CN204224430U - A kind of novel welded tube device - Google Patents
A kind of novel welded tube device Download PDFInfo
- Publication number
- CN204224430U CN204224430U CN201420734899.5U CN201420734899U CN204224430U CN 204224430 U CN204224430 U CN 204224430U CN 201420734899 U CN201420734899 U CN 201420734899U CN 204224430 U CN204224430 U CN 204224430U
- Authority
- CN
- China
- Prior art keywords
- silica tube
- tube
- cutting ferrule
- quartzy
- electric heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Abstract
The utility model relates to a kind of novel welded tube device, comprise silica tube, the outer wall of described silica tube is provided with electric heating unit, described electric heating unit forms high temperature welded tube district in described silica tube, described silica tube is provided with quartzy pipe cap in inherent high temperature welded tube district, the edge of described quartzy pipe cap and the inwall of described silica tube are fitted, the mouth of pipe and the cutting ferrule junction of described silica tube are provided with the first O-ring seal, described cutting ferrule is communicated with vacuum machine, can avoid hydrogen, oxygen welding meets accident blast when connecing when device of the present utility model carries out gallium arsenide synthesis; Adopt Electric heating not need closely to operate, and silica tube can be made to be heated evenly, ensure operative employee's safety and silica tube resistance to air loss; Also adopt two seals cushion rubber, both ensured that the quartzy mouth of pipe was not damaged when vacuumizing, ensuring equipment resistance to air loss is good again; Greatly reduce energy consumption, save energy, reduce costs, reduce the incidence of security incident.
Description
Technical field
The utility model relates to a kind of novel welded tube device, belongs to semi-conductor synthesis technical field.
Background technology
The synthesis of semicon industry gallium arsenide need be carried out in the silica tube of sealing, the general one section of sealing of silica tube, and silica tube cap sleeve, so that place arsenic and gallium, need enter in silica tube during the sealing of opening portion, carry out high-temperature soldering in high-temperature soldering district by one section of opening.This technique many employings hydrogen, oxygen welding connect at present, manually carry out.The shortcoming of this technique is: 1, manual operation inconvenience, under the condition of high temperature, can damage employee's health; 2, hydrogen is explosive, and misoperation can be blasted; 3, silica tube is heated uneven, welding can occur not exclusively, the phenomenon of silica tube gas leakage.
Utility model content
The technical problems to be solved in the utility model is: for overcoming the problems referred to above, provides a kind of safety to carry out the novel welded tube device of Semiconductor GaAs synthesis.
The utility model solves the technical scheme that its technical problem adopts:
A kind of novel welded tube device, comprise silica tube, the outer wall of described silica tube is provided with electric heating unit, described electric heating unit forms high temperature welded tube district in described silica tube, described silica tube is provided with quartzy pipe cap in inherent high temperature welded tube district, the edge of described quartzy pipe cap and the inwall of described silica tube are fitted, and the mouth of pipe and the cutting ferrule junction of described silica tube are provided with the first O-ring seal, and described cutting ferrule is communicated with vacuum machine.
Preferably, be provided with between described quartzy pipe cap and described first O-ring seal and stagnantly move unit.
Preferably, the described stagnant unit that moves is quartz pushrod or quartzy cutting ferrule, and removable.
Preferably, described cutting ferrule is communicated with described vacuum machine by valve tube, and described cutting ferrule and described valve tube junction are provided with the second O-ring seal.
Preferably, electric heating unit is electrical heating wire, and described electrical heating wire is wrapped on the outer wall of described silica tube.
The beneficial effects of the utility model are: can avoid hydrogen when device of the present utility model carries out gallium arsenide synthesis, oxygen welding meets accident blast when connecing; Adopt Electric heating not need closely to operate, and silica tube can be made to be heated evenly, ensure operative employee's safety and silica tube resistance to air loss; Also avoid a large amount of hydrogen, carrier of oxygen is preserved, eliminate recessive potential safety hazard; Also adopt two seals cushion rubber, both ensured that the quartzy mouth of pipe was not damaged when vacuumizing, ensuring equipment resistance to air loss is good again; The stagnant unit that moves ensures that quartzy pipe cap does not depart from high temperature welded tube district, is conducive to welding operation; Greatly reduce energy consumption, save energy, reduce costs, reduce the incidence of security incident.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is the front view of the utility model embodiment.
Mark in figure: 1-silica tube, 2-quartz pipe cap, 3-electric heating unit, 4-first O-ring seal, 5-cutting ferrule, 6-second O-ring seal, 7-valve tube, 8-vacuum machine, 9-is stagnant moves unit.
Embodiment
By reference to the accompanying drawings the utility model is described in further detail now.These accompanying drawings are the schematic diagram of simplification, only basic structure of the present utility model are described in a schematic way, and therefore it only shows the formation relevant with the utility model.
The novel welded tube device of one described in the utility model as shown in Figure 1, comprise silica tube 1, the outer wall of described silica tube 1 is provided with electric heating unit 3, described electric heating unit 3 forms high temperature welded tube district in described silica tube 1, this device adopts electrically heated mode, safety and silica tube 1 are heated evenly, ensure in silica tube 1 and seal completely, prevent arsenic from leaking, quartzy pipe cap 2 is provided with in described silica tube 1 inherent high temperature welded tube district, the edge of described quartzy pipe cap 2 and the inwall of described silica tube 1 are fitted, the mouth of pipe and cutting ferrule 5 junction of described silica tube 1 are provided with the first O-ring seal 4, described cutting ferrule 5 is communicated with vacuum machine 8, this device improves hydrogen, oxygen mix heating process, avoid the generation of accidental explosion accident, may cause when avoiding human weld's heated quarty tube 1 be simultaneously heated uneven, cause welding the problem not exclusively occurring to leak.
In preferred embodiments, be provided with between described quartzy pipe cap 2 and described first O-ring seal 4 and stagnantly move unit 9 and removable, be convenient to place quartzy pipe cap 2, when ensureing to vacuumize, quartz pipe cap 2 does not depart from high temperature welded tube district simultaneously.
In preferred embodiments, the described stagnant unit 9 that moves for quartz pushrod or quartzy cutting ferrule 5, but is not limited to this, can also carry out other as required and select.
In preferred embodiments, described cutting ferrule 5 is communicated with described vacuum machine 8 by valve tube 7, and described cutting ferrule 5 is provided with the second O-ring seal 6 with described valve tube 7 junction.
In preferred embodiments, electric heating unit 3 is electrical heating wire, and described electrical heating wire is wrapped on the outer wall of described silica tube 1, but is not limited to electrical heating wire, can also be other heating units.
The operation steps of this device is as follows:
One, quartzy pipe cap 2 is positioned in silica tube 1, silica tube 1 is put into cutting ferrule 5, open vacuum machine 8 and gradually the air in silica tube 1 is extracted out;
When two, vacuumizing, quartzy pipe cap 2 moves with because of draught head, and the stagnant unit 9 that moves therefore in cutting ferrule 5 can stop the displacement of quartzy pipe cap 2 excessive, affects welding effect; Silica tube 1 opening and device cutting ferrule 5 inboard are equipped with O-ring seal, occur in vacuum without gas leakage;
Three, after silica tube 1 and quartzy pipe cap 2 fix, opening power, heated quarty tube 1, in silica tube 1, the edge of inside pipe wall and quartzy pipe cap 2 tightly touch, and when heating temperatures is to 1300 ~ 1350 DEG C, both is welded solid, be sealed state in silica tube 1, can gallium arsenide synthesis technique be carried out.
With above-mentioned according to desirable embodiment of the present utility model for enlightenment, by above-mentioned description, relevant staff in the scope not departing from this utility model technological thought, can carry out various change and amendment completely.The technical scope of this utility model is not limited to the content on specification sheets, must determine its technical scope according to right.
Claims (5)
1. a novel welded tube device, it is characterized in that, comprise silica tube, the outer wall of described silica tube is provided with electric heating unit, described electric heating unit forms high temperature welded tube district in described silica tube, and described silica tube is provided with quartzy pipe cap in inherent high temperature welded tube district, and the edge of described quartzy pipe cap and the inwall of described silica tube are fitted, the mouth of pipe and the cutting ferrule junction of described silica tube are provided with the first O-ring seal, and described cutting ferrule is communicated with vacuum machine.
2. novel welded tube device as claimed in claim 1, is characterized in that, is provided with stagnantly to move unit between described quartzy pipe cap and described first O-ring seal.
3. novel welded tube device as claimed in claim 2, is characterized in that, the described stagnant unit that moves is quartz pushrod or quartzy cutting ferrule.
4. novel welded tube device as claimed in claim 1, it is characterized in that, described cutting ferrule is communicated with described vacuum machine by valve tube, and described cutting ferrule and described valve tube junction are provided with the second O-ring seal.
5. novel welded tube device as claimed in claim 1, is characterized in that, electric heating unit is electrical heating wire, and described electrical heating wire is wrapped on the outer wall of described silica tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420734899.5U CN204224430U (en) | 2014-11-28 | 2014-11-28 | A kind of novel welded tube device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420734899.5U CN204224430U (en) | 2014-11-28 | 2014-11-28 | A kind of novel welded tube device |
Publications (1)
Publication Number | Publication Date |
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CN204224430U true CN204224430U (en) | 2015-03-25 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201420734899.5U Expired - Fee Related CN204224430U (en) | 2014-11-28 | 2014-11-28 | A kind of novel welded tube device |
Country Status (1)
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CN (1) | CN204224430U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108395080A (en) * | 2018-03-16 | 2018-08-14 | 河北明亮玻璃制品有限公司 | A kind of manufacturing method of high temperature-resistant vessel |
-
2014
- 2014-11-28 CN CN201420734899.5U patent/CN204224430U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108395080A (en) * | 2018-03-16 | 2018-08-14 | 河北明亮玻璃制品有限公司 | A kind of manufacturing method of high temperature-resistant vessel |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151123 Address after: 344000 Jiangxi city of Fuzhou province high tech Zone gold Ni Road No. 198 incubator Park A7 building 3 floor Patentee after: JIANGXI DEYI SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Address before: 100000 Beijing city Haidian District Shangyuan village of 3 homes and 2003 Graduate School of Mechatronics Patentee before: Yi Defu |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150325 Termination date: 20211128 |