CN204125555U - Profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation - Google Patents
Profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation Download PDFInfo
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- CN204125555U CN204125555U CN201420424092.1U CN201420424092U CN204125555U CN 204125555 U CN204125555 U CN 204125555U CN 201420424092 U CN201420424092 U CN 201420424092U CN 204125555 U CN204125555 U CN 204125555U
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- inner bag
- reduction furnace
- stationary installation
- profiling anode
- profiling
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- 238000009434 installation Methods 0.000 title claims abstract description 62
- 238000009713 electroplating Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 25
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 22
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 37
- 229910052742 iron Inorganic materials 0.000 claims abstract description 18
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910000746 Structural steel Inorganic materials 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 abstract description 18
- 238000002203 pretreatment Methods 0.000 abstract description 4
- 230000007423 decrease Effects 0.000 abstract description 2
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 229920005591 polysilicon Polymers 0.000 abstract description 2
- 238000007733 ion plating Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Vertical, Hearth, Or Arc Furnaces (AREA)
Abstract
The utility model relates to profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, belongs to the technical field of auxiliary equipment in production of polysilicon industry.The utility model comprises profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt bottom profiling anode inner bag, inner bag top standing bolt, inner bag; Described cruciform stationary installation comprises side standing bolt, cross frame, fixed triangle iron and top stationary shaft.The utility model is without the need to a large amount of plating solution and operating equipment, and without the need to reduction furnace is carried out long-distance transportation, security is high.In addition, this equipment mechanism is simple, and cost is low, easy to use and flexible, and operability is good, decreases human cost and energy consumption, and auxiliary plating and pre-treatment operation thereof, use rear easy accessibility effectively, is convenient to mobile, reduces the movement of huge reduction furnace.
Description
Technical field
The utility model relates to profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, belongs to the technical field of auxiliary equipment in production of polysilicon industry.
Background technology
Current reduction furnace inner wall surface coating on the market adopts vacuum ion plating, needs, by reduction furnace long distance transportation to ion plating producer, to carry out plating with professional ion plating equipment.And adopt electrochemical plating to carry out plating required equipment simply, can field conduct.But due to the tall and big bad enforcement of reduction furnace conventional electroplating method, using reduction furnace as container, plating solution directly can be added reduction furnace and carries out plating, the problems such as this needs to prepare a large amount of plating solutions, and cost is high, the resource causing waste a large amount of.
Summary of the invention
The technical problems to be solved in the utility model is: provide the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, the transport needing long distance during vacuum ion plating is adopted for solving existing reduction furnace inwall, specialized factory's process problem and reduction furnace adopt the problem that when electroplating, plating solution requirement is large, have saved transportation cost and electroplating cost.
Technical solutions of the utility model are: the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Described top stationary shaft 6 is welded into one with cross frame 4 by fixed triangle iron 5.
Described cross frame 4 can overlap and have rope for connecting the lifting appliance of reduction furnace.
Described cross frame 4 adopts High Strength Structural Steel.
Described profiling anode inner bag can be soluble anode, and the metal being plated in reduction furnace inwall needed for employing is made.
The described profiling anode assembly that is equipped with is placed in the base 7 identical with reduction furnace bottom shape with the bottom of the reduction furnace of criss-cross stationary installation.
Working process of the present utility model is: in use, first profiling anode inner bag is placed in reduction furnace, coaxially nested with reduction furnace, by inner bag top standing bolt 1, bottom inner bag, standing bolt 2 is fixed on reduction furnace inwall, then cruciform stationary installation is loaded onto at the top of reduction furnace, cross frame 4 in cruciform stationary installation clamps the opening end of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, finally mounted reduction furnace is hung operation room to fix, time fixing, reduction furnace bottom is placed in the preprepared base 7 identical with reduction furnace bottom shape, keep reduction furnace firm, balance, be convenient to carry out follow-up electroplating operations.
Principle of work of the present utility model is: during plating, first on reduction furnace, profiling anode assembly and stationary installation is fixed, secondly the reduction furnace being fixed with profiling anode and cruciform stationary installation is lifted in base 7 by cruciform stationary installation, and keep reduction furnace firm, balance, between profiling anode inner bag and the inwall of reduction furnace, inject pretreatment solution again carry out oil removing, pickling, operate Deng pre-treatment, then using the plating piece of the inwall of reduction furnace as negative electrode, receive the negative electrode of electroplating power supply, profiling anode inner bag in profiling anode assembly is as anode, receive the anode of electroplating power supply, plating solution is injected between profiling anode inner bag and the inwall of reduction furnace, calculate reduction furnace inner wall area, calculate need open current value according to current density, finally electroplating power supply opened and be adjusted to the current value previously calculated, implement plating.
The beneficial effects of the utility model are: the utility model provides a kind of similar to reduction furnace shape, and radius is less than the profiling anode of reduction furnace inwall radius, and stationary installation.By stationary installation, profiling anode is nested with reduction furnace inwall concentric shafts and be fixed in reduction furnace.This device is applicable to reduction furnace plating and pre-treatment operating process, solves existing reduction furnace inwall and adopts the transport needing long distance during vacuum ion plating, the problem of specialized factory's process.Simultaneously the use of profiling anode, occupies the most of volume in reduction furnace, solves tradition plating and does not use during profiling anode and cause the problem that plating solution demand is large, saved cost;
This profiling anode, and stationary installation is without the need to a large amount of plating solution and operating equipment, without the need to reduction furnace is carried out long-distance transportation, security is high.In addition, this equipment mechanism is simple, and cost is low, easy to use and flexible, and operability is good, decreases human cost and energy consumption, and auxiliary plating and pre-treatment operation thereof, use rear easy accessibility effectively, is convenient to mobile, reduces the movement of huge reduction furnace.
Accompanying drawing explanation
Fig. 1 is the utility model profiling anode inner bag and cruciform stationary installation front view;
Fig. 2 is the utility model profiling anode inner bag front view;
Fig. 3 is the utility model cross frame front view;
Fig. 4 is the utility model cross frame vertical view.
Each label in Fig. 1-4: 1-inner bag top standing bolt, standing bolt bottom 2-inner bag, 3-side standing bolt, 4-cross frame, 5-fixed triangle iron, 6-top stationary shaft, 7-base, 8-solution.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Embodiment 1: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Embodiment 2: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Embodiment 3: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Described top stationary shaft 6 is welded into one with cross frame 4 by fixed triangle iron 5.
Embodiment 4: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Described top stationary shaft 6 is welded into one with cross frame 4 by fixed triangle iron 5.
Described cross frame 4 can overlap and have rope for connecting the lifting appliance of reduction furnace.
Embodiment 5: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Described top stationary shaft 6 is welded into one with cross frame 4 by fixed triangle iron 5.
Described cross frame 4 can overlap and have rope for connecting the lifting appliance of reduction furnace.
Described cross frame 4 adopts High Strength Structural Steel.
Embodiment 6: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening to pass through four side standing bolts 3, and top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Described top stationary shaft 6 is welded into one with cross frame 4 by fixed triangle iron 5.
Described cross frame 4 can overlap and have rope for connecting the lifting appliance of reduction furnace.
Described cross frame 4 adopts High Strength Structural Steel.
Described profiling anode inner bag can be soluble anode, and the metal being plated in reduction furnace inwall needed for employing is made.
The described profiling anode assembly that is equipped with is placed in the base 7 identical with reduction furnace bottom shape with the bottom of the reduction furnace of criss-cross stationary installation.
Embodiment 7: as Figure 1-4, the profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation, comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt 2 bottom profiling anode inner bag, inner bag top standing bolt 1, inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt 2 bottom inner bag top standing bolt 1, inner bag, inner bag top standing bolt 1 has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution 8 is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt 3, cross frame 4, fixed triangle iron 5 and top stationary shaft 6;
Cross frame 4 in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts 3, top stationary shaft 6 passes the center of cross frame 4 and inserts a reduction furnace bottom part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
Bottom the axle center of described top stationary shaft 6 and inner bag, standing bolt 2 point-blank.
Described top stationary shaft 6 is welded into one with cross frame 4 by fixed triangle iron 5.
Described cross frame 4 can overlap and have rope for connecting the lifting appliance of reduction furnace.
Described cross frame 4 adopts High Strength Structural Steel.
The described profiling anode assembly that is equipped with is placed in the base 7 identical with reduction furnace bottom shape with the bottom of the reduction furnace of criss-cross stationary installation.
By reference to the accompanying drawings specific embodiment of the utility model is explained in detail above, but the utility model is not limited to above-described embodiment, in the ken that those of ordinary skill in the art possess, various change can also be made under the prerequisite not departing from the utility model aim.
Claims (7)
1. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process and a stationary installation, is characterized in that: comprise profiling anode assembly and criss-cross stationary installation; Described profiling anode assembly comprises standing bolt (2) bottom profiling anode inner bag, inner bag top standing bolt (1), inner bag; Described profiling anode inner bag is identical with reduction furnace inner wall shape, and it is coaxially nested with reduction furnace, be fixed on reduction furnace inwall by standing bolt (2) bottom inner bag top standing bolt (1), inner bag, inner bag top standing bolt (1) has four, lay respectively on the cruciform direction of reduction furnace tangent plane, solution (8) is housed between profiling anode inner bag and reduction furnace;
Described cruciform stationary installation comprises side standing bolt (3), cross frame (4), fixed triangle iron (5) and top stationary shaft (6);
Cross frame (4) in described cruciform stationary installation is for clamping the bottom of reduction furnace, and it is fastening by four side standing bolts (3), top stationary shaft (6) through cross frame (4) center and insert reduction furnace bottom a part, described profiling anode inner bag can be insoluble anode, adopts titanium plate to make.
2. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process according to claim 1 and stationary installation, is characterized in that: bottom the axle center at described top stationary shaft (6) and inner bag, standing bolt (2) point-blank.
3. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process according to claim 1 and stationary installation, is characterized in that: described top stationary shaft (6) is welded into one with cross frame (4) by fixed triangle iron (5).
4. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process according to claim 1 and stationary installation, is characterized in that: described cross frame (4) can overlap and have rope for connecting the lifting appliance of reduction furnace.
5. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process according to claim 1 and stationary installation, is characterized in that: described cross frame (4) adopts High Strength Structural Steel.
6. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process according to claim 1 and stationary installation, is characterized in that: described profiling anode inner bag can be soluble anode, and the metal being plated in reduction furnace inwall needed for employing is made.
7. the profiling anode in polycrystalline silicon reducing furnace inwall electroplating process according to claim 1 and stationary installation, is characterized in that: described in profiling anode assembly be housed be placed in the base (7) identical with reduction furnace bottom shape with the bottom of the reduction furnace of criss-cross stationary installation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420424092.1U CN204125555U (en) | 2014-07-30 | 2014-07-30 | Profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420424092.1U CN204125555U (en) | 2014-07-30 | 2014-07-30 | Profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation |
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| Publication Number | Publication Date |
|---|---|
| CN204125555U true CN204125555U (en) | 2015-01-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420424092.1U Expired - Fee Related CN204125555U (en) | 2014-07-30 | 2014-07-30 | Profiling anode in a kind of polycrystalline silicon reducing furnace inwall electroplating process and stationary installation |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108728891A (en) * | 2018-09-03 | 2018-11-02 | 宝鸡市创信金属材料有限公司 | A kind of netted Ti electrode anode of cross grafting |
-
2014
- 2014-07-30 CN CN201420424092.1U patent/CN204125555U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108728891A (en) * | 2018-09-03 | 2018-11-02 | 宝鸡市创信金属材料有限公司 | A kind of netted Ti electrode anode of cross grafting |
| CN108728891B (en) * | 2018-09-03 | 2023-12-26 | 宝鸡市创信金属材料有限公司 | Cross grafting netted titanium electrode positive pole |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150128 Termination date: 20180730 |
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| CF01 | Termination of patent right due to non-payment of annual fee |