CN204111862U - For the magnetic steering unit of vacuum plating - Google Patents

For the magnetic steering unit of vacuum plating Download PDF

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Publication number
CN204111862U
CN204111862U CN201420580862.1U CN201420580862U CN204111862U CN 204111862 U CN204111862 U CN 204111862U CN 201420580862 U CN201420580862 U CN 201420580862U CN 204111862 U CN204111862 U CN 204111862U
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CN
China
Prior art keywords
magnet
suspension member
steering unit
magnetic steering
vacuum plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201420580862.1U
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Chinese (zh)
Inventor
马磊
李忠
刘成
褚凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BENGBU RENO VACUUM TECHNOLOGY Co Ltd
Original Assignee
BENGBU RENO VACUUM TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by BENGBU RENO VACUUM TECHNOLOGY Co Ltd filed Critical BENGBU RENO VACUUM TECHNOLOGY Co Ltd
Priority to CN201420580862.1U priority Critical patent/CN204111862U/en
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Publication of CN204111862U publication Critical patent/CN204111862U/en
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Abstract

The utility model provides a kind of magnetic steering unit for vacuum plating, and comprise the magnet suspension member substantially in a few font, the outside of magnet suspension member two side is all fixed with magnet-fixation grooves, and magnet-fixation grooves built with organizing magnet more.Magnetic steering unit of the present utility model is fixed on magnet the outside of magnet suspension member, can not produce scraping, decrease the friction of substrate frame and magnetic steering unit to workpiece car, decrease dust, thus solve the problem of plated film pin hole, and structure is simple, dismounting, easy for installation.

Description

For the magnetic steering unit of vacuum plating
Technical field
The utility model belongs to technical field of vacuum plating, specifically a kind of magnetic steering unit for vacuum plating.
Background technology
In the filming process of vacuum plating tinuous production, substrate is normally arranged in substrate frame, and by transmission rig transmission, smooth running is in membrane cassette of vacuum evaporation.Type of drive the most frequently used is in the industry magnetic steering transmission at present, as shown in Figure 1, namely on vacuum chamber top board, magnetic steering unit 1 is fixed, substrate frame 3 push rod is provided with row's magnet steel 2, substrate frame 3 push rod is inserted in the space between magnetic steering unit 1, described magnetic steering unit 1 comprises U-lag 11, the two side of U-lag 11 is respectively provided with many group magnet 12, magnet 12 is fixed on the inwall of U-lag 11 by magnet fixed plate 13, the N pole of the magnet steel 2 that substrate frame 3 push rod is arranged, the N pole of S pole and magnet 12, S is extremely corresponding, the repulsive force between magnet 12 and magnet steel 2 is utilized to realize leading.In practical vacuum plated film production process, because substrate frame 3 is moved in the space of magnetic steering unit 1, the wedge angle, burr etc. of magnet fixed plate 13 are inevitably swiped workpiece car, produce powder, pollute substrate, cause product to produce the defects such as plated film pin hole; In addition, because magnet fixed plate 13 and magnet 12 will be fixed on U-lag 11 by screw, screw will certainly partial denudation in the intermediate space of magnetic steering unit 1, workpiece car of also swiping, reduces plated film yield rate; And be positioned on U-lag 11 inwall due to magnet 12, installation and maintenance are very inconvenient, and magnet removes and installs all very difficult in inside.
Utility model content
The technical problems to be solved in the utility model is the defect overcoming prior art, a kind of magnetic steering unit for vacuum plating is provided, this magnetic steering unit is fixed on magnet the outside of magnet suspension member, and magnet suspension member is overall stainless steel tank, there is not wedge angle, burr in inside, no longer produce scraping, make it the use being more suitable for the production of practical vacuum plated film, plated film yield rate can be increased substantially.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is to provide a kind of magnetic steering unit for vacuum plating, comprise the magnet suspension member substantially in a few font, described magnet suspension member is one-body molded by the stainless steel of entirety, the outside of magnet suspension member two side is all fixed with magnet-fixation grooves, and magnet-fixation grooves built with organizing magnet more.
Described magnet is along the axis direction linear arrangement of magnet suspension member.
Magnetic steering unit for vacuum plating of the present utility model is fixed on magnet by magnet-fixation grooves the outside of magnet suspension member, interior smooth, there is no wedge angle, burr, scraping can not be produced to workpiece car, and decrease the friction of substrate frame and magnetic steering unit, decrease dust, thus solve the problem of plated film pin hole, and structure is simple, dismounting, easy for installation.
Described magnet-fixation grooves is fixed on magnet suspension member by hex screw, and it is inner that described hex screw the inner is positioned at magnet suspension member.Avoid swiping between hex screw and workpiece car, improve plated film yield rate further.
Accompanying drawing explanation
Fig. 1 is the structural representation of magnetic steering in background technology.
Fig. 2 is the structural representation of the utility model for the magnetic steering unit of vacuum plating.
Fig. 3 is the A-A cutaway view Amplified image of Fig. 2.
Embodiment
In order to more clearly understand the utility model, below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
As Fig. 2, shown in Fig. 3, for the magnetic steering unit of vacuum plating, comprise the magnet suspension member 41 substantially in a few font, described magnet suspension member 41 is one-body molded by the stainless steel tank of entirety, inner wall smooth, without wedge angle, burr, the outside of magnet suspension member 41 two side is all fixed with magnet-fixation grooves 43, described magnet-fixation grooves 43 is fixed on magnet suspension member 41 by hex screw 44, the inner of hex screw 44 is positioned at magnet suspension member 41 inside, do not penetrate magnet suspension member 41, magnet-fixation grooves 43 is built with many group magnet 42, described magnet 42 is along the axis direction linear arrangement of magnet suspension member 41.
The above; it is only embodiment of the present utility model; be not limitation of the utility model; those skilled in the art is not when departing from the utility model technical project principle, and the change utilizing above-mentioned technology contents to do or modification all should be considered as belonging to protection domain of the present utility model.

Claims (3)

1. for the magnetic steering unit of vacuum plating, it is characterized in that: comprise the magnet suspension member substantially in a few font, described magnet suspension member is one-body molded by the stainless steel of entirety, and the outside of magnet suspension member two side is all fixed with magnet-fixation grooves, and magnet-fixation grooves built with organizing magnet more.
2. the magnetic steering unit for vacuum plating according to claim 1, is characterized in that: described magnet is along the axis direction linear arrangement of magnet suspension member.
3. the magnetic steering unit for vacuum plating according to claim 1 and 2, is characterized in that: described magnet-fixation grooves is fixed on magnet suspension member by hex screw, and it is inner that described hex screw the inner is positioned at magnet suspension member.
CN201420580862.1U 2014-09-30 2014-09-30 For the magnetic steering unit of vacuum plating Active CN204111862U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420580862.1U CN204111862U (en) 2014-09-30 2014-09-30 For the magnetic steering unit of vacuum plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420580862.1U CN204111862U (en) 2014-09-30 2014-09-30 For the magnetic steering unit of vacuum plating

Publications (1)

Publication Number Publication Date
CN204111862U true CN204111862U (en) 2015-01-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420580862.1U Active CN204111862U (en) 2014-09-30 2014-09-30 For the magnetic steering unit of vacuum plating

Country Status (1)

Country Link
CN (1) CN204111862U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109355630A (en) * 2018-11-26 2019-02-19 上海子创镀膜技术有限公司 A kind of contactless substrate frame transmission magnetic steering device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109355630A (en) * 2018-11-26 2019-02-19 上海子创镀膜技术有限公司 A kind of contactless substrate frame transmission magnetic steering device

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