CN204178122U - Be applicable to the film and the workpiece adherence device of image transfer exposure machine - Google Patents
Be applicable to the film and the workpiece adherence device of image transfer exposure machine Download PDFInfo
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- CN204178122U CN204178122U CN201420479170.8U CN201420479170U CN204178122U CN 204178122 U CN204178122 U CN 204178122U CN 201420479170 U CN201420479170 U CN 201420479170U CN 204178122 U CN204178122 U CN 204178122U
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Abstract
The utility model discloses a kind of film and workpiece adherence device of applicable image transfer exposure machine, comprise device body, Control Component, the film, porosint dielectric layer, glass plate, workpiece is placed on the upper surface of described porosint dielectric layer, the bottom of porosint dielectric layer is provided with platform, described platform is connected with pneumatic pump, portion is provided with the first driving mechanism on a glass, the described film is attached to this glass sheet lower surface, described platform lower is provided with the second driving mechanism, described porosint dielectric layer offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, uniform air supporting pressure is formed at described porosint dielectric layer surface by making it to the inflation of described platform, described workpiece and the film is forced to fit tightly.The time that this adherence device forms air supporting normal pressure comparatively forms negative pressure of vacuum time shorten several times, and can significantly improve production efficiency, the normal pressure that workpiece and the film are fitted can unrestrictedly increase.
Description
Technical field
The utility model relates to exposure machine operation technique field, particularly relates to a kind of film and workpiece adherence device of applicable image transfer exposure machine.
Background technology
In batch production printed circuit board process, be through ultraviolet exposure, required circuitous pattern is transferred on workpiece by the film, if having gap or bubble between the film and workpiece, will aliasing be caused, cause ill-exposed, recent decades are for this reason all adopt to vacuumize formation negative pressure in industry, make glass pressurized or distortion reach the laminating of the film and workpiece, but there is following problem all the time: the overlong time 1, vacuumized, make production efficiency step-down; 2, owing to posting the Glass breadks easily of the film, so vacuum tightness can not be too high, this just makes the larger workpiece of distortional stress and the film can not form good laminating, in addition, the remainder filling and leading up vacuum chamber must be removed with different pads (workpiece to different), quick-fried to avoid glass not taken out, time-consumingly to take a lot of work, be not suitable with automated production; 3, due to workpiece upper and lower surface simultaneously with platform and the glass contact of high rigidity, the not gentle depression of glass itself (with work piece interface) and aluminum alloy platform will cause fits bad, is also difficult to by regulating vacuum tightness to improve the uniformity coefficient of laminating.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of film and workpiece adherence device of applicable image transfer exposure machine, this is used in the film of image transfer exposure machine and workpiece adherence method can make the film in image transfer exposure machine and workpiece fit tightly under air blowing condition, glass plate is avoided to crush, gassing time is short, the air pressure of blowing can unrestrictedly increase, production efficiency is high, and automaticity is high.
For solving the above-mentioned technical matters vacuumizing adherence and exist, the film of the applicable image transfer exposure machine that the utility model provides and workpiece adherence device comprise device body, be placed in the Control Component in described device body, the film, porosint dielectric layer, be installed in the glass plate on described device body, workpiece is placed on the upper surface of described porosint dielectric layer, the platform fitted tightly with described porosint dielectric layer is provided with in the bottom of porosint dielectric layer, described platform is connected with pneumatic pump, portion is provided with the first driving mechanism on a glass, the described film is attached to this glass sheet lower surface, described platform is connected with pneumatic pump, the second driving mechanism of the Distance geometry depth of parallelism between the described workpiece of adjustment and the film is provided with at described platform lower, the described film is attached to this glass sheet lower surface, described porosint dielectric layer offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, uniform floating pressure is formed at described porosint dielectric layer surface by making it to the inflation of described platform, described workpiece and the film is forced to fit tightly.
Preferably, described second driving mechanism comprises four and can be elevated separately and for the electric cylinder that adjusts described workpiece and flat spacing and the depth of parallelism and three laser displacement sensors, the electric cylinder of each described lifting is arranged at described platform lower.
Preferably, the film of described applicable image transfer exposure machine and workpiece adherence device also comprise for being placed by described workpiece grabbing or shifting out the mechanical arm of described platform upper surface.
Preferably, described porosint dielectric layer is made up of pottery or aluminum metallic material, and the tiny holes that air can be evenly distributed from it forms air supporting and absorption.
Preferably, described first driving mechanism adopts servocontrol, and described glass plate can move and circular-rotation along X, Y relative to described device body.
Preferably, described first driving mechanism comprises mechanism body, be placed in the Control Component in described mechanism body, be installed in the X-axis screw mandrel in described mechanism body, the X-axis screw rodb base be assembled together with described X-axis screw mandrel, be installed in the Y-axis screw mandrel on described X-axis screw rodb base, to be assembled together Y-axis screw rodb base with described Y-axis screw mandrel, be installed in the 3rd servomotor for driving described glass plate to do circular-rotation on described Y-axis screw rodb base, for the first servomotor driving described X-axis screw mandrel to rotate, for the second servomotor driving described Y-axis screw mandrel to rotate, described glass plate and described 3rd servomotor are assembled together.
Preferably, the lower surface of described platform offers an air intake opening, and its upper surface offers the corresponding pore of some and described tiny holes, and described air intake opening is communicated with each described pore, and described air intake opening is connected with described pneumatic pump.
Preferably, described pneumatic pump can infinitely increase the blow gas pressure of described workpiece.
After adopting said structure, the described film is posted at described glass sheet lower surface, described workpiece is placed on described porosint dielectric layer top by mechanical arm, and described platform first moves to the position below glass plate, and whether CCD camera detects workpiece and tentatively aim at the position of the film, the target of CCD camera to four of described workpiece pilot holes and the film carries out centering, described glass plate is driven to carry out X by the first drive unit, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece, described pneumatic pump is blown, by described tiny holes, described workpiece is blown, the even air supporting pressure produced makes described workpiece and the film fit tightly, detect described workpiece and the described film whether to fit and put in place, if laminating puts in place, ultraviolet light starts exposure, by the image transfer above the described film on described workpiece.The advantage of this adherence method is:
1, the time of this adherence method formation air supporting normal pressure comparatively forms negative pressure of vacuum time shorten several times, can significantly improve production efficiency;
2, the normal pressure of laminating can unrestrictedly increase, and can regulate the consistance of workpiece and film spacing respectively by the lifting of four of a support platform electric cylinder, to improve the homogeneity of laminating;
3, due to adherence time, workpiece and platform contactless, and be flexible workpiece distortion deacclimatize glass, so the depression of platform and glass etc. to laminating influential effect less;
4, the absorption that possesses of platform itself and air supporting function are conducive to picking and placeing of workpiece and transmit, and more adapt to automated production.
Accompanying drawing explanation
Fig. 1 is that the utility model is applicable to the film of image transfer exposure machine and the structural representation of workpiece adherence device;
Fig. 2 is the enlarged drawing of the a-quadrant of structural representation shown in Fig. 1;
Fig. 3 is the operating diagram that the utility model is applicable to step S1 in the film of image transfer exposure machine and workpiece adherence device workflow;
Fig. 4 is the operating diagram that the utility model is applicable to step S2 in the film of image transfer exposure machine and workpiece adherence device workflow;
Fig. 5 is the operating diagram that the utility model is applicable to step S3 in the film of image transfer exposure machine and workpiece adherence device workflow;
Fig. 6 is the operating diagram that the utility model is applicable to step S4 in the film of image transfer exposure machine and workpiece adherence device workflow;
Fig. 7 is that the present invention is applicable to the film of image transfer exposure machine and the workflow diagram of workpiece adherence device.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only for explaining the utility model, and be not used in restriction the utility model.
Refer to Fig. 1 and Fig. 2, Fig. 1 is that the utility model is applicable to the film of image transfer exposure machine and the structural representation of workpiece adherence device, and Fig. 2 is that the utility model is applicable to the film of image transfer exposure machine and the enlarged drawing of workpiece adherence device a-quadrant, in the present embodiment, the film and the workpiece adherence device 10 that are applicable to image transfer exposure machine comprise device body 17, be placed in the Control Component in described device body, the film 12, porosint dielectric layer 14, be installed in the glass plate 11 on described device body 17, workpiece 13 is placed on the upper surface of porosint dielectric layer 14, the platform 15 fitted tightly with porosint dielectric layer 14 is provided with in the bottom of porosint dielectric layer 14, platform 15 is connected with pneumatic pump, glass plate 11 top is provided with the first driving mechanism, the film 12 is attached to glass plate 11 lower surface, platform 15 is connected with pneumatic pump, the second driving mechanism 16 of the Distance geometry depth of parallelism between adjustment workpiece 13 and the film 12 is provided with in platform 15 bottom, the film 12 is attached to this glass plate 11 lower surface, porosint dielectric layer 14 offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, the overanxious air that platform 15 produces is blown to workpiece 13 through described tiny holes, the uniform floating pressure produced makes workpiece 13 and the film 12 fit tightly.
In the present embodiment, the preferred material of porosint dielectric layer 14 is pottery or aluminum metallic material, and in other embodiments, also can select the material of other types, the tiny holes that air can be evenly distributed from porosint dielectric layer 14 forms air supporting and absorption.
First driving mechanism 15 adopts servocontrol, and blowning installation 15 can move along X, Y and Z axis relative to device body 17.
First driving mechanism 15 comprises device body, be placed in the Control Component in described device body, be installed in the X-axis screw mandrel on described device body, the X-axis screw rodb base be assembled together with described X-axis screw mandrel, be installed in the Y-axis screw mandrel on described X-axis screw rodb base, to be assembled together Y-axis screw rodb base with described Y-axis screw mandrel, be installed in the 3rd servomotor for driving described glass plate to do circular-rotation on described Y-axis screw rodb base, for the first servomotor driving described X-axis screw mandrel to rotate, for the second servomotor driving described Y-axis screw mandrel to rotate, described glass plate 11 is assembled together with described 3rd servomotor.The lower surface of platform 15 offers an air intake opening, and its upper surface offers the corresponding pore of some and described tiny holes, and described air intake opening is communicated with each described pore, and described air intake opening is connected with described pneumatic pump.
The blow gas pressure of described pneumatic pump to described workpiece 13 can unrestrictedly increase.
The applicable film of image transfer exposure machine and the workflow of workpiece adherence device are:
Refer to Fig. 7, Fig. 7 is that the present invention is applicable to the film of image transfer exposure machine and the workflow diagram of workpiece adherence device; The film 12 and workpiece 13 adherence device workflow comprise the following steps:
S1: as shown in Figure 3, the described film is posted at described glass sheet lower surface, described workpiece is placed on described porosint dielectric layer top by mechanical arm, and described platform first moves to the position below glass plate, and whether CCD camera detects workpiece and tentatively aim at the position of the film;
S2: as shown in Figure 4, CCD camera carries out contraposition demarcation to the target on four of workpiece 13 pilot holes and the film 12, driven by the first drive unit that described glass plate carries out X, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece;
S3: as shown in Figure 5, described pneumatic pump is blown, by the tiny holes of platform 15 with porosint dielectric layer 14, workpiece 13 is blown, the even air supporting pressure produced makes workpiece 13 and the film 12 fit tightly, whether detection workpiece 13 fits with the film 12 is put in place, if laminating puts in place, ultraviolet starts exposure, by the image transfer above the described film on described workpiece;
S4: as shown in Figure 6, described pneumatic pump air-breathing, makes described workpiece be separated with the described film, described absorption of workpieces is returned platform surface and removes.
The advantage of this adherence device is:
1, the time of this adherence device formation air supporting normal pressure comparatively forms negative pressure of vacuum time shorten several times, can significantly improve production efficiency;
2, the normal pressure of laminating can unrestrictedly increase, and can regulate the consistance of workpiece and film spacing respectively by the lifting of four of a support platform electric cylinder, to improve the homogeneity of laminating;
3, due to adherence time, workpiece and platform contactless, and be flexible workpiece distortion deacclimatize glass, so the depression of platform and glass etc. to laminating influential effect less;
4, the absorption that possesses of platform itself and air supporting function are conducive to picking and placeing of workpiece and transmit, and more adapt to automated production.
Should be understood that; these are only preferred embodiment of the present utility model; can not therefore limit the scope of the claims of the present utility model; every utilize the utility model instructions and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (8)
1. be applicable to the film and the workpiece adherence device of image transfer exposure machine, it is characterized in that: comprise device body, be placed in the Control Component in described device body, the film, porosint dielectric layer, be installed in the glass plate on described device body, workpiece is placed on the upper surface of described porosint dielectric layer, the platform fitted tightly with described porosint dielectric layer is provided with in the bottom of porosint dielectric layer, described platform is connected with pneumatic pump, portion is provided with the first driving mechanism on a glass, the described film is attached to this glass sheet lower surface, described platform is connected with pneumatic pump, the second driving mechanism of the Distance geometry depth of parallelism between the described workpiece of adjustment and the film is provided with at described platform lower, the described film is attached to this glass sheet lower surface, described porosint dielectric layer offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, uniform air supporting pressure is formed at described porosint dielectric layer surface by making it to the inflation of described platform, described workpiece and the film is forced to fit tightly.
2. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence device, is characterized in that: described porosint dielectric layer is made up of pottery or aluminum metallic material, and the trickle pore that air can be evenly distributed from it carries out air supporting and absorption.
3. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence device, it is characterized in that: described second driving mechanism comprises four and can be elevated separately and for the electric cylinder of the spacing that adjusts described workpiece and platform and the depth of parallelism and three laser displacement sensors, the electric cylinder of each described lifting is arranged at described platform lower.
4. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence device, is characterized in that: the film of described applicable image transfer exposure machine and workpiece adherence device also comprise for being placed by described workpiece grabbing or shifting out the mechanical arm of described platform upper surface.
5. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence device, is characterized in that: described first driving mechanism adopts servocontrol, and described glass plate can move and circular-rotation along X, Y relative to described device body.
6. the film of applicable image transfer exposure machine according to claim 5 and workpiece adherence device, it is characterized in that: described first driving mechanism comprises mechanism body, be placed in the Control Component in described mechanism body, be installed in the X-axis screw mandrel in described mechanism body, the X-axis screw rodb base be assembled together with described X-axis screw mandrel, be installed in the Y-axis screw mandrel on described X-axis screw rodb base, to be assembled together Y-axis screw rodb base with described Y-axis screw mandrel, be installed in the 3rd servomotor for driving described glass plate to do circular-rotation on described Y-axis screw rodb base, for the first servomotor driving described X-axis screw mandrel to rotate, for the second servomotor driving described Y-axis screw mandrel to rotate, described glass plate and described 3rd servomotor are assembled together.
7. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence device, it is characterized in that: the lower surface of described platform offers an air intake opening, its upper surface offers the corresponding pore of some and described tiny holes, described air intake opening is communicated with each described pore, and described air intake opening is connected with described pneumatic pump.
8. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence device, is characterized in that: described pneumatic pump can infinitely increase the blow gas pressure of described workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420479170.8U CN204178122U (en) | 2014-08-22 | 2014-08-22 | Be applicable to the film and the workpiece adherence device of image transfer exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420479170.8U CN204178122U (en) | 2014-08-22 | 2014-08-22 | Be applicable to the film and the workpiece adherence device of image transfer exposure machine |
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| CN204178122U true CN204178122U (en) | 2015-02-25 |
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| CN201420479170.8U Active CN204178122U (en) | 2014-08-22 | 2014-08-22 | Be applicable to the film and the workpiece adherence device of image transfer exposure machine |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104820346A (en) * | 2015-04-24 | 2015-08-05 | 深圳市大川光电设备有限公司 | Flat workpiece alignment method |
| CN107561870A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of sports platform adsorbent equipment and lithographic equipment |
| CN109143791A (en) * | 2018-08-29 | 2019-01-04 | 中国科学院光电技术研究所 | A kind of vacuum adhering device for fexible film substrate contact formula photoetching |
| CN110045583A (en) * | 2019-05-17 | 2019-07-23 | 中国科学院光电技术研究所 | A kind of dual surface lithography work stage based on dual masks alignment |
-
2014
- 2014-08-22 CN CN201420479170.8U patent/CN204178122U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104820346A (en) * | 2015-04-24 | 2015-08-05 | 深圳市大川光电设备有限公司 | Flat workpiece alignment method |
| CN104820346B (en) * | 2015-04-24 | 2017-04-12 | 深圳市大川光电设备有限公司 | Flat workpiece alignment method |
| CN107561870A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of sports platform adsorbent equipment and lithographic equipment |
| CN109143791A (en) * | 2018-08-29 | 2019-01-04 | 中国科学院光电技术研究所 | A kind of vacuum adhering device for fexible film substrate contact formula photoetching |
| CN110045583A (en) * | 2019-05-17 | 2019-07-23 | 中国科学院光电技术研究所 | A kind of dual surface lithography work stage based on dual masks alignment |
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