CN204204652U - A kind of high-performance MEMS super capacitor - Google Patents

A kind of high-performance MEMS super capacitor Download PDF

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Publication number
CN204204652U
CN204204652U CN201420732406.4U CN201420732406U CN204204652U CN 204204652 U CN204204652 U CN 204204652U CN 201420732406 U CN201420732406 U CN 201420732406U CN 204204652 U CN204204652 U CN 204204652U
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CN
China
Prior art keywords
layer
conductive layer
super capacitor
insulated enclosure
central area
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Expired - Fee Related
Application number
CN201420732406.4U
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Chinese (zh)
Inventor
朱平
魏丽玲
孙汶
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North University of China
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North University of China
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/13Energy storage using capacitors

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  • Electric Double-Layer Capacitors Or The Like (AREA)

Abstract

The utility model discloses a kind of high-performance MEMS super capacitor, comprise substrate layer, conductive layer, insulated enclosure layer and external seal lid, described conductive layer is positioned on substrate layer, conductive layer is made up of some carbon nanotube arrangement, reservoir channel is provided with in conductive layer, conductive layer is divided into central area and is positioned at the contact area of both sides, central area, the contact area of both sides is placed with positive plate and negative plate respectively, positive plate and negative plate are connected to positive pole ear and negative lug, described insulated enclosure layer is positioned at the top of conductive layer, external seal lid is installed on the outside of insulated enclosure layer.The utility model has that stored energy is large, volume microminiaturization, have extended cycle life, can the repeatedly advantage such as cycle charge-discharge, and have good sealing property, electrolyte not easily overflows, and has longer useful life.

Description

A kind of high-performance MEMS super capacitor
[technical field]
The utility model relates to the technical field of super capacitor, particularly a kind of technical field of high-performance MEMS super capacitor.
[background technology]
Ultracapacitor, have another name called electrochemical capacitor (Electrochemical Capacitors), comprising double electric layer capacitor, gold electric capacity, farad capacitor, is a kind of electrochemical element being carried out energy storage by polarized electrolytic matter grown up from the 1970s and 1980s in last century.It is different from traditional chemical power source, be a kind of between traditional capacitor and battery, there is the power supply of property, mainly rely on electric double layer and Redox pseudocapacitance charge storage electric energy.But chemical reaction does not occur in the process of its energy storage, this thermal energy storage process is reversible, also just because of this ultracapacitor can repeated charge hundreds thousand of time.Its general principle is the same with the double electric layer capacitor of other kind, is all the capacity utilizing the double electrical layers of active carbon porous electrode and electrolyte composition to obtain super large.But existing common super capacitor cannot realize the microminiaturization of device, intellectuality and integrated, and the energy storage density of device is lower, complex structure, and volume is larger.
[utility model content]
The purpose of this utility model solves the problems of the prior art exactly, a kind of high-performance MEMS super capacitor is proposed, have that stored energy is large, volume microminiaturization, have extended cycle life, can the repeatedly advantage such as cycle charge-discharge, and there is good sealing property, electrolyte not easily overflows, and has longer useful life.
For achieving the above object, the utility model proposes a kind of high-performance MEMS super capacitor, comprise substrate layer, conductive layer, insulated enclosure layer and external seal lid, described conductive layer is positioned on substrate layer, conductive layer is made up of some carbon nanotube arrangement, reservoir channel is provided with in conductive layer, conductive layer is divided into central area and is positioned at the contact area of both sides, central area, the contact area of both sides is placed with positive plate and negative plate respectively, positive plate and negative plate are connected to positive pole ear and negative lug, described insulated enclosure layer is positioned at the top of conductive layer, external seal lid is installed on the outside of insulated enclosure layer.
As preferably, the height of described conductive layer is 60 ~ 100 μm, and described carbon nano-tube is hollow structure, and the cross section of CNT (carbon nano-tube) is regular hexagon.
As preferably, described reservoir channel is positioned at the central area of conductive layer, and reservoir channel is in spiral shape through central area.
As preferably, described substrate layer adopts layer-of-substrate silicon, and the thickness of substrate layer is 20 ~ 30 μm.
As preferably, described insulated enclosure layer adopts hot melt adhesive layer.
The beneficial effects of the utility model: the utility model is logical forms conductive layer by some carbon nanotube arrangement, carbon nano-tube has larger specific area, have that stored energy is large, volume microminiaturization, have extended cycle life, can the repeatedly advantage such as cycle charge-discharge, and at the arranged outside insulated enclosure layer of conductive layer and external seal lid double-layer sealing structure, electric capacity has good sealing property, electrolyte not easily overflows, and has longer useful life.
Feature of the present utility model and advantage will be described in detail by reference to the accompanying drawings by embodiment.
[accompanying drawing explanation]
Fig. 1 is the main pseudosection of a kind of high-performance MEMS of the utility model super capacitor;
Fig. 2 is the plan structure figure of the utility model conductive layer.
[embodiment]
Consult Fig. 1, Fig. 2, a kind of high-performance MEMS super capacitor of the utility model, comprise substrate layer 1, conductive layer 2, insulated enclosure layer 3 and external seal lid 4, described conductive layer 2 is positioned on substrate layer 1, conductive layer 2 is rearranged by some carbon nano-tube 5, reservoir channel 6 is provided with in conductive layer 2, conductive layer 2 is divided into central area 21 and is positioned at the contact area 22 of both sides, central area 21, the contact area 22 of both sides is placed with respectively positive plate 71 and negative plate 72, positive plate 71 and negative plate 72 are connected to positive pole ear 73 and negative lug 74, described insulated enclosure layer 3 is positioned at the top of conductive layer 2, external seal lid 4 is installed on the outside of insulated enclosure layer 3.
The height of described conductive layer 2 is 60 ~ 100 μm, described carbon nano-tube 5 is hollow structure, the cross section of CNT (carbon nano-tube) 5 is regular hexagon, described reservoir channel 6 is positioned at the central area 21 of conductive layer 2, reservoir channel 6 is in spiral shape through central area 21, described substrate layer 1 adopts layer-of-substrate silicon, and the thickness of substrate layer 1 is 20 ~ 30 μm, and described insulated enclosure layer 3 adopts hot melt adhesive layer.
Utility model works process:
A kind of high-performance MEMS super capacitor of the utility model in the course of the work, conductive layer 2 is rearranged by some carbon nano-tube 5, carbon nano-tube 5 has larger specific area, have that stored energy is large, volume microminiaturization, have extended cycle life, can the repeatedly advantage such as cycle charge-discharge, and at the arranged outside insulated enclosure layer 3 of conductive layer 2 and external seal lid 4 double-layer sealing structure, electric capacity has good sealing property, and electrolyte not easily overflows, and has longer useful life.
Above-described embodiment is to explanation of the present utility model, is not to restriction of the present utility model, anyly all belongs to protection range of the present utility model to the scheme after the utility model simple transformation.

Claims (5)

1. a high-performance MEMS super capacitor, it is characterized in that: comprise substrate layer (1), conductive layer (2), insulated enclosure layer (3) and external seal lid (4), described conductive layer (2) is positioned on substrate layer (1), conductive layer (2) is rearranged by some carbon nano-tube (5), reservoir channel (6) is provided with in conductive layer (2), conductive layer (2) is divided into central area (21) and is positioned at the contact area (22) of central area (21) both sides, the contact area (22) of both sides is placed with respectively positive plate (71) and negative plate (72), positive plate (71) and negative plate (72) are connected to positive pole ear (73) and negative lug (74), described insulated enclosure layer (3) is positioned at the top of conductive layer (2), external seal lid (4) is installed on the outside of insulated enclosure layer (3).
2. a kind of high-performance MEMS super capacitor as claimed in claim 1, it is characterized in that: the height of described conductive layer (2) is 60 ~ 100 μm, described carbon nano-tube (5) is hollow structure, and the cross section of CNT (carbon nano-tube) (5) is regular hexagon.
3. a kind of high-performance MEMS super capacitor as claimed in claim 1, it is characterized in that: described reservoir channel (6) is positioned at the central area (21) of conductive layer (2), reservoir channel (6) is in spiral shape through central area (21).
4. a kind of high-performance MEMS super capacitor as claimed in claim 1, is characterized in that: described substrate layer (1) adopts layer-of-substrate silicon, and the thickness of substrate layer (1) is 20 ~ 30 μm.
5. a kind of high-performance MEMS super capacitor as claimed in claim 1, is characterized in that: described insulated enclosure layer (3) adopts hot melt adhesive layer.
CN201420732406.4U 2014-11-18 2014-11-18 A kind of high-performance MEMS super capacitor Expired - Fee Related CN204204652U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420732406.4U CN204204652U (en) 2014-11-18 2014-11-18 A kind of high-performance MEMS super capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420732406.4U CN204204652U (en) 2014-11-18 2014-11-18 A kind of high-performance MEMS super capacitor

Publications (1)

Publication Number Publication Date
CN204204652U true CN204204652U (en) 2015-03-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420732406.4U Expired - Fee Related CN204204652U (en) 2014-11-18 2014-11-18 A kind of high-performance MEMS super capacitor

Country Status (1)

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CN (1) CN204204652U (en)

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150311

Termination date: 20151118