CN204188272U - One converges lenticular wavefront measurement chip based on electrically-controlled liquid crystal - Google Patents
One converges lenticular wavefront measurement chip based on electrically-controlled liquid crystal Download PDFInfo
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- CN204188272U CN204188272U CN201420657067.8U CN201420657067U CN204188272U CN 204188272 U CN204188272 U CN 204188272U CN 201420657067 U CN201420657067 U CN 201420657067U CN 204188272 U CN204188272 U CN 204188272U
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Abstract
The utility model discloses one and converge lenticular wavefront measurement chip based on electrically-controlled liquid crystal.Comprise face battle array electrically-controlled liquid crystal and converge lenticule and face battle array visible-light detector; Face battle array electrically-controlled liquid crystal converges lenticule and comprises liquid crystal material layer, be successively set on the first liquid crystal initial orientation layer of liquid crystal material layer upper surface, patterned electrodes layer, the first substrate and the first anti-reflection film, and be successively set on the second liquid crystal initial orientation layer of liquid crystal material layer lower surface, common electrode layer, the second substrate and the second anti-reflection film; Common electrode layer is made up of the homogeneous conducting film of one deck, and patterned electrodes layer is made up of the homogeneous conducting film of one deck of the square hole or circular hole that it are furnished with the distribution of m × n element array; Face battle array visible-light detector is divided into the sub-face battle array visible-light detector of m × n element array distribution, and every height face battle array visible-light detector comprises the photosensitive unit of j × j element array distribution.This chip wavefront measurement scope is large, and target and good environmental adaptability, be easily coupled with optical photoconductor physical construction.
Description
Technical Field
The utility model belongs to the technical field of optics precision measurement and control, more specifically relates to a wavefront measurement chip based on automatically controlled liquid crystal assembles microlens.
Background
The wavefront is a fundamental parameter characterizing the light wave. The method can accurately acquire the wave front information of the transmitted light field in time, and is a basis and a precondition for analyzing the spatial-temporal evolution behavior of the light wave, the interaction attribute with the material structure, the influence of the environment medium on the transmitted light field, the capability of carrying and transmitting target image information and the variation characteristics thereof, and performing controlled modulation on the light field. To date, a wide variety of wavefront direct and indirect measurement methods have been developed. In a wavefront measurement means with small miniaturization characteristics, based on a wavefront rapid measurement framework of Shack-Hartmaan (SH) effect, through coupling a CCD or CMOS photosensitive array and a micro-nano light beam transformation structure, the wavefront rapid measurement and point array image measurement are executed, attributes such as standard microelectronic process compatibility and the like are realized, obvious advantages are shown in the aspect of nondestructive and plug-and-play wavefront real-time detection, and wide attention and attention are paid. At present, by continuously developing a high-performance arrayed photosensitive structure, including increasing the array scale of a photosensitive device, reducing the size of a photosensitive element, adopting a quantum wire or quantum dot photosensitive structure, improving the photoelectric response sensitivity of a photosensitive material, reducing the noise of the photosensitive structure, developing a planar array beam-gathering micro lens monolithically integrated with the photosensitive array, an image information processing module during chip processing and the like, the chip-level wavefront measurement capability based on the SH effect is continuously enhanced.
At present, widely-used wavefront measuring devices based on the SH effect perform operations such as discretization segmentation of incident light waves, focusing of sub-beams, acquisition and processing of point-array images, and wavefront inversion construction based on the surface array refraction of specific topography profiles, the matching coupling of diffraction microlenses and photosensitive arrays. Because the microlens does not have the ability of focusing, adjusting and controlling the photosensitive field of view and adjusting the point spread function, the microlens cannot effectively play a role in some special occasions. For example, under the conditions that the target approaches or leaves at a high speed or changes violently, the environmental medium is in a metastable state or even an unsteady state such as a typical atmospheric turbulence, a hypersonic flow field or an unbalanced high-temperature gas environment, and is subjected to strong radiation, glare, flash or strong laser irradiation, and the target is in an interface environment with extremely different intensities or brightness contrast at night, the wavefront measurement capability is reduced or even lost sharply, including the situations of photosensitive equipment damage and the like under extreme conditions. In view of the above situation, the main optical system is mainly modified, a dedicated image information processing algorithm is developed, and the micro-lens array is configured to be placed on the MEMS structure to adjust the pitch of the CCD or CMOS photosensitive array, which only solves some problems or plays a very limited role, and has high cost and serious performance deficiency, so that a new technical support means is urgently needed.
In recent years, the technology of electrically controlled liquid crystal microlens arrays has been developed rapidly, and the electrically controlled liquid crystal microlens arrays have main functions including: under the action of an electric drive control signal, the liquid crystal micro-lens array on the plane end surface can effectively execute operations such as focusing, photosensitive field regulation and control, point spread function modulation and the like; (II) the electric control conversion time among different light convergence states of the liquid crystal micro lens is as low as sub-millisecond level, and the electric control conversion time of laboratory level is as low as microsecond level; the modulation operation of the light condensation capacity of the liquid crystal micro lens can be expanded according to a set electric control sequence, and the liquid crystal micro lens has an intelligent light control characteristic; (IV) the liquid crystal micro-lens structure with the plane end face and the thickness of the micron-sized liquid crystal material can be flexibly placed in a light control framework or coupled with other optical photoelectric mechanical structures or even integrated; and fifthly, the spatial distribution form of the refractive index of the liquid crystal is maintained or changed by regulating and controlling the electrical parameters, and the device effectively adapts to the power supply fluctuation of the device, the change of environmental factors, the change of target characteristics and the demand condition. At present, how to develop a smart wavefront measurement means suitable for complex background environment and dynamic condition based on the electric control liquid crystal microlens technology becomes an opportunistic challenge for the continuous development of optical precision measurement and control technology, and a new breakthrough is urgently needed.
SUMMERY OF THE UTILITY MODEL
To the above defect of prior art or improve the demand, the utility model provides a wavefront measurement chip based on automatically controlled liquid crystal assembles microlens, work in the visible light spectrum section, assembles the automatically controlled liquid crystal of area array of efficiency electricity modulation through optics and assembles microlens and photosensitive array coupling execution optics wavefront measurement operation, it is big to have the wavefront measurement scope of electricity modulation, and volume and quality are little, and target and environmental suitability are good, characteristics such as easy and optical photoelectricity mechanical structure coupling.
In order to achieve the above object, the utility model provides a wavefront measuring chip, which is characterized in that the wavefront measuring chip comprises an area array electric control liquid crystal convergence micro lens, an area array visible light detector and a driving and controlling preprocessing module; the area array electric control liquid crystal converging micro-lens comprises a liquid crystal material layer, a first liquid crystal initial orientation layer, a graphical electrode layer, a first substrate and a first antireflection film which are sequentially arranged on the upper surface of the liquid crystal material layer, and a second liquid crystal initial orientation layer, a common electrode layer, a second substrate and a second antireflection film which are sequentially arranged on the lower surface of the liquid crystal material layer; the common electrode layer is composed of a layer of homogeneous conductive film, the patterned electrode layer is composed of a layer of homogeneous conductive film on which m x n element array distributed square holes or round holes are distributed, wherein m and n are integers more than 1; the area array electric control liquid crystal converging micro lens is divided into unit electric control liquid crystal converging micro lenses distributed in an m multiplied by n element array, the unit electric control liquid crystal converging micro lenses correspond to the square holes or the round holes one by one, each square hole or the round hole is positioned in the center of the corresponding unit electric control liquid crystal converging micro lens to form an upper electrode of the unit electric control liquid crystal converging micro lens, and lower electrodes of all the unit electric control liquid crystal converging micro lenses are provided by the common electrode layer; the area array visible light detector is divided into sub-area array visible light detectors distributed in an m multiplied by n element array, the sub-area array visible light detectors correspond to the unit electric control liquid crystal convergence micro lenses one to one, each sub-area array visible light detector comprises photosensitive elements distributed in a j multiplied by j element array, and j is an integer larger than 1.
Preferably, the ratio of the area of a single square hole or round hole to the light receiving area of the corresponding unit electrically-controlled liquid crystal converging microlens is an electrode aperture opening coefficient, and the electrode aperture opening coefficient is 4-16%.
Preferably, the chip further comprises a chip housing and a supporting heat dissipation plate; the chip shell is positioned above the supporting heat dissipation plate, and the bottom of the chip shell is fixedly connected with the supporting heat dissipation plate; drive accuse pre-processing module, area array visible light detector and the coaxial order of the automatically controlled liquid crystal of area array and assemble microlens and arrange in the chip shell, wherein, area array visible light detector is located drive the top of accuse pre-processing module, the automatically controlled liquid crystal of area array assembles microlens and is located the top of area array visible light detector and its light incident surface pass through the top trompil of chip shell exposes outside.
Preferably, a fourth port is arranged on a side surface of the chip housing, the common electrode layer and the patterned electrode layer are respectively led out through one wire, and a common electrode layer lead and a patterned electrode layer lead are connected into the fourth port.
Preferably, a first port, a second port, a third port, a fifth port and a sixth port, as well as a first indicator light, a second indicator light, a third indicator light, a fourth indicator light and a fifth indicator light are arranged on the side surface of the chip housing.
Generally, through the utility model discloses above technical scheme who conceives compares with prior art, has following beneficial effect:
1. electrically tunable wavefront measurement range. The light convergence capability of the liquid crystal convergence micro lens is electrically modulated, the variation range of the inclination angle of the measured sub-plane wave front is changed, and the method has the advantage of electrically controlling the variable degree of the wave front modulation form.
2. The anti-interference capability is strong, and the adaptability is good. The converging micro lens has the advantages that the converging light bending capacity is adjusted by an electric signal, and the converging micro lens can dynamically adjust and control wavefront measurement to adapt to environment and radiation change and deal with light field disturbance.
3. The measuring precision is high, and the area array electric control liquid crystal converging micro lens and the area array visible light detector have extremely high structural and performance stability and control precision, so that the measuring precision is high.
4. And (4) intelligentizing. The electric control forming and the electric variable operation of the light gathering capacity of the liquid crystal gathering micro lens can be expanded under the restraint, intervention or guidance of prior knowledge or wavefront conditions, and the intelligent characteristic is achieved.
5. Is convenient to use. The system framework of the integrated area array electric control liquid crystal convergent micro lens, the area array visible light detector and the drive control preprocessing module is adopted, so that the system framework has the advantages of convenience in plugging and easiness in coupling with an optical system, electronics and a mechanical device.
Drawings
Fig. 1 is a schematic structural diagram of a wavefront measurement chip based on an electrically controlled liquid crystal converging microlens according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an area array electrically controlled liquid crystal converging microlens, wherein (a) a cross-sectional diagram, (b) an upper electrode of a unit electrically controlled liquid crystal converging microlens is formed of a micro square hole, and (c) an upper electrode of a unit electrically controlled liquid crystal converging microlens is formed of a micro round hole;
fig. 3 is a schematic configuration diagram of a wavefront measurement chip based on an electrically controlled liquid crystal converging microlens in a test light path according to an embodiment of the present invention;
fig. 4 is a schematic diagram of the working principle of the wavefront measuring chip based on the electrically controlled liquid crystal converging microlens according to the embodiment of the present invention;
fig. 5 is a wavefront test chart of an embodiment of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-a first indicator light, 2-a first port, 3-a second indicator light, 4-a third indicator light, 5-a second port, 6-a third port, 7-a driving and controlling pretreatment module, 8-an area array visible light detector, 9-a fourth port, 10-an area array electric control liquid crystal convergence micro lens, 11-a fourth indicator light, 12-a fifth indicator light, 13-a fifth port, 14-a sixth port, 15-a chip shell and 16-a metal supporting and radiating plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Furthermore, the technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
As shown in fig. 1, the wavefront measurement chip based on the electrically controlled liquid crystal converging microlens of the embodiment of the present invention includes a chip housing 15, a wavefront measurement structure, and a metal supporting heat dissipation plate 16. The wavefront measurement framework comprises a driving and controlling preprocessing module 7, an area array visible light detector 8 and an area array electric control liquid crystal convergence micro lens 10. The metal supporting heat sink 16 is used for supporting and dissipating heat, and the chip housing 15 is located above the metal supporting heat sink 16, and the bottom of the chip housing is fixedly connected to the metal supporting heat sink 16. The driving and controlling pretreatment module 7, the area array visible light detector 8 and the area array electric control liquid crystal convergent microlens 10 are coaxially and sequentially arranged in the chip shell 15, the area array visible light detector 8 is positioned above the driving and controlling pretreatment module 7, the area array electric control liquid crystal convergent microlens 10 is positioned above the area array visible light detector 8, and the light incidence surface of the area array electric control liquid crystal convergent microlens is exposed outside through an opening at the top of the chip shell 15.
The side surface of the chip shell 15 is provided with a first port 2, a second port 5, a sixth port 14, a first indicator light 1, a second indicator light 3 and a fifth indicator light 12. The first port 2 is used for accessing a power line so as to connect the driving and controlling preprocessing module 7 with an external power supply; the second port 5 is used for outputting driving and regulating signals provided by the driving and controlling preprocessing module 7 for the area array visible light detector 8 and inputting a working instruction sent to the measuring chip by external equipment; the sixth port 14 is used for inputting a photoelectric response signal provided by the area array visible light detector 8 to the driving and controlling preprocessing module 7 and outputting wavefront measurement data; the first indicator light 1 is used for indicating whether the power supply of the driving and controlling preprocessing module 7 is switched on or not; the second indicator light 3 is used for indicating whether the driving and controlling preprocessing module 7 is in a normal working state; the fifth indicator light 12 is used for indicating whether the driving preprocessing module 7 is in a normal wavefront measurement data output state.
The side surface of the chip shell 15 is also provided with a third port 6, a fifth port 13, a third indicator light 4 and a fourth indicator light 11. The third port 6 is used for inputting driving and regulating signals provided by the driving and controlling preprocessing module 7 to the area array visible light detector 8; the fifth port 13 is used for outputting a photoelectric response signal provided by the area array visible light detector 8 to the driving and controlling preprocessing module 7; the third indicator light 4 is used for indicating whether the area array visible light detector 8 is in a normal working state; the fourth indicator light 11 is used for indicating whether the area array visible light detector 8 is in a normal signal output state.
The side surface of the chip shell 15 is also provided with a fourth port 9 for inputting driving and regulating signals of the area array electric control liquid crystal convergence micro lens 10.
As shown in fig. 2(a), the area array electrically controlled liquid crystal converging microlens 10 includes a liquid crystal material layer, a first liquid crystal initial alignment layer, a patterned electrode layer, a first substrate and a first antireflection film sequentially disposed on an upper surface of the liquid crystal material layer, and a second liquid crystal initial alignment layer, a common electrode layer, a second substrate and a second antireflection film sequentially disposed on a lower surface of the liquid crystal material layer. The common electrode layer is formed of a homogeneous conductive film. The patterned electrode layer is composed of a layer of homogeneous conductive film on which micro square holes or micro round holes distributed in an m x n element array are distributed, wherein m and n are integers larger than 1. The common electrode layer and the patterned electrode layer are respectively led out through a lead, and the common electrode layer lead and the patterned electrode layer lead are connected into the fourth port 9 and used for inputting driving and regulating signals of the area array electric control liquid crystal convergence micro lens 10.
The area array electrically controlled liquid crystal converging microlens 10 is divided into unit electrically controlled liquid crystal converging microlenses distributed in an m × n element array, the unit electrically controlled liquid crystal converging microlenses correspond to the micro square holes or the micro round holes one by one, and each micro square hole or the micro round hole is located in the center of the corresponding unit electrically controlled liquid crystal converging microlens to form an upper electrode of the unit electrically controlled liquid crystal converging microlens, as shown in fig. 2(b) and fig. 2 (c). The lower electrodes of all the unit electrically-controlled liquid crystal converging micro-lenses are provided by a common electrode layer. The ratio of the area of a single micro square hole or a micro round hole to the light receiving area of the corresponding unit electrically controlled liquid crystal converging microlens is called as an electrode aperture opening coefficient, and the typical value of the electrode aperture opening coefficient is between 4% and 16%.
The area array visible light detector 8 is divided into sub-area array visible light detectors distributed in an m × n element array. The sub-area array visible light detectors correspond to the unit electric control liquid crystal convergence micro lenses one by one, each sub-area array visible light detector comprises photosensitive elements distributed by a j x j element array, wherein j is an integer larger than 1.
The utility model discloses wave front measurement chip based on automatically controlled liquid crystal assembles microlens can be directly arranged in the test light path in strong light field environment, can be arranged in the optical system's that constitutes by the primary mirror focal plane department or carry out weak out of focus configuration in weak radiation light field environment, carries out the wave front and measures the operation, as shown in figure 3. The working principle is as follows.
And loading the driving and controlling voltage signal V on the area array electric control liquid crystal converging micro-lens 10 through a common electrode layer lead and a patterned electrode layer lead in the fourth port 9, and synchronously powering and driving and controlling the electric control liquid crystal converging micro-lenses of all the units by the driving and controlling voltage signal V. Liquid crystal molecules distributed near the inner surfaces of double-layer planar electrode plates (comprising an antireflection film, a substrate, an electrode layer and a liquid crystal initial orientation layer) forming the liquid crystal microcavity are firmly anchored by the liquid crystal initial orientation layer which is manufactured on the surfaces of the two opposite planar electrode plates and has parallel groove orientation, and the liquid crystal molecules in the liquid crystal layer are driven by a space electric field excited by the double-layer planar electrode plates to perform electrically adjustable convergence operation on incident beams.
After entering the area array electrically controlled liquid crystal converging micro-lens, the light wave is discretely divided into sub-plane incident wavefronts with different inclination angles relative to the light incident surface of the chip, such as sub-plane incident wavefronts-a, -B and-C shown in fig. 4. The incident wavefront of each sub-plane is directionally converged on a specific photosensitive element of the corresponding sub-area array visible light detector by each unit electric control liquid crystal converging micro-lens to form a typical focal spot-A as shown in FIG. 41、-B1and-C1And each sub-area array visible light detector further performs a photoelectric conversion operation to convert the optical signal into an electrical signal. The driving and controlling preprocessing module calculates two-dimensional position information of electric signals of each sub-area array detector corresponding to incident wavefronts of each sub-plane and calibrates the two-dimensional position information to obtain two-dimensional inclination angle information of the incident wavefronts of each sub-plane, then arranges the incident wavefronts of each sub-plane based on the space position of each unit electric control liquid crystal convergence micro lens to construct incident wavefront data and output the incident wavefront data, namely, further fits the incident wavefronts of each sub-plane to construct the incident wavefronts of a specific form, thereby completing the position arrangement information arrangement based on photosensitive signalsA resolved wavefront measurement operation.
By adjusting the frequency or the mean square amplitude of the driving voltage signal V, the light converging capability of each unit of electrically controlled liquid crystal converging microlens is modulated, which is equivalent to the surface curvature degree of a conventional convex refractive microlens having similar light converging efficiency to the unit of electrically controlled liquid crystal converging microlens, such as equivalent electrically controlled states-1 and-2 shown in fig. 4, so as to modulate the converging state of each sub-plane incident beam after passing through the unit of electrically controlled liquid crystal converging microlens, such as in fig. 4, correspondingly, the converging focal spot is transformed from-C1 to-C2. A typical wavefront measured is shown in figure 5. By the mode, the inclination angle variation range of the sub-plane incident wavefront can be changed, the modulation of the measurable variation range of the incident wavefront can be realized, the illuminance on the sub-area array detector coupled with the unit electric control liquid crystal convergence micro lens can be changed, the irradiation intensity change of a target or an environment light field can be effectively adapted, and the disturbance wavefront variation caused by the environment or target factors can be corrected. Specifically, aiming at the wave front change caused by the disturbance of a target or an environment light field and the vibration of a chip, the wave front is adjusted by modulating a driving and controlling voltage signal loaded on the chip, and the chip has the wave front measurement capability of resisting the disturbance or the vibration of the light field; aiming at a strong light or weak radiation light field, the form of a beam-bunching wave beam is modulated by the electric focusing function of an area array electric control liquid crystal converging micro lens in the chip, and the chip has a wider light irradiation application range; the wavefront measurement is carried out by modulating the driving and controlling voltage signal loaded on the chip in time aiming at the moving target and the time-varying wavefront, and the chip has the capability of measuring the moving target wavefront and the time-varying wavefront. And after the chip is powered off, the light convergence function disappears, and the wavefront measurement is finished.
The utility model has the characteristics of this apparent characteristic of automatically controlled execution and modulation wavefront measurement, the chip connects and inserts convenient operation, easily with the coupling of conventional optics photoelectricity mechanical structure etc.
It will be understood by those skilled in the art that the foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (5)
1. A wavefront measurement chip is characterized by comprising an area array electric control liquid crystal convergence micro lens, an area array visible light detector and a driving and controlling preprocessing module; wherein,
the area array electric control liquid crystal converging micro-lens comprises a liquid crystal material layer, a first liquid crystal initial orientation layer, a graphical electrode layer, a first substrate and a first antireflection film which are sequentially arranged on the upper surface of the liquid crystal material layer, and a second liquid crystal initial orientation layer, a common electrode layer, a second substrate and a second antireflection film which are sequentially arranged on the lower surface of the liquid crystal material layer; the common electrode layer is composed of a layer of homogeneous conductive film, the patterned electrode layer is composed of a layer of homogeneous conductive film on which m x n element array distributed square holes or round holes are distributed, wherein m and n are integers more than 1; the area array electric control liquid crystal converging micro lens is divided into unit electric control liquid crystal converging micro lenses distributed in an m multiplied by n element array, the unit electric control liquid crystal converging micro lenses correspond to the square holes or the round holes one by one, each square hole or the round hole is positioned in the center of the corresponding unit electric control liquid crystal converging micro lens to form an upper electrode of the unit electric control liquid crystal converging micro lens, and lower electrodes of all the unit electric control liquid crystal converging micro lenses are provided by the common electrode layer;
the area array visible light detector is divided into sub-area array visible light detectors distributed in an m multiplied by n element array, the sub-area array visible light detectors correspond to the unit electric control liquid crystal convergence micro lenses one to one, each sub-area array visible light detector comprises photosensitive elements distributed in a j multiplied by j element array, and j is an integer larger than 1.
2. The wavefront measurement chip of claim 1, where the ratio of the area of a single square or circular hole to the light receiving area of the corresponding cell electrically controlled liquid crystal converging microlens is an electrode aperture opening factor, which is 4% to 16%.
3. The wavefront measurement chip according to claim 1 or 2, further comprising a chip housing and a supporting heat dissipation plate; the chip shell is positioned above the supporting heat dissipation plate, and the bottom of the chip shell is fixedly connected with the supporting heat dissipation plate; drive accuse pre-processing module, area array visible light detector and the coaxial order of the automatically controlled liquid crystal of area array and assemble microlens and arrange in the chip shell, wherein, area array visible light detector is located drive the top of accuse pre-processing module, the automatically controlled liquid crystal of area array assembles microlens and is located the top of area array visible light detector and its light incident surface pass through the top trompil of chip shell exposes outside.
4. The wavefront measurement chip of claim 3 wherein a fourth port is disposed on a side surface of the chip housing, the common electrode layer and the patterned electrode layer are respectively led out by one lead, and a common electrode layer lead and a patterned electrode layer lead are connected to the fourth port.
5. The wavefront measurement chip of claim 3 with the first, second, third, fifth and sixth ports and the first, second, third, fourth and fifth indicator lights disposed on the side of the chip housing.
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| CN112834180A (en) * | 2020-12-28 | 2021-05-25 | 中国科学院紫金山天文台 | Mounting device and positioning method for detector array chip and micro-lens array |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112834180A (en) * | 2020-12-28 | 2021-05-25 | 中国科学院紫金山天文台 | Mounting device and positioning method for detector array chip and micro-lens array |
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