CN204167277U - A kind of liquid cutter cleaning device - Google Patents
A kind of liquid cutter cleaning device Download PDFInfo
- Publication number
- CN204167277U CN204167277U CN201420713520.2U CN201420713520U CN204167277U CN 204167277 U CN204167277 U CN 204167277U CN 201420713520 U CN201420713520 U CN 201420713520U CN 204167277 U CN204167277 U CN 204167277U
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- China
- Prior art keywords
- liquid cutter
- cleaning device
- slanting baffle
- liquid
- substrate
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Abstract
The utility model discloses a kind of liquid cutter cleaning device, to improve the homogeneity of substrate, and then improve product quality.Liquid cutter cleaning device comprises: the splash guard being fixed on wash chamber sidewall; Liquid cutter, is positioned at the below of splash guard; Slanting baffle, between splash guard and liquid cutter, the upper side of slanting baffle is fixedly connected with the sidewall of wash chamber, being fixedly connected with the edge of a knife top of liquid cutter compared with downside of slanting baffle.Substrate on liquid cutter and delivery roller and most of steam can be isolated by slanting baffle, and the drop be dropped on slanting baffle can flow down along the inclined-plane of slanting baffle, and can not be dropped on substrate that liquid cutter not yet rinses.Compared to prior art, this programme can greatly reduce the impact of drop on substrate homogeneity, thus improves product quality.
Description
Technical field
The utility model relates to display floater manufacturing technology field, particularly relates to a kind of liquid cutter cleaning device.
Background technology
In panel display apparatus, TFT-LCD (Thin Film Transistor Liquid Crystal Display, Thin Film Transistor-LCD, be called for short TFT-LCD) have that volume is little, low in energy consumption, manufacturing cost is relatively low and the feature such as radiationless, occupy leading position in current flat panel display market.Along with the size-enlargement of glass substrate, for ensureing the qualification rate of product, each step manufacturing process is all faced with larger challenge.
Wet etching is the important ring in display floater manufacture process, its utilize etching liquid to etch away metallic region that substrate surface does not cover photoresist, thus forms the metal level with certain pattern.As shown in Figure 1, the equipment cleaned substrate after wet etching comprises liquid cutter cleaning device 100 and spray equipment 200.In liquid cutter cleaning device 100, the edge of a knife of liquid cutter 14 is wire, can eject uniform deionization water curtain, thus gets express developed the substrate 13 on delivery roller 10, removes etching liquid residual on substrate 13.Spray equipment 200 is arranged on the downstream of liquid cutter cleaning device 100, comprises multiple shower nozzle 201, and the deionized water that shower nozzle 201 sprays can carry out drip washing to the substrate on delivery roller 10, thus is cleaned up further by substrate.
As shown in Figure 1, existing liquid cutter cleaning device 100 mainly comprises: supporting bracket 24, L shape splash guard 11 and liquid cutter 14, wherein: supporting bracket 24 is fixedly connected with the sidewall 16 of wash chamber, the top board of splash guard 11 is fixedly connected with supporting bracket 24, liquid cutter 14 is arranged on the below of splash guard 11, and the edge of a knife is towards delivery roller 10.
The defect that above-mentioned prior art exists is, liquid cutter cleaning device 100 operationally, steam very easily condenses into drop at the G angle place of the below of splash guard 11 and liquid cutter 14, drips slightly can dilute residual etching liquid on the substrate 13, thus makes etching liquid and substrate again etching reaction occur.This have impact on the homogeneity of substrate to a certain extent, and then has influence on product quality.
Utility model content
The object of the utility model embodiment is to provide a kind of liquid cutter cleaning device, to improve the homogeneity of substrate, and then improves product quality.
The liquid cutter cleaning device that the utility model embodiment provides, comprising:
Splash guard, is fixed on the sidewall of wash chamber;
Liquid cutter, is positioned at the below of splash guard;
Slanting baffle, between splash guard and liquid cutter, the upper side of described slanting baffle is fixedly connected with the sidewall of wash chamber, being fixedly connected with the edge of a knife top of liquid cutter compared with downside of described slanting baffle.
In the technical scheme of the utility model embodiment, the substrate on liquid cutter and delivery roller and most of steam can be isolated by slanting baffle, and the drop be dropped on slanting baffle can flow down along inclined-plane, and can not be dropped on substrate that liquid cutter not yet rinses.Compared to prior art, this programme can greatly reduce the impact of drop on substrate homogeneity, improves product quality.
Preferably, described slanting baffle comprises at least two joint flat units; The upper surface intersection of adjacent two joint flat units is provided with perpendicular baffle plate, and described perpendicular baffle plate and higher one flat unit saved form the first guiding gutter.First guiding gutter can rapidly by the both sides of the deionized water of convergence guiding liquid cutter cleaning device.
Preferably, between the upper side of described slanting baffle and the sidewall of wash chamber, there is the first sealing gasket.First sealing gasket can prevent drop from flowing down from the gap of slanting baffle and wash chamber sidewall, thus prevents drips on substrate, produces harmful effect to the homogeneity of substrate.
Preferably, described slanting baffle compared with between downside and the edge of a knife top of liquid cutter, there is the second sealing gasket, described slanting baffle, between the second sealing gasket and the edge of a knife top of liquid cutter, form the second guiding gutter.The both sides of the deionized water guiding liquid cutter cleaning device that slanting baffle lower surface can converge by this second guiding gutter rapidly.
Preferably, liquid cutter cleaning device also comprises: the supporting bracket be fixedly connected with the sidewall of wash chamber, and the upper surface of described supporting bracket has the 3rd guiding gutter; The top board of described splash guard is fixedly connected with the upper surface of described supporting bracket.When deionized water is infiltrated at gap place between splash guard and supporting bracket, can fast by the both sides of the 3rd guiding gutter discharged to liquid cutter cleaning device.
Preferably, the edge of a knife of described liquid cutter is towards the gap between adjacent two delivery rollers.Like this, when delivery roller not being placed substrate, the deionization water curtain of liquid cutter edge of a knife ejection can not impact delivery roller, thus decreases liquid spitting back, effectively reduces the generation of steam.
Preferably, liquid cutter cleaning device also comprises: the perpendicular baffle plate below the edge of a knife being positioned at liquid cutter, and the height of described perpendicular baffle plate is lower than the transmission plane of delivery roller.Before cleaning substrate, need first to make liquid cutter work a period of time, deionization water curtain is sprayed evenly.The splash that perpendicular baffle plate effectively can reduce liquid is set, thus reduces the generation of steam.
Preferably, liquid cutter cleaning device also comprises: be positioned at and dispel pipe below slanting baffle, above delivery roller; And to dispelling in pipe the air-blast device blasting air-flow.Air-blast device blasts dry and cold air-flow to dispelling in pipe when can not place substrate on delivery roller, thus makes to dispel pipe and dispelled by the steam below slanting baffle, reduces the condensation of drop.
Better, described in dispel pipe tube wall be distributed with multiple venthole.Blast the dry and cold air-flow dispelled in pipe to blow out from multiple venthole, thus from multiple directions, the steam below slanting baffle can be dispelled, dispel effect better.
Accompanying drawing explanation
Fig. 1 is existing cleaning equipment structural representation;
Fig. 2 is the cleaning equipment structural representation of the liquid cutter cleaning device comprising a kind of embodiment of the utility model;
Fig. 3 is the cleaning equipment structural representation of the liquid cutter cleaning device comprising the another kind of embodiment of the utility model;
Fig. 4 is the cleaning equipment structural representation of the liquid cutter cleaning device comprising another embodiment of the utility model;
Fig. 5 dispels tubular construction schematic diagram in one embodiment.
Reference numeral:
100-liquid cutter cleaning device (prior art); 24-supporting bracket (prior art); 200-spray equipment; 201-shower nozzle; 100 '-liquid cutter cleaning device; 24 '-supporting bracket; 10-delivery roller; 11-splash guard; 11a-top board; 11b-side plate; 12-drop; 13-substrate; 14-liquid cutter; 15-slanting baffle; The sidewall of 16-wash chamber; 17-flat unit; 18-erects baffle plate; 19-first sealing gasket; 20-second sealing gasket; 21-first guiding gutter; 22-second guiding gutter; 23-the 3rd guiding gutter; 25-erects baffle plate; 26-dispels pipe; 27-venthole.
Embodiment
In order to improve the homogeneity of substrate, and then improve product quality, the utility model embodiment provides a kind of liquid cutter cleaning device.In technical solutions of the utility model, be provided with slanting baffle between splash guard and liquid cutter, the upper side of this slanting baffle is fixedly connected with the sidewall of wash chamber, being fixedly connected with the edge of a knife top of liquid cutter compared with downside of this slanting baffle.Substrate on liquid cutter and delivery roller and most of steam can be isolated by slanting baffle, and the drop be dropped on slanting baffle can flow down along inclined-plane, and can not be dropped on substrate that liquid cutter not yet rinses.Therefore, this programme can greatly reduce the impact of drop on substrate homogeneity, improves product quality.For making the purpose of this utility model, technical scheme and advantage clearly, by the following examples the utility model is described in further detail.
As shown in Figure 2, the utility model embodiment provides a kind of liquid cutter cleaning device 100 ', comprising:
Splash guard 11, is fixed on the sidewall 16 of wash chamber;
Liquid cutter 14, is positioned at the below of splash guard 11;
Slanting baffle 15, between splash guard 11 and liquid cutter 14, the upper side of slanting baffle 15 is fixedly connected with the sidewall 16 of wash chamber, being fixedly connected with the edge of a knife top of liquid cutter 14 compared with downside of slanting baffle 15.
The deionized water that splash guard 11 can prevent spray equipment 200 from spraying splashes on the substrate 13 of liquid cutter 14, slanting baffle 15 and pending cleaning, also plays certain buffer action to the steam outside cover simultaneously.The concrete shape of splash guard 11 is not limit, and at Fig. 2 in technical scheme embodiment illustrated in fig. 4, splash guard 11 is L-shaped, comprises top board 11a and side plate 11b, and wherein top board 11a is fixed on the sidewall 16 of wash chamber.
As shown in Figure 2, substrate 13 transmits (delivery roller 10 rotates counterclockwise) to the left along shown by arrow direction.Liquid cutter 14 is arranged on the below of splash guard 11 and the side plate 11b of close splash guard 11, namely near the exit of liquid cutter cleaning device 100 '.Liquid cutter 14 by spraying deionization water curtain to substrate 13, thus gets etching liquid residual on substrate 13 express developed.Substrate 13 is sent to the below of spray equipment 200 after rinsing through deionization water curtain, proceeds deionized water drip washing.
The concrete shape of slanting baffle 15 is not limit, and understandably, its width should be greater than the width (width refers to the horizontal size perpendicular to substrate 13 direction of transfer) of substrate 13 here.In order to allow most of steam isolate with liquid cutter 14 and substrate 13, the position of slanting baffle 15 should be low as much as possible.
In the technical scheme of the utility model embodiment, substrate 13 on liquid cutter 14 and delivery roller 10 can be isolated with most of steam by slanting baffle 15, the drop 12 be dropped on slanting baffle 15 can flow down along the inclined-plane of slanting baffle 15, and can not be dropped on the substrate 13 that not yet rinses.Compared to prior art, this programme can greatly reduce the impact of drop on substrate homogeneity, improves product quality.
As shown in Figure 3, the plate body of slanting baffle 15 can be a flat board.Embodiment as shown in Figure 2 and Figure 4, slanting baffle 15 also can comprise at least two joint flat units 17; The upper surface intersection of adjacent two joint flat units 17 is provided with perpendicular baffle plate 18, and perpendicular baffle plate 18 forms the first guiding gutter 21 (V-shaped groove) with higher one flat unit saved.The drop be dropped on a higher joint flat unit can flow in the first guiding gutter 21 along inclined-plane under gravity, and fast discharged to the both sides (drainage direction is perpendicular to page) of liquid cutter cleaning device 100 '.The quantity of flat unit 17 can design according to the real space in splash guard 11.As shown in Figure 4, in this embodiment, slanting baffle 15 comprises three joint flat units 17, and the upper surface intersection of adjacent two joint flat units 17 is provided with perpendicular baffle plate 18.
The upper side of slanting baffle 15 and the sidewall 16 of wash chamber can be achieved a fixed connection by securing member.Shown in Fig. 2, in this embodiment, between the upper side of slanting baffle 15 and the sidewall 16 of wash chamber, there is the first sealing gasket 19.First sealing gasket 19 can prevent drop from flowing down from the gap of slanting baffle 15 and wash chamber sidewall 16, thus prevents drips on the substrate 13, produces harmful effect to the homogeneity of substrate.
In addition, slanting baffle 15 compared with having the second sealing gasket 20 between downside and the edge of a knife top of liquid cutter 14, form the second guiding gutter 22 between slanting baffle 15, second sealing gasket 20 and the edge of a knife top of liquid cutter 14.When the lower surface condensation of slanting baffle 15 has a drop, drop can flow in the second guiding gutter 22 along inclined-plane under gravity, and fast discharged to the both sides of liquid cutter cleaning device 100 '.
In the prior art, as shown in Figure 1, deionized water very easily infiltrates in the gap place between splash guard 11 and supporting bracket 24, and these deionized waters are dropped in the homogeneity that substrate 13 also can have influence on substrate, and then have influence on product quality.For this technical problem, in the preferred embodiment shown in the utility model Fig. 2, liquid cutter cleaning device 100 ' also comprises further: the supporting bracket 24 ' be fixedly connected with the sidewall 16 of wash chamber, and the upper surface of supporting bracket 24 ' has the 3rd guiding gutter 23; The top board 11a of splash guard 11 is fixedly connected with the upper surface of supporting bracket 24 '.Can be achieved a fixed connection by securing member between the top board 11a of splash guard 11 and supporting bracket 24 '.When deionized water is infiltrated at gap place between splash guard 11 and supporting bracket 24 ', can fast by the both sides of the 3rd guiding gutter 23 discharged to liquid cutter cleaning device 100 '.The concrete shape of the 3rd guiding gutter 23 is not limit, and can be U-lag, V-shaped groove or rectangular channel etc.In addition, the top board 11a of splash guard 11 also can directly and the sidewall 16 of wash chamber be tightly connected, be isolated in the outside of splash guard 11 with the drop produced by spray.
Liquid cutter 14 is when just starting, and the deionization water curtain of ejection is even not, stable, is therefore unsuitable for rinsing substrate.Common way is, first makes liquid cutter 14 start a period of time, and after even until deionization water curtain, stable, then below substrate 13 being sent to liquid cutter cleaning device 100 ' is cleaned.As shown in Figure 1, in the prior art, the edge of a knife of liquid cutter 14 is towards delivery roller 10, when delivery roller 10 does not place substrate, deionization water curtain impacts delivery roller 10 can produce splash, and this has increased the weight of the generation of steam in splash guard 11, thus causes harmful effect to product quality.As shown in Figures 2 to 4, in the technical scheme of the utility model embodiment, the edge of a knife of liquid cutter 14 is towards the gap between adjacent two delivery rollers 10.Like this, when delivery roller 10 does not place substrate, the deionization water curtain of liquid cutter 14 edge of a knife ejection can not impact delivery roller 10, thus decreases liquid spitting back, and then effectively reduces the generation of steam.
In addition, in order to strengthen anti-splash effect further, liquid cutter cleaning device 100 ' also can comprise: the perpendicular baffle plate 25 below the edge of a knife being positioned at liquid cutter 14, and the height of perpendicular baffle plate 25 should lower than the transmission plane of delivery roller 10.The splash that perpendicular baffle plate 25 effectively can reduce liquid is set, thus reduces the generation of steam.
As shown in Figure 2 and Figure 4, as a preferred version of the utility model embodiment, liquid cutter cleaning device 100 ' also can comprise: be positioned at and dispel pipe 26 below slanting baffle 15, above delivery roller 10; And to dispelling the air-blast device (not shown) blasting air-flow in pipe 26.Air-blast device blasts dry and cold air-flow to dispelling in pipe 26 when can not place substrate on delivery roller 10, thus makes to dispel pipe 26 and dispelled by the steam below slanting baffle 15, reduces the condensation of drop.As shown in Figure 5, better, the tube wall dispelling pipe 26 is distributed with multiple venthole 27, and blasting the dry and cold air-flow dispelled in pipe 26 can blow out from multiple venthole 27, thus can be dispelled by the steam below slanting baffle 15 from multiple directions, dispels effect better.Adopting the program, also not easily condenses drop in the G angle place of liquid cutter 14.
It is worth mentioning that, the technical scheme that the utility model embodiment provides also can be used in other similar cleaning.Not easily condensing drop in the below of slanting baffle, thus decreases the impact that drips causes technique or product quality.
Obviously, those skilled in the art can carry out various change and modification to the utility model and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.
Claims (9)
1. a liquid cutter cleaning device, is characterized in that, comprising:
Splash guard, is fixed on the sidewall of wash chamber;
Liquid cutter, is positioned at the below of splash guard;
Slanting baffle, between splash guard and liquid cutter, the upper side of described slanting baffle is fixedly connected with the sidewall of wash chamber, being fixedly connected with the edge of a knife top of liquid cutter compared with downside of described slanting baffle.
2. liquid cutter cleaning device as claimed in claim 1, is characterized in that, described slanting baffle comprises at least two joint flat units; The upper surface intersection of adjacent two joint flat units is provided with perpendicular baffle plate, and described perpendicular baffle plate and higher one flat unit saved form the first guiding gutter.
3. liquid cutter cleaning device as claimed in claim 1, is characterized in that having the first sealing gasket between the upper side of described slanting baffle and the sidewall of wash chamber.
4. liquid cutter cleaning device as claimed in claim 1, is characterized in that, described slanting baffle compared with between downside and the edge of a knife top of liquid cutter, there is the second sealing gasket, described slanting baffle, between the second sealing gasket and the edge of a knife top of liquid cutter, form the second guiding gutter.
5. the liquid cutter cleaning device as described in any one of Claims 1 to 4, is characterized in that, also comprises the supporting bracket be fixedly connected with the sidewall of wash chamber, and the upper surface of described supporting bracket has the 3rd guiding gutter; The top board of described splash guard is fixedly connected with the upper surface of described supporting bracket.
6. the liquid cutter cleaning device as described in any one of Claims 1 to 4, is characterized in that, the edge of a knife of described liquid cutter is towards the gap between adjacent two delivery rollers.
7. the liquid cutter cleaning device as described in any one of Claims 1 to 4, is characterized in that, also comprise: the perpendicular baffle plate below the edge of a knife being positioned at liquid cutter, and the height of described perpendicular baffle plate is lower than the transmission plane of delivery roller.
8. the liquid cutter cleaning device as described in any one of Claims 1 to 4, is characterized in that, also comprise:
Be positioned at and dispel pipe below slanting baffle, above delivery roller; And to dispelling in pipe the air-blast device blasting air-flow.
9. liquid cutter cleaning device as claimed in claim 8, is characterized in that, described in dispel pipe tube wall be distributed with multiple venthole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420713520.2U CN204167277U (en) | 2014-11-24 | 2014-11-24 | A kind of liquid cutter cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420713520.2U CN204167277U (en) | 2014-11-24 | 2014-11-24 | A kind of liquid cutter cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204167277U true CN204167277U (en) | 2015-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420713520.2U Withdrawn - After Issue CN204167277U (en) | 2014-11-24 | 2014-11-24 | A kind of liquid cutter cleaning device |
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| Country | Link |
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| CN (1) | CN204167277U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104362118A (en) * | 2014-11-24 | 2015-02-18 | 合肥鑫晟光电科技有限公司 | Liquid cutter cleaning device |
| CN108074835A (en) * | 2016-11-09 | 2018-05-25 | 盟立自动化股份有限公司 | Wet process device |
-
2014
- 2014-11-24 CN CN201420713520.2U patent/CN204167277U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104362118A (en) * | 2014-11-24 | 2015-02-18 | 合肥鑫晟光电科技有限公司 | Liquid cutter cleaning device |
| WO2016082419A1 (en) * | 2014-11-24 | 2016-06-02 | 京东方科技集团股份有限公司 | Liquid cutter cleaning device |
| CN104362118B (en) * | 2014-11-24 | 2017-02-01 | 合肥鑫晟光电科技有限公司 | Liquid cutter cleaning device |
| US10157754B2 (en) | 2014-11-24 | 2018-12-18 | Boe Technology Group Co., Ltd. | Liquid knife cleaning device |
| CN108074835A (en) * | 2016-11-09 | 2018-05-25 | 盟立自动化股份有限公司 | Wet process device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150218 Effective date of abandoning: 20170201 |