CN204116728U - A kind of optical collimator - Google Patents
A kind of optical collimator Download PDFInfo
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- CN204116728U CN204116728U CN201420179004.6U CN201420179004U CN204116728U CN 204116728 U CN204116728 U CN 204116728U CN 201420179004 U CN201420179004 U CN 201420179004U CN 204116728 U CN204116728 U CN 204116728U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 40
- 238000009434 installation Methods 0.000 claims abstract description 44
- 239000000919 ceramic Substances 0.000 claims description 8
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- 239000011796 hollow space material Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000002689 soil Substances 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000001105 regulatory effect Effects 0.000 description 6
- 238000003754 machining Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000004807 localization Effects 0.000 description 2
- 241000272510 Apteryx Species 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
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Abstract
Disclose a kind of optical collimator.Focusing comprises concentrating element and concentrating element adjustable ground is fixed on the first installation component of the second support, receiving mechanism comprises receiving element and receiving element adjustable ground is fixed to the second installation component of the 3rd support, wherein, first installation component is configured to light beam is navigated on concentrating element accurately, and the light beam that the second installation component is configured to concentrating element is focused on navigates on receiving element accurately.The utility model can meet measuring equipment, especially Measurement of Semiconductors equipment, to the requirement of the high position precision of concentrating element and receiving element.
Description
Technical field
The utility model relates to a kind of optical collimator, be applied to optical-mechanical apparatus field, use this micro-adjusting mechanism the beam collimation of various shape can be incided a certain focusing system, and make the later beam collimation of focusing incide a certain receiving system, complete the focusing to this beam signal and collection.The utility model is particularly useful for Measurement of Semiconductors equipment, and this optical collimator can meet the high-precision requirement of measuring equipment to focusing system and receiving system position.
Background technology
Concentrating element and receiving element is all there is in many Photomechanical equipments, concentrating element such as can comprise parabolic lens, condenser lens and spherical reflector etc., receiving element such as can comprise the detector such as spectrometer or CCD, they all require higher positioning precision in Measurement of Semiconductors equipment, some precision even reach micron dimension, therefore, in optical system, need optical collimator that concentrating element and receiving element are carried out mechanical collimation.At present, in some optical systems, only need regulate one of them position of concentrating element and receiving element, light beam adopt other media to be incorporated into system that one does not need adjustment.Such as optical fiber, introduces concentrating element or receiving element by light, inapplicable in the measuring system needing to obtain light beam spectral line, energy, ripple difference and waveform.In some other optical systems, only receiving element need be regulated, and concentrating element adopts the precision of machining to ensure, very high to the accuracy requirement of machining, long in light path, in the optical system that volume is larger, machining is difficult to ensure very high positioning precision.Other equipment alignment precision is low, and the micro-adjusting mechanism of optical collimator regulates dimension inadequate, because a lot of attitude of receiving element and the direction of incident light are unique, regulates the disappearance of dimension to cause light to receive completely, loss measuring accuracy.
Utility model content
The technical matters that the utility model solves is: the adjustment degree of freedom how reasonably setting optical focusing element and receiving element, makes it to carry out high-accuracy mechanical collimation between light beam.
The utility model discloses a kind of optical collimator, it comprises the first support, the second support and the 3rd support, wherein, described second support and described 3rd spacer support frame are turned up the soil and are fixed on described first support, described second support is for carrying focusing, and described 3rd support carries receiving mechanism.Described focusing comprises concentrating element and described concentrating element adjustable ground is fixed on the first installation component of described second support, described receiving mechanism comprises receiving element and described receiving element adjustable ground is fixed to the second installation component of described 3rd support, wherein, described second support is configured to make light beam navigate on described concentrating element roughly according to the path of unfocused light bundle, the light beam that described 3rd support is configured to described concentrating element is focused on according to the light beam that described concentrating element focuses on navigates on described receiving element roughly, and described first installation component is configured to make light beam navigate on described concentrating element accurately, the light beam that described second installation component is configured to described concentrating element is focused on navigates on described receiving element accurately.
Particularly, centered by the center of described concentrating element and be the first focusing reference axis with the axis of unfocused light bundle, and focusing in the focusing coordinate system set up of reference axis to focus on second and the 3rd of reference axis perpendicular to described first, described first installation component is configured to make described concentrating element to focus on reference axis around described first to regulate rotationally, focus on reference axis regulate rotationally and focus on reference axis around the described 3rd and regulate rotationally around described second.
More specifically, described first installation component also comprises mounting cylinder, described mounting cylinder has side and end face, described side is limited with the screw that at least two longitudinal axis one another along mounting cylinder are aimed at, described first installation component also comprise have fixed part and from described fixed part extending longitudinally go out but diameter is less than the ring flange of the insertion portion of described fixed part, described fixed part offers multiple waist through hole, the insertion portion of described ring flange to be inserted in described mounting cylinder and fixed part abut to described mounting cylinder end face on and by the securing member through waist through hole, described fixed part is fastened on the end face of described mounting cylinder, wherein said concentrating element is formed in or is fixed on the end face of the insertion portion of ring flange, described securing member is releasable to make the relatively described mounting cylinder of described ring flange rotating in the angle that described waist through hole limits.
More specifically, described first installation component also comprises erecting bed, described erecting bed comprises the base portion being fixed to described second support and the Liang Ge ear extended perpendicular to described base portion, described base portion is provided with longitudinally through pin-and-hole, each of Liang Ge ear is respectively arranged with the screw of lateral direction penetrating and this two screws are symmetrical relative to longitudinal pin-and-hole of described base portion, described first installation component also comprises U-shaped block, the bottom center of described U-shaped block is provided with the longitudinal hole aimed at the pin-and-hole of described base portion, the two bottom sides of described U-shaped block is respectively equipped with the horizontal counterbore aimed at the screw of described ear, ceramic gasket is furnished with in described counterbore, the screwed turning axle in one end through described base portion pin-and-hole and so that described U-shaped block is fixed on described base portion rotationally in the screw being fixed to described U-shaped block, set screw is threadably fastened to the screw of each described ear and its end is leaned be arranged on the ceramic gasket in the counterbore of described U-shaped block thus described U-shaped block swings when screwing or unclamp described set screw thereupon, relatively pin-and-hole is provided with near the free end in the two arms portion of described U-shaped block, securing member passes the pin-and-hole of described arm and is threadably fastened in the side screw of described mounting cylinder.
More specifically, the side of described U-shaped block has also radially protruded out cylindrical member in the centre of the screw of two sides, the hollow space internal fixtion limited in the Liang Ge ear of described erecting bed has holder, described cylindrical member is held in the inner by described holder on basic longitudinal direction, described holder is relatively provided with gib screw and set screw respectively to be folded in therebetween by described cylindrical member in the both sides of described cylindrical member, wherein, also Compress Spring is furnished with between described cylindrical member and described set screw, described set screw screws or unscrews to make described cylindrical member to swing rotationally thus the described mounting cylinder moving axis that rotates is rotated.
Particularly, centered by the geometric center of the receiving plane of described receiving element and be the first reception reference axis with the axis of focused beam, and set up to receive reference axis perpendicular to second and the 3rd of described first reception reference axis second receives in coordinate system, described second installation component is configured to can translationally regulate so that described concentrating element can be made to receive reference axis along described first, receive reference axis along described second can translationally regulate, receive reference axis around described second regulate rotationally and regulate rotationally around described 3rd reception reference axis.
More specifically, described second installation component comprises the class cross rail structure that is fixedly installed on described 3rd support and is installed in rotation on the structural rotating disk of described class cross rail.
Preferably, described concentrating element is parabolic lens.
Preferably, described receiving element is spectrometer.
The utility model can meet the requirement of measuring equipment (especially Measurement of Semiconductors equipment) to the high position precision of concentrating element and receiving element.
Accompanying drawing explanation
In order to explain the utility model, its illustrative embodiments will be described with reference to the drawings hereinafter, in accompanying drawing:
Fig. 1 schematically shows the skeleton view of optical collimator at a certain visual angle according to a kind of embodiment of the present utility model, illustrated therein is the 3rd support being fixed to the first support;
Fig. 2 is the front view of optical collimator at a certain visual angle of Fig. 1, illustrated therein is the second support be fixed on the first support;
Fig. 3 is the cut-open view of the optical collimator of Fig. 1;
Fig. 4 is the skeleton view being carried on the focusing on the second support of the optical collimator of Fig. 1;
Fig. 5 is the skeleton view being carried on the receiving mechanism on the 3rd support of the optical collimator of Fig. 1;
Fig. 6 is the skeleton view of the second adjusting part of the receiving mechanism of Fig. 5; And
Fig. 7 is the optical collimator schematic diagram according to a kind of embodiment of the present utility model;
Similar features in different figure is indicated by similar Reference numeral.
Embodiment
In the detailed description of following embodiment, the accompanying drawing with reference to the part forming this description is described.Accompanying drawing shows specific embodiment in an illustrative manner, and the utility model is implemented in these embodiments.Shown embodiment is not in order to limit is according to all embodiments of the present utility model.Be appreciated that other embodiment can be utilized, change that is structural or logicality can be made under the prerequisite not departing from scope of the present utility model.For accompanying drawing, the term of directivity, such as "left", "right", " end ", "front", "rear", " downwards ", " upwards " etc., the orientation with reference to described accompanying drawing uses.Because the assembly of embodiment of the present utility model can by with multiple orientations, these directional terminology be for illustration of object, instead of the object of restriction.Therefore, following embodiment is not the meaning as restriction, and scope of the present utility model limited by appending claims.
Fig. 1 schematically shows the skeleton view of optical collimator at a certain visual angle according to a kind of embodiment of the present utility model, illustrated therein is the 3rd support being fixed to the first support; Fig. 2 is the front view of optical collimator at a certain visual angle of Fig. 1, illustrated therein is the second support be fixed on the first support; Fig. 3 is the cut-open view of the optical collimator of Fig. 1; Fig. 4 is the skeleton view being carried on the focusing on the second support of the optical collimator of Fig. 1; Fig. 7 is the optical collimator schematic diagram according to a kind of embodiment of the present utility model.
As shown in Fig. 1-Fig. 4 and Fig. 7, this optical collimator 10 comprises the first support 102, second support 104 and the 3rd support 106.This first support 102 comprises approximate horizontal base portion 102a, extend substantially straight up from this base portion 102a the first side wall 102b, the second sidewall 102c and the 3rd sidewall 102d, the first side wall 102b and the second sidewall 102c positioned opposite and linked together by the 3rd sidewall 102d.The Part II 104b that this second support 104 comprises Part I 104a and angularly extends out from Part I 104a, wherein Part I 104a is fixed on the 3rd sidewall 102d by the securing member 108 of such as bolt, and Part II 104b is by the first installation component 202 adjustable ground fixed-focus element 204.Aforementioned concentrating element 204 can be parabolic lens.And this first installation component 202 and concentrating element 204 can be called focusing.
Particularly, this first installation component 202 comprises the erecting bed 206 on the end face of the Part II 104b for being fixed to the second support 104, the ear 206b that this erecting bed 206 has the base portion 206a parallel with the Part II 104b of the second support 104 and extends vertically upward respectively from the both sides, end of this base portion 206a, the central authorities of this base portion 206a are provided with pin-and-hole, and this ear 206b is provided with screw.Further, this first installation component 202 also comprises U-shaped block 208, the central authorities of the bottom of this U-shaped block 208 are provided with screw (not shown), the both sides of the bottom of this U-shaped block 208 are respectively arranged with a counterbore in the position corresponding with the screw on ear 206b, and ceramic gasket can be arranged in this counterbore.Pin-and-hole is provided with symmetrically respectively near the free end in the two arms portion of U-shaped block 208.Bearing pin passes the central pin-and-hole of the base portion 206a of erecting bed 206 and screw thread wears in the central screw of the bottom of U-shaped block 208, screw 210 is screwed into the screw of the ear 206b of the side of erecting bed 206 and leans on the ceramic gasket in the counterbore being arranged in U-shaped block 208, screw 212 is screwed into the screw of the opposite side ear 206b of erecting bed 206 and leans on the ceramic gasket in the counterbore being arranged in U-shaped block 208, and aforesaid ceramic gasket has antiskid function.Like this, when tightening or unclamp screw 210,212, this U-shaped block 208 can rotate around the direction of X ' thus the rotation around X ' axle that can realize as shown in Figure 7 regulates.In addition, this first installation component 202 also comprises parabolic lens mounting cylinder 214, be formed with a line screw respectively in the left and right sides of parabolic lens mounting cylinder 214 and the screw on the screw in left side and right side is aimed at center respectively, the pin-and-hole that the threaded bearing pin 217 of end belt passes the two arms portion of U-shaped block 208 is threaded onto the screw of parabolic lens mounting cylinder 214 to be pivotally mounted on U-shaped block 208 around Z ' direction by this parabolic lens mounting cylinder 214.The end face fixed flange 216 of this parabolic lens mounting cylinder 214, the end face of the part that the diameter of this ring flange 216 is less is formed or is fixed with parabolic lens 204, the part that diameter is larger is provided with three mounting holes 218 in the circumferential, and these three mounting holes 218 equably circumferentially.During installation, what the diameter of ring flange 216 was less is inserted partially in parabolic lens mounting cylinder 214, and the securing member of such as bolt is each passed through this mounting hole 218 and is fixed firmly on the end face of parabolic lens mounting cylinder 214 by this ring flange 216.When parabolic lens 204 rotate around Y ' direction as shown in Figure 7 regulate time, first can unclamp the securing member of each mounting hole 218 and then rotate this ring flange 216 and turn to until its position the securing member screwing each mounting hole 218 after ideal position.Further, the peripheral surface of this parabolic lens mounting cylinder 214 also radially convex stretch out columnar member 220, its top is threaded onto on parabolic lens mounting cylinder 214.When this parabolic lens mounting cylinder 214 is installed on U-shaped block 208, the Distance geometry between the two arms portion that this columnar member 220 is in U-shaped block 208 just and this columnar member 220 and wherein one arm portion is equal with the distance between another arm.In order to coordinate with this columnar member 220, the hollow space internal fixtion limited at the Liang Ge ear 206b of erecting bed 206 has holder 222, aforementioned columnar member 220 holds in the inner by this holder 222 in roughly vertical direction, illustrated roughly fore-and-aft direction is fixed with gib screw 224 and set screw 226 respectively, wherein, Compress Spring (not shown) is furnished with between columnar member 220 and the set screw 226 at illustrated roughly rear, set screw 226 screws rotationally or unscrew this columnar member 220 is swung thus makes parabolic lens mounting cylinder 214 moving axis 217 that rotates rotate thus realize the rotation around Z ' axle as shown in Figure 7 and regulate.
Fig. 5 is the skeleton view being carried on the receiving mechanism on the 3rd support of the optical collimator of Fig. 1; Fig. 6 is the skeleton view of the second adjusting part of the receiving mechanism of Fig. 5; Fig. 7 is the optical collimator schematic diagram according to a kind of embodiment of the present utility model.
Again see Fig. 5-Fig. 7,3rd support 106 roughly becomes L shape, the diapire 106a comprising basic horizontal and the sidewall 106b substantially upwards extended vertically from this diapire 106a, this diapire 106a is fixed on the upper surface of the first support 102 by securing members such as such as bolts.Receiving element 304 adjustable ground is fixed on the 3rd support 106 by the second installation component 302, and wherein this receiving element 304 can be spectrometer.And this second installation component 302 and receiving element 304 can be called receiving mechanism.
Particularly, this second installation component 302 comprise be fixedly installed to the 3rd support 106 sidewall 106b on the first holder 306, first 306 the first slide blocks 308 slidably coordinated in the X-direction of Fig. 7 are fixed with this, second holder 310, the second slide block 312 slidably coordinated in the figure Y-direction of Fig. 7 with this second holder 310, the 3rd holder 314 be fixedly connected with the second slide block 312, the turning block 316 rotatably installed around the Y-direction of Fig. 7 with the 3rd holder 314, be fixedly connected on the 4th holder 318 of the 3rd slide block 316, to be installed on the 4th holder 318 and around Fig. 7 the rotating rotating disk 320 of Z-direction and to be fixedly attached on rotating disk 320 and plate-shaped member 321 for installing receiving element 304.This first holder 306, first slide block 308, second holder 310 and the second slide block 312 constitute the cross rail structure known, and at this, the detail about this structure repeats no more.And, latch-up structure between this first holder 306 and first slide block 308 and the latch-up structure between the second holder 310 and the second slide block 312 are substantially similar, exemplarily, as shown in the figure, stator 322 is fixed on the second holder 310 by the securing member of two such as bolts, stator 322 is offered the slit 326 passed for locking piece 324, this locking piece 324 is threaded onto on the second slide block 312, tighten aforementioned lock member 324 just the second slide block 312 to be fixed on the second holder 310 when this second slide block 312 is slid to ideal position relative to the second holder 310.Spectrometer 304 is fixed on plate-shaped member 321.
As shown in Figure 6, the second installation component 302 is four-dimensional adjusting part, and four-dimensional stacking pattern can reduce the coupling between each dimension, convenient adjustment.In illustrated superposition order, because receiving element 304 needs sometimes around Z axis large rotation but all the other apteryxs do not need to rotate on a large scale, in order to avoid taking up room and making total compacter, receiving element 304 is connected to regulating element (rotating disk 320) by plate-shaped member 321 thus it can rotate around Z axis.Turning axle around the regulating element (turning block 316) of Y-axis rotation passes through the center of receiving element 304, and according to the standard component of reality, it is more suitable to be placed on below illustrated rotating disk 320.In addition, the structural rigidity of general linear motion is better, be placed on the illustrated rigidity can strengthening whole assembly below, therefore the regulating element (class cross rail structure) of X and Y-direction is arranged on the position away from receiving element 304.In the utility model, setting around the regulating element (turning block 316) of Y-axis rotation instead of a linear mechanism moved along Z axis, in the adjustment of rotating around Y-axis, receiving element 304 all can change at Z and X-direction, meanwhile, for the receiving element 304 of such as spectrometer circular reception face also there occurs along circular reception face rotate angle, make light beam can be positioned on this circular reception face exactly, adjustment dimension can be reduced, make more compact structure, rigidity is better.
See Fig. 1, Fig. 3 and Fig. 7, shown by these figure, the light from light source and after determinand can be injected on the parabolic lens 204 as concentrating element, is injected in the slit as the spectrometer 304 of receiving element after focusing again.That is, aforesaid optical collimator 10 should be configured to make to form light path accurately between this parabolic lens 204 and spectrometer 304.More particularly, at this, be achieved in that on the parabolic lens 204 that this second support 104 is configured to according to the path of light light is navigated to roughly as concentrating element, 3rd support 106 navigates on the spectrometer 304 as receiving element according to the light that the light that parabolic lens 204 focuses on is configured to make parabolic lens 204 focus on roughly, and the first installation component 202 is configured to make light navigate on parabolic lens 204 accurately, and the light that the second installation component 302 is configured to make parabolic lens 204 focus on navigates on spectrometer 304 accurately.
The object arranging the first installation component 202 is light is incided on parabolic lens 204 along the direction of the optical axis being parallel to parabolic lens 204, and the object arranging the second installation component 302 is that the light making to focus on through parabolic lens 204 incides the slit of spectrometer 304 along the optical axis being parallel to spectrometer 304.
As previously mentioned, in optical collimator 10 of the present utility model, first installation component 202 of three-dimensional regulation can regulate concentrating element 204 by arranging, arranging simultaneously and can regulate receiving element 304 by four-dimensional the second installation component 302 regulated, realizing precise positioning.
The object of coarse localization is to reduce some degree of freedom or range of adjustment, and the object of precise positioning is to finely tune some degree of freedom.Coarse localization can be determined according to the theoretical position of light beam, concentrating element 204 and receiving element 304, adopt and can realize the machining of the first support 102, second support 104 and the 3rd support 106 precision and mutual pin positioning instant, as depicted in figs. 1 and 2.This should know for those of ordinary skills.As shown in Figure 7, it diagrammatically show the principle of precise positioning, coordinate system X, Y, Z and X ' and, Y ', Z ' be cartesian coordinate system, O and O ' is their initial point respectively.Concentrating element 204 enters receiving element 304 after being focused on by light beam.As previously mentioned, the first installation component 202 comprise respectively around X ', Y ', the mechanism of Z ' rotation, thus make concentrating element 204 have three fine-tuning rotational freedoms: Rx ', Ry ', Rz ', and the second installation component 302 comprises around the rotation of Z and Y and along X, the mechanism of the translation of Y both direction, thus make receiving element 304 have four fine-tuning degree of freedom: X, Y, Ry, Rz.At this, coordinate system X ', Y ', Z ' in Y ' axle should with the dead in line of light beam, coordinate system X, the initial point O of Y, Z should be placed in the geometric center of receiving element 304 receiving plane, reduce the scope of translational adjustment.The adjustment benchmark of concentrating element 204 is light beams, and the adjustment benchmark of receiving element 304 is the light beams after concentrating element 204 focusing.
The utility model is limited to the illustrative embodiments presented in the specification and illustrated in the drawings never in any form.All combinations of the embodiment (part) illustrated and describe are interpreted as clearly to be incorporated within this instructions and to be interpreted as clearly and fall in scope of the present utility model.And in the scope of the present utility model that such as claims are summarized, a lot of distortion is possible.In addition, any reference marker in claims should be configured to limit scope of the present utility model.
Claims (9)
1. an optical collimator, it comprises the first support, second support and the 3rd support, wherein, described second support and described 3rd spacer support frame are turned up the soil and are fixed on described first support, described second support is for carrying focusing, described 3rd support carrying receiving mechanism, it is characterized in that, described focusing comprises concentrating element and described concentrating element adjustable ground is fixed on the first installation component of described second support, described receiving mechanism comprises receiving element and described receiving element adjustable ground is fixed to the second installation component of described 3rd support, wherein, described second support is configured to make light beam navigate on described concentrating element roughly according to the path of unfocused light bundle, the light beam that described 3rd support is configured to described concentrating element is focused on according to the light beam that described concentrating element focuses on navigates on described receiving element roughly, and described first installation component is configured to make light beam navigate on described concentrating element accurately, the light beam that described second installation component is configured to described concentrating element is focused on navigates on described receiving element accurately.
2. optical collimator according to claim 1, it is characterized in that, centered by the center of described concentrating element and be the first focusing reference axis with the axis of unfocused light bundle, and focusing in the focusing coordinate system set up of reference axis to focus on second and the 3rd of reference axis perpendicular to described first, described first installation component is configured to make described concentrating element to focus on reference axis around described first to regulate rotationally, focus on reference axis regulate rotationally and focus on reference axis around the described 3rd and regulate rotationally around described second.
3. optical collimator according to claim 2, it is characterized in that, described first installation component also comprises mounting cylinder, described mounting cylinder has side and end face, described side is limited with the screw that at least two longitudinal axis one another along mounting cylinder are aimed at, described first installation component also comprise have fixed part and from described fixed part extending longitudinally go out but diameter is less than the ring flange of the insertion portion of described fixed part, described fixed part offers multiple waist through hole, the insertion portion of described ring flange to be inserted in described mounting cylinder and fixed part abut to described mounting cylinder end face on and by the securing member through waist through hole, described fixed part is fastened on the end face of described mounting cylinder, wherein said concentrating element is formed in or is fixed on the end face of the insertion portion of ring flange, described securing member is releasable to make the relatively described mounting cylinder of described ring flange rotating in the angle that described waist through hole limits.
4. optical collimator according to claim 3, it is characterized in that, described first installation component also comprises erecting bed, described erecting bed comprises the base portion being fixed to described second support and the Liang Ge ear extended perpendicular to described base portion, described base portion is provided with longitudinally through pin-and-hole, each of Liang Ge ear is respectively arranged with the screw of lateral direction penetrating and this two screws are symmetrical relative to longitudinal pin-and-hole of described base portion, described first installation component also comprises U-shaped block, the bottom center of described U-shaped block is provided with the longitudinal hole aimed at the pin-and-hole of described base portion, the two bottom sides of described U-shaped block is respectively equipped with the horizontal counterbore aimed at the screw of described ear, ceramic gasket is furnished with in described counterbore, the screwed turning axle in one end through described base portion pin-and-hole and so that described U-shaped block is fixed on described base portion rotationally in the screw being fixed to described U-shaped block, set screw is threadably fastened to the screw of each described ear and its end is leaned be arranged on the ceramic gasket in the counterbore of described U-shaped block thus described U-shaped block swings when screwing or unclamp described set screw thereupon, relatively pin-and-hole is provided with near the free end in the two arms portion of described U-shaped block, securing member passes the pin-and-hole of described arm and is threadably fastened in the side screw of described mounting cylinder.
5. optical collimator according to claim 4, it is characterized in that, the side of described U-shaped block has also radially protruded out cylindrical member in the centre of the screw of two sides, the hollow space internal fixtion limited in the Liang Ge ear of described erecting bed has holder, described cylindrical member is held in the inner by described holder on basic longitudinal direction, described holder is relatively provided with gib screw and set screw respectively to be folded in therebetween by described cylindrical member in the both sides of described cylindrical member, wherein, also Compress Spring is furnished with between described cylindrical member and described set screw, described set screw screws or unscrews to make described cylindrical member to swing rotationally thus the described mounting cylinder moving axis that rotates is rotated.
6. optical collimator according to claim 1, it is characterized in that, centered by the geometric center of the receiving plane of described receiving element and be the first reception reference axis with the axis of focused beam, and set up to receive reference axis perpendicular to second and the 3rd of described first reception reference axis second receives in coordinate system, described second installation component is configured to can translationally regulate so that described concentrating element can be made to receive reference axis along described first, receive reference axis along described second can translationally regulate, receive reference axis around described second regulate rotationally and regulate rotationally around described 3rd reception reference axis.
7. optical collimator according to claim 6, is characterized in that, described second installation component comprises the class cross rail structure that is fixedly installed on described 3rd support and is installed in rotation on the structural rotating disk of described class cross rail.
8. the optical collimator according to any one of claim 1-7, is characterized in that, described concentrating element is parabolic lens.
9. the optical collimator according to any one of claim 1-7, is characterized in that, described receiving element is spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420179004.6U CN204116728U (en) | 2014-04-14 | 2014-04-14 | A kind of optical collimator |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420179004.6U CN204116728U (en) | 2014-04-14 | 2014-04-14 | A kind of optical collimator |
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| CN204116728U true CN204116728U (en) | 2015-01-21 |
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| CN110262058A (en) * | 2019-06-19 | 2019-09-20 | 中国工程物理研究院应用电子学研究所 | A kind of auxiliary pupil optical axis adjustment means and method |
| CN113075780A (en) * | 2021-04-13 | 2021-07-06 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
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2014
- 2014-04-14 CN CN201420179004.6U patent/CN204116728U/en not_active Expired - Lifetime
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109725496A (en) * | 2017-10-31 | 2019-05-07 | 上海微电子装备（集团）股份有限公司 | CCD camera adjusts fixed device and its adjustment fixing means |
| CN109725496B (en) * | 2017-10-31 | 2020-08-04 | 上海微电子装备（集团）股份有限公司 | CCD camera adjusting and fixing device and adjusting and fixing method thereof |
| CN109140153A (en) * | 2018-09-28 | 2019-01-04 | 武汉精立电子技术有限公司 | A kind of liquid crystal display panel optical detection camera micromatic setting |
| CN109140153B (en) * | 2018-09-28 | 2024-04-05 | 武汉精立电子技术有限公司 | Fine adjustment device for optical detection camera of liquid crystal display panel |
| CN110262058A (en) * | 2019-06-19 | 2019-09-20 | 中国工程物理研究院应用电子学研究所 | A kind of auxiliary pupil optical axis adjustment means and method |
| CN113075780A (en) * | 2021-04-13 | 2021-07-06 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
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