CN204111918U - Silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard - Google Patents

Silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard Download PDF

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Publication number
CN204111918U
CN204111918U CN201420484113.9U CN201420484113U CN204111918U CN 204111918 U CN204111918 U CN 204111918U CN 201420484113 U CN201420484113 U CN 201420484113U CN 204111918 U CN204111918 U CN 204111918U
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mullite
assembly
furnace
silicon
polycrystalline
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CN201420484113.9U
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石刚
王巍
俞安州
孙明
周建灿
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HANGZHOU HUIXIANG ELECTROHYDRAULIC TECHNOLOGY DEVELOPMENT Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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HANGZHOU HUIXIANG ELECTROHYDRAULIC TECHNOLOGY DEVELOPMENT Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Abstract

The utility model relates to polycrystalline silicon ingot or purifying furnace, aims to provide silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard.The monitoring of this silicon leakage of polycrystalline silicon ingot furnace and safety guard comprise overflow silk, seal assembly, mullite shade assembly, keel assembly, mullite and PLC module; Keel assembly is located at the lower outside of graphite column, between graphite column and keel assembly, mullite is housed, the bottom of furnace body bleeding point of polycrystalline furnace is provided with mullite shade assembly, between bleeding point and mullite shade assembly, mullite is housed, keel assembly and mullite shade assembly surrounding are covered with mullite; The top of asbestos layer is covered with overflow silk, and overflow silk is connected with the PLC module being arranged on polycrystalline furnace body of heater outside by two seal assemblies.When the utility model occurs to leak silicon phenomenon on a small quantity in process of production, can very first time trigger alarm, when a large amount of leak silicon, key position also can be protected to be difficult to by high temperature silicon liquid burn through, the sexual behavior that averts a calamity therefore occur.

Description

Silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard
Technical field
The utility model is about polycrystalline silicon ingot or purifying furnace, particularly silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard.
Background technology
Polycrystalline silicon ingot or purifying furnace once occur leak silicon phenomenon and do not have Timeliness coverage, will affect whole production process, and may cause various accident in process of production.Therefore; need and a kind of leak silicon monitoring and safety guard is monitored whole production process in real time, once occur to leak silicon phenomenon, can and alarm take corresponding measure; and the key position such as thin-walled, welding can be protected to be difficult to burn through, to avoid the safety of accident generation and guarantee equipment and personnel.
Existing patent " a kind of silicon leakage of polycrystalline silicon ingot furnace detects catching device (patent No. CN 103130224A) " can be found; its method adopting bottom of furnace body to place bearing container accepts the silicon liquid spilt; but its scope accepting silicon liquid has certain limitation; and when there is a large amount of leakage silicon; initiatively do not protect the measure of body of heater, serious meeting causes heavy losses.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, provides a kind of and key position can be protected to be difficult to burn through when there is leakage silicon phenomenon in production process, and and alarm take the device of corresponding measure.For solving the problems of the technologies described above, solution of the present utility model is:
Silicon leakage of polycrystalline silicon ingot furnace is provided to monitor and safety guard, the bottom of furnace body of polycrystalline furnace is provided with three graphite column open holess, three graphite columns are arranged on graphite column open holes, the top of graphite column is provided with warming plate, warming plate surrounding has overflow weir, the bottom of furnace body of polycrystalline furnace is covered with asbestos layer, and described silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard comprise overflow silk, seal assembly, mullite shade assembly, keel assembly, mullite and PLC module; Keel assembly is located at the lower outside of graphite column, between graphite column and keel assembly, mullite is housed, the bottom of furnace body bleeding point of polycrystalline furnace is provided with mullite shade assembly, between bleeding point and mullite shade assembly, mullite is housed, keel assembly and mullite shade assembly surrounding are covered with mullite; The top of asbestos layer is covered with overflow silk, and overflow silk is connected with the PLC module being arranged on polycrystalline furnace body of heater outside by two seal assemblies;
When described seal assembly is for ensureing overflow silk turnover body of heater and body of heater not conducting, and ensure the body of heater integral sealing of polycrystalline furnace; Described keel assembly is not easily fused when leaking silicon for the protection of graphite column; Described mullite shade assembly is not easily fused when leaking silicon for the protection of bleeding point; (brand is Omron to described PLC module, model is CJ1W-ID211) be communicated with overflow silk by wire, a signal can be produced when overflow silk loop fuses, feed back to PLC module, according to the program trigger alarm that PLC inside sets in advance, and automatically enter the urgent cooling mode of polycrystalline furnace in tape program.
As further improvement, described overflow silk is three-back-shaped.
As further improvement, described keel assembly comprises 1 stacking keel a, 3 keel b and 1 keel c, and the inside and outside of keel assembly is all equipped with mullite.
As further improvement, described mullite shade assembly comprises 1 mullite cover a, 1 mullite cover b, 5 mullite cover c, 3 mullite cover d, 1 mullite cover e and 1 mullite cover f, and the inside and outside of mullite shade assembly is all equipped with mullite.
As further improvement, the Stainless Steel Wire of described overflow silk to be diameter be 1.2 ~ 1.5mm.
Compared with prior art, the beneficial effects of the utility model are:
When there is a small amount of leakage silicon phenomenon in production process, energy very first time trigger alarm, reminds operator to take corresponding measure in time, avoids losing further expansion; When a large amount of leak silicon key position also can be protected to be difficult to by high temperature silicon liquid burn through, the sexual behavior that averts a calamity therefore occur, dropped to by equipment damage minimum, protection operator preserve from.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present utility model.
Fig. 2 is the overflow silk structural representation in the utility model.
Fig. 3 is the mullite shade assembly structural representation in the utility model.
Fig. 4 is the keel unit construction schematic diagram in the utility model.
Reference numeral in figure is: 1 heat-insulation cage assembly; 2 crucible guard boards assemblies; 3 crucibles; 4 DS blocks; 5 bodies of heater; 6 warming plates; 7 asbestos layers; 8 PLC module; 9 seal assemblies; 10 overflow silks; 11 mullites; 12 bleeding points; 13 mullite shade assemblies; 14 keel assemblies; 15 graphite columns; 16 mullite cover a; 17 mullite cover b; 18 mullite cover c; 19 mullite cover d; 20 mullite cover e; 21 mullite cover f; 22 keel a; 23 keel b; 24 keel c.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
As shown in Figure 1, be provided with three graphite column open holess bottom the body of heater 5 of polycrystalline furnace, three graphite columns 15 are arranged on graphite column open holes, and the top of graphite column 15 is provided with warming plate 6, are covered with asbestos layer 7 bottom the body of heater 5 of polycrystalline furnace.Silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard comprise overflow silk 10, seal assembly 9, mullite shade assembly 13, keel assembly 14, mullite 11 and PLC module 8.Keel assembly 14 is located at the lower outside of graphite column 15, mullite 11 is housed between graphite column 15 and keel assembly 14, the body of heater 5 bottom pumping mouth 12 of polycrystalline furnace is provided with mullite shade assembly 13, mullite 11 is housed between bleeding point 12 and mullite shade assembly 13, keel assembly 14 and mullite shade assembly 13 surrounding are covered with mullite 11, mullite 11 is a kind of high temperature materials, still very stable 1800 DEG C time.The top of asbestos layer 7 is covered with overflow silk 10, as shown in Figure 2, overflow silk 10 in three-back-shaped, the Stainless Steel Wire of to be diameter be 1.2 ~ 1.5mm.Overflow silk 10 is connected with the PLC module 8 being arranged on polycrystalline furnace body of heater 5 outside by two seal assemblies 9, when described seal assembly 9 principal security overflow silk 10 passes in and out body of heater 5 and body of heater 5 not conducting, and does not affect the stopping property of body of heater 5 entirety.Described PLC module 8 is communicated with overflow silk 10 by wire, a signal is produced when overflow silk 10 loop fuses, feed back to PLC module 8, according to the program trigger alarm that PLC inside sets in advance, and automatically enter the urgent cooling mode of polycrystalline furnace in tape program, here PLC module 8 is prior art, specifically selects that brand is Omron, model is the PLC of CJ1W-ID211, can realize required function.As shown in Figure 4 keel assembly 14 by 1 keel a22,3 keel b23 and 1 keel c24 is stacking forms, it is inside and outside lays mullite 11, and protection graphite erection column is not easily fused when leaking silicon.Mullite shade assembly 13 is made up of 1 mullite cover a16,1 mullite cover b17,5 mullite cover c18,3 mullite cover d19,1 mullite cover e20 and 1 mullite cover f21 as shown in Figure 3; also lay mullite 11 inside and outside it, protection bleeding point 12 is not easily fused when leaking silicon.
The position of the easiest burn through of general body of heater 5 is three the graphite column position of mounting hole being welded on furnace bottom, if the fusing of this position, DS block 4 will be caused to offset, and the high temperature silicon liquid in whole crucible 3 will be dumped and have an accident.Be exactly thin-walled place in addition; mainly bleeding point 12 position; this position is directly communicated with air; because being high-temperature vacuum state in body of heater 5; to ambient atmosphere be caused to enter body of heater 5 fast if be fused; the carbon containing objects such as body of heater 5 internal heater will be caused to meet oxygen blast, so these positions will be laid special stress on protecting when leaking silicon.When leaking silicon and occurring, gap by crucible guard boards assembly 2 is oozed out by silicon liquid, being flowed out by the overflow weir of warming plate 6 to enter bottom body of heater 5 on asbestos layer 7, because body of heater 5 is end enclosure structures, silicon liquid will middlely bottom body of heater 5 be gathered, because bleeding point 12, three graphite column open holes surroundings are covered with mullite 11, between bleeding point 12 and mullite shade assembly 13 and between graphite column 15 and keel assembly 14, also mullite 11 is all housed.Under normal circumstances; mullite 11 is suitable with the temperature of 200 DEG C ~ about 500 DEG C, furnace wall; when leaking silicon; the gap that the high temperature silicon liquid of about 1420 DEG C will flow through between mullite 11; mullite 11 is high temperature material; can absorb rapidly heat and make high temperature silicon liquid rapid crystallization, these four hazardous locations of protection are difficult to burn through in time.Simultaneously; because overflow silk 10 is arranged on asbestos layer 7, silicon liquid will flow through overflow silk 10, because silicon liquid temp is very high; overflow silk 10 is caused to fuse; trigger the PLC module 8 be connected with overflow silk 10 to report to the police, make production sequence enter urgent cooling mode, system will cut off heating installation power supply; and then cool stove fast; excess silicon liquid is condensed, to avoid security incident, proterctive equipment and personal security.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed in the utility model, all should think protection domain of the present utility model.

Claims (5)

1. silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard, the bottom of furnace body of polycrystalline furnace is provided with three graphite column open holess, three graphite columns are arranged on graphite column open holes, the top of graphite column is provided with warming plate, warming plate surrounding has overflow weir, the bottom of furnace body of polycrystalline furnace is covered with asbestos layer, it is characterized in that, described silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard comprise overflow silk, seal assembly, mullite shade assembly, keel assembly, mullite and PLC module; Keel assembly is located at the lower outside of graphite column, between graphite column and keel assembly, mullite is housed, the bottom of furnace body bleeding point of polycrystalline furnace is provided with mullite shade assembly, between bleeding point and mullite shade assembly, mullite is housed, keel assembly and mullite shade assembly surrounding are covered with mullite; The top of asbestos layer is covered with overflow silk, and overflow silk is connected with the PLC module being arranged on polycrystalline furnace body of heater outside by two seal assemblies;
When described seal assembly is for ensureing overflow silk turnover body of heater and body of heater not conducting, and ensure the body of heater integral sealing of polycrystalline furnace; Described keel assembly is not easily fused when leaking silicon for the protection of graphite column; Described mullite shade assembly is not easily fused when leaking silicon for the protection of bleeding point; Described PLC module is communicated with overflow silk by wire, can produce a signal, feed back to PLC module when overflow silk loop fuses, and according to the program trigger alarm that PLC inside sets in advance, and automatically enters the urgent cooling mode of polycrystalline furnace in tape program.
2. silicon leakage of polycrystalline silicon ingot furnace monitoring according to claim 1 and safety guard, it is characterized in that, described overflow silk is three-back-shaped.
3. silicon leakage of polycrystalline silicon ingot furnace monitoring according to claim 1 and safety guard, it is characterized in that, described keel assembly comprises 1 stacking keel a, 3 keel b and 1 keel c, and the inside and outside of keel assembly is all equipped with mullite.
4. silicon leakage of polycrystalline silicon ingot furnace monitoring according to claim 1 and safety guard, it is characterized in that, described mullite shade assembly comprises 1 mullite cover a, 1 mullite cover b, 5 mullite cover c, 3 mullite cover d, 1 mullite cover e and 1 mullite cover f, and the inside and outside of mullite shade assembly is all equipped with mullite.
5. silicon leakage of polycrystalline silicon ingot furnace according to claim 1 monitoring and safety guard, is characterized in that, the Stainless Steel Wire of described overflow silk to be diameter be 1.2 ~ 1.5mm.
CN201420484113.9U 2014-08-26 2014-08-26 Silicon leakage of polycrystalline silicon ingot furnace monitoring and safety guard Active CN204111918U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109579527A (en) * 2018-11-29 2019-04-05 大余明发矿业有限公司 A kind of pure oxygen mixed gas submerged combustion bath smelting furnace
CN110747508A (en) * 2019-09-29 2020-02-04 扬州荣德新能源科技有限公司 Circuit for automatically judging false silicon leakage alarm of polycrystalline furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109579527A (en) * 2018-11-29 2019-04-05 大余明发矿业有限公司 A kind of pure oxygen mixed gas submerged combustion bath smelting furnace
CN110747508A (en) * 2019-09-29 2020-02-04 扬州荣德新能源科技有限公司 Circuit for automatically judging false silicon leakage alarm of polycrystalline furnace

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