CN204128731U - A kind of MEMS oil-filled pressure transducer - Google Patents
A kind of MEMS oil-filled pressure transducer Download PDFInfo
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- CN204128731U CN204128731U CN201420560370.6U CN201420560370U CN204128731U CN 204128731 U CN204128731 U CN 204128731U CN 201420560370 U CN201420560370 U CN 201420560370U CN 204128731 U CN204128731 U CN 204128731U
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Abstract
The utility model discloses the MEMS oil-filled pressure transducer of a kind of new structure belonging to pressure sensor technique field.Comprise pressure chip and be provided with the metal base of cavity, metal base is provided with the boss extended to internal diameter direction, boss arranges double-layer circuit board, fluid sealant is applied between boss and double-layer circuit board, at the periphery of double-layer circuit board, several circuit vias are set, and circuit vias is sealed covering completely by fluid sealant, weld-ring, metallic membrane, metal base forms an airtight cavity together with double-layer circuit board, pressure chip to be placed in cavity and to be bonded on double-layer circuit board, silicone oil is full of in cavity, pressure chip is connected with double-layer circuit board through nation's line, double-layer circuit board is provided with lead-in wire.The double-layer circuit board of this structure employing particular design substitutes the carrier that the glass insulator generally used at present is used as pressure chip, and this circuit board also possesses the function that electric signal is drawn simultaneously, and this circuit board is tightly connected by fluid sealant and pressure base.
Description
Technical field
The utility model relates to a kind of pressure transducer, particularly relates to a kind of MEMS oil-filled pressure transducer of new structure.
Background technology
Current MEMS (microelectromechanical systems) oil-filled pressure transducer is the function that supporting body using the glass insulator of a TO structure as pressure chip and circuit are drawn, and this glass insulator is connected with metal base by resistance welded.
Traditional MEMS oil-filled pressure transducer as shown in Figure 1, comprise the metal base 3 being provided with cavity, metal base is disposed with metallic membrane 6 and weld-ring 1, metallic membrane 6, link together by laser bonding between weld-ring 1 and metal base 3, glass insulator is connected with metal base by resistance welded, by weld-ring 1, metallic membrane 6, metal base 3 and glass insulator 11 weld the airtight cavity of formation one, pressure chip 4 to be placed in cavity and to be bonded on glass insulator 11, silicone oil 7 is full of in cavity, pressure chip 4 is connected with lead-in wire 5 through nation's line 9, be delivered on pressure chip 4 by measuring pressure 12 by the silicone oil 7 be sealed in this cavity, signal is then drawn by the lead-in wire 5 on nation's line 9 and glass insulator 11, connect follow-up signal treatment circuit again.
This structure has following three problems:
1, glass insulator cost is higher;
2, sintered glass has the risk of leakage;
3, with shell welding process in have welding stress, and failure welding easily causes leakage.
Utility model content
For a change MEMS oil-filled pressure transducer infrastructure cost is higher at present, has the problem of welding stress and risk of leakage, proposes the new structure substituting glass insulator with the circuit board of particular design, provide a kind of MEMS oil-filled pressure transducer of new structure.
The utility model technical solution problem adopts following technical scheme:
A kind of MEMS oil-filled pressure transducer of new structure, comprise pressure chip and be provided with the metal base of cavity, metal base is disposed with metallic membrane and weld-ring, metallic membrane, by being welded to connect between weld-ring and metal base, it is characterized in that: described metal base is provided with the boss extended to internal diameter direction, described boss arranges double-layer circuit board, described boss is used for lifting described double-layer circuit board, fluid sealant is applied between described boss and described double-layer circuit board, at the periphery of described double-layer circuit board, several circuit vias are set, and described circuit vias is sealed covering completely by described fluid sealant, weld-ring, metallic membrane, metal base forms an airtight cavity together with double-layer circuit board, described pressure chip to be placed in cavity and to be bonded on described double-layer circuit board, silicone oil is full of in described cavity, described pressure chip is connected with double-layer circuit board through nation's line, described double-layer circuit board is provided with lead-in wire.
The electric signal of double-layer circuit board side can be guided to opposite side by described circuit vias.
Described fluid sealant plays the effect of insulation, plug-hole and sealing.
Because circuit vias is sealed covering completely by fluid sealant, silicone oil can not be revealed by circuit vias.
Groove can be set on metal base outer peripheral face, O-ring seal is set in groove.When being connected with miscellaneous part to make MEMS oil-filled pressure transducer, play sealing function.
Described metal base and described metallic membrane material are stainless steel.
Be delivered to silicone oil, pressure chip by measuring pressure successively by metallic membrane, signal is then drawn through nation's line, double-layer circuit board, lead-in wire, then is connected follow-up signal treatment circuit successively.
In this technical scheme, adopt the supporting body of circuit board as pressure chip of particular design, simultaneously simplicity of design circuit on circuit boards, electric signal is drawn, and this double-layer circuit board is tightly connected by gluing mode and metal base, when special structural design makes to bear ambient pressure, circuit board and metal base are compression relations, even if so guarantee that adhesive layer is not also destroyed when bearing larger pressure, still keep good sealing.
The beneficial effects of the utility model are: the MEMS oil-filled pressure transducer of the new structure that the utility model provides.The double-layer circuit board of this structure employing particular design substitutes the carrier that the glass insulator generally used at present is used as pressure chip, and this circuit board also possesses the function that electric signal is drawn simultaneously, and this circuit board is tightly connected by fluid sealant and pressure base.Compared with traditional structure, this new structure has more advantage in reliability and cost.Use the glass insulator of the circuit board alternative structure complexity of simple structure, while reducing costs, keep original function constant, and effectively prevent several risk point easily gone wrong.
Accompanying drawing explanation
Fig. 1 is the structure of traditional oil-filled pressure transducer;
Fig. 2 is the structure of the MEMS oil-filled pressure transducer that embodiment 1 provides;
Fig. 3 is the double-layer circuit board schematic diagram how realizing circuit is drawn in the MEMS oil-filled pressure transducer that provides of embodiment 1;
In figure, mark is illustrated as: 1-weld-ring (stainless steel), 2-weld seam, 3-metal base (stainless steel), 4-pressure chip, 5-goes between, 6-metallic membrane (stainless steel), 7-silicone oil, 8-O-ring seal, 9-nation line, 10-weld seam (electric resistance welding), 11-glass insulator, 12-by measuring pressure, 13-fluid sealant, 14-double-layer circuit board, 15-circuit vias.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the technical solution of the utility model is further elaborated.
Embodiment 1
Present embodiments provide a kind of MEMS oil-filled pressure transducer, as shown in Figure 2, comprise pressure chip 4 and be provided with the metal base 3 of cavity, metal base is disposed with metallic membrane 6 and weld-ring 1, metallic membrane 6, by being welded to connect between weld-ring 1 and metal base 3, it is characterized in that: described metal base 3 is provided with the boss extended to internal diameter direction, described boss is arranged double-layer circuit board 14, described boss is used for lifting described double-layer circuit board 14, fluid sealant 13 is applied between described boss and described double-layer circuit board 14, at the periphery of described double-layer circuit board 14, several circuit vias 15 are set, and described circuit vias 15 is sealed covering completely by described fluid sealant 13, weld-ring 1, metallic membrane 6, metal base 3 forms an airtight cavity together with double-layer circuit board 14, described pressure chip 4 to be placed in cavity and to be bonded on described double-layer circuit board 14, silicone oil 7 is full of in described cavity, described pressure chip 4 is connected with double-layer circuit board 14 through nation's line 9, described double-layer circuit board 14 is provided with lead-in wire 5.
The electric signal of double-layer circuit board 14 side can be guided to opposite side by described circuit vias 15.The double-layer circuit board schematic diagram how realizing circuit is drawn as shown in Figure 3.
Described fluid sealant 13 plays the effect of insulation, plug-hole and sealing.
Because circuit vias 15 is sealed covering completely by fluid sealant 13, silicone oil 7 can not be revealed by circuit vias.
Groove can be set on metal base 3 outer peripheral face, O-ring seal 8 is set in groove.When being connected with miscellaneous part to make MEMS oil-filled pressure transducer, play sealing function.
Described metal base 3 and described metallic membrane 6 material can be stainless steel.
Be delivered to silicone oil 7, pressure chip 4 by measuring pressure 12 successively by metallic membrane 6, signal is then drawn through nation's line 9, double-layer circuit board 14, lead-in wire 5, then is connected follow-up signal treatment circuit successively.
Because the cost of double-layer circuit board is lower than glass insulator, and avoid the potential risk of leakage that sintered glass may cause, so take advantage in reliability and cost.
Last it is noted that above embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of each embodiment technical scheme of the utility model.
Claims (5)
1. a MEMS oil-filled pressure transducer, comprise pressure chip (4) and be provided with the metal base (3) of cavity, metal base is disposed with metallic membrane (6) and weld-ring (1), metallic membrane (6), by being welded to connect between weld-ring (1) and metal base (3), it is characterized in that: described metal base (3) is provided with the boss extended to internal diameter direction, described boss is arranged double-layer circuit board (14), described boss is used for lifting described double-layer circuit board (14), fluid sealant (13) is applied between described boss and described double-layer circuit board (14), at the periphery of described double-layer circuit board (14), several circuit vias (15) are set, and described circuit vias (15) is sealed covering completely by described fluid sealant (13), weld-ring (1), metallic membrane (6), metal base (3) and double-layer circuit board (14) form an airtight cavity together, described pressure chip (4) to be placed in cavity and to be bonded on described double-layer circuit board (14), silicone oil (7) is full of in described cavity, described pressure chip (4) is connected with double-layer circuit board (14) through nation's line (9), described double-layer circuit board (14) is provided with lead-in wire (5).
2. MEMS oil-filled pressure transducer according to claim 1, is characterized in that, the electric signal of double-layer circuit board (14) side can be guided to opposite side by described circuit vias (15).
3. MEMS oil-filled pressure transducer according to claim 1, is characterized in that, described metal base (3) outer peripheral face arranges groove, arranges O-ring seal (8) in groove.
4. MEMS oil-filled pressure transducer according to claim 1, is characterized in that, described metal base (3) and described metallic membrane (6) material are stainless steel.
5. MEMS oil-filled pressure transducer according to claim 1, it is characterized in that, silicone oil (7), pressure chip (4) is delivered to successively by metallic membrane (6) by measuring pressure (12), signal is then drawn through nation's line (9), double-layer circuit board (14), lead-in wire (5), then is connected follow-up signal treatment circuit successively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420560370.6U CN204128731U (en) | 2014-09-26 | 2014-09-26 | A kind of MEMS oil-filled pressure transducer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420560370.6U CN204128731U (en) | 2014-09-26 | 2014-09-26 | A kind of MEMS oil-filled pressure transducer |
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| Publication Number | Publication Date |
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| CN204128731U true CN204128731U (en) | 2015-01-28 |
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| CN201420560370.6U Active CN204128731U (en) | 2014-09-26 | 2014-09-26 | A kind of MEMS oil-filled pressure transducer |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106238874A (en) * | 2016-08-19 | 2016-12-21 | 麦克传感器股份有限公司 | The immersion oil welder of a kind of filling type sensor and method |
| CN106430085A (en) * | 2016-12-09 | 2017-02-22 | 苏州美仑凯力电子有限公司 | Protection method for MEMS pressure sensor packaging |
| CN107144391A (en) * | 2017-07-10 | 2017-09-08 | 深圳瑞德感知科技有限公司 | A kind of integrated form MEMS oil-filled pressure transducers |
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN108267259A (en) * | 2018-03-19 | 2018-07-10 | 深圳瑞德感知科技有限公司 | Ceramic MEMS pressure sensor |
| CN108387288A (en) * | 2017-02-03 | 2018-08-10 | 横河电机株式会社 | Water-level gauge, hydraulic pressure sensor device and water level measurement system |
| CN109425459A (en) * | 2017-08-22 | 2019-03-05 | 横河电机株式会社 | Sensor |
| CN109632154A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing real-time testing system and preparation method thereof |
| CN109632153A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing vertical load and the method for real-timely testing of horizontal displacement |
| CN109959481A (en) * | 2017-12-14 | 2019-07-02 | 浙江三花制冷集团有限公司 | A kind of pressure sensor |
| CN109990942A (en) * | 2019-04-30 | 2019-07-09 | 芜湖天波光电技术研究院有限公司 | A kind of high-pressure common-rail pressure sensor |
| CN111982360A (en) * | 2020-09-01 | 2020-11-24 | 辽宁大学 | Small-sized pressure sensing device for robot foot |
-
2014
- 2014-09-26 CN CN201420560370.6U patent/CN204128731U/en active Active
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106238874A (en) * | 2016-08-19 | 2016-12-21 | 麦克传感器股份有限公司 | The immersion oil welder of a kind of filling type sensor and method |
| CN106238874B (en) * | 2016-08-19 | 2018-04-13 | 麦克传感器股份有限公司 | The immersion oil welder and method of a kind of filling type sensor |
| CN106430085A (en) * | 2016-12-09 | 2017-02-22 | 苏州美仑凯力电子有限公司 | Protection method for MEMS pressure sensor packaging |
| CN108387288A (en) * | 2017-02-03 | 2018-08-10 | 横河电机株式会社 | Water-level gauge, hydraulic pressure sensor device and water level measurement system |
| CN107144391A (en) * | 2017-07-10 | 2017-09-08 | 深圳瑞德感知科技有限公司 | A kind of integrated form MEMS oil-filled pressure transducers |
| CN109425459B (en) * | 2017-08-22 | 2021-12-28 | 横河电机株式会社 | Sensor with a sensor element |
| CN109425459A (en) * | 2017-08-22 | 2019-03-05 | 横河电机株式会社 | Sensor |
| CN109959481A (en) * | 2017-12-14 | 2019-07-02 | 浙江三花制冷集团有限公司 | A kind of pressure sensor |
| CN109959481B (en) * | 2017-12-14 | 2021-03-26 | 浙江三花制冷集团有限公司 | Pressure sensor |
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN108267259A (en) * | 2018-03-19 | 2018-07-10 | 深圳瑞德感知科技有限公司 | Ceramic MEMS pressure sensor |
| CN109632153A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing vertical load and the method for real-timely testing of horizontal displacement |
| CN109632154A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing real-time testing system and preparation method thereof |
| CN109990942A (en) * | 2019-04-30 | 2019-07-09 | 芜湖天波光电技术研究院有限公司 | A kind of high-pressure common-rail pressure sensor |
| CN111982360A (en) * | 2020-09-01 | 2020-11-24 | 辽宁大学 | Small-sized pressure sensing device for robot foot |
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