CN204188474U - Micro-nano impression/the scarification tester of original position - Google Patents
Micro-nano impression/the scarification tester of original position Download PDFInfo
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- CN204188474U CN204188474U CN201420559377.6U CN201420559377U CN204188474U CN 204188474 U CN204188474 U CN 204188474U CN 201420559377 U CN201420559377 U CN 201420559377U CN 204188474 U CN204188474 U CN 204188474U
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Abstract
The utility model relates to the micro-nano impression/scarification tester of a kind of original position, belongs to mechanical-electrical integration precision scientific instrument field.Servomotor outputting power, rear drive leading screw is turned round by turbine and worm deceleration increasing, guide rail slide block, web joint is driven by leading screw, realize the transverse movement of flexible hinge, precisely locating platform, objective table, complete scratch experiment, drive web joint by precision movement platform, thus drive the flexure hinge mechanism and objective table that are arranged on above web joint, realize the coarse feed of objective table; Piezoelectric stack drives flexible hinge to realize objective table precision feeding, completes indentation test.The precision positioning of laser displacement sensor is realized by precisely locating platform.The height of pressure head is adjusted by two-dimensional micro-displacement platform.Advantage is: novel structure, compact, and reliability is high, precision is high.Utilize laser displacement sensor to carry out the measurement of displacement, there is the features such as broad quantum, precision be high, easy for installation, regulate by manual two-dimensional micro-displacement platform, accurate positioning.
Description
Technical field
The utility model relates to mechanical-electrical integration precision scientific instrument field, particularly a kind ofly collects driving, the accurate micro-nano impression/scarification tester of original position loading, be detected as one, belongs to the precision detecting instrument of electromechanical integration.Exact instrument promotes scientific-technical progress, and the important guarantee of social development, has good application prospect in fields such as Ultra-precision Turning, material science, semiconductor technologies.
Background technology
Material Micro Mechanical Properties measuring technology is the cutting edge technology grown up in recent years, is subject to showing great attention to of national governments and research institution.The measuring technology of micro/nano level material mechanical performance mainly comprises nano impress (Nanoindentation), nanometer cut (Nanoscratch), atomic force microscope (AFM), MEMS (micro electro mechanical system) (MEMS) special test technology (as micro-stretching etc.) and Related Supporting Technologies etc.According to the deformation and damage situation whether by instrument on-line real time monitoring materials such as electron microscopes in test, original position (In situ) can be divided into again to test and ex situ (Ex situ) is tested.So-called original position (or in place) is tested, and refers to the on-line continuous monitoring carried out in measured piece Mechanics Performance Testing and analyzes; Corresponding is non-in-situ test (also known as dystopy or displacement test) with it, refers to that the test specimen before utilizing experiment or after experiment carries out mechanics property analysis.Most material Micro Mechanical Properties tests rests in ex situ measuring technology, and in-situ testing technique becomes an international study hotspot.
The test of ex situ nano impress/cut cannot the damage process of real-time monitored material, and by contrast, nano impress/scarification tester can obtain the information of more related materials deformation damages; But in-situ nano impression/cut test mainly concentrates in transmission electron microscope (TEM) and scanning electron microscope (SEM) and carries out, and both has very limited working cavity, and needs the compatibility ensureing proving installation.At home, in-situ testing technique is not yet shaping, and in high-end science and technology and military field, the external blockade on new techniques to China, ultraprecise drives and loading force/displacement precise detection technology develops slowly, differ greatly with development abroad, these reasons all limit the fast development of China's in-situ nano impression/cut measuring technology, hinder the development of China's material science.
All in all, the in-situ nano impression/cut proving installation of research high precision, large test specification, low cost is still challenging work, is also a urgent job simultaneously.
Summary of the invention
The purpose of this utility model is to provide a kind of original position micro-nano impression/scarification tester, solving ex situ impression/cut measuring technology cannot online observation material damage process, the present situation that China's impression/cut measuring technology falls behind very much, the problems such as serious obstruction China Material Field development.For technical Problems existing, the utility model proposes the micro-nano impression/scarification tester of a kind of original position, the utility model comprise have coarse feed and progress greatly to objective table; The grand dynamic adjusting mechanism of Z-direction, for detecting the precise displacement sensor of diamond penetrator compression distance and the precision mechanics sensor for detecting diamond penetrator press-in material internal pressure.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
Micro-nano impression/the scarification tester of original position, comprise locating platform and driver element, specifically piezoelectric stack 9 is arranged in flexible hinge 10 interior grooves, drives flexible hinge 10 by piezoelectric stack 9, and then drives objective table 13 to realize precision feeding and complete indentation test; Flexible hinge 10 is fastened on web joint a6, and described web joint a6 is arranged on precisely locating platform a23, drives web joint a6 thus realize the coarse feed of objective table 13 by handle a7; Laser displacement sensor 22 is arranged on precisely locating platform b20, laser displacement sensor 22 realizes the displacement detecting to objective table 13 by baffle plate 5, precisely locating platform b20 is fastened on base 18, and handle b19, handle c21 drive precisely locating platform b20 to realize the fine setting of laser displacement sensor 22; Precisely locating platform a23 is arranged on web joint b8, servomotor 1 drives turbine 2 to drive worm screw 3, worm screw 3 is connected with leading screw 12 by trip bolt 4, leading screw 12 is connected with web joint b8, servomotor 1 is arranged on base 18, drive precise guide rail slide block 11 by servomotor 1 and then drive web joint b8 thus realize objective table 13 traverse feed, completing scratch experiment.
Described base 18 fixedly mounts two-dimensional micro-displacement platform 17, web joint c16 is fastened on two-dimensional micro-displacement platform 17, precision force transducer 15 is fastened on web joint c16, diamond penetrator 14 is installed in the front end of precision force transducer 15, is adjusted the height of diamond penetrator 14 by two-dimensional micro-displacement platform 17.
Described precision force transducer 15 is Two-dimensional strain sheet type sensor, can measure transverse force and longitudinal force simultaneously, and due to 2 D force sensor and flexible hinge series connection, thus its resolving power is high, and error is less.
Micro-nano impression/the scarification tester of described original position designs coarse feed and precise feed mechanism respectively, and coarse feed is by driven by servomotor, and precision feeding drives flexible hinge to carry out by piezoelectric stack.
The overall dimension of the micro-nano impression/scarification tester of described original position is 178mm × 165 mm × 80mm.
Real-time monitored is carried out under the micro-nano impression/scarification tester of described original position is placed in scanning electron microscope SEM, transmission electron microscope TEM.
The beneficial effects of the utility model are: its novel structure, have motor-driven grand dynamic locomitivity, and the micro-move device ability that active material piezoelectric element drives; Volume is little, overall dimension is 178mm × 165 mm × 80mm, and closely, accessible site realizes material impression to structure in electron microscope, the Visual Dynamic of cut test detects, make online observation material damage process become possibility, and important facilitation is played to the research of material; Utilize laser displacement sensor to carry out the measurement of displacement, there is the features such as broad quantum, precision are high, easy for installation, manually can carry out the adjustment of height, accurate positioning by two-dimensional micro-displacement platform; Reliability is high, precision is high: in test process, load resolution reaches micro-ox level, and displacement is differentiated road and reached nanoscale, and precision is high.The utility model all has good application to the field such as material science, Ultra-precision Turning.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms a application's part, and illustrative example of the present utility model and explanation thereof, for explaining the utility model, are not formed improper restriction of the present utility model.
Fig. 1 is perspective view of the present utility model;
Fig. 2 is plan structure schematic diagram of the present utility model;
Fig. 3 is right TV structure schematic diagram of the present utility model.
In figure: 1, servomotor; 2, turbine; 3, worm screw; 4, trip bolt; 5, baffle plate; 6, web joint a; 7, handle a; 8, web joint b; 9, piezoelectric stack; 10, flexible hinge; 11, precise guide rail slide block; 12, leading screw; 13, objective table; 14, diamond penetrator; 15, precision force transducer b; 16, web joint c; 17, two-dimensional micro-displacement platform; 18, base; 19, handle b; 20, precisely locating platform b; 21, handle c; 22, laser displacement sensor; 23, precisely locating platform a.
Embodiment
Detailed content of the present utility model and embodiment thereof is further illustrated below in conjunction with accompanying drawing.
See shown in Fig. 1 to Fig. 3, the micro-nano impression/scarification tester of original position of the present utility model, comprises servomotor 1, turbine 2, worm screw 3, trip bolt 4, baffle plate 5, web joint a6, handle a7, web joint b8, piezoelectric stack 9, flexible hinge 10, precise guide rail slide block 11, leading screw 12, objective table 13, diamond penetrator 14, precision force transducer b15, web joint c16, two-dimensional micro-displacement platform 17, base 18, handle b19, precisely locating platform b20, handle c21, laser displacement sensor 22, precisely locating platform a23, wherein, piezoelectric stack 9 pre-loading screw is arranged in flexible hinge 10 interior grooves, flexible hinge 10 is driven by piezoelectric stack 9, and then drive objective table 13 to realize precision feeding, complete indentation test, flexible hinge 10 by screw fastening on web joint a6, web joint a6 is arranged on precisely locating platform a23 by screw, drive web joint a6 by handle a7 thus realize the coarse feed of objective table 13, laser displacement sensor 22 is arranged on precisely locating platform b20 by screw, and laser displacement sensor 22 realizes the displacement detecting to objective table 13 by baffle plate 5, precisely locating platform b20 passes through on screw fastening base 18, handle b19, handle c21 drives precisely locating platform b20 to realize the fine setting of laser displacement sensor 22, precisely locating platform a23 is arranged on web joint b8 by screw, servomotor 1 is connected by screw and drives turbine 2 thus drive worm screw 3, worm screw 3 is connected with leading screw 12 by trip bolt 4, leading screw 12 is connected with web joint b8, servomotor 1 is arranged on base 18, drives precise guide rail slide block 11 and then drives web joint b8 thus realize objective table 13 traverse feed, complete scratch experiment by servomotor 1.
The diamond penetrator 14 of the micro-nano impression/scarification tester of described original position is arranged on precision force transducer 15 front end, precision force transducer 15 by screw fastening on web joint c16, web joint c16 by screw fastening on two-dimensional micro-displacement platform 17, two-dimensional micro-displacement platform 17 is arranged on base 18, is adjusted the height of diamond penetrator 14 by adjustment two-dimensional micro-displacement platform 17.
The precision force transducer 15 of the micro-nano impression/scarification tester of described original position is strain-gauge transducer, and its resolving power is high, and error is less.
Micro-nano impression/the scarification tester of described original position designs coarse feed and precise feed mechanism respectively.
The overall dimension of the micro-nano impression/scarification tester of described original position is 178mm × 165 mm × 80mm.
Real-time monitored is carried out under the micro-nano impression/scarification tester of described original position can be placed in scanning electron microscope SEM, transmission electron microscope TEM.
See shown in Fig. 1 to Fig. 3, the utility model mainly comprises three movement output ends, and one is diamond penetrator 14, and two is objective tables 13, and three is laser displacement sensors 22.Wherein diamond penetrator 1 is arranged on precision force transducer 15 front end, precision force transducer 15 by screw fastening on web joint c16, web joint c16 is fastened on two-dimensional micro-displacement platform 17, two-dimensional micro-displacement platform 17 is arranged on base 18, is adjusted the height of diamond penetrator 14 by two-dimensional micro-displacement platform 17.
The concrete mode of motion of objective table 23 is: flexible hinge 10 by screw fastening on web joint a6, web joint a6 is arranged on precisely locating platform a23 by screw, drive web joint a6 by handle a7 thus realize the coarse feed of objective table 13, piezoelectric stack 9 is arranged in flexible hinge 10 interior grooves, flexible hinge 10 is driven by piezoelectric stack 9, and then drive objective table 13 to realize precision feeding, when electrical power, servomotor 1 is connected by screw and drives turbine 2 thus drive worm screw 3, worm screw 3 is connected with leading screw 12 by trip bolt 4, leading screw 12 is connected with web joint b8, slided by precise guide rail slide block 11 and then drive web joint b8, thus realize objective table 13 traverse feed, complete scratch experiment.
The concrete mode of motion of laser displacement sensor 22 is: laser displacement sensor 22 is arranged on precisely locating platform b20 by screw, precisely locating platform b20, by screw fastening base 18, drives precisely locating platform b20 to realize the fine setting of laser displacement sensor 22 by rotary handle b19, handle c21.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All the utility model is done any amendment, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (5)
1. the micro-nano impression/scarification tester of original position, it is characterized in that: piezoelectric stack (9) is arranged in flexible hinge (10) interior grooves, drive flexible hinge (10) by piezoelectric stack (9), and then drive objective table (13) to realize precision feeding and complete indentation test; Flexible hinge (10) is fastened on web joint a(6) on, described web joint a(6) be arranged on precisely locating platform a(23) on, by handle a(7) drive web joint a(6) thus realize the coarse feed of objective table (13); Laser displacement sensor (22) is arranged on precisely locating platform b(20) on, laser displacement sensor (22) realizes the displacement detecting to objective table (13) by baffle plate (5), precisely locating platform b(20) be fastened on base (18), handle b(19), handle c(21) drive precisely locating platform b(20) realize the fine setting of laser displacement sensor (22); Precisely locating platform a(23) be arranged on web joint b(8) on, servomotor (1) drives turbine (2) to drive worm screw (3), worm screw (3) is connected with leading screw (12) by trip bolt (4), leading screw (12) and web joint b(8) be connected, servomotor (1) is arranged on base (18), drive precise guide rail slide block (11) by servomotor (1) and then drive web joint b(8) thus realize objective table (13) traverse feed, complete scratch experiment.
2. the micro-nano impression/scarification tester of original position according to claim 1, it is characterized in that: described base (18) upper fixed installation two-dimensional micro-displacement platform (17), web joint c(16) be fastened on two-dimensional micro-displacement platform (17), precision force transducer (15) is fastened on web joint c(16) on, diamond penetrator (14) is installed in the front end of precision force transducer (15), by the height of two-dimensional micro-displacement platform (17) adjustment diamond penetrator (14).
3. the micro-nano impression/scarification tester of original position according to claim 2, is characterized in that: described precision force transducer (15) is Two-dimensional strain sheet type sensor, can measure transverse force and longitudinal force simultaneously, 2 D force sensor and flexible hinge series connection; Micro-nano impression/the scarification tester of described original position designs coarse feed and precise feed mechanism respectively, and coarse feed is by driven by servomotor, and precision feeding drives flexible hinge to carry out by piezoelectric stack.
4. the micro-nano impression/scarification tester of original position according to claim 1 or 2 or 3, is characterized in that: the overall dimension of the micro-nano impression/scarification tester of described original position is 178mm × 165 mm × 80mm.
5. the micro-nano impression/scarification tester of original position according to claim 1 or 2 or 3, is characterized in that: carry out real-time monitored under the micro-nano impression/scarification tester of described original position is placed in scanning electron microscope SEM, transmission electron microscope TEM.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420559377.6U CN204188474U (en) | 2014-09-25 | 2014-09-25 | Micro-nano impression/the scarification tester of original position |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420559377.6U CN204188474U (en) | 2014-09-25 | 2014-09-25 | Micro-nano impression/the scarification tester of original position |
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| CN204188474U true CN204188474U (en) | 2015-03-04 |
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| CN201420559377.6U Withdrawn - After Issue CN204188474U (en) | 2014-09-25 | 2014-09-25 | Micro-nano impression/the scarification tester of original position |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297082A (en) * | 2014-09-25 | 2015-01-21 | 吉林大学 | In-situ micro-nano indentation/scratch tester |
| CN105259178A (en) * | 2015-11-20 | 2016-01-20 | 云南卡索实业有限公司 | Shearing type linear trace laser detection system |
| CN106059382A (en) * | 2016-06-06 | 2016-10-26 | 长春工业大学 | Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor |
| CN106370660A (en) * | 2016-08-18 | 2017-02-01 | 中航电测仪器股份有限公司 | Strainometer AOI defect identification detection device |
| CN110940683A (en) * | 2019-11-18 | 2020-03-31 | 中国科学院金属研究所 | Method for realizing in-situ compression observation by combination of Vickers hardness tester and transmission electron microscope |
| CN111915977A (en) * | 2020-09-04 | 2020-11-10 | 浙江工业大学 | Experimental platform for novel fluid dynamic pressure polishing research |
-
2014
- 2014-09-25 CN CN201420559377.6U patent/CN204188474U/en not_active Withdrawn - After Issue
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297082A (en) * | 2014-09-25 | 2015-01-21 | 吉林大学 | In-situ micro-nano indentation/scratch tester |
| CN105259178A (en) * | 2015-11-20 | 2016-01-20 | 云南卡索实业有限公司 | Shearing type linear trace laser detection system |
| CN105259178B (en) * | 2015-11-20 | 2019-03-15 | 云南卡索实业有限公司 | A kind of shearing class linear trace laser detection system |
| CN106059382A (en) * | 2016-06-06 | 2016-10-26 | 长春工业大学 | Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor |
| CN106059382B (en) * | 2016-06-06 | 2017-09-01 | 长春工业大学 | Rhombus hinge oblique slot type quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method |
| CN106370660A (en) * | 2016-08-18 | 2017-02-01 | 中航电测仪器股份有限公司 | Strainometer AOI defect identification detection device |
| CN106370660B (en) * | 2016-08-18 | 2018-12-07 | 中航电测仪器股份有限公司 | A kind of strain gauge AOI defect recognition detection device |
| CN110940683A (en) * | 2019-11-18 | 2020-03-31 | 中国科学院金属研究所 | Method for realizing in-situ compression observation by combination of Vickers hardness tester and transmission electron microscope |
| CN111915977A (en) * | 2020-09-04 | 2020-11-10 | 浙江工业大学 | Experimental platform for novel fluid dynamic pressure polishing research |
| CN111915977B (en) * | 2020-09-04 | 2024-05-17 | 浙江工业大学 | Experimental platform for novel hydrodynamic polishing research |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150304 Effective date of abandoning: 20160824 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |