetic core and receiving coil, thus a coupled voltages is formed on receiving coil, this voltage can be added in final output signal, and it is saturated that the signal to noise ratio (S/N ratio) reducing output signal even causes amplifier to export.
3. due to many domain structures characteristic of amorphous wire, noncrystal membrane or amorphous ribbon magnetic core self, the magnetic field sensor utilizing prior art to develop all has hysteresis effect, and after namely magnetic core is magnetized by external magnetic field, the phenomenon offset can occur in sensor output.
Summary of the invention
Goal of the invention: solve above-mentioned the deficiencies in the prior art, a kind of high sensitivity magnetic field sensor based on amorphous alloy material is proposed, to reduce distorted signals, to improve the signal to noise ratio (S/N ratio) of sensor output signal, and reach the control magnetic field detection scope of sensor and the object of magnetic field sensitivity.
Technical scheme: a kind of high sensitivity magnetic field sensor based on amorphous alloy material, comprise the nonmagnetic metal receiving coil 4 of magnetic core 2 that insulated substrate 1, high permeability amorphous wire, noncrystal membrane or amorphous ribbon make, nonmagnetic conductive metal 3, structural symmetry, it is characterized in that:
Insulated substrate 1 is placed or the parallel up and down and magnetic core 2 joining end to end, mutually connect of processing even number bar, the left and right two ends of every bar magnetic core 2 connect one section of nonmagnetic conductive metal 3 respectively; The nonmagnetic metal receiving coil 4 of one or one group structural symmetry is wound with in magnetic core 2 outside of series connection; The upper input terminal a of magnetic core, lower input terminal b be communicated with respectively sensor topmost, foot two magnetic cores 2 certain one end nonmagnetic conductive metal 3 and be positioned at the side of sensor, and the upper lead-out terminal c of metal receiving coil and lower lead-out terminal d is close to each other and be positioned at the opposite side of sensor, as shown in Fig. 7 or Fig. 8;
Described magnetic core 2 has minor axis anisotropy domain structure as shown in Figure 1 and Figure 2, the material of magnetic core can be cobalt (CoFeSiB, CoFeNiSiB or CoZrB) base non-crystalline material, or nickel (Ni) base non-crystalline material, or iron (Fe) base non-crystalline material; The thickness range of noncrystal membrane, amorphous ribbon is 0.01um ~ 100um, and the diameter range of amorphous wire is 2um ~ 100um, and the length range of magnetic core is 0.05mm ~ 20mm; Preferably, to be diameter the be CoFeSiB amorphous wire of 10um adopted in the present invention is as magnetic core, and its length is 0.8mm;
The coil form of described metal receiving coil 4 can be micro electronmechanical (MEMS) type coil, common coiled wire-wound coil, metallic film type coil etc.;
Preferably, be some sections of isometric segments by each magnetic core 2 cutting, between every bar segment, use nonmagnetic conductive metal 3 to be communicated with (as shown in Figure 9);
When the length direction of magnetic core 2 exists an externally-applied magnetic field, direction of magnetization in domain structure will deflect, as Fig. 3, shown in Fig. 4, now, magnetic core 2 flows through an exciting current, in magnetic core 2, the direction of magnetization of magnetic domain will be arranged along short-axis direction again, as Fig. 5, shown in Fig. 6, this kind of arrangement changes the magnetic permeability mu of magnetic core 2, and on the long axis direction of magnetic core 2, form the changes delta φ of a magnetic flux, the receiving coil 4 that the change of this magnetic flux is wrapped in magnetic core 2 outside senses and is converted into a voltage output signal, the amplitude size of this voltage output signal at the crest place (or trough place) of stationary phase is corresponding with the size of externally-applied magnetic field on magnetic core 2 length direction, its polarity is corresponding with the direction of externally-applied magnetic field,
When the present invention applies an exciting current between the upper input terminal a and lower input terminal b of magnetic core, because every bar magnetic core 2 joins end to end, mutually connects, so the exciting current direction of adjacent upper and lower two magnetic cores 2 is contrary, flow through by exciting current the magnetic field that every bar magnetic core 2 produces will cancel out each other, can not be formed inductive coupled on metal receiving coil 4, thus adding the signal to noise ratio (S/N ratio) of output signal, " 1 " point solving above-mentioned prior art is not enough;
The present invention adopts the metal receiving coil of symmetrical canoe and the structure of even number bar series connection magnetic core, make the upper input terminal a of magnetic core and lower input terminal b can be close to each other and be positioned at the side of sensor, and the upper lead-out terminal c of metal receiving coil and lower lead-out terminal d can be close to each other and be positioned at the opposite side of sensor, two pairs of terminals of magnetic core and receiving coil can as far as possible away from.The electric potential difference that this structure makes exciting current be formed on magnetic core drops to minimum by the impact of being coupled on metal receiving coil 4 of capacitive coupling effect, and " 2 " point solving above-mentioned prior art is not enough;
Preferably, each magnetic core 2 cutting is some sections of isometric segments by the present invention, nonmagnetic conductive metal 3 is used to be communicated with between every bar segment, by adjusting the size of its demagnetizing factor in the longitudinal direction of cut to lengthen of every section of magnetic core, thus reach and control the magnetic field detection scope of sensor and the object of magnetic field sensitivity; Along with the shortening of every section of core length, the demagnetizing factor on core length direction increases thereupon, and magnetic field detection sensing range broadens, magnetic field sensitivity diminishes; Otherwise magnetic field detection scope narrows, magnetic field sensitivity becomes large (as shown in Figure 9);
Along when core length direction applying the external magnetic field of a constant size, the output signal amplitude of receiving coil increases with the number of magnetic core and increases, and adopts the common coiled wire-wound coil of 100 circles and the structure (as Fig. 8) of four magnetic cores in the present invention.
The beneficial effects of the utility model: the every bar magnetic core of the utility model joins end to end, mutually connects, the exciting current direction of adjacent upper and lower two magnetic cores is contrary, flow through by exciting current the magnetic field that every bar magnetic core produces will cancel out each other, thus can not be formed inductive coupled on metal receiving coil, add the signal to noise ratio (S/N ratio) of output signal; The metal receiving coil of symmetrical canoe and the structure of even number bar series connection magnetic core, make two of magnetic core input terminals close to each other and be positioned at the side of sensor, and two of receiving coil lead-out terminals are close to each other and be positioned at the opposite side of sensor, two pairs of terminals of magnetic core and receiving coil can as far as possible away from, the electric potential difference that exciting current is formed on magnetic core drops to minimum by the impact of being coupled on metal receiving coil of capacitive coupling effect.
Accompanying drawing explanation
Fig. 1 is high permeability amorphous wire magnetic core schematic diagram;
Fig. 2 is high permeability noncrystal membrane or amorphous ribbon magnetic core schematic diagram;
Fig. 3 is that direction of magnetization when there is an externally-applied magnetic field on high permeability amorphous wire core length direction in domain structure deflects schematic diagram;
Fig. 4 is that direction of magnetization when there is an externally-applied magnetic field on high permeability noncrystal membrane or amorphous ribbon core length direction in domain structure deflects schematic diagram;
Fig. 5 is that direction of magnetization when there is an externally-applied magnetic field and flow through a reverse exciting current on high permeability amorphous wire core length direction on magnetic core in domain structure occurs to reset schematic diagram;
Fig. 6 is that direction of magnetization when there is an externally-applied magnetic field and flow through a reverse exciting current on high permeability noncrystal membrane or amorphous ribbon core length direction on magnetic core in domain structure occurs to reset schematic diagram;
Fig. 7 is magnetic field sensor of the present invention structural representation when adopting micro electronmechanical type (MEMS) coil;
Fig. 8 is magnetic field sensor of the present invention structural representation when adopting common coiled wire-wound coil;
Fig. 9 is structural representation when each magnetic core cutting is some sections of isometric segments in magnetic field sensor of the present invention.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly, below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Embodiment:
A kind of high sensitivity magnetic field sensor based on amorphous alloy material, comprise the nonmagnetic metal receiving coil 4 of magnetic core 2 that insulated substrate 1, high permeability amorphous wire, noncrystal membrane or amorphous ribbon make, nonmagnetic conductive metal 3, structural symmetry, insulated substrate 1 is placed or the parallel up and down and magnetic core 2 joining end to end, mutually connect of processing even number bar, the left and right two ends of every bar magnetic core 2 connect one section of nonmagnetic conductive metal 3 respectively; The nonmagnetic metal receiving coil 4 of one or one group structural symmetry is wound with in magnetic core 2 outside of series connection; The upper input terminal a of magnetic core, lower input terminal b be communicated with respectively sensor topmost, foot two magnetic cores 2 certain one end nonmagnetic conductive metal 3 and be positioned at the side of sensor, and the upper lead-out terminal c of metal receiving coil and lower lead-out terminal d is close to each other and be positioned at the opposite side of sensor, as shown in Fig. 7 or Fig. 8;
Described magnetic core 2 has minor axis anisotropy domain structure as shown in Figure 1 and Figure 2, the material of magnetic core can be cobalt (CoFeSiB, CoFeNiSiB or CoZrB) base non-crystalline material, or nickel (Ni) base non-crystalline material, or iron (Fe) base non-crystalline material; The thickness range of noncrystal membrane, amorphous ribbon is 0.01um ~ 100um, and the diameter range of amorphous wire is 2um ~ 100um, and the length range of magnetic core is 0.05mm ~ 20mm;
To be diameter the be CoFeSiB amorphous wire of 10um adopted in the present embodiment is as magnetic core, and its length is 0.8mm;
The coil form of described metal receiving coil 4 can be micro electronmechanical (MEMS) type coil, common coiled wire-wound coil, metallic film type coil etc.;
In the present embodiment, be some sections of isometric segments by each magnetic core 2 cutting, between every bar segment, use nonmagnetic conductive metal 3 to be communicated with (as shown in Figure 9);
When the length direction of magnetic core 2 exists an externally-applied magnetic field, direction of magnetization in domain structure will deflect, as Fig. 3, shown in Fig. 4, now, magnetic core 2 flows through an exciting current, in magnetic core 2, the direction of magnetization of magnetic domain will be arranged along short-axis direction again, as Fig. 5, shown in Fig. 6, this kind of arrangement changes the magnetic permeability mu of magnetic core 2, and on the long axis direction of magnetic core 2, form the changes delta φ of a magnetic flux, the receiving coil 4 that the change of this magnetic flux is wrapped in magnetic core 2 outside senses and is converted into a voltage output signal, the amplitude size of this voltage output signal at the crest place (or trough place) of stationary phase is corresponding with the size of externally-applied magnetic field on magnetic core 2 length direction, its polarity is corresponding with the direction of externally-applied magnetic field, when applying an exciting current between the upper input terminal a and lower input terminal b of magnetic core, because every bar magnetic core 2 joins end to end, mutually connects, so the exciting current direction of adjacent upper and lower two magnetic cores 2 is contrary, flow through by exciting current the magnetic field that every bar magnetic core 2 produces will cancel out each other, the induced voltage affecting final output signal can not be formed on metal receiving coil 4, thus adding the signal to noise ratio (S/N ratio) of output signal, " 1 " point solving above-mentioned prior art is not enough,
Adopt the metal receiving coil of symmetrical canoe and the structure of even number bar series connection magnetic core, make the upper input terminal a of magnetic core and lower input terminal b can be close to each other and be positioned at the side of sensor, and the upper lead-out terminal c of metal receiving coil and lower lead-out terminal d can be close to each other and be positioned at the opposite side of sensor, two pairs of terminals of magnetic core and receiving coil can as far as possible away from.The electric potential difference that this structure makes exciting current be formed on magnetic core drops to minimum by the impact of being coupled on metal receiving coil 4 of capacitive coupling effect, and " 2 " point solving above-mentioned prior art is not enough; Each magnetic core 2 cutting is some sections of isometric segments by the present embodiment, nonmagnetic conductive metal 3 is used to be communicated with between every bar segment, by adjusting the size of its demagnetizing factor in the longitudinal direction of cut to lengthen of every section of magnetic core, thus reach and control the magnetic field detection scope of sensor and the object of magnetic field sensitivity; Along with the shortening of every section of core length, the demagnetizing factor on core length direction increases thereupon, and magnetic field detection sensing range broadens, magnetic field sensitivity diminishes; Otherwise magnetic field detection scope narrows, magnetic field sensitivity becomes large (as shown in Figure 9); Along when core length direction applying the external magnetic field of a constant size, the output signal amplitude of receiving coil increases with the number of magnetic core and increases, and adopts the common coiled wire-wound coil of 100 circles and the structure (as Fig. 8) of four magnetic cores in the present invention.
The foregoing is only preferred embodiments of the present utility model, not in order to limit the present invention, any amendment done within the spirit and principle of invention, equivalent replacement, improvement etc., all should be included within system architecture of the present utility model.

Claims (5)

1. the high sensitivity magnetic field sensor based on amorphous alloy material, comprise the nonmagnetic metal receiving coil (4) of magnetic core (2) that insulated substrate (1), high permeability amorphous wire, noncrystal membrane or amorphous ribbon make, nonmagnetic conductive metal (3), structural symmetry, it is characterized in that:
Place or the parallel up and down and magnetic core (2) joining end to end, mutually connect of processing even number bar insulated substrate (1) is upper, the left and right two ends of every bar magnetic core (2) connect one section of nonmagnetic conductive metal (3) respectively; The nonmagnetic metal receiving coil (4) of one or one group structural symmetry is wound with in magnetic core (2) outside of series connection; The upper input terminal (a) of magnetic core, lower input terminal (b) be communicated with respectively sensor topmost, foot two magnetic cores (2) certain one end nonmagnetic conductive metal (3) and be positioned at the side of sensor, and the upper lead-out terminal (c) of metal receiving coil and lower lead-out terminal (d) close to each other and be positioned at the opposite side of sensor.
2. high sensitivity magnetic field sensor according to claim 1, is characterized in that:
Described magnetic core (2) has minor axis anisotropy domain structure, and the material of magnetic core is cobalt base amorphous material, Ni-based non-crystalline material or Fe-based amorphous material; The thickness range of noncrystal membrane, amorphous ribbon is 0.01um ~ 100um, and the diameter range of amorphous wire is 2um ~ 100um, and the length range of magnetic core is 0.05mm ~ 20mm.
3. high sensitivity magnetic field sensor according to claim 1, is characterized in that:
The coil form of described metal receiving coil (4) is micro electronmechanical type (MEMS) coil, common coiled wire-wound coil or metallic film type coil.
4. high sensitivity magnetic field sensor according to claim 1, is characterized in that: be some sections of isometric segments by each magnetic core (2) cutting, use nonmagnetic conductive metal (3) to be communicated with between every bar segment.
5. high sensitivity magnetic field sensor according to claim 1, is characterized in that: adopt the common coiled wire-wound coil of 100 circles and the structure of four magnetic cores.
CN201420806065.0U 2014-12-17 2014-12-17 Based on the high sensitivity magnetic field sensor of amorphous alloy material Active CN204241670U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105929196A (en) * 2016-05-11 2016-09-07 哈尔滨工业大学 Flexible hair sensor based on ferromagnetic microfilaments and applications thereof
CN108072851A (en) * 2016-11-16 2018-05-25 Tdk株式会社 Magnetic Sensor inductance element and the Magnetic Sensor for possessing it
CN109313242A (en) * 2016-06-09 2019-02-05 爱知制钢株式会社 Magneto-impedance sensors
TWI675207B (en) * 2018-07-31 2019-10-21 力誠儀器股份有限公司 Current sensing module for current sensor and method of manufacturing the same
CN110832336A (en) * 2017-06-16 2020-02-21 朝日英达科株式会社 Ultrasensitive micromagnetic sensor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105929196A (en) * 2016-05-11 2016-09-07 哈尔滨工业大学 Flexible hair sensor based on ferromagnetic microfilaments and applications thereof
CN105929196B (en) * 2016-05-11 2018-12-11 哈尔滨工业大学 Flexible fine hair sensor and its application based on ferromagnetic microfilament
CN109313242A (en) * 2016-06-09 2019-02-05 爱知制钢株式会社 Magneto-impedance sensors
CN109313242B (en) * 2016-06-09 2021-06-11 爱知制钢株式会社 Magnetic impedance sensor
US11035911B2 (en) 2016-06-09 2021-06-15 Aichi Steel Corporation Magneto-impedance sensor
CN108072851A (en) * 2016-11-16 2018-05-25 Tdk株式会社 Magnetic Sensor inductance element and the Magnetic Sensor for possessing it
CN110832336A (en) * 2017-06-16 2020-02-21 朝日英达科株式会社 Ultrasensitive micromagnetic sensor
CN110832336B (en) * 2017-06-16 2022-02-25 朝日英达科株式会社 Ultrasensitive micromagnetic sensor
TWI675207B (en) * 2018-07-31 2019-10-21 力誠儀器股份有限公司 Current sensing module for current sensor and method of manufacturing the same

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Effective date of registration: 20170113

Address after: 518100 Guangdong city of Shenzhen province Baoan District Xixiang Street Silver Road No. 4 wisdom Valley Science and Technology Park A building room 526

Patentee after: Hebson Technology (Shenzhen) Co., Ltd.

Address before: 110000 Heping Road, Heping District, Liaoning, Shenyang, Lane 11, No. three

Patentee before: Wang Guoan

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Address after: 518000 Floor 1, Building E, Huafeng International Robot Industrial Park, Nanchang Community Avenue, Xixiang Street, Baoan District, Shenzhen City, Guangdong Province

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Address before: 518100 Guangdong city of Shenzhen province Baoan District Xixiang Street Silver Road No. 4 wisdom Valley Science and Technology Park A building room 526

Patentee before: Hebson Technology (Shenzhen) Co., Ltd.