CN204174311U - A kind of hanging plate assembly for monocrystalline silicon growing furnace - Google Patents

A kind of hanging plate assembly for monocrystalline silicon growing furnace Download PDF

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Publication number
CN204174311U
CN204174311U CN201420471684.9U CN201420471684U CN204174311U CN 204174311 U CN204174311 U CN 204174311U CN 201420471684 U CN201420471684 U CN 201420471684U CN 204174311 U CN204174311 U CN 204174311U
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CN
China
Prior art keywords
hanging plate
spring
switch
monocrystalline silicon
silicon growing
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Expired - Fee Related
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CN201420471684.9U
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Chinese (zh)
Inventor
朱亮
王巍
倪军夫
孙明
周建灿
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Priority to CN201420471684.9U priority Critical patent/CN204174311U/en
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Abstract

The utility model relates to monocrystalline silicon growing furnace field, aims to provide a kind of hanging plate assembly for monocrystalline silicon growing furnace.This kind comprises linker screw, hanging plate and switch assembly for the hanging plate assembly of monocrystalline silicon growing furnace, switch assembly comprises switch assembly A and switch assembly B, switch assembly A for controlling the secondary furnace chamber of monocrystalline silicon growing furnace, can bell move, switch assembly B is for control secondary furnace chamber be independently moving or move with bell simultaneously, by the cooperation of linker screw and hanging plate, the connection between the secondary furnace chamber of monocrystalline silicon growing furnace and bell and disengaging can be realized.The utility model can realize convenient and safely getting crystalline substance in midway at any time, just realizes getting brilliant action with body of heater after slowly need not cooling, and saves cold burden time and clout heat-up time again, reduces production cost, improve production efficiency.

Description

A kind of hanging plate assembly for monocrystalline silicon growing furnace
Technical field
The utility model is about monocrystalline silicon growing furnace field, particularly a kind of hanging plate assembly for monocrystalline silicon growing furnace.
Background technology
Silicon single crystal is the major function material that photovoltaic generation utilizes sun power, more and more crucial for present information society.Single crystal growing furnace in process of production, needs midway to get crystalline substance, because body of heater also has silicon material to exist, the states such as the pressure in stove and temperature need be kept constant, need independent open auxiliary furnace chamber.Bell and secondary furnace chamber need be opened when installing the operation such as thermal field crucible and charging.Existing technical scheme is the secondary furnace chamber of the first lifting of lifting gear, and after certain altitude, lift shaft is topped bar to push up and together promoted to bell bracket again.Cause lifting mechanism complicated, lift stroke is that two steps are shared, and range of lift is longer; Bell rotates also needs manual hand manipulation or independent rotating mechanism.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, provides a kind of and can realize using same lifting gear to perform secondary furnace chamber being elevated separately and the hanging plate assembly of secondary furnace chamber and bell synchronization lifting.For solving the problems of the technologies described above, solution of the present utility model is:
A kind of hanging plate assembly for monocrystalline silicon growing furnace is provided, comprises linker screw, hanging plate and switch assembly, by the cooperation of linker screw and hanging plate, the connection between the secondary furnace chamber of monocrystalline silicon growing furnace and bell and disengaging can be realized;
Hanging plate is ring structure, be arranged on the secondary furnace chamber lower flange of monocrystalline silicon growing furnace, and hanging plate can with secondary furnace chamber lower flange for axle rotates, hanging plate is provided with at least two deep-slotted chip breakers, deep-slotted chip breaker comprises interconnective large arc and little arc, the diameter of large arc is d1, and the diameter of little arc is d2;
The secondary furnace chamber lower flange upper surface of monocrystalline silicon growing furnace is provided with at least two through holes, the deep-slotted chip breaker that through hole is corresponding with on hanging plate is respectively communicated with, the diameter of through hole is d3, linker screw can enter in deep-slotted chip breaker through through hole, and by rotating suspension fishplate bar, linker screw can in the large arc of deep-slotted chip breaker and little arc internal conversion, make linker screw on hanging plate, complete mounting and depart from, the connection realizing bell and secondary furnace chamber be separated; Secondary furnace chamber lower flange upper surface is also provided with two deep holes, for realizing the location of hanging plate after rotating to two positions;
Switch assembly comprises switch assembly A and switch assembly B, switch assembly A for controlling the secondary furnace chamber of monocrystalline silicon growing furnace, can bell carry out move (judging safe condition when simultaneously promoting secondary furnace chamber and bell motion), switch assembly B is for control secondary furnace chamber be independently moving or move (judging that secondary furnace chamber and bell are connected or disengaged position) with bell simultaneously;
Switch assembly A comprises spring pin main body, stage clip lid, handle cap, axis pin of the spring, spring and switch A, spring pin main body is arranged on hanging plate, switch A is also arranged on hanging plate, stage clip lid is arranged in spring pin main body, handle cap is arranged on axis pin of the spring, and axis pin of the spring is connected with spring pin main body by spring; By rotating suspension fishplate bar, when linker screw and hanging plate complete two positions mounting and depart from, axis pin of the spring under spring tension, can fall into two deep holes respectively, and axis pin of the spring upper surface decline trigger switch A realizes auto-lock function;
Switch assembly B comprises switch B and collision block, and switch B is arranged on hanging plate, and collision block is arranged on the side of secondary furnace chamber lower flange, and collision block is provided with a ramp structure; By rotating suspension fishplate bar, when axis pin of the spring slides between two deep holes, switch B rotates to collision block place with hanging plate, the slide assemblies of switch B slides (pressure contact) along the ramp structure of collision block, realize the effect of buffer-oriented (when linker screw is in the large arc of hanging plate deep-slotted chip breaker, switch B is in closure state, secondary furnace chamber energy independently moving, when linker screw is in the little arc of hanging plate deep-slotted chip breaker, switch B is in normally open, and secondary furnace chamber can move with bell simultaneously).
As further improvement, in described switch assembly A, in the main body of spring pin, be provided with a cavity, for holding axis pin of the spring and spring activity in chamber; Axis pin of the spring comprises seam disk for stopping spring, for pinning the roundlet axis of a cylinder of hanging plate position; Handle cap comprises for the small column of manual hand manipulation, the big disk for trigger switch A; The front end of switch A is with a retractable contact, and contact is the roller that can reduce friction, by triggering contact, under being operated in Chang Kai and normally closed two states, and feeding back signal to outside (PLC) and judges.
As further improvement, in described switch assembly B, the front end of switch B can retractable contact with one, contact is the roller that can reduce friction, for the slide assemblies as switch B, by triggering contact, under being operated in Chang Kai and normally closed two states, and feeding back signal to outside (PLC) and judge.
As further improvement, the described hanging plate assembly for monocrystalline silicon growing furnace is also provided with protector, protector, for preventing the lifting device of monocrystalline silicon growing furnace, when not reaching jacking conditions, is elevated the bell of monocrystalline silicon growing furnace, secondary furnace chamber; Jacking conditions refers to that switch assembly A axis pin of the spring falls into the deep hole of secondary furnace chamber lower flange upper surface, and axis pin of the spring upper surface decline trigger switch A realizes auto-lock function.
As further improvement, described hanging plate is provided with handle, for being realized the rotation of hanging plate by rotary handle.
As further improvement, described linker screw comprises the end face connected successively, upper cylinder, middle cylinder, lower cylinder, and is arranged on the bell upper flange of monocrystalline silicon growing furnace by lower cylinder, and bell upper flange is provided with at least two linker screws; Described end face is the circular cone spherical structure for leading, and circular cone spherical structure refers to that the summit place of circular cone is the structure of sphere, and the external diameter of upper cylinder, middle cylinder and lower cylinder is followed successively by D1, D2, D3.
As further improvement, described linker screw, hanging plate, through hole meet: D2, d2, D1, d1 reduce successively, and d3 is greater than D1, and d3 is greater than D3.
Perform secondary furnace chamber by the utility model to be elevated separately and secondary furnace chamber and bell synchronization lifting, specific works principle is:
Mechanical part: linker screw is different from hanging plate deep-slotted chip breaker relative position, its mated condition is different; Design concept is that on linker screw, cylindrical surface external diameter is D1, and middle cylindrical surface external diameter is D2, and hanging plate Baltimore groove has 2 deep-slotted chip breakers varied in size to connect to form, and large deep-slotted chip breaker external diameter is d1, and little deep-slotted chip breaker external diameter is d2.The characteristic relation of deep-slotted chip breaker and linker screw is D2 < d2 < D1 < d1; When linker screw is at deep-slotted chip breaker d1 place: due to d1 > D1, linker screw cannot be articulated on hanging plate, when secondary furnace chamber promotes and bell be in separate stage; When linker screw is at deep-slotted chip breaker d2 place: due to D1 > d2, linker screw D1 section is articulated on hanging plate, and when promoting secondary furnace chamber, bell and secondary furnace chamber together promote, and bell and secondary furnace chamber are in connection state.
Secondary furnace chamber lower flange has two places to coordinate the deep hole of axis pin of the spring, and when being in d1 or d2 deep-slotted chip breaker completely to linker screw, linker screw lower end can fall in the deep hole of secondary furnace chamber lower flange.Make axis pin of the spring trigger switch A by spring action, ensure safety when simultaneously promoting secondary furnace chamber and bell motion.
Switch B is also arranged on hanging plate, collision block is arranged on secondary furnace chamber flange side, at rotating suspension fishplate bar, when axis pin of the spring is in two positions of deep hole, by the ramp structure of collision block, collision block is different from switch B relative status, when switch B is in closure state, linker screw is in the d1 position of hanging plate deep-slotted chip breaker, and secondary furnace chamber and bell are in separate stage.When switch B is in normally open, linker screw is in the d2 position of hanging plate deep-slotted chip breaker, and secondary furnace chamber and bell are in connection state.
Electric part: reflect the situation that is connected of secondary furnace chamber and bell by switch A and switch B and lead programmer operates.When switch A triggers, determine that axis pin of the spring normally inserts in secondary furnace chamber laxative remedy flange aperture, safety when simultaneously promoting secondary furnace chamber and bell motion can be ensured.The different situations that switch B is in reflect the connection of secondary furnace chamber and bell.Lead programmer is to the operation of different states therebetween.
Suppose that the normally open of switch A is 0, closure state is 1; The normally open of switch B is 0, and closure state is 1.2 switches form 4 groups of unlike signals and feed back to program, and programable action is as following table:
Compared with prior art, the beneficial effects of the utility model are:
Convenient and safely can get crystalline substance in midway at any time, just realize after slowly need not cooling with body of heater getting brilliant action, save cold burden time and clout heat-up time again, reduce production cost, improve production efficiency.
The utility model is simple and compact for structure and lifting travel is short, can realize again a set of lifting device easily and safely and perform secondary furnace chamber and be elevated separately or secondary furnace chamber and bell synchronization lifting.
Accompanying drawing explanation
Fig. 1 is the installation plan of hanging plate and linker screw in the utility model.
Fig. 2 is the utility model breaker in middle assembly A schematic diagram.
Fig. 3 is the utility model breaker in middle assembly B right view.
Fig. 4 is the separate stage figure of hanging plate and linker screw in the utility model.
Fig. 5 is the connection state figure of hanging plate and linker screw in the utility model.
Reference numeral in figure is: 1 hanging plate; 2 linker screws; 3 secondary furnace chambers; 4 bells; 5 axis pin of the spring; 6 springs; 7 switch A; 8 spring pin main bodys; 9 stage clip lids; 10 handle caps; 11 switch B; 12 collision blocks; 13 handles.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
A kind of hanging plate assembly for monocrystalline silicon growing furnace as shown in Figure 1, comprises linker screw 2, hanging plate 1, handle 13 and switch assembly.
Linker screw 2 comprises the end face connected successively, upper cylinder, middle cylinder, lower cylinder, and is arranged on bell 4 upper flange of monocrystalline silicon growing furnace by lower cylinder, and bell 4 upper flange is provided with at least two linker screws 2; Described end face is circular cone spherical structure, and circular cone spherical structure refers to that the summit place of circular cone is the structure of sphere, and the external diameter of upper cylinder, middle cylinder and lower cylinder is followed successively by D1, D2, D3.
Hanging plate 1 is ring structure, and be arranged on secondary furnace chamber 3 lower flange of monocrystalline silicon growing furnace, hanging plate 1 is provided with handle 13, and realize hanging plate 1 with secondary furnace chamber 3 lower flange for axle rotates by rotary handle 13, rotating range is arcuate socket length on hanging plate 1.Hanging plate 1 is provided with at least two deep-slotted chip breakers, and deep-slotted chip breaker comprises interconnective large arc and little arc, and the diameter of large arc is d1, and the diameter of little arc is d2.
Secondary furnace chamber 3 lower flange of monocrystalline silicon growing furnace is provided with at least two through holes, the deep-slotted chip breaker that through hole is corresponding with on hanging plate 1 is respectively communicated with, and the diameter of through hole is d3, and linker screw 2, hanging plate 1, through hole meet: D2, d2, D1, d1 reduce successively, and d3 is greater than D1, d3 is greater than D3.As shown in Figure 2 and Figure 3, linker screw 2 can enter in deep-slotted chip breaker through through hole, and by rotating suspension fishplate bar 1, linker screw 2 can in the large arc of deep-slotted chip breaker and little arc internal conversion.When in the large arc of linker screw 2 at deep-slotted chip breaker, because d1 is greater than D1, linker screw 2 cannot be articulated on hanging plate 1, when secondary furnace chamber 3 promotes and bell 4 be in separate stage; When in the little arc of linker screw 2 at deep-slotted chip breaker, due to D1 > d2, on linker screw 2, cylinder is articulated on hanging plate 1, and when promoting secondary furnace chamber 3, bell 4 and secondary furnace chamber 3 together promote.
For matching program operates together with bell 4 secondary furnace chamber 3 or secondary furnace chamber 3, hanging plate 1 is provided with switch assembly, switch assembly comprises switch assembly A and switch assembly B, switch assembly A for controlling the secondary furnace chamber 3 of monocrystalline silicon growing furnace, can bell 4 move, switch assembly B is for control secondary furnace chamber 3 are independently movings or move with bell 4 simultaneously.
As shown in Figure 2, switch assembly A comprises spring pin main body 8, stage clip lid 9, handle cap 10, axis pin of the spring 5, spring 6 and switch A7, spring pin main body 8 is arranged on hanging plate 1, switch A7 is also arranged on hanging plate 1, stage clip lid 9 is arranged in spring pin main body 8, handle cap 10 is arranged on axis pin of the spring 5, and axis pin of the spring 5 is connected with spring pin main body 8 by spring 6; By rotating suspension fishplate bar 1, when linker screw 2 completes with hanging plate 1 two positions mounting and depart from, axis pin of the spring 5, under the tension force effect of spring 6, can fall into two deep holes respectively, and axis pin of the spring 5 upper surface decline trigger switch A7 realizes auto-lock function.Wherein, in the main body of spring pin, be provided with a cavity, for holding axis pin of the spring 5 and spring 6 up and down activity in chamber; Axis pin of the spring 5 comprises seam disk for stopping spring 6, for pinning the roundlet axis of a cylinder of hanging plate 1 position; Handle cap 10 comprises for the small column of manual hand manipulation, the big disk for trigger switch A7; The front end of switch A7 is with a retractable contact, and contact is the roller that can reduce friction, and by triggering contact, under being operated in Chang Kai and normally closed two states, and the PLC feeding back signal to outside judges.
As shown in Figure 3, switch assembly B comprises switch B11 and collision block 12, and switch B11 is arranged on hanging plate 1, and collision block 12 is arranged on the side of secondary furnace chamber 3 lower flange, and collision block 12 is provided with a ramp structure; By rotating suspension fishplate bar 1, when axis pin of the spring 5 slides between two deep holes, switch B11 rotates to collision block 12 place with hanging plate 1, the slide assemblies of switch B11 slides (pressure contact) along the ramp structure of collision block 12, realize the effect of buffer-oriented, namely when linker screw 2 is in the large arc of hanging plate 1 deep-slotted chip breaker, switch B11 is in closure state, secondary furnace chamber 3 energy independently moving, when linker screw 2 is in the little arc of hanging plate 1 deep-slotted chip breaker, switch B11 is in normally open, and secondary furnace chamber 3 can move with bell 4 simultaneously.Wherein, in switch assembly B, the front end of switch B11 can retractable contact with one, contact is the roller that can reduce friction, for the slide assemblies as switch B11, by triggering contact, under being operated in Chang Kai and normally closed two states, and the PLC feeding back signal to outside judges.
Hanging plate assembly for monocrystalline silicon growing furnace is also provided with protector, and protector, for preventing the lifting device of monocrystalline silicon growing furnace, when not reaching jacking conditions, is elevated the bell 4 of monocrystalline silicon growing furnace, secondary furnace chamber 3; Jacking conditions refers to that switch assembly A axis pin of the spring 5 falls into the deep hole of secondary furnace chamber 3 lower flange upper surface, and axis pin of the spring 5 upper surface decline trigger switch A7 realizes auto-lock function.
During installation, hanging plate 1 is arranged on secondary furnace chamber 3 lower flange, and linker screw 2 is arranged on bell 4 upper flange, and through the through hole on secondary furnace chamber 3 lower flange.Switch A7 is arranged on hanging plate 1, and axis pin of the spring 5 exists 2 different states, and when secondary furnace chamber 3 to be connected completely with bell 4 or to throw off, axis pin of the spring 5 can be in a specific position, trigger switch A7.Switch B11 is arranged on hanging plate 1, and collision block 12 is arranged on secondary furnace chamber 3 lower flange, and when secondary furnace chamber 3 to be connected completely with bell 4 or to throw off, collision block 12 and switch B11 are in 2 different states, and feed back to program.
During use, hanging plate 1 is horizontally rotated by pilot lever 13, position in the deep hole making axis pin of the spring 5 fall into secondary furnace chamber 3 upper flange, linker screw 2 is when deep-slotted chip breaker d1 position, axis pin of the spring 5 is under the tension force effect of spring 6, handle cap 10 big disk declines and trigger switch A7, switch A7 is in closure state, and feed back signal to PLC, illustrate in the correct patchhole of axis pin of the spring 5, status safety, switch B11 is by the ramp structure activated contacts of collision block 12, become normally off, and feed back signal to PLC, illustrate that linker screw 2 is in Baltimore groove d1 position, due to d1 > D1, so in its situation, linker screw 2 cannot be articulated on hanging plate 1, realize secondary furnace chamber 3 to be separated with bell 4 in uphill process, by pilot lever 13 horizontal reverse to rotating suspension fishplate bar 1, position in another deep hole making axis pin of the spring 5 fall into secondary furnace chamber 3 upper flange, linker screw 2 is when deep-slotted chip breaker d2 position, axis pin of the spring 5 is under the tension force effect of spring 6, handle cap 10 big disk declines and trigger switch A7, switch A7 is in closure state, and feed back signal to PLC, illustrate in the correct patchhole of axis pin of the spring 5, status safety, switch B11 touches less than collision block 12, become normally open, and feed back signal to PLC, illustrate that linker screw 2 is in Baltimore groove d2 position, due to D1 > d2, linker screw 2 is firmly linked with on hanging plate 1, realize secondary furnace chamber 3 and bell 4 one lifting.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed in the utility model, all should think protection domain of the present utility model.

Claims (7)

1. for a hanging plate assembly for monocrystalline silicon growing furnace, comprise linker screw, hanging plate and switch assembly, it is characterized in that, by the cooperation of linker screw and hanging plate, the connection between the secondary furnace chamber of monocrystalline silicon growing furnace and bell and disengaging can be realized;
Hanging plate is ring structure, be arranged on the secondary furnace chamber lower flange of monocrystalline silicon growing furnace, and hanging plate can with secondary furnace chamber lower flange for axle rotates, hanging plate is provided with at least two deep-slotted chip breakers, deep-slotted chip breaker comprises interconnective large arc and little arc, the diameter of large arc is d1, and the diameter of little arc is d2;
The secondary furnace chamber lower flange upper surface of monocrystalline silicon growing furnace is provided with at least two through holes, the deep-slotted chip breaker that through hole is corresponding with on hanging plate is respectively communicated with, the diameter of through hole is d3, linker screw can enter in deep-slotted chip breaker through through hole, and by rotating suspension fishplate bar, linker screw can in the large arc of deep-slotted chip breaker and little arc internal conversion, make linker screw on hanging plate, complete mounting and depart from, the connection realizing bell and secondary furnace chamber be separated; Secondary furnace chamber lower flange upper surface is also provided with two deep holes, for realizing the location of hanging plate after rotating to two positions;
Switch assembly comprises switch assembly A and switch assembly B, switch assembly A for controlling the secondary furnace chamber of monocrystalline silicon growing furnace, can bell move, switch assembly B is for control secondary furnace chamber be independently moving or move with bell simultaneously;
Switch assembly A comprises spring pin main body, stage clip lid, handle cap, axis pin of the spring, spring and switch A, spring pin main body is arranged on hanging plate, switch A is also arranged on hanging plate, stage clip lid is arranged in spring pin main body, handle cap is arranged on axis pin of the spring, and axis pin of the spring is connected with spring pin main body by spring; By rotating suspension fishplate bar, when linker screw and hanging plate complete two positions mounting and depart from, axis pin of the spring under spring tension, can fall into two deep holes respectively, and axis pin of the spring upper surface decline trigger switch A realizes auto-lock function;
Switch assembly B comprises switch B and collision block, and switch B is arranged on hanging plate, and collision block is arranged on the side of secondary furnace chamber lower flange, and collision block is provided with a ramp structure; By rotating suspension fishplate bar, when axis pin of the spring slides between two deep holes, switch B rotates to collision block place with hanging plate, and the slide assemblies of switch B slides along the ramp structure of collision block, realizes the effect of buffer-oriented.
2. a kind of hanging plate assembly for monocrystalline silicon growing furnace according to claim 1, is characterized in that, in described switch assembly A, be provided with a cavity in the main body of spring pin, for holding axis pin of the spring and spring activity in chamber; Axis pin of the spring comprises seam disk for stopping spring, for pinning the roundlet axis of a cylinder of hanging plate position; Handle cap comprises for the small column of manual hand manipulation, the big disk for trigger switch A; The front end of switch A is with a retractable contact, and contact is the roller that can reduce friction, by triggering contact, under being operated in Chang Kai and normally closed two states, and feeding back signal to outside and judges.
3. a kind of hanging plate assembly for monocrystalline silicon growing furnace according to claim 1, it is characterized in that, in described switch assembly B, the front end of switch B can retractable contact with one, contact is the roller that can reduce friction, for the slide assemblies as switch B, by triggering contact, under being operated in Chang Kai and normally closed two states, and feeding back signal to outside and judge.
4. a kind of hanging plate assembly for monocrystalline silicon growing furnace according to claim 1, it is characterized in that, the described hanging plate assembly for monocrystalline silicon growing furnace is also provided with protector, protector is for preventing the lifting device of monocrystalline silicon growing furnace, when not reaching jacking conditions, the bell of monocrystalline silicon growing furnace, secondary furnace chamber are elevated; Jacking conditions refers to that switch assembly A axis pin of the spring falls into the deep hole of secondary furnace chamber lower flange upper surface, and axis pin of the spring upper surface decline trigger switch A realizes auto-lock function.
5. a kind of hanging plate assembly for monocrystalline silicon growing furnace according to claim 1, it is characterized in that, described hanging plate is provided with handle, for being realized the rotation of hanging plate by rotary handle.
6. a kind of hanging plate assembly for monocrystalline silicon growing furnace according to claim 1, it is characterized in that, described linker screw comprises the end face connected successively, upper cylinder, middle cylinder, lower cylinder, and being arranged on the bell upper flange of monocrystalline silicon growing furnace by lower cylinder, bell upper flange is provided with at least two linker screws; Described end face is the circular cone spherical structure for leading, and circular cone spherical structure refers to that the summit place of circular cone is the structure of sphere, and the external diameter of upper cylinder, middle cylinder and lower cylinder is followed successively by D1, D2, D3.
7. a kind of hanging plate assembly for monocrystalline silicon growing furnace according to claim 6, is characterized in that, described linker screw, hanging plate, through hole meet: D2, d2, D1, d1 reduce successively, and d3 is greater than D1, and d3 is greater than D3.
CN201420471684.9U 2014-08-20 2014-08-20 A kind of hanging plate assembly for monocrystalline silicon growing furnace Expired - Fee Related CN204174311U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104213190A (en) * 2014-08-20 2014-12-17 浙江晶盛机电股份有限公司 Mounting plate assembly for monocrystalline silicon growth furnace
CN107151819A (en) * 2017-06-08 2017-09-12 浙江晶盛机电股份有限公司 For monocrystalline silicon growing furnace furnace chamber retaining mechanism
CN113005508A (en) * 2021-01-29 2021-06-22 河北晶龙阳光设备有限公司 Single crystal furnace
US20230243588A1 (en) * 2022-01-30 2023-08-03 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104213190A (en) * 2014-08-20 2014-12-17 浙江晶盛机电股份有限公司 Mounting plate assembly for monocrystalline silicon growth furnace
CN107151819A (en) * 2017-06-08 2017-09-12 浙江晶盛机电股份有限公司 For monocrystalline silicon growing furnace furnace chamber retaining mechanism
CN107151819B (en) * 2017-06-08 2023-06-23 浙江晶盛机电股份有限公司 Furnace chamber locking mechanism for monocrystalline silicon growth furnace
CN113005508A (en) * 2021-01-29 2021-06-22 河北晶龙阳光设备有限公司 Single crystal furnace
US20230243588A1 (en) * 2022-01-30 2023-08-03 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace
US11821690B2 (en) * 2022-01-30 2023-11-21 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace

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Granted publication date: 20150225

Termination date: 20190820