CN204188170U - 微机电可变形结构和三轴微机电陀螺仪 - Google Patents
微机电可变形结构和三轴微机电陀螺仪 Download PDFInfo
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- CN204188170U CN204188170U CN201420731958.3U CN201420731958U CN204188170U CN 204188170 U CN204188170 U CN 204188170U CN 201420731958 U CN201420731958 U CN 201420731958U CN 204188170 U CN204188170 U CN 204188170U
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Application Number | Priority Date | Filing Date | Title |
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CN201420731958.3U CN204188170U (zh) | 2014-11-27 | 2014-11-27 | 微机电可变形结构和三轴微机电陀螺仪 |
KR1020177014294A KR101927647B1 (ko) | 2014-11-27 | 2015-07-23 | 3축 mems 자이로스코프 |
US15/529,491 US10330471B2 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
PCT/CN2015/084973 WO2016082571A1 (zh) | 2014-11-27 | 2015-07-23 | 三轴微机电陀螺仪 |
EP15863686.0A EP3217146B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
JP2017528429A JP6448793B2 (ja) | 2014-11-27 | 2015-07-23 | 3軸memsジャイロ |
EP19180147.1A EP3561451B1 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
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CN201420731958.3U CN204188170U (zh) | 2014-11-27 | 2014-11-27 | 微机电可变形结构和三轴微机电陀螺仪 |
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CN204188170U true CN204188170U (zh) | 2015-03-04 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016082571A1 (zh) * | 2014-11-27 | 2016-06-02 | 歌尔声学股份有限公司 | 三轴微机电陀螺仪 |
CN110702088A (zh) * | 2018-07-09 | 2020-01-17 | 北京大学 | 一种轮式双轴微机械陀螺 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016082571A1 (zh) * | 2014-11-27 | 2016-06-02 | 歌尔声学股份有限公司 | 三轴微机电陀螺仪 |
US10330471B2 (en) | 2014-11-27 | 2019-06-25 | Goertek, Inc. | Triaxial micro-electromechanical gyroscope |
CN110702088A (zh) * | 2018-07-09 | 2020-01-17 | 北京大学 | 一种轮式双轴微机械陀螺 |
CN110702088B (zh) * | 2018-07-09 | 2023-08-22 | 北京大学 | 一种轮式双轴微机械陀螺 |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Effective date of registration: 20200612 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |