CN204053765U - Rubbing head - Google Patents
Rubbing head Download PDFInfo
- Publication number
- CN204053765U CN204053765U CN201420441962.6U CN201420441962U CN204053765U CN 204053765 U CN204053765 U CN 204053765U CN 201420441962 U CN201420441962 U CN 201420441962U CN 204053765 U CN204053765 U CN 204053765U
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- CN
- China
- Prior art keywords
- rubbing head
- connecting rod
- upper cover
- cover plate
- buffering ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of rubbing head, comprise upper cover plate, middle shrouding disc and lower cover, upper cover plate is connected with rotating shaft, lower cover is connected with clamper, is evenly provided with several connecting rods between described upper cover plate and middle shrouding disc, and the upper end thereof of connecting rod is in the center of upper cover plate, the lower end of connecting rod is articulated with the edge of middle shrouding disc, be provided with rubber buffer between the upper end of connecting rod and upper cover plate, the edge of middle shrouding disc is provided with circular intermediate plate, and the lower end of connecting rod is articulated with in circular intermediate plate; Be provided with hydraulic cushion layer between described middle shrouding disc and lower cover, the arranged outside of hydraulic cushion layer has silica gel outer wall, is provided with the first buffering ring with one heart in hydraulic cushion layer, is provided with lamination layer in the first buffering ring.The utility model can improve the deficiencies in the prior art, improves stability when rubbing head rotates further.
Description
Technical field
The utility model relates to chemical Mechanical Polishing Technique field, especially a kind of rubbing head.
Background technology
When carrying out polishing to accurate devices such as semiconductor crystal wafers, chemically mechanical polishing is a kind of the most frequently used processing method.Chinese utility model patent CN 101342681B discloses a kind of rubbing head, improves the uniformity of polishing.But the vibration produced when this structure pair and polishing only can be carried out filtration by air bag and water pocket to the stage casing vibration of width frequently and cushion, and not good to the filtration buffering effect of the vibration of high and low frequency.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of rubbing head, can improve the deficiencies in the prior art, improves stability when rubbing head rotates further.
For solving the problems of the technologies described above, technical solution adopted in the utility model is as follows.
Rubbing head, comprise upper cover plate, middle shrouding disc and lower cover, upper cover plate is connected with rotating shaft, lower cover is connected with clamper, is evenly provided with several connecting rods between described upper cover plate and middle shrouding disc, and the upper end thereof of connecting rod is in the center of upper cover plate, the lower end of connecting rod is articulated with the edge of middle shrouding disc, be provided with rubber buffer between the upper end of connecting rod and upper cover plate, the edge of middle shrouding disc is provided with circular intermediate plate, and the lower end of connecting rod is articulated with in circular intermediate plate; Be provided with hydraulic cushion layer between described middle shrouding disc and lower cover, the arranged outside of hydraulic cushion layer has silica gel outer wall, is provided with the first buffering ring with one heart in hydraulic cushion layer, is provided with lamination layer in the first buffering ring.
As preferably, described rotating shaft bilateral symmetry is provided with two arc hollow pipes, is provided with heavy ball in arc hollow pipe, heavy ball and arc hollow pipe interference fit.
As preferably, described arc hollow pipe is elliptic arc, and the weight of single heavy ball accounts for 20% ~ 25% of rubbing head gross weight, and arc hollow pipe is 1.2 times ~ 1.5 times of upper cover plate radius in the length that upper cover plate projects.
As preferably, in described lower cover, annular is provided with several passages, and passage comprises the capillary communicated with lower cover bottom surface, and the import department of capillary is provided with inclined-plane, be provided with open tubes above capillary, the opening end of open tubes communicates with the sidewall of lower cover.
As preferably, described hydraulic cushion layer is provided with the second buffering ring, and the second buffering ring communicates with the first buffering ring, is provided with clathrum in the second buffering ring.
As preferably, between described first buffering ring and the second buffering ring, be provided with spherical buffer strip.
As preferably, be provided with pole inside described circular intermediate plate, connecting rod is hinged on pole by torsion spring, is provided with wavy rubber undulating layers inside circular intermediate plate, connecting rod and rubber undulating layers interference fit.
As preferably, described clamper comprises retaining ring, is provided with step inside retaining ring, and step top is provided with air pocket rings, and the center of step is provided with negative pressure sucker, is provided with several hard supporting rings in negative pressure sucker.
The beneficial effect adopting technique scheme to bring is: the utility model on the basis of existing technology, increase bar linkage structure and filtration buffering is carried out to the low-frequency vibration of large amplitude, increase the vibration of hydraulic cushion layer to little amplitude and high frequency rate and carry out filtration buffering.By the common mating reaction of two structures, be that the vibration of the utility model to various frequency and amplitude can filter fully and cushion, further increase the stationarity in the rubbing head course of work.What heavy ball relied on centrifugal force in rubbing head rotary course acts on the hollow in-pipe of arc, and heavy ball applies the equilibrium centrifugation power of horizontal direction to rotating shaft, reduces the relative displacement of rotating shaft horizontal direction in rotary course.Passage produces the air-flow upwards flowed in rotary course, makes the lifting force that whole rubbing head is subject to upwards, reduces the relative displacement of rotating shaft vertical direction in rotary course.Clamper is clamped processing materials by negative pressure sucker, and meanwhile step and hard supporting ring carry out comprehensive support to processing materials, improves the stability to material clamping in material polishing process.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the utility model detailed description of the invention.
Fig. 2 is the schematic diagram of circular intermediate plate inside in the utility model detailed description of the invention.
Fig. 3 is the schematic diagram of passage in the utility model detailed description of the invention.
Fig. 4 is the top view of clamper in the utility model detailed description of the invention.
In figure: 1, upper cover plate; 2, middle shrouding disc; 3, lower cover, 4, rotating shaft, 5, clamper; 6, connecting rod; 7, rubber buffer; 8, circular intermediate plate; 9, hydraulic cushion layer; 10, silica gel outer wall; 11, the first buffering ring; 12, lamination layer; 13, arc hollow pipe; 14, heavy ball; 15, passage; 16, capillary; 17, inclined-plane; 18, open tubes; 19, the second buffering ring; 20, clathrum; 21, spherical buffer strip; 22, pole; 23, torsion spring; 24, rubber undulating layers; 25, retaining ring; 26, step; 27, negative pressure sucker; 28, hard supporting ring.
Detailed description of the invention
With reference to Fig. 1-4, this detailed description of the invention comprises upper cover plate 1, middle shrouding disc 2 and lower cover 3, upper cover plate 1 is connected with rotating shaft 4, lower cover 3 is connected with clamper 5, several connecting rods 6 are evenly provided with between described upper cover plate 1 and middle shrouding disc 2, the upper end thereof of connecting rod 6 is in the center of upper cover plate 1, the lower end of connecting rod 6 is articulated with the edge of middle shrouding disc 2, rubber buffer 7 is provided with between the upper end of connecting rod 6 and upper cover plate 1, the edge of middle shrouding disc 2 is provided with circular intermediate plate 8, and the lower end of connecting rod 6 is articulated with in circular intermediate plate 8; Be provided with hydraulic cushion layer 9 between described middle shrouding disc 2 and lower cover 3, the arranged outside of hydraulic cushion layer 9 has silica gel outer wall 10, is provided with one heart in the first buffering ring 11, first buffering ring 11 and is provided with lamination layer 12 in hydraulic cushion layer 9.
It should be noted that described rotating shaft 4 bilateral symmetry is provided with two arc hollow pipes 13, in arc hollow pipe 13, be provided with heavy ball 14, heavy ball 14 and arc hollow pipe 13 interference fit.
It should be noted that described arc hollow pipe 13 is elliptic arc, the elliptic equation that elliptic arc is corresponding is 3x
2+ 7y
2=1, single heavy ball 14, weight account for 23% of rubbing head gross weight, arc hollow pipe 13 is 1.4 times of upper cover plate 1 radius in the length that upper cover plate 1 projects.
It should be noted that, in described lower cover 3, annular is provided with several passages 15, passage 15 comprises the capillary 16 communicated with lower cover 3 bottom surface, the import department of capillary 16 is provided with inclined-plane 17, be provided with open tubes 18 above capillary 16, the opening end of open tubes 18 communicates with the sidewall of lower cover 3.
It should be noted that described hydraulic cushion layer 9 is provided with the second buffering ring 19, second buffering ring 19 and communicates with the first buffering ring 11, in the second buffering ring 19, be provided with clathrum 20.
It should be noted that and be provided with spherical buffer strip 21 between described first buffering ring 11 and the second buffering ring 19.
It should be noted that and be provided with pole 22 inside described circular intermediate plate 8, connecting rod 6 is hinged on pole 22 by torsion spring 23, is provided with wavy rubber undulating layers 24 inside circular intermediate plate 4, connecting rod 6 and rubber undulating layers 24 interference fit.
It should be noted that described clamper 5 comprises retaining ring 25, be provided with step 26 inside retaining ring 25, step 26 top is provided with air pocket rings 27, and the center of step 26 is provided with negative pressure sucker 27, is provided with several hard supporting rings 28 in negative pressure sucker 27.
The connecting rod 6 of this detailed description of the invention forms taper, can carry out uniform pickup to violent oscillatory motion.The absorption of rubber buffer 7 for vibrating vertical direction, meanwhile, rubber buffer 7 has certain deformability, can be that connecting rod 6 is finely tuned in the horizontal direction, coordinates absorb the vibration of horizontal direction with circular intermediate plate 8.Torsion spring 23 in circular intermediate plate 8 plays the effect providing damping force and restoring force, coordinating, connecting rod 6 can being made when producing displacement relative to circular intermediate plate 8 with wavy rubber undulating layers 24, reduces the amplitude of reciprocating vibration, accelerates the elimination of oscillatory process.The design of two buffering rings in hydraulic cushion layer 9, can absorb the higher-order of oscillation, and effectively reduces the higher-order of oscillation and be passed to ratio on clamper, and spherical buffer strip 21 can reduce the reverse turbulent flow that hydraulic oil produces in the first buffering ring 11.The inclined-plane 17 of the import department of capillary 16 can strengthen air inflow, and open tubes 18 1 aspect can strengthen the draught head in passage 15, and the wind can eliminating air current flow generation is in addition made an uproar.Airbag design in clamper 5 is annular, medium design negative pressure sucker 27, can keep improving adsorption area under the constant prerequisite of cushioning effect, step 26 and hard supporting ring 28 support processing materials at diverse location simultaneously, improve the uniformity made, avoid material to produce resonance.
More than show and describe general principle of the present utility model and principal character and advantage of the present utility model.The technical staff of the industry should understand; the utility model is not restricted to the described embodiments; what describe in above-described embodiment and description just illustrates principle of the present utility model; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof
.
Claims (8)
1. rubbing head, comprise upper cover plate (1), middle shrouding disc (2) and lower cover (3), upper cover plate (1) is connected with rotating shaft (4), lower cover (3) is connected with clamper (5), it is characterized in that: between described upper cover plate (1) and middle shrouding disc (2), be evenly provided with several connecting rods (6), the upper end thereof of connecting rod (6) is in the center of upper cover plate (1), the lower end of connecting rod (6) is articulated with the edge of middle shrouding disc (2), rubber buffer (7) is provided with between the upper end of connecting rod (6) and upper cover plate (1), the edge of middle shrouding disc (2) is provided with circular intermediate plate (8), the lower end of connecting rod (6) is articulated with in circular intermediate plate (8), hydraulic cushion layer (9) is provided with between described middle shrouding disc (2) and lower cover (3), the arranged outside of hydraulic cushion layer (9) has silica gel outer wall (10), be provided with the first buffering ring (11) in hydraulic cushion layer (9) with one heart, in the first buffering ring (11), be provided with lamination layer (12).
2. rubbing head according to claim 1, it is characterized in that: described rotating shaft (4) bilateral symmetry is provided with two arc hollow pipes (13), heavy ball (14) is provided with, heavy ball (14) and arc hollow pipe (13) interference fit in arc hollow pipe (13).
3. rubbing head according to claim 2, it is characterized in that: described arc hollow pipe (13) is elliptic arc, the weight of single heavy ball (14) accounts for 20% ~ 25% of rubbing head gross weight, and arc hollow pipe (13) is 1.2 times ~ 1.5 times of upper cover plate (1) radius in the length that upper cover plate (1) projects.
4. rubbing head according to claim 1, it is characterized in that: described lower cover (3) interior annular is provided with several passages (15), passage (15) comprises the capillary (16) communicated with lower cover (3) bottom surface, the import department of capillary (16) is provided with inclined-plane (17), capillary (16) top is provided with open tubes (18), and the opening end of open tubes (18) communicates with the sidewall of lower cover (3).
5. rubbing head according to claim 1, is characterized in that: described hydraulic cushion layer (9) is provided with the second buffering ring (19), and the second buffering ring (19) communicates with the first buffering ring (11), is provided with clathrum (20) in the second buffering ring (19).
6. rubbing head according to claim 5, is characterized in that: be provided with spherical buffer strip (21) between described first buffering ring (11) and the second buffering ring (19).
7. rubbing head according to claim 1, it is characterized in that: described circular intermediate plate (8) inner side is provided with pole (22), connecting rod (6) is hinged on pole (22) by torsion spring (23), circular intermediate plate (4) inner side is provided with wavy rubber undulating layers (24), connecting rod (6) and rubber undulating layers (24) interference fit.
8. rubbing head according to claim 1, it is characterized in that: described clamper (5) comprises retaining ring (25), retaining ring (25) inner side is provided with step (26), step (26) top is provided with air pocket rings (27), the center of step (26) is provided with negative pressure sucker (27), is provided with several hard supporting rings (28) in negative pressure sucker (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420441962.6U CN204053765U (en) | 2014-08-07 | 2014-08-07 | Rubbing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420441962.6U CN204053765U (en) | 2014-08-07 | 2014-08-07 | Rubbing head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204053765U true CN204053765U (en) | 2014-12-31 |
Family
ID=52195350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420441962.6U Expired - Fee Related CN204053765U (en) | 2014-08-07 | 2014-08-07 | Rubbing head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204053765U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104162834A (en) * | 2014-08-07 | 2014-11-26 | 陈菊芳 | Polishing head |
| CN110253402A (en) * | 2019-07-27 | 2019-09-20 | 陈烁 | The polishing rust-removal device of long range round tube handware inner wall |
-
2014
- 2014-08-07 CN CN201420441962.6U patent/CN204053765U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104162834A (en) * | 2014-08-07 | 2014-11-26 | 陈菊芳 | Polishing head |
| CN110253402A (en) * | 2019-07-27 | 2019-09-20 | 陈烁 | The polishing rust-removal device of long range round tube handware inner wall |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141231 Termination date: 20150807 |
|
| EXPY | Termination of patent right or utility model |